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H01S3/2251

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Parent Industries

HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/2251ArF

Industries

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Patents Grantslast 30 patents

Information Patent Grant
High voltage pulse generation device, gas laser apparatus, and elec...
- Patent number 12,166,329
- Issue date Dec 10, 2024
- National University Corporation Nagaoka University of Technology
- Weihua Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Copper electrode material
- Patent number 12,132,289
- Issue date Oct 29, 2024
- JX Advanced Metals Corporation
- Masahiro Takahata
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Electrodes for laser chambers having extended lifetime
- Patent number 11,987,871
- Issue date May 21, 2024
- Cymer, LLC
- Leyla Ramin
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Electrode for a discharge chamber
- Patent number 11,749,520
- Issue date Sep 5, 2023
- Cymer, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 11,682,877
- Issue date Jun 20, 2023
- Gigaphoton Inc.
- Takashi Onose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing method and laser processing system
- Patent number 11,604,416
- Issue date Mar 14, 2023
- Gigaphoton Inc.
- Koji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser chamber apparatus, gas laser apparatus, and method for manufa...
- Patent number 11,588,291
- Issue date Feb 21, 2023
- Gigaphoton Inc.
- Takuya Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and laser processing system
- Patent number 11,469,568
- Issue date Oct 11, 2022
- Gigaphoton Inc.
- Kouji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing system and laser processing method
- Patent number 11,465,233
- Issue date Oct 11, 2022
- Gigaphoton Inc.
- Kouji Kakizaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser gas regenerating apparatus and electronic device manufacturin...
- Patent number 11,451,003
- Issue date Sep 20, 2022
- Gigaphoton Inc.
- Hiroaki Tsushima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Line narrowing module, gas laser apparatus, and electronic device m...
- Patent number 11,411,364
- Issue date Aug 9, 2022
- Gigaphoton Inc.
- Miwa Igarashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and method for manufacturing optical element
- Patent number 11,264,773
- Issue date Mar 1, 2022
- Gigaphoton Inc.
- Daisuke Tei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing method and laser processing system
- Patent number 11,194,255
- Issue date Dec 7, 2021
- Gigaphoton Inc.
- Koji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode for a discharge chamber
- Patent number 11,127,582
- Issue date Sep 21, 2021
- Cymer, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Online calibration for repetition rate dependent performance variables
- Patent number 11,050,213
- Issue date Jun 29, 2021
- Cymer, LLC
- Joshua Jon Thornes
- G01 - MEASURING TESTING
Information Patent Grant
Laser system
- Patent number 11,025,026
- Issue date Jun 1, 2021
- Gigaphoton Inc.
- Takashi Onose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus
- Patent number 10,971,886
- Issue date Apr 6, 2021
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser device
- Patent number 10,965,087
- Issue date Mar 30, 2021
- Gigaphoton Inc.
- Hirotaka Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line narrowing module
- Patent number 10,916,910
- Issue date Feb 9, 2021
- Gigaphoton Inc.
- Shinichi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wavelength measuring device
- Patent number 10,890,484
- Issue date Jan 12, 2021
- Gigaphoton Inc.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas purifying system and laser system
- Patent number 10,892,592
- Issue date Jan 12, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus
- Patent number 10,797,465
- Issue date Oct 6, 2020
- Gigaphoton Inc.
- Hirotaka Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam reverser module and optical power amplifier having such a beam...
- Patent number 10,777,958
- Issue date Sep 15, 2020
- Carl Zeiss SMT GmbH
- Michael Schall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Narrowband laser apparatus and spectral linewidth measuring apparatus
- Patent number 10,741,991
- Issue date Aug 11, 2020
- Gigaphoton Inc.
- Takahito Kumazaki
- G01 - MEASURING TESTING
Information Patent Grant
Online calibration for repetition rate dependent performance variables
- Patent number 10,727,642
- Issue date Jul 28, 2020
- Cymer, LLC
- Joshua Jon Thornes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solid-state laser system
- Patent number 10,256,594
- Issue date Apr 9, 2019
- Gigaphoton Inc.
- Takashi Onose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for reclaiming, rebalancing and recirculating laser gas mixt...
- Patent number 10,103,507
- Issue date Oct 16, 2018
- Matheson Tri-Gas, Inc.
- Joseph Vininski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser device and condenser
- Patent number 10,096,966
- Issue date Oct 9, 2018
- Gigaphoton Inc.
- Akira Suwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture control in a gas discharge light source
- Patent number 10,090,629
- Issue date Oct 2, 2018
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 9,966,721
- Issue date May 8, 2018
- Gigaphoton Inc.
- Kouji Kakizaki
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240235149
- Publication date Jul 11, 2024
- Gigaphoton Inc.
- Hironori IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRAVIOLET LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20230378713
