Atmospheric CVD gas inlets with no enclosed reaction chamber

Industry

CPC
C23C16/45595

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45595Atmospheric CVD gas inlets with no enclosed reaction chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 11,913,114
- Issue date Feb 27, 2024
- Samsung Electronics Co., Ltd.
- Jae Hyun Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atmospheric cold plasma jet coating and surface treatment
- Patent number 11,560,627
- Issue date Jan 24, 2023
- Starfire Industries LLC
- Brian Edward Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with vacuum pre-loaded deposition head
- Patent number 11,535,935
- Issue date Dec 27, 2022
- Eastman Kodak Company
- Todd Mathew Spath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus with half open loop
- Patent number 11,459,146
- Issue date Oct 4, 2022
- Arkema France
- Oliver Meurer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus for containers
- Patent number 11,274,061
- Issue date Mar 15, 2022
- Arkema B.V.
- Bram Van Dis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming device including a detachable bottom plate for forming...
- Patent number 11,124,877
- Issue date Sep 21, 2021
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Takahiro Shirahata
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Solar cell with selectively doped conductive oxide layer and method...
- Patent number 11,031,514
- Issue date Jun 8, 2021
- VITRO, S.A.B. DE C.V.
- James W. McCamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Article with transparent conductive oxide coating
- Patent number 10,680,123
- Issue date Jun 9, 2020
- Vitro Flat Glass LLC
- James W. McCamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Article with buffer layer
- Patent number 10,672,920
- Issue date Jun 2, 2020
- Vitro Flat Glass LLC
- Zhixun Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Article with transparent conductive layer and method of making the...
- Patent number 10,672,921
- Issue date Jun 2, 2020
- Vitro Flat Glass LLC
- James W. McCamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus, plasma processing method, and method f...
- Patent number 10,141,162
- Issue date Nov 27, 2018
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Tomohiro Okumura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation device
- Patent number 10,121,931
- Issue date Nov 6, 2018
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Hiroyuki Orita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Vapor deposition systems and processes for the protection of glass...
- Patent number 10,106,457
- Issue date Oct 23, 2018
- Corning Incorporated
- Robert Addison Boudreau
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Apparatus and process for producing thin layers
- Patent number 10,030,307
- Issue date Jul 24, 2018
- Gebr. Schmid GmbH
- Christian Schmid
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus and method for forming CVD film
- Patent number 9,831,069
- Issue date Nov 28, 2017
- WACOM
- Masaki Kusuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Article with buffer layer and method of making the same
- Patent number 9,818,888
- Issue date Nov 14, 2017
- VITRO, S.A.B. DE C.V.
- James W. McCamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition process for depositing zinc oxide coating...
- Patent number 9,776,914
- Issue date Oct 3, 2017
- Pilkington Group Limited
- Yu Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus, plasma processing method, and method f...
- Patent number 9,741,538
- Issue date Aug 22, 2017
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Tomohiro Okumura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing device and plasma processing method
- Patent number 9,691,593
- Issue date Jun 27, 2017
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Tomohiro Okumura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing glass substrate with layered film
- Patent number 9,309,148
- Issue date Apr 12, 2016
- Asahi Glass Company, Limited
- Kuniaki Hiromatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-temperature synthesis of silica
- Patent number 8,993,063
- Issue date Mar 31, 2015
- President and Fellows of Harvard College
- Joanna Aizenberg
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and method for atomic layer deposition
- Patent number 8,956,456
- Issue date Feb 17, 2015
- Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
- Adrianus Johannes Petrus Maria Vermeer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition reactor using plasma and method for forming thin f...
- Patent number 8,851,012
- Issue date Oct 7, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for coating glass substrate
- Patent number 8,642,120
- Issue date Feb 4, 2014
- Beneq Oy
- Markku Rajala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atmospheric pressure chemical vapor deposition method for producing...
- Patent number 8,609,516
- Issue date Dec 17, 2013
- Helmholtz-Zentrum Berlin fuer Materialien und Energie GmbH
- Nicholas Allsop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma deposition apparatus and deposition method utilizing same
- Patent number 8,281,741
- Issue date Oct 9, 2012
- Industrial Technology Research Institute
- Chia-Chiang Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma deposition apparatus and deposition method utilizing same
- Patent number 7,923,076
- Issue date Apr 12, 2011
- Industrial Technology Research Institute
- Chia-Chiang Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for atomic layer deposition
- Patent number 7,851,380
- Issue date Dec 14, 2010
- Eastman Kodak Company
- Shelby F. Nelson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment apparatus
- Patent number 7,824,520
- Issue date Nov 2, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Osamu Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma film forming system
- Patent number 7,819,081
- Issue date Oct 26, 2010
- Sekisui Chemical Co., Ltd.
- Shinichi Kawasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240018657
- Publication date Jan 18, 2024
- Samsung Electronics Co., Ltd.
- Jae Hyun YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON DOPED METAL OXYFLUORIDE (C:M-0-F) LAYER AS PROTECTION LAYER...
- Publication number 20230383396
- Publication date Nov 30, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siegfried KRASSNITZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT
- Publication number 20230160067
- Publication date May 25, 2023
- Starfire Industires, LLC
- Brian Edward Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...
- Publication number 20220049352
- Publication date Feb 17, 2022
- SOULBRAIN CO., LTD
- Changbong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...
- Publication number 20220049351
- Publication date Feb 17, 2022
- SOULBRAIN CO., LTD
- Changbong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-THIN FILMS WITH TRANSITION METAL DICHALCOGENIDES
- Publication number 20210404056
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Susmit Singha Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20210108313
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Jae Hyun YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...
- Publication number 20210062338
- Publication date Mar 4, 2021
- SOULBRAIN CO., LTD
- Changbong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Article with Transparent Conductive Layer and Method of Making the...
- Publication number 20200365744
- Publication date Nov 19, 2020
- Vitro Flat Glass LLC
- James McCamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA DENSIFICATION WITHIN A PROCESSING CHAMBER
- Publication number 20200328066
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM WITH VACUUM PRE-LOADED DEPOSITION HEAD
- Publication number 20200318238
- Publication date Oct 8, 2020
- Todd Mathew Spath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Article with Transparent Conductive Oxide Coating
- Publication number 20200295204
- Publication date Sep 17, 2020
- Vitro Flat Glass LLC
- James W. McCamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEM FLANGE PLASMA TREATMENT PROCESS
- Publication number 20190078201
- Publication date Mar 14, 2019
- FORD GLOBAL TECHNOLOGIES, L.L.C.
- Larry P. Haack
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Solar Cell With Selectively Doped Conductive Oxide Layer and Method...
- Publication number 20180190844
- Publication date Jul 5, 2018
- Vitro S.A.B. de C.V.
- James W. McCamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR TREATING THE SURFACE OF A MOVING FILM, AND FACILITY FOR...
- Publication number 20180144910
- Publication date May 24, 2018
- COATING PLASMA INDUSTRIE
- Eric GAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISCHARGE ELECTRODE
- Publication number 20180076008
- Publication date Mar 15, 2018
- WACOM
- Masaki Kusuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND METHOD F...
- Publication number 20170309451
- Publication date Oct 26, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- Tomohiro OKUMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device and Method for Producing Thin Films
- Publication number 20150024540
- Publication date Jan 22, 2015
- Christian Schmid
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Deposition Reactor Using Plasma and Method for Forming Thin F...
- Publication number 20140370204
- Publication date Dec 18, 2014
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION SYSTEMS AND PROCESSES FOR THE PROTECTION OF GLASS...
- Publication number 20140352355
- Publication date Dec 4, 2014
- Robert Addison Boudreau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Solar Cell With Selectively Doped Conductive Oxide Layer And Method...
- Publication number 20140311573
- Publication date Oct 23, 2014
- PPG INDUSTRIES OHIO, INC.
- James W. McCamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS BARRIER LAMINATE AND PRODUCTION METHOD OF THE SAME
- Publication number 20140255288
- Publication date Sep 11, 2014
- Konica Minolta, Inc.
- Hiroaki ARITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD APPARATUS AND METHOD FOR FORMING CVD FILM
- Publication number 20140186990
- Publication date Jul 3, 2014
- WACOM
- Masaki Kusuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING GLASS SUBSTRATE WITH LAYERED FILM
- Publication number 20140123704
- Publication date May 8, 2014
- Asahi Glass Company, Limited
- Kuniaki HIROMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Coated Metallic Parts and Method of Making The Same
- Publication number 20140113146
- Publication date Apr 24, 2014
- FORD GLOBAL TECHNOLOGIES, L.L.C.
- Larry P. Haack
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
REPAIRING DEVICE FOR REPAIRING DISCONNECTED LINE
- Publication number 20140007811
- Publication date Jan 9, 2014
- Shenzhen China Star Optoelectronics Technology Co. Ltd.
- Wen-da Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATMOSPHERIC PRESSURE PLASMA TREATMENT APPARATUS AND ATMOSPHERIC PRE...
- Publication number 20130309416
- Publication date Nov 21, 2013
- Mitsubishi Electric corporation
- Yoshinori Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION DEVICE
- Publication number 20130247820
- Publication date Sep 26, 2013
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL.SYS. CORP.
- Hiroyuki Orita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LOW-TEMPERATURE SYNTHESIS OF SILICA
- Publication number 20130236641
- Publication date Sep 12, 2013
- President and Fellows of Harvard College
- Joanna Aizenberg
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
ATMOSPHERIC FILM-COATING DEVICE AND FILM-MANUFACTURING APPARATUS
- Publication number 20120266818
- Publication date Oct 25, 2012
- CREATING NANO TECHNOLOGIES, INC.
- Yih-Ming SHYU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Atmospheric CVD gas inlets with no enclosed reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor manufacturing apparatus

Atmospheric cold plasma jet coating and surface treatment

Deposition system with vacuum pre-loaded deposition head

Coating apparatus with half open loop

Coating apparatus for containers

Film forming device including a detachable bottom plate for forming...

Solar cell with selectively doped conductive oxide layer and method...

Article with transparent conductive oxide coating

Article with buffer layer

Article with transparent conductive layer and method of making the...

Plasma processing apparatus, plasma processing method, and method f...

Film formation device

Vapor deposition systems and processes for the protection of glass...

Apparatus and process for producing thin layers

CVD apparatus and method for forming CVD film

Article with buffer layer and method of making the same

Chemical vapor deposition process for depositing zinc oxide coating...

Plasma processing apparatus, plasma processing method, and method f...

Plasma processing device and plasma processing method

Method for manufacturing glass substrate with layered film

Low-temperature synthesis of silica

Apparatus and method for atomic layer deposition

Vapor deposition reactor using plasma and method for forming thin f...

Method and apparatus for coating glass substrate

Atmospheric pressure chemical vapor deposition method for producing...

Plasma deposition apparatus and deposition method utilizing same

Plasma deposition apparatus and deposition method utilizing same

Process for atomic layer deposition

Plasma treatment apparatus

Plasma film forming system

Patents Applicationslast 30 patents

SEMICONDUCTOR MANUFACTURING APPARATUS

CARBON DOPED METAL OXYFLUORIDE (C:M-0-F) LAYER AS PROTECTION LAYER...

ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT

GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...

GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...

ULTRA-THIN FILMS WITH TRANSITION METAL DICHALCOGENIDES

SEMICONDUCTOR MANUFACTURING APPARATUS

GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...

Article with Transparent Conductive Layer and Method of Making the...

PLASMA DENSIFICATION WITHIN A PROCESSING CHAMBER

DEPOSITION SYSTEM WITH VACUUM PRE-LOADED DEPOSITION HEAD

Article with Transparent Conductive Oxide Coating

HEM FLANGE PLASMA TREATMENT PROCESS

Solar Cell With Selectively Doped Conductive Oxide Layer and Method...

METHOD FOR TREATING THE SURFACE OF A MOVING FILM, AND FACILITY FOR...

DISCHARGE ELECTRODE

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND METHOD F...

Device and Method for Producing Thin Films

Vapor Deposition Reactor Using Plasma and Method for Forming Thin F...

VAPOR DEPOSITION SYSTEMS AND PROCESSES FOR THE PROTECTION OF GLASS...

Solar Cell With Selectively Doped Conductive Oxide Layer And Method...

GAS BARRIER LAMINATE AND PRODUCTION METHOD OF THE SAME

CVD APPARATUS AND METHOD FOR FORMING CVD FILM

METHOD FOR MANUFACTURING GLASS SUBSTRATE WITH LAYERED FILM

Coated Metallic Parts and Method of Making The Same

REPAIRING DEVICE FOR REPAIRING DISCONNECTED LINE

ATMOSPHERIC PRESSURE PLASMA TREATMENT APPARATUS AND ATMOSPHERIC PRE...

FILM FORMATION DEVICE

LOW-TEMPERATURE SYNTHESIS OF SILICA

ATMOSPHERIC FILM-COATING DEVICE AND FILM-MANUFACTURING APPARATUS