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Arrangements enabling beams to pass between regions of different pressure
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H01J37/301
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/301
Arrangements enabling beams to pass between regions of different pressure
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Patents Grants
last 30 patents
Information
Patent Grant
Particle yield via beam-line pressure control
Patent number
11,562,885
Issue date
Jan 24, 2023
Applied Materials, Inc.
Thomas Stacy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced electron beam generation
Patent number
11,517,975
Issue date
Dec 6, 2022
Arcam AB
Mattias Fager
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Electron beam 3D printing machine
Patent number
11,370,055
Issue date
Jun 28, 2022
Consorzio Di Ricerca Hypatia
Gildo Di Domenico
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Plasma driven particle propagation apparatus and pumping method
Patent number
10,593,515
Issue date
Mar 17, 2020
Aurora Labs Limited
David Budge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle optical apparatus with a predetermined final vacuum pressure
Patent number
9,153,414
Issue date
Oct 6, 2015
FEI Company
Hendrik Nicolaas Slingerland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interface, a method for observing an object within a non-vacuum env...
Patent number
9,076,631
Issue date
Jul 7, 2015
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High pressure charged particle beam system
Patent number
8,921,811
Issue date
Dec 30, 2014
FEI Company
Milos Toth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle lithography system with intermediate chamber
Patent number
8,916,837
Issue date
Dec 23, 2014
Mapper Lithography IP B.V.
Laura Dinu-Gürtler
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Interface, a method for observing an object within a non-vacuum env...
Patent number
8,779,358
Issue date
Jul 15, 2014
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle lithography system with intermediate chamber
Patent number
8,586,949
Issue date
Nov 19, 2013
Mapper Lithography IP B.V.
Laura Dinu-Gürtler
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Gas-cluster-jet generator and gas-cluster ion-beam apparatus utiliz...
Patent number
8,217,372
Issue date
Jul 10, 2012
Exogenesis Corporation
Stanley Harrison
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interface, a method for observing an object within a non-vacuum env...
Patent number
8,164,057
Issue date
Apr 24, 2012
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope for inspecting and processing of an object with...
Patent number
8,058,614
Issue date
Nov 15, 2011
Carl Zeiss NTS GmbH
Johannes Bihr
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electron microscope for inspecting and processing of an object with...
Patent number
7,645,989
Issue date
Jan 12, 2010
Carl Zeiss NTS GmbH
Johannes Bihr
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
7,186,976
Issue date
Mar 6, 2007
Carl Zeiss SMT Limited
Michael Frank Dean
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detection apparatus, detection method and electron beam irradiation...
Patent number
7,095,699
Issue date
Aug 22, 2006
Sony Corporation
Yoshihisa Miura
G11 - INFORMATION STORAGE
Information
Patent Grant
Electron beam irradiation apparatus, electron beam irradiation meth...
Patent number
7,034,319
Issue date
Apr 25, 2006
Sony Corporation
Yuichi Aki
G11 - INFORMATION STORAGE
Information
Patent Grant
Ion and charged particle source for production of thin films
Patent number
6,878,930
Issue date
Apr 12, 2005
Ross Clark Willoughby
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Environmental scanning electron microscope
Patent number
6,809,322
Issue date
Oct 26, 2004
Gerasimos Daniel Danilatos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam system using multiple electron beams
Patent number
6,797,953
Issue date
Sep 28, 2004
FEI Company
Robert L. Gerlach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam irradiation system and electron beam irradiation method
Patent number
6,649,859
Issue date
Nov 18, 2003
Sony Corporation
Yoshihisa Miura
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Charged-particle beam exposure apparatus and device manufacturing m...
Patent number
6,603,128
Issue date
Aug 5, 2003
Canon Kabushiki Kaisha
Hiroshi Maehara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam column for charged particle beam device
Patent number
6,576,908
Issue date
Jun 10, 2003
Applied Materials, Inc.
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atmospheric electron x-ray spectrometer
Patent number
6,452,177
Issue date
Sep 17, 2002
California Institute of Technology
Jason E. Feldman
G01 - MEASURING TESTING
Information
Patent Grant
Particle beam emitting assembly
Patent number
6,404,115
Issue date
Jun 11, 2002
The Welding Institute
Allan Sanderson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Differential pumping via core of annular supersonic jet
Patent number
6,396,064
Issue date
May 28, 2002
Gerasimos Daniel Danilatos
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Apparatus for electron beam welding at atmospheric pressure
Patent number
5,951,886
Issue date
Sep 14, 1999
PTR Precision Technologies
Guenther G. Schubert
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for extracting ion current from space of high vacuum into sp...
