Protecting Aperture for Charged Particle Emitter

Abstract

A charged particle beam apparatus and a method are provided. The apparatus comprises a charged particle emitter located within a gun chamber, the gun chamber being adapted to encompass a first pressure; at least one further vacuum chamber adapted to encompass a second pressure between one order and four orders of magnitude higher than the first pressure; a first aperture unit; comprising at least a first aperture opening and a molecule blocking area; a second aperture unit comprising a second aperture opening. Thereby, the first aperture unit and/or the second aperture unit is a differential pressure aperture separating two independently evacuateable vacuum chambers and being adapted for maintaining a pressure difference of at least two orders of magnitude and the emitter, the molecule blocking area and the second aperture opening are positioned to be on a straight line.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

Some of the above indicated and other more detailed aspects of the invention will be described in the following description and partially illustrated with reference to the figures. Therein:

FIG. 1 shows a schematic drawing of a charged particle beam apparatus with a blocked diffusion path according to an embodiment of the present invention;

FIGS. 2A and 2B show schematic drawings illustrating arrangements with a blocked molecule diffusion path according to embodiments of the present invention;

FIGS. 3A and 3B show schematic drawings illustrating further arrangements with a blocked diffusion path according to embodiments of the present invention;

FIGS. 4A and 4B show schematic drawings illustrating further arrangements with aperture units including molecule blocking areas;

FIGS. 5A and 5B show schematic drawings illustrating further arrangements with aperture units including molecule blocking areas;

FIGS. 6A and 6B show schematic drawings illustrating further arrangements with a blocked molecule diffusion path according to embodiments of the present invention;

FIG. 7 shows a schematic drawing of an aperture unit with a molecule blocking area according to the present invention; and

FIG. 8 shows a schematic drawing of a further aperture unit with a molecule blocking area according to the present invention.

Claims

1. A charged particle beam apparatus comprising: a charged particle emitter located within a gun chamber, the gun chamber being adapted to encompass a first pressure;at least one further vacuum chamber adapted to encompass a second pressure between one order and four orders of magnitude higher than the first pressure;a first aperture unit comprising a molecule blocking area and at least one first aperture opening; anda second aperture unit comprising a second aperture opening;wherein the first aperture unit and/or the second aperture unit is a differential pressure aperture separating two independently evacuateable vacuum chambers and being adapted for maintaining a pressure difference of at least two orders of magnitude; andwherein the emitter, the molecule blocking area and the second aperture opening are positioned to be on a straight line.

2. The charged particle beam apparatus according to claim 1, wherein the second aperture unit is a differential pressure aperture separating the gun chamber from the at least one further vacuum chamber and being adapted for maintaining a pressure difference of at least two orders of magnitude.

3. The charged particle beam apparatus according to claim 2, wherein the molecule blocking area is located on an optical axis of the charged particle beam apparatus, the second aperture opening is located on the optical axis and the aperture openings of the at least one first aperture opening are located off-axis from the optical axis.

4. The charged particle beam apparatus according to claim 1, further comprising a specimen chamber being adapted to encompass a third pressure between one order and four orders of magnitude higher than the second pressure;wherein the second aperture unit is a differential pressure aperture separating the specimen chamber from the further vacuum chamber and being adapted for holding a pressure difference of at least two orders of magnitude.

5. The charged particle beam apparatus according to claim 4, wherein the second aperture unit comprises the final aperture of the charged particle beam apparatus.

6. The charged particle beam apparatus according to claim 5, wherein the first aperture unit is a multiple aperture unit.

7. The charged particle beam apparatus according to claim 5, wherein the molecule blocking area is located on an optical axis of the charged particle beam apparatus, the second aperture opening is located on the optical axis and the aperture openings of the at least one first aperture opening are located off-axis from the optical axis.

8. The charged particle beam apparatus according to claim 4, wherein the first aperture unit is a multiple aperture unit.

9. The charged particle beam apparatus according to claim 4, wherein the molecule blocking area is located on an optical axis of the charged particle beam apparatus, the second aperture opening is located on the optical axis and the aperture openings of the at least one first aperture opening are located off-axis from the optical axis.

10. The charged particle beam apparatus according to claim 4, wherein the first aperture unit is a differential pressure aperture separating the further vacuum chamber from the gun chamber and being adapted for maintaining a pressure difference of at least two orders of magnitude.

11. The charged particle beam apparatus according to claim 10, wherein the second aperture unit comprises the final aperture of the charged particle beam apparatus.

12. The charged particle beam apparatus according to claim 10, wherein the first aperture unit is a multiple aperture unit.

13. The charged particle beam apparatus according to claim 10, wherein the molecule blocking area is located on an optical axis of the charged particle beam apparatus, the second aperture opening is located on the optical axis and the aperture openings of the at least one first aperture opening are located off-axis from the optical axis.

14. The charged particle beam apparatus according to claim 4, wherein the third pressure is below 1*10−5 mbar.

15. The charged particle beam apparatus according to claim 4, further comprising: a deflection system for directing the charged particle beam through one of the at least one first aperture opening and the second aperture opening.

16. The charged particle beam apparatus according to claim 15, wherein the deflection system is a 3-stage deflection system or a 4-stage deflection system adapted to deflect the charged particle beam travelling along an optical axis before the deflection system to travel substantially along the optical axis after the deflection system.

17. The charged particle beam apparatus according to claim 16, wherein the deflector system is symmetrical regarding a middle deflector of the three deflectors of the 3-stage deflection system or regarding a plane between the second and the third deflector of the 4-stage deflection system.

18. The charged particle beam apparatus according to claim 1, wherein the first pressure is below 1*10−9 mbar and the second pressure is below 1*10−6 mbar.

19. The charged particle beam apparatus according to claim 1, wherein the molecule blocking area is located on an optical axis of the charged particle beam apparatus, the second aperture opening is located on the optical axis and the aperture openings of the at least one first aperture opening are located off-axis from the optical axis.

20. A method of protecting an emitter tip with an aperture, comprising: providing an emitter for emission of a charged particle beam within a gun chamber;providing a first aperture unit;providing a second differential pressure aperture unit separating two independently evacuateable vacuum chambers and being adapted for maintaining a pressure difference of at least two orders of magnitude;deflecting the charged particle beam through openings of the first aperture unit and the second differential pressure aperture unit on a path different from diffusion paths of molecules originating in a specimen chamber; andblocking the diffusion paths of molecules originating in the specimen chamber to the emitter by the combined action of the first aperture unit and the second differential pressure aperture unit.