- Publication date Nov 23, 2023
- Gigaphoton Inc.
- Yuki TAMARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL ISOLATOR, ULTRAVIOLET LASER APPARATUS, AND ELECTRONIC DEVIC...
- Publication number 20230375846
- Publication date Nov 23, 2023
- Gigaphoton Inc.
- Yuki TAMARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL ISOLATOR, ULTRAVIOLET LASER DEVICE, AND ELECTRONIC DEVICE M...
- Publication number 20230375847
- Publication date Nov 23, 2023
- Gigaphoton Inc.
- Yuki TAMARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
- Publication number 20230229088
- Publication date Jul 20, 2023
- Gigaphoton Inc.
- Takuma YAMANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREDICTIVE CONTROL OF A PULSED LIGHT BEAM
- Publication number 20230055090
- Publication date Feb 23, 2023
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE SYSTEM, LASER CONTROL PARAMETER PRODUCTION METHOD, AND ELE...
- Publication number 20220373893
- Publication date Nov 24, 2022
- Gigaphoton Inc.
- Koichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR MANUFACTUR...
- Publication number 20220131335
- Publication date Apr 28, 2022
- Gigaphoton Inc.
- Akiyoshi SUZUKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM
- Publication number 20220050382
- Publication date Feb 17, 2022
- Gigaphoton Inc.
- Koji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE FOR A DISCHARGE CHAMBER
- Publication number 20210384027
- Publication date Dec 9, 2021
- CYMER, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COPPER ELECTRODE MATERIAL
- Publication number 20210359482
- Publication date Nov 18, 2021
- JX NIPPON MINING & METALS CORPORATION
- Masahiro TAKAHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER CHAMBER APPARATUS, GAS LASER APPARATUS, AND METHOD FOR MANUFA...
- Publication number 20210336404
- Publication date Oct 28, 2021
- Gigaphoton Inc.
- Takuya ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE NARROWING MODULE, GAS LASER APPARATUS, AND ELECTRONIC DEVICE M...
- Publication number 20210336407
- Publication date Oct 28, 2021
- Gigaphoton Inc.
- Miwa IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM
- Publication number 20210242649
- Publication date Aug 5, 2021
- Gigaphoton Inc.
- Takashi ONOSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Argon Fluoride Laser-Driven Inertial Fusion Energy System
- Publication number 20210043334
- Publication date Feb 11, 2021
- The Government of the United States of America, as represented by the Secreta...
- Stephen P. Obenschain
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
LASER GAS REGENERATING APPARATUS AND ELECTRONIC DEVICE MANUFACTURIN...
- Publication number 20200403371
- Publication date Dec 24, 2020
- Gigaphoton Inc.
- Hiroaki TSUSHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRODE FOR A DISCHARGE CHAMBER
- Publication number 20200328074
- Publication date Oct 15, 2020
- CYMER, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM
- Publication number 20200209760
- Publication date Jul 2, 2020
- Gigaphoton Inc.
- Koji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS AND METHOD FOR MANUFACTURING OPTICAL ELEMENT
- Publication number 20200067257
- Publication date Feb 27, 2020
- Gigaphoton Inc.
- Daisuke TEI
- G02 - OPTICS
Information Patent Application
LASER PROCESSING SYSTEM AND LASER PROCESSING METHOD
- Publication number 20190283179
- Publication date Sep 19, 2019
- Gigaphoton Inc.
- Kouji KAKIZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS AND LASER PROCESSING SYSTEM
- Publication number 20190245321
- Publication date Aug 8, 2019
- Gigaphoton Inc.
- Kouji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM
- Publication number 20190103724
- Publication date Apr 4, 2019
- Gigaphoton Inc.
- Takashi ONOSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NARROWBAND LASER APPARATUS AND SPECTRAL LINEWIDTH MEASURING APPARATUS
- Publication number 20180254600
- Publication date Sep 6, 2018
- Gigaphoton Inc.
- Takahito KUMAZAKI
- G01 - MEASURING TESTING
Information Patent Application
Beam Reverser Module and Optical Power Amplifier Having Such a Beam...
- Publication number 20180102620
- Publication date Apr 12, 2018
- Carl Zeiss SMT GMBH
- Michael Schall
- G02 - OPTICS
Information Patent Application
SYSTEM FOR RECLAIMING, REBALANCING AND RECIRCULATING LASER GAS MIXT...
- Publication number 20180097331
- Publication date Apr 5, 2018
- Matheson Tri-Gas, Inc.
- Joseph Vininski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ONLINE CALIBRATION FOR REPETITION RATE DEPENDENT PERFORMANCE VARIABLES
- Publication number 20180006425
- Publication date Jan 4, 2018
- CYMER, LLC
- Joshua Jon Thornes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR RECLAIMING, REBALANCING AND RECIRCULATING LASER GAS MIXT...
- Publication number 20170063016
- Publication date Mar 2, 2017
- Matheson Tri-Gas, Inc.
- Joseph Vininski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASERSYSTEM
- Publication number 20160344158
- Publication date Nov 24, 2016
- Gigaphoton Inc.
- Takashi ONOSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DEVICE, AND METHOD OF CONTROLLING ACTUATOR
- Publication number 20150380893
- Publication date Dec 31, 2015
- Gigaphoton Inc.
- Takashi MATSUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Reverser Module and Optical Power Amplifier Having Such a Beam...
- Publication number 20150340829
- Publication date Nov 26, 2015
- Carl Zeiss SMT GMBH
- Michael Schall
- G02 - OPTICS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

