Associated circuits

Industry

CPC
H01J2237/1202

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1202Associated circuits

Industries

Patents Grantslast 30 patents

Information Patent Grant
Particle beam system for adjusting the current of individual partic...
- Patent number 11,562,880
- Issue date Jan 24, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circuits for edge ring control in shaped DC pulsed plasma process d...
- Patent number 11,289,310
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Linying Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam charged particle system
- Patent number 11,087,948
- Issue date Aug 10, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 11,024,481
- Issue date Jun 1, 2021
- FEI Company
- Karel Diederick Van Der Mast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization, densification, and exfoliation of porous materials b...
- Patent number 10,896,804
- Issue date Jan 19, 2021
- Lawrence Livermore National Security, LLC
- Sergei Kucheyev
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Conductive beam optic containing internal heating element
- Patent number 10,879,038
- Issue date Dec 29, 2020
- Applied Materials, Inc.
- Scott E. Peitzsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 10,825,649
- Issue date Nov 3, 2020
- Hitachi, Ltd.
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deflection array apparatus for multi-electron beam system
- Patent number 10,748,739
- Issue date Aug 18, 2020
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam charged particle system
- Patent number 10,741,355
- Issue date Aug 11, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system
- Patent number 10,600,613
- Issue date Mar 24, 2020
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system
- Patent number 10,147,582
- Issue date Dec 4, 2018
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for imaging a secondary charged particle beam wit...
- Patent number 10,103,004
- Issue date Oct 16, 2018
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- G01 - MEASURING TESTING
Information Patent Grant
System for imaging a secondary charged particle beam with adaptive...
- Patent number 9,953,805
- Issue date Apr 24, 2018
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and sample processing method
- Patent number 8,269,188
- Issue date Sep 18, 2012
- SII NanoTechnology Inc.
- Takashi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and a method of imaging objects
- Patent number 7,326,928
- Issue date Feb 5, 2008
- National University of Singapore
- Anjam Khursheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical apparatus, electron microscopy system and electron...
- Patent number 6,914,249
- Issue date Jul 5, 2005
- Carl Zeiss NTS GmbH
- Oliver Kienzle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rule based control for charged-particle beam instrument
- Patent number 5,767,515
- Issue date Jun 16, 1998
- Jeol Ltd.
- Kazuhiro Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and controlling method therefor
- Patent number 5,293,508
- Issue date Mar 8, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Shigeru Shiratake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam apparatus and method for driving the same
- Patent number 5,233,196
- Issue date Aug 3, 1993
- Canon Kabushiki Kaisha
- Masahiko Okunuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS D...
- Publication number 20220223386
- Publication date Jul 14, 2022
- Applied Materials, Inc.
- Linying CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM FOR ADJUSTING THE CURRENT OF INDIVIDUAL PARTIC...
- Publication number 20210210303
- Publication date Jul 8, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE SYSTEM
- Publication number 20200357600
- Publication date Nov 12, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE SYSTEM
- Publication number 20200251301
- Publication date Aug 6, 2020
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS D...
- Publication number 20200161098
- Publication date May 21, 2020
- Applied Materials, Inc.
- Linying CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deflection Array Apparatus for Multi-Electron Beam System
- Publication number 20200118784
- Publication date Apr 16, 2020
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE
- Publication number 20190295805
- Publication date Sep 26, 2019
- Hitachi, Ltd
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM
- Publication number 20190088440
- Publication date Mar 21, 2019
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR IMAGING A SECONDARY CHARGED PARTICLE BEAM WITH ADAPTIVE...
- Publication number 20170076910
- Publication date Mar 16, 2017
- ICT Integrated Circuit Testing Gesellscaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus and sample processing method
- Publication number 20120001086
- Publication date Jan 5, 2012
- Takashi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20090302233
- Publication date Dec 10, 2009
- Takashi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscope and a method of imaging objects
- Publication number 20060151696
- Publication date Jul 13, 2006
- National University of Singapore
- Anjam Khursheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-optical apparatus, electron microscopy system and electron...
- Publication number 20040105160
- Publication date Jun 3, 2004
- LEO Elektronenmikroskopie GmbH
- Oliver Kienzle
- B82 - NANO-TECHNOLOGY

Associated circuits

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Particle beam system for adjusting the current of individual partic...

Circuits for edge ring control in shaped DC pulsed plasma process d...

Multi-beam charged particle system

Scanning electron microscope

Planarization, densification, and exfoliation of porous materials b...

Conductive beam optic containing internal heating element

Electron beam device

Deflection array apparatus for multi-electron beam system

Multi-beam charged particle system

Particle beam system

Particle beam system

System and method for imaging a secondary charged particle beam wit...

System for imaging a secondary charged particle beam with adaptive...

Charged particle beam apparatus and sample processing method

Electron microscope and a method of imaging objects

Particle-optical apparatus, electron microscopy system and electron...

Rule based control for charged-particle beam instrument

Ion implanter and controlling method therefor

Electron beam apparatus and method for driving the same

Patents Applicationslast 30 patents

CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS D...

PARTICLE BEAM SYSTEM FOR ADJUSTING THE CURRENT OF INDIVIDUAL PARTIC...

MULTI-BEAM CHARGED PARTICLE SYSTEM

MULTI-BEAM CHARGED PARTICLE SYSTEM

CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS D...

Deflection Array Apparatus for Multi-Electron Beam System

ELECTRON BEAM DEVICE

PARTICLE BEAM SYSTEM

SYSTEM FOR IMAGING A SECONDARY CHARGED PARTICLE BEAM WITH ADAPTIVE...

Charged particle beam apparatus and sample processing method

CHARGED PARTICLE BEAM APPARATUS

Electron microscope and a method of imaging objects

Particle-optical apparatus, electron microscopy system and electron...