Assembly, maintenance, transport and storage of apparatus

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CPC
G03F7/70975

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70975Assembly, maintenance, transport and storage of apparatus

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Mitigating long-term energy decay of laser devices
- Patent number 12,147,166
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ping Yen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for producing a mirror of a microlithographic projection exp...
- Patent number 12,117,731
- Issue date Oct 15, 2024
- Carl Zeiss SMT GmbH
- Christoph Zaczek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
- Patent number 12,055,862
- Issue date Aug 6, 2024
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced-packaging high-volume-mode digital-lithography-tool
- Patent number 12,032,284
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Shih-Hao Kuo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vessel for a radiation source
- Patent number 12,007,699
- Issue date Jun 11, 2024
- ASML Netherlands B.V.
- Sander Kerssemakers
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for the tracking and identification of components of lithogr...
- Patent number 11,927,888
- Issue date Mar 12, 2024
- Carl Zeiss SMT GmbH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,854,846
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Method of assembling a facet mirror of an optical system
- Patent number 11,841,620
- Issue date Dec 12, 2023
- Carl Zeiss SMT GmbH
- Andreas Königer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for removing residue of EUV light source vessel
- Patent number 11,822,260
- Issue date Nov 21, 2023
- Samsung Electronics Co., Ltd.
- Jongbin Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Module vessel with scrubber gutters sized to prevent overflow
- Patent number 11,815,821
- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Kai Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mitigating long-term energy decay of laser devices
- Patent number 11,720,035
- Issue date Aug 8, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ping Yen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Collector mirror and apparatus for creating extreme ultraviolet lig...
- Patent number 11,698,590
- Issue date Jul 11, 2023
- Samsung Electronics Co., Ltd.
- Hoseok Song
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet catcher, droplet catcher system of EUV lithography apparatu...
- Patent number 11,599,030
- Issue date Mar 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Tu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV radiation source, insert for an EUV radiation source and insert...
- Patent number 11,550,225
- Issue date Jan 10, 2023
- Carl Zeiss SMT GmbH
- Iris Pilch
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of and apparatus for in-situ repair of reflective optic
- Patent number 11,474,440
- Issue date Oct 18, 2022
- ASML Netherlands B.V.
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
- Patent number 11,454,895
- Issue date Sep 27, 2022
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EUV photolithography system and methods of operating the same
- Patent number 11,442,365
- Issue date Sep 13, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Kuang Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical apparatus
- Patent number 11,428,892
- Issue date Aug 30, 2022
- Gigaphoton Inc.
- Hiroshi Someya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Movable body apparatus, moving method, exposure apparatus, exposure...
- Patent number 11,402,762
- Issue date Aug 2, 2022
- Nikon Corporation
- Yasuo Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Management method of managing processing apparatus by setting offse...
- Patent number 11,385,549
- Issue date Jul 12, 2022
- Canon Kabushiki Kaisha
- Tetsuya Taguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,380,566
- Issue date Jul 5, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Maintenance management method for lithography system, maintenance m...
- Patent number 11,353,801
- Issue date Jun 7, 2022
- Gigaphoton Inc.
- Kunihiko Abe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for containing a substrate and method of manufacturing th...
- Patent number 11,314,176
- Issue date Apr 26, 2022
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for semiconductor lithography
- Patent number 11,281,114
- Issue date Mar 22, 2022
- Carl Zeiss SMT GmbH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of operating semiconductor apparatus and semiconductor appar...
- Patent number 11,243,479
- Issue date Feb 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsiang Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for localizing assembly errors
- Patent number 11,175,595
- Issue date Nov 16, 2021
- Carl Zeiss SMT GmbH
- Thomas Niederhausen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Extreme ultraviolet light generation device and electronic device m...
- Patent number 11,126,095
- Issue date Sep 21, 2021
- Gigaphoton Inc.
- Georg Saumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System, a lithographic apparatus, and a method for reducing oxidati...
- Patent number 11,086,238
- Issue date Aug 10, 2021
- ASML Netherlands B.V.
- Lucas Henricus Johannes Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Droplet catcher system of EUV lithography apparatus and EUV lithogr...
- Patent number 11,067,906
- Issue date Jul 20, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Tu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for containing a substrate and method of manufacturing th...
