Arrangement, mounting, housing, environment, cleaning or maintenance of apparatus

Industry

CPC
G03F9/7096

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces

Current Industry

G03F9/7096Arrangement, mounting, housing, environment, cleaning or maintenance of apparatus

Industries

Patents Grantslast 30 patents

Information Patent Grant
Clamping appliance of reticle inner pod
- Patent number 12,013,649
- Issue date Jun 18, 2024
- GUDENG EQUIPMENT CO., LTD.
- Ho-Yi Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Invariable magnification multilevel optical device with telecentric...
- Patent number 11,960,216
- Issue date Apr 16, 2024
- ASML Holding N.V.
- Lev Ryzhikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle processing system
- Patent number 11,940,724
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Sanjay Bhat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, lithography apparatus, article manufacturing m...
- Patent number 11,829,083
- Issue date Nov 28, 2023
- Canon Kabushiki Kaisha
- Tomokazu Taki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, metrology apparatus, optical system and method
- Patent number 11,537,055
- Issue date Dec 27, 2022
- ASML Holding N.V.
- Stanislav Smirnov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Height sensor, lithographic apparatus and method for manufacturing...
- Patent number 11,467,505
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Hans Butler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating semiconductor apparatus and semiconductor appar...
- Patent number 11,243,479
- Issue date Feb 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsiang Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High stability collimator assembly, lithographic apparatus, and method
- Patent number 11,204,559
- Issue date Dec 21, 2021
- ASML Holdings N.V.
- David Taub
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Athermalization of an alignment system
- Patent number 10,866,531
- Issue date Dec 15, 2020
- ASML Netherlands B.V.
- Suzanne Johanna Antonetta Geertruda Cosijns
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for removing contamination from lithographic...
- Patent number 10,852,649
- Issue date Dec 1, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Zi-Wen Chen
- G01 - MEASURING TESTING
Information Patent Grant
Reticle processing system
- Patent number 10,831,112
- Issue date Nov 10, 2020
- Applied Materials, Inc.
- James Strassner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,775,707
- Issue date Sep 15, 2020
- ASML Netherlands B.V.
- Güneş Nakìboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and device manufacturing method
- Patent number 10,551,751
- Issue date Feb 4, 2020
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for removing contamination from lithographic...
- Patent number 10,534,279
- Issue date Jan 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Zi-Wen Chen
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for removing contamination from lithographic...
- Patent number 10,509,334
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Zi-Wen Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,495,985
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus operable to perform a measurement operation on a substrat...
- Patent number 10,444,632
- Issue date Oct 15, 2019
- ASML Netherlands B.V.
- Daan Maurits Slotboom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment control in nanoimprint lithography based on real-time sys...
- Patent number 10,409,178
- Issue date Sep 10, 2019
- Canon Kabushiki Kaisha
- Xiaoming Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, movable body drive system, pattern formation ap...
- Patent number 10,310,384
- Issue date Jun 4, 2019
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, movable body drive system, pattern formation ap...
- Patent number 10,274,831
- Issue date Apr 30, 2019
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Enclosure for a target processing machine
- Patent number 10,144,134
- Issue date Dec 4, 2018
- Mapper Lithography IP B.V.
- Joep Gerard Vijverberg
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,114,295
- Issue date Oct 30, 2018
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,114,300
- Issue date Oct 30, 2018
- ASML Netherlands B.V.
- Henrikus Herman Marie Cox
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Computational process control
- Patent number 10,007,192
- Issue date Jun 26, 2018
- ASML Netherlands B.V.
- Jun Ye
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Apparatus operable to perform a measurement operation on a substrat...
- Patent number 9,989,858
- Issue date Jun 5, 2018
- ASML Netherlands B.V.
- Daan Maurits Slotboom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 9,939,739
- Issue date Apr 10, 2018
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for attaching a mask to a mask holder
- Patent number 9,829,809
- Issue date Nov 28, 2017
- Applied Materials Israel Ltd.
- Israel Avneri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, movable body drive system, pattern formation ap...
- Patent number 9,690,205
- Issue date Jun 27, 2017
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,465,303
- Issue date Oct 11, 2016
- Canon Kabushiki Kaisha
- Atsushi Takagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system for processing at least a part of a target
- Patent number 9,383,662
- Issue date Jul 5, 2016
- Mapper Lithography IP B.V.
- Niels Vergeer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING MASK, MASK AND METHOD OF MANUFACTURING MASK...
- Publication number 20240060168