Patent number
5,637,880
Issue date
Jun 10, 1997
Agency of Industrial Science & Technology Ministry of International Trade & I...
Yuji Horino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for charged particle propagation
Patent number
5,578,831
Issue date
Nov 26, 1996
Associated Universities, Inc.
Ady Hershcovitch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low magnification gas limiting aperture assembly for electron micro...
Patent number
5,485,008
Issue date
Jan 16, 1996
University of Maryland, College Park
Myron E. Taylor
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PARTICLE YIELD VIA BEAM-LINE PRESSURE CONTROL
Publication number
20220037114
Publication date
Feb 3, 2022
Applied Materials, Inc.
Thomas Stacy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Beam 3D Printing Machine
Publication number
20190202000
Publication date
Jul 4, 2019
Consorzio Di Ricerca Hypatia
Gildo Di Domenico
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Plasma Driven Particle Propagation Apparatus and Pumping Method
Publication number
20180190471
Publication date
Jul 5, 2018
Aurora Labs Limited
David Budge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...
Publication number
20140361166
Publication date
Dec 11, 2014
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH INTERMEDIATE CHAMBER
Publication number
20140061497
Publication date
Mar 6, 2014
MAPPER LITHOGRAPHY IP BV
Laura DINU-GÜRTLER
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH INTERMEDIATE CHAMBER
Publication number
20120293780
Publication date
Nov 22, 2012
MAPPER LITHOGRAPHY IP BV
Laura DINU-GÜRTLER
B82 - NANO-TECHNOLOGY
Information
Patent Application
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...
Publication number
20120241608
Publication date
Sep 27, 2012
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Particle-Beam Induced Processing Using Liquid Reactants
Publication number
20110293847
Publication date
Dec 1, 2011
Jeffrey Todd Hastings
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS-CLUSTER-JET GENERATOR AND GAS-CLUSTER ION-BEAM APPARATUS UTILIZ...
Publication number
20110155897
Publication date
Jun 30, 2011
Exogenesis Corporation
Stanley Harrison
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH PRESSURE CHARGED PARTICLE BEAM SYSTEM
Publication number
20110031394
Publication date
Feb 10, 2011
FEI Company
William Ralph Knowles
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...
Publication number
20100140470
Publication date
Jun 10, 2010
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron microscope for inspecting and processing of an object with...
Publication number
20100119698
Publication date
May 13, 2010
Johannes Bihr
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Electron microscope for inspecting and processing of an object with...
Publication number
20080099674
Publication date
May 1, 2008
CARL ZEISS NTS GMBH
Johannes Bihr
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Particle optical apparatus with a predetermined final vacuum pressure
Publication number
20070176102
Publication date
Aug 2, 2007
FEI Company
Hendrik Nicolaas Slingerland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Protecting Aperture for Charged Particle Emitter
Publication number
20070145303
Publication date
Jun 28, 2007
Pavel Adamec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Glow discharge drilling apparatus and glow discharge drilling method
Publication number
20060231590
Publication date
Oct 19, 2006
Akihiro Hirano
G01 - MEASURING TESTING
Information
Patent Application
Scanning electron microscope
Publication number
20040173747
Publication date
Sep 9, 2004
Michael Frank Dean
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Detection apparatus, detection method and electron beam irradiation...
Publication number
20030202449
Publication date
Oct 30, 2003
Yoshihisa Miura
G11 - INFORMATION STORAGE
Information
Patent Application
Environmental scanning electron microscope
Publication number
20030168595
Publication date
Sep 11, 2003
Gerasimos Daniel Danilatos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lens assembly for electron beam column
Publication number
20020148971
Publication date
Oct 17, 2002
Michael Sogard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron beam irradiation system and electron beam irradiation method
Publication number
20020121504
Publication date
Sep 5, 2002
Yoshihisa Miura
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam system using multiple electron beams
Publication number
20020117967
Publication date
Aug 29, 2002
Robert L. Gerlach
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged-particle beam exposure apparatus and device manufacturing m...
Publication number
20020009901
Publication date
Jan 24, 2002
Hiroshi Maehara
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam irradiation apparatus, electron beam irradiation meth...
Publication number
20010052577
Publication date
Dec 20, 2001
Yuichi Aki
H01 - BASIC ELECTRIC ELEMENTS