High voltage pulse generation device, gas laser apparatus, and elec...

Copper electrode material

Electrodes for laser chambers having extended lifetime

Electrode for a discharge chamber

Laser system

Laser processing method and laser processing system

Laser chamber apparatus, gas laser apparatus, and method for manufa...

Laser apparatus and laser processing system

Laser processing system and laser processing method

Laser gas regenerating apparatus and electronic device manufacturin...

Line narrowing module, gas laser apparatus, and electronic device m...

Laser apparatus and method for manufacturing optical element

Laser processing method and laser processing system

Electrode for a discharge chamber

Online calibration for repetition rate dependent performance variables

Laser system

Laser apparatus

Laser device

Line narrowing module

Wavelength measuring device

Laser gas purifying system and laser system

Laser apparatus

Beam reverser module and optical power amplifier having such a beam...

Narrowband laser apparatus and spectral linewidth measuring apparatus

Online calibration for repetition rate dependent performance variables

Solid-state laser system

System for reclaiming, rebalancing and recirculating laser gas mixt...

Gas laser device and condenser

Gas mixture control in a gas discharge light source

Laser system

Patents Applicationslast 30 patents

LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

ULTRAVIOLET LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

OPTICAL ISOLATOR, ULTRAVIOLET LASER APPARATUS, AND ELECTRONIC DEVIC...

OPTICAL ISOLATOR, ULTRAVIOLET LASER DEVICE, AND ELECTRONIC DEVICE M...

LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

PREDICTIVE CONTROL OF A PULSED LIGHT BEAM

EXPOSURE SYSTEM, LASER CONTROL PARAMETER PRODUCTION METHOD, AND ELE...

LASER APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR MANUFACTUR...

LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM

ELECTRODE FOR A DISCHARGE CHAMBER

COPPER ELECTRODE MATERIAL

LASER CHAMBER APPARATUS, GAS LASER APPARATUS, AND METHOD FOR MANUFA...

LINE NARROWING MODULE, GAS LASER APPARATUS, AND ELECTRONIC DEVICE M...

LASER SYSTEM

Argon Fluoride Laser-Driven Inertial Fusion Energy System

LASER GAS REGENERATING APPARATUS AND ELECTRONIC DEVICE MANUFACTURIN...

ELECTRODE FOR A DISCHARGE CHAMBER

LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM

LASER APPARATUS AND METHOD FOR MANUFACTURING OPTICAL ELEMENT

LASER PROCESSING SYSTEM AND LASER PROCESSING METHOD

LASER APPARATUS AND LASER PROCESSING SYSTEM

LASER SYSTEM

NARROWBAND LASER APPARATUS AND SPECTRAL LINEWIDTH MEASURING APPARATUS

Beam Reverser Module and Optical Power Amplifier Having Such a Beam...

SYSTEM FOR RECLAIMING, REBALANCING AND RECIRCULATING LASER GAS MIXT...

ONLINE CALIBRATION FOR REPETITION RATE DEPENDENT PERFORMANCE VARIABLES

SYSTEM FOR RECLAIMING, REBALANCING AND RECIRCULATING LASER GAS MIXT...

LASERSYSTEM

LASER DEVICE, AND METHOD OF CONTROLLING ACTUATOR

Beam Reverser Module and Optical Power Amplifier Having Such a Beam...