Associated with semiconductor wafer handling

Industry

CPC
Y10S414/135

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S414/00Material or article handling

Current Industry

Y10S414/135Associated with semiconductor wafer handling

Industries

Patents Grantslast 30 patents

Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE49671
- Issue date Sep 26, 2023
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Replaceable end effector contact pads, end effectors, and maintenan...
- Patent number 11,600,580
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Whitney Kroetz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor-based position and orientation feedback of robot end effecto...
- Patent number 11,413,767
- Issue date Aug 16, 2022
- Applied Materials, Inc.
- Preetham Kariyaiah Shivanna
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE48792
- Issue date Oct 26, 2021
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE48031
- Issue date Jun 2, 2020
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE47909
- Issue date Mar 17, 2020
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Substrate storage and processing
- Patent number 10,403,526
- Issue date Sep 3, 2019
- Murata Machinery, Ltd.
- Thomas Schober
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus with parallel gas supply pipes and a g...
- Patent number 10,290,521
- Issue date May 14, 2019
- Screen Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate transport apparatus with active edge gripper
- Patent number 10,204,811
- Issue date Feb 12, 2019
- Brooks Automation, Inc.
- Michael Duhamel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE47145
- Issue date Nov 27, 2018
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Semiconductor manufacturing systems
- Patent number 10,086,511
- Issue date Oct 2, 2018
- Brooks Automation, Inc.
- Peter van der Meulen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE46465
- Issue date Jul 4, 2017
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Multi-story substrate treating apparatus with flexible transport me...
- Patent number 9,687,874
- Issue date Jun 27, 2017
- Screen Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Container transport facility
- Patent number 9,685,361
- Issue date Jun 20, 2017
- Daifuku Co., Ltd.
- Hideo Yoshioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate loading and unloading station with buffer
- Patent number 9,670,010
- Issue date Jun 6, 2017
- Brooks Automation, Inc.
- Ulysses Gilchrist
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Method of etching and cleaning wafers
- Patent number 9,583,352
- Issue date Feb 28, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang Tsai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Low cost high throughput processing platform
- Patent number 9,493,306
- Issue date Nov 15, 2016
- Mattson Technology, Inc.
- Leszek Niewmierzycki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Port door positioning apparatus and associated methods
- Patent number 9,378,995
- Issue date Jun 28, 2016
- Brooks Automation, Inc.
- Anthony C. Bonora
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lid opening/closing system for closed container and substrate proce...
- Patent number 9,349,627
- Issue date May 24, 2016
- TDK Corporation
- Tsutomu Okabe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Systems, apparatus and methods for transporting substrates in elect...
- Patent number 9,334,127
- Issue date May 10, 2016
- Applied Materials, Inc.
- Izya Kremerman
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate treating apparatus
- Patent number 9,230,834
- Issue date Jan 5, 2016
- Screen Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Removable spin chamber with vacuum attachment
- Patent number 9,209,062
- Issue date Dec 8, 2015
- Spintrac Systems, Inc.
- Alan W. Kukas
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treating apparatus using horizontal treatment cell arrang...
- Patent number 9,174,235
- Issue date Nov 3, 2015
- Screen Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treating apparatus with vertical treatment arrangement in...
- Patent number 9,165,807
- Issue date Oct 20, 2015
- Screen Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE45772
- Issue date Oct 20, 2015
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
- 001 -
Information Patent Grant
Transfer chamber between workstations
- Patent number 9,099,506
- Issue date Aug 4, 2015
- Brooks Automation, Inc.
- Clinton M. Haris
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate transferring system and substrate transferring method
- Patent number 9,087,865
- Issue date Jul 21, 2015
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Chun Liu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Industrial robot
- Patent number 9,064,919
- Issue date Jun 23, 2015
- NIDEC SANKYO CORPORATION
- Takayuki Yazawa
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing system and substrate transferring method
- Patent number 9,022,714
- Issue date May 5, 2015
- Jusung Engineering Co., Ltd.
- Kyoo Hwan Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Load port
- Patent number 9,010,384
- Issue date Apr 21, 2015
- Right Mfg. Co. Ltd.
- Takehiko Yoshimura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Substrate Storage and Processing
- Publication number 20170372930
- Publication date Dec 28, 2017
- Tec-Sem AG
- Thomas Schober
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, APPARATUS AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECT...
- Publication number 20140286736
- Publication date Sep 25, 2014
- Applied Materials, Inc.
- Izya Kremerman
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
LOW COST HIGH THROUGHPUT PROCESSING PLATFORM
- Publication number 20140151195
- Publication date Jun 5, 2014
- Mattson Technology, Inc.
- Leszek Niewmierzycki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
- Publication number 20140119856
- Publication date May 1, 2014
- Brooks Automation, Inc.
- Michael Duhamel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LCD GLASS SUBSTRATE STORAGE TRAY
- Publication number 20140076771
- Publication date Mar 20, 2014
- SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Rui Fang
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEMS
- Publication number 20130343841
- Publication date Dec 26, 2013
- Brooks Automation, Inc.
- Peter van der Meulen
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER
- Publication number 20130336749
- Publication date Dec 19, 2013
- Brooks Automation, Inc.
- Ulysses Gilchrist
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE, AND METHOD FOR FABRICA...
- Publication number 20130089933
- Publication date Apr 11, 2013
- Katsuyuki Suga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE DEVICE AND LOAD PORT APPARATUS INCLUDING THE SAME
- Publication number 20130042945
- Publication date Feb 21, 2013
- TDK Corporation
- Jun Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Frame Feeding System and Frame Feeding Method
- Publication number 20130017040
- Publication date Jan 17, 2013
- Hitachi High-Tech Instruments Co., Ltd.
- Tatsuyuki OHKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Using a Two Part Cover and a Box for Protecti...
- Publication number 20130010277
- Publication date Jan 10, 2013
- ASML Holding N.V.
- Santiago del Puerto
- B82 - NANO-TECHNOLOGY
Information Patent Application
LOAD PORT
- Publication number 20130000757
- Publication date Jan 3, 2013
- RIGHT MFG., CO., LTD.
- Takehiko YOSHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER
- Publication number 20120325328
- Publication date Dec 27, 2012
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20120320361
- Publication date Dec 20, 2012
- Tetsuya Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Transferring System and Substrate Transferring Method
- Publication number 20120308342
- Publication date Dec 6, 2012
- Shenzhen China Star Optoelectronics Technology Co., LTD.
- Chun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER
- Publication number 20120261031
- Publication date Oct 18, 2012
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT ARM APPARATUS
- Publication number 20120253511
- Publication date Oct 4, 2012
- SINFONIA TECHNOLOGY CO., LTD.
- Toru SAEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD FOR PERFORMING PROCESSES INCLUDING PHOTOL...
- Publication number 20120251957
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Yuichi Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
- Publication number 20120189406
- Publication date Jul 26, 2012
- Brooks Automation, Inc.
- Michael Duhamel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUSTRIAL ROBOT
- Publication number 20120189419
- Publication date Jul 26, 2012
- Takayuki Yazawa
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20120180983
- Publication date Jul 19, 2012
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20120156380
- Publication date Jun 21, 2012
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LINEAR SEMICONDUCTOR PROCESSING FACILITIES
- Publication number 20120148374
- Publication date Jun 14, 2012
- Brooks Automation, Inc.
- Peter van der Meulen
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20120145074
- Publication date Jun 14, 2012
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20120145073
- Publication date Jun 14, 2012
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL
- Publication number 20120141237
- Publication date Jun 7, 2012
- Mike Rice
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ANODIZING APPARATUS
- Publication number 20120138455
- Publication date Jun 7, 2012
- Yasuyoshi MIYAJI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20120111668
- Publication date May 10, 2012
- TOKYO ELECTRON LIMITED
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING THIN WAFERS
- Publication number 20120093616
- Publication date Apr 19, 2012
- Terry BLUCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC...
- Publication number 20120083061
- Publication date Apr 5, 2012
- Hee-Cheol Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Associated with semiconductor wafer handling