- Publication date Feb 22, 2024
- DAI NIPPON PRINTING CO., LTD.
- Hideyuki OKAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INVARIABLE MAGNIFICATION MULTILEVEL OPTICAL DEVICE WITH TELECENTRIC...
- Publication number 20240053688
- Publication date Feb 15, 2024
- ASML Holding N.V.
- Lev Ryzhikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF DETERMINING A MARK MEASUREMENT SEQUENCE, STAGE APPARATUS...
- Publication number 20220260933
- Publication date Aug 18, 2022
- ASML NETHERLANDS B.V.
- István NAGY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY APPARATUS, OPTICAL SYSTEM AND METHOD
- Publication number 20220179330
- Publication date Jun 9, 2022
- ASML Holding N.V.
- Stanislav SMIRNOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF OPERATING SEMICONDUCTOR APPARATUS AND SEMICONDUCTOR APPAR...
- Publication number 20210149317
- Publication date May 20, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsiang CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High Stability Collimator Assembly, Lithographic Apparatus, and Method
- Publication number 20210072654
- Publication date Mar 11, 2021
- ASML Holding N.V.
- David TAUB
- G02 - OPTICS
Information Patent Application
MASK TRANSFER SYSTEM AND TRANSFER METHOD
- Publication number 20200356014
- Publication date Nov 12, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Gang WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUS FOR REMOVING CONTAMINATION FROM LITHOGRAPHIC...
- Publication number 20200150550
- Publication date May 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Zi-Wen CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEIGHT SENSOR, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURING...
- Publication number 20200057390
- Publication date Feb 20, 2020
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method
- Publication number 20200041916
- Publication date Feb 6, 2020
- ASML NETHERLANDS B.V.
- Günes NAKÌBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Athermalization of an Alignment System
- Publication number 20190219927
- Publication date Jul 18, 2019
- ASML NETHERLANDS B.V.
- Suzanne Johanna Antonetta Geertruda COSIJNS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT CONTROL IN NANOIMPRINT LITHOGRAPHY BASED ON REAL-TIME SYS...
- Publication number 20190187575
- Publication date Jun 20, 2019
- Canon Kabushiki Kaisha
- Xiaoming Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190041761
- Publication date Feb 7, 2019
- ASML Netherlands B.V.
- Gunes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS OPERABLE TO PERFORM A MEASUREMENT OPERATION ON A SUBSTRAT...
- Publication number 20180364582
- Publication date Dec 20, 2018
- ASML, Netherlands B.V.
- Daan Maurits SLOTBOOM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20180196352
- Publication date Jul 12, 2018
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION AP...
- Publication number 20180004097
- Publication date Jan 4, 2018
- Nikon Corporation
- Yuichi Shibazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
EXPOSURE APPARATUS, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION AP...
- Publication number 20180004098
- Publication date Jan 4, 2018
- Nikon Corporation
- Yuichi Shibazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
EXPOSURE APPARATUS, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION AP...
- Publication number 20170255108
- Publication date Sep 7, 2017
- Nikon Corporation
- Yuichi Shibazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
COATING APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING A...
- Publication number 20160161868
- Publication date Jun 9, 2016
- Canon Kabushiki Kaisha
- Kunihiko Asada
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SYSTEM AND METHOD FOR ATTACHING A MASK TO A MASK HOLDER
- Publication number 20160161869
- Publication date Jun 9, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Israel Avneri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENCLOSURE FOR A TARGET PROCESSING MACHINE
- Publication number 20150321356
- Publication date Nov 12, 2015
- MAPPER LITHOGRAPHY IP BV
- Joep Gerard Vijverberg
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150212435
- Publication date Jul 30, 2015
- ASML NETHERLANDS B.V,
- Henrikus Herman Marie Cox
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
COMPUTATIONAL PROCESS CONTROL
- Publication number 20150025668
- Publication date Jan 22, 2015
- ASML NETHERLANDS B.V.
- Jun YE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
EXPOSURE APPARATUS, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION AP...
- Publication number 20140362356
- Publication date Dec 11, 2014
- Nikon Corporation
- Yuichi Shibazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20140293249
- Publication date Oct 2, 2014
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection System, Lithographic Apparatus, Method of Projecting a B...
- Publication number 20140293251
- Publication date Oct 2, 2014
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS,...
- Publication number 20140204357
- Publication date Jul 24, 2014
- Canon Kabushiki Kaisha
- Toshihiko Nishida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas Gauge Compatible With Vacuum Environments
- Publication number 20140096614
- Publication date Apr 10, 2014
- ASML Holding N.V.
- Geoffrey Alan SCHULTZ
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...
- Publication number 20140092374
- Publication date Apr 3, 2014
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, CHARGED PARTICLE BEAM A...
- Publication number 20130265575
- Publication date Oct 10, 2013
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING

Arrangement, mounting, housing, environment, cleaning or maintenance of apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Clamping appliance of reticle inner pod

Invariable magnification multilevel optical device with telecentric...

Reticle processing system

Detection apparatus, lithography apparatus, article manufacturing m...

Lithographic apparatus, metrology apparatus, optical system and method

Height sensor, lithographic apparatus and method for manufacturing...

Method of operating semiconductor apparatus and semiconductor appar...

High stability collimator assembly, lithographic apparatus, and method

Athermalization of an alignment system

Methods and apparatus for removing contamination from lithographic...

Reticle processing system

Lithographic apparatus and method

Lithography apparatus and device manufacturing method

Methods and apparatus for removing contamination from lithographic...

Methods and apparatus for removing contamination from lithographic...

Lithographic apparatus and device manufacturing method

Apparatus operable to perform a measurement operation on a substrat...

Alignment control in nanoimprint lithography based on real-time sys...

Exposure apparatus, movable body drive system, pattern formation ap...

Exposure apparatus, movable body drive system, pattern formation ap...

Enclosure for a target processing machine

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Computational process control

Apparatus operable to perform a measurement operation on a substrat...

Exposure apparatus and method for producing device

System and method for attaching a mask to a mask holder

Exposure apparatus, movable body drive system, pattern formation ap...

Exposure apparatus and device manufacturing method

Lithography system for processing at least a part of a target

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING MASK, MASK AND METHOD OF MANUFACTURING MASK...

INVARIABLE MAGNIFICATION MULTILEVEL OPTICAL DEVICE WITH TELECENTRIC...

METHOD OF DETERMINING A MARK MEASUREMENT SEQUENCE, STAGE APPARATUS...

LITHOGRAPHIC APPARATUS, METROLOGY APPARATUS, OPTICAL SYSTEM AND METHOD

METHOD OF OPERATING SEMICONDUCTOR APPARATUS AND SEMICONDUCTOR APPAR...

High Stability Collimator Assembly, Lithographic Apparatus, and Method

MASK TRANSFER SYSTEM AND TRANSFER METHOD

METHODS AND APPARATUS FOR REMOVING CONTAMINATION FROM LITHOGRAPHIC...

HEIGHT SENSOR, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURING...

Lithographic Apparatus and Method

Athermalization of an Alignment System

ALIGNMENT CONTROL IN NANOIMPRINT LITHOGRAPHY BASED ON REAL-TIME SYS...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

APPARATUS OPERABLE TO PERFORM A MEASUREMENT OPERATION ON A SUBSTRAT...

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION AP...

EXPOSURE APPARATUS, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION AP...

EXPOSURE APPARATUS, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION AP...

COATING APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING A...

SYSTEM AND METHOD FOR ATTACHING A MASK TO A MASK HOLDER

ENCLOSURE FOR A TARGET PROCESSING MACHINE

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

COMPUTATIONAL PROCESS CONTROL

EXPOSURE APPARATUS, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION AP...

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

Projection System, Lithographic Apparatus, Method of Projecting a B...

DETECTION APPARATUS, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS,...

Gas Gauge Compatible With Vacuum Environments

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, CHARGED PARTICLE BEAM A...