- Patent number 11,061,339
- Issue date Jul 13, 2021
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DIGITAL PHOTOLITHOGRAPHY SYSTEM, COMPONENTS THEREOF AND RELATED MET...
- Publication number 20250053101
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Assaf Kidron
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL COMPONENT FOR A LITHOGRAPHY APPARATUS
- Publication number 20250044712
- Publication date Feb 6, 2025
- Carl Zeiss SMT GMBH
- Thomas IRTENKAUF
- G02 - OPTICS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240393705
- Publication date Nov 28, 2024
- SEMES CO., LTD.
- Sang Hyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
- Publication number 20240385542
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT APPARATUS AND METHOD FOR INSPECTING PHOTOMASKS INTENDED...
- Publication number 20240353757
- Publication date Oct 24, 2024
- Christian Roedel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...
- Publication number 20240319619
- Publication date Sep 26, 2024
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
COMBINED DISPENSING AND STAMPING APPARATUS AND METHOD FOR APPLYING...
- Publication number 20240264524
- Publication date Aug 8, 2024
- ASMPT SINGAPORE PTE. LTD
- Kai Siu LAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODULAR WAFER TABLE AND METHODS OF MANUFACTURING THEREOF
- Publication number 20240248415
- Publication date Jul 25, 2024
- ASML Holding N.V.
- Shahab SHERVIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINTENANCE OF MODULES FOR LIGHT SOURCES USED IN SEMICONDUCTOR PHOT...
- Publication number 20240152063
- Publication date May 9, 2024
- CYMER, LLC
- Russell Allen Burdt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION METHOD, DETERMINATION APPARATUS, INFORMATION PROCESSI...
- Publication number 20240118626
- Publication date Apr 11, 2024
- Canon Kabushiki Kaisha
- SHUJI SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADVANCED-PACKAGING HIGH-VOLUME-MODE DIGITAL-LITHOGRAPHY-TOOL
- Publication number 20240027896
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Shih-Hao Kuo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
- Publication number 20230400787
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW
- Publication number 20230384697
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Kai CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Dry Developing Metal-Free Photoresists
- Publication number 20230350303
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Charlotte Cutler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOME POT AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20230205103
- Publication date Jun 29, 2023
- SEMES CO.,LTD
- Ho Jong HWANG
- B08 - CLEANING
Information Patent Application
INTERFACE PLATE, INSPECTION SYSTEM AND METHOD OF INSTALLING AN INSP...
- Publication number 20230152717
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Marcel Koenraad Marie BAGGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIFFERENTIAL MEASUREMENT SYSTEM
- Publication number 20230152718
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Hubert Matthieu Richard STEIJNS
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...
- Publication number 20230081844
- Publication date Mar 16, 2023
- Carl Zeiss SMT GMBH
- Thorsten Hofmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MAINTAINING A PROJECTION EXPOSURE APPARATUS, SERVICE MOD...
- Publication number 20230072843
- Publication date Mar 9, 2023
- Carl Zeiss SMT GMBH
- Dirk Heinrich Ehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD HAVING LATCH INCLUDING RAMPED SURFACE
- Publication number 20230075744
- Publication date Mar 9, 2023
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...
- Publication number 20230048272
- Publication date Feb 16, 2023
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis LAFARRE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VESSEL FOR A RADIATION SOURCE
- Publication number 20230023631
- Publication date Jan 26, 2023
- ASML NETHERLANDS B.V.
- Sander KERSSEMAKERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR THE TRACKING AND IDENTIFICATION OF COMPONENTS OF LITHOGR...
- Publication number 20220342320
- Publication date Oct 27, 2022
- Carl Zeiss SMT GMBH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Point of Use Solvent Mixing for Film Removal
- Publication number 20220334485
- Publication date Oct 20, 2022
- TOKYO ELECTRON LIMITED
- Lior Huli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
- Publication number 20220328331
- Publication date Oct 13, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW
- Publication number 20220299891
- Publication date Sep 22, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Chun-Kai CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MOUNTING AN OPTICAL SYSTEM
- Publication number 20220283503
- Publication date Sep 8, 2022
- Carl Zeiss SMT GMBH
- Johann Dorn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUPPORT OF AN OPTICAL UNIT
- Publication number 20220283509
- Publication date Sep 8, 2022
- Carl Zeiss SMT GMBH
- Boaz Pnini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WORKPIECE CONTAINER SYSTEM
- Publication number 20220100106
- Publication date Mar 31, 2022
- GUDENG PRECISION INDUSTRIAL CO., LTD
- MING-CHIEN CHIU
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD O...
- Publication number 20220082945
- Publication date Mar 17, 2022
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Assembly, maintenance, transport and storage of apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Mitigating long-term energy decay of laser devices

Method for producing a mirror of a microlithographic projection exp...

Substrate holder, lithographic apparatus, device manufacturing meth...

Advanced-packaging high-volume-mode digital-lithography-tool

Vessel for a radiation source

Method for the tracking and identification of components of lithogr...

System for a semiconductor fabrication facility and method for oper...

Method of assembling a facet mirror of an optical system

Apparatus for removing residue of EUV light source vessel

Module vessel with scrubber gutters sized to prevent overflow

Mitigating long-term energy decay of laser devices

Collector mirror and apparatus for creating extreme ultraviolet lig...

Droplet catcher, droplet catcher system of EUV lithography apparatu...

EUV radiation source, insert for an EUV radiation source and insert...

Method of and apparatus for in-situ repair of reflective optic

Substrate holder, lithographic apparatus, device manufacturing meth...

EUV photolithography system and methods of operating the same

Optical apparatus

Movable body apparatus, moving method, exposure apparatus, exposure...

Management method of managing processing apparatus by setting offse...

System for a semiconductor fabrication facility and method for oper...

Maintenance management method for lithography system, maintenance m...

Apparatus for containing a substrate and method of manufacturing th...

Projection exposure apparatus for semiconductor lithography

Method of operating semiconductor apparatus and semiconductor appar...

Method for localizing assembly errors

Extreme ultraviolet light generation device and electronic device m...

System, a lithographic apparatus, and a method for reducing oxidati...

Droplet catcher system of EUV lithography apparatus and EUV lithogr...

Apparatus for containing a substrate and method of manufacturing th...

Patents Applicationslast 30 patents

DIGITAL PHOTOLITHOGRAPHY SYSTEM, COMPONENTS THEREOF AND RELATED MET...

OPTICAL COMPONENT FOR A LITHOGRAPHY APPARATUS

SUBSTRATE PROCESSING APPARATUS

MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES

MEASUREMENT APPARATUS AND METHOD FOR INSPECTING PHOTOMASKS INTENDED...

PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...

COMBINED DISPENSING AND STAMPING APPARATUS AND METHOD FOR APPLYING...

MODULAR WAFER TABLE AND METHODS OF MANUFACTURING THEREOF

MAINTENANCE OF MODULES FOR LIGHT SOURCES USED IN SEMICONDUCTOR PHOT...

DETERMINATION METHOD, DETERMINATION APPARATUS, INFORMATION PROCESSI...

ADVANCED-PACKAGING HIGH-VOLUME-MODE DIGITAL-LITHOGRAPHY-TOOL

MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES

MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW

Dry Developing Metal-Free Photoresists

HOME POT AND APPARATUS FOR TREATING SUBSTRATE

INTERFACE PLATE, INSPECTION SYSTEM AND METHOD OF INSTALLING AN INSP...

DIFFERENTIAL MEASUREMENT SYSTEM

METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...

METHOD FOR MAINTAINING A PROJECTION EXPOSURE APPARATUS, SERVICE MOD...

RETICLE POD HAVING LATCH INCLUDING RAMPED SURFACE

SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...

VESSEL FOR A RADIATION SOURCE

METHOD FOR THE TRACKING AND IDENTIFICATION OF COMPONENTS OF LITHOGR...

Point of Use Solvent Mixing for Film Removal

SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...

MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW

METHOD FOR MOUNTING AN OPTICAL SYSTEM

SUPPORT OF AN OPTICAL UNIT

WORKPIECE CONTAINER SYSTEM

SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD O...