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer transfer apparatus and substrate transfer apparatus

Replaceable end effector contact pads, end effectors, and maintenan...

Sensor-based position and orientation feedback of robot end effecto...

Wafer transfer apparatus and substrate transfer apparatus

Wafer transfer apparatus and substrate transfer apparatus

Wafer transfer apparatus and substrate transfer apparatus

Substrate storage and processing

Substrate treating apparatus with parallel gas supply pipes and a g...

Substrate transport apparatus with active edge gripper

Wafer transfer apparatus and substrate transfer apparatus

Semiconductor manufacturing systems

Wafer transfer apparatus and substrate transfer apparatus

Multi-story substrate treating apparatus with flexible transport me...

Container transport facility

Substrate loading and unloading station with buffer

Method of etching and cleaning wafers

Low cost high throughput processing platform

Port door positioning apparatus and associated methods

Lid opening/closing system for closed container and substrate proce...

Systems, apparatus and methods for transporting substrates in elect...

Substrate treating apparatus

Removable spin chamber with vacuum attachment

Substrate treating apparatus using horizontal treatment cell arrang...

Substrate treating apparatus with vertical treatment arrangement in...

Wafer transfer apparatus and substrate transfer apparatus

Transfer chamber between workstations

Substrate transferring system and substrate transferring method

Industrial robot

Substrate processing system and substrate transferring method

Load port

Patents Applicationslast 30 patents

Substrate Storage and Processing

SYSTEMS, APPARATUS AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECT...

LOW COST HIGH THROUGHPUT PROCESSING PLATFORM

SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER

LCD GLASS SUBSTRATE STORAGE TRAY

SEMICONDUCTOR MANUFACTURING SYSTEMS

SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE, AND METHOD FOR FABRICA...

PURGE DEVICE AND LOAD PORT APPARATUS INCLUDING THE SAME

Frame Feeding System and Frame Feeding Method

System and Method for Using a Two Part Cover and a Box for Protecti...

LOAD PORT

METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

Substrate Transferring System and Substrate Transferring Method

LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER

ROBOT ARM APPARATUS

SUBSTRATE TRANSFER METHOD FOR PERFORMING PROCESSES INCLUDING PHOTOL...

SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER

INDUSTRIAL ROBOT

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

SUBSTRATE TREATING APPARATUS

LINEAR SEMICONDUCTOR PROCESSING FACILITIES

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL

ANODIZING APPARATUS

VACUUM PROCESSING APPARATUS

PROCESSING THIN WAFERS

THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC...