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G03F1/82
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Parent Industries
G
PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F1/00
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles Mask blanks or pellicles therefor Containers specially adapted therefor Preparation thereof
Current Industry
G03F1/82
Auxiliary processes
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Patents Grants
last 30 patents
Information
Patent Grant
Debris removal from high aspect structures
Patent number
11,964,310
Issue date
Apr 23, 2024
Bruker Nano, Inc.
Tod Evan Robinson
B08 - CLEANING
Information
Patent Grant
Pellicle removal tool
Patent number
11,948,824
Issue date
Apr 2, 2024
Photronics, Inc.
Hilario Ar-Miguel Alvarez
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Single-volume baking chamber for mask clean
Patent number
11,921,422
Issue date
Mar 5, 2024
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for removing a particle from a photolithograph...
Patent number
11,899,359
Issue date
Feb 13, 2024
Carl Zeiss SMT GmbH
Christof Baur
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatuses for disposing of excess material of a photol...
Patent number
11,874,598
Issue date
Jan 16, 2024
Carl Zeiss SMT GmbH
Michael Budach
B08 - CLEANING
Information
Patent Grant
Exposure machine and exposure method
Patent number
11,852,976
Issue date
Dec 26, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Bin Zou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cleaning method for photo masks and apparatus therefor
Patent number
11,852,969
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hsin-Chang Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
Patent number
11,809,076
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Wu-Hung Ko
B08 - CLEANING
Information
Patent Grant
Methods and apparatus for photomask processing
Patent number
11,803,118
Issue date
Oct 31, 2023
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Pellicle frame, pellicle, and method for peeling pellicle
Patent number
11,796,908
Issue date
Oct 24, 2023
Shin-Etsu Chemical Co., Ltd.
Yu Yanase
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask glue removing apparatus, system and method
Patent number
11,786,942
Issue date
Oct 17, 2023
SK Hynix Inc.
Sung Hyun Kim
B08 - CLEANING
Information
Patent Grant
Membrane for EUV lithography
Patent number
11,762,281
Issue date
Sep 19, 2023
ASML Netherlands B.V.
Maxim Aleksandrovich Nasalevich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Power structure with power pick-up cell connecting to buried power...
Patent number
11,755,812
Issue date
Sep 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Wei Peng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus for removing a pellicle frame from a photomask and the me...
Patent number
11,714,348
Issue date
Aug 1, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Wei Cheng Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of fabricating and servicing a photomask
Patent number
11,714,350
Issue date
Aug 1, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Fu Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Integrated circuit and method of forming the same
Patent number
11,704,469
Issue date
Jul 18, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
John Lin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Particle removing assembly and method of cleaning mask for lithography
Patent number
11,698,592
Issue date
Jul 11, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Yang Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for modifying the wettability and/or other biocompatibility...
Patent number
11,698,582
Issue date
Jul 11, 2023
Exogenesis Corporation
Joseph B. Khoury
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for cleaning substrate
Patent number
11,691,187
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Hao-Ming Chang
B08 - CLEANING
Information
Patent Grant
Reduce mask defect impact by contamination decompose
Patent number
11,687,012
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chi-Hung Liao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for cleaning an EUV mask
Patent number
11,681,235
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yen-Hui Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle removal tool
Patent number
11,682,573
Issue date
Jun 20, 2023
Photronics, Inc.
Hilario Ar-Miguel Alvarez
B32 - LAYERED PRODUCTS
Information
Patent Grant
Membrane cleaning apparatus
Patent number
11,673,169
Issue date
Jun 13, 2023
ASML Netherlands B.V.
Andrey Nikipelov
B08 - CLEANING
Information
Patent Grant
Reticle cleaning system
Patent number
11,675,264
Issue date
Jun 13, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Chang Cheng
B08 - CLEANING
Information
Patent Grant
Reticle cleaning device and method of use
Patent number
11,650,512
Issue date
May 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Che-Chang Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi-volume baking chamber for mask clean
Patent number
11,644,748
Issue date
May 9, 2023
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High throughput and high position accurate method for particle insp...
Patent number
11,614,691
Issue date
Mar 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Jui Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflective mask cleaning apparatus and reflective mask cleaning method
Patent number
11,609,491
Issue date
Mar 21, 2023
Shibaura Mechatronics Corporation
Daisuke Matsushima
B08 - CLEANING
Information
Patent Grant
Debris removal in high aspect structures
Patent number
11,577,286
Issue date
Feb 14, 2023
Bruker Nano, Inc.
Tod Evan Robinson
B08 - CLEANING
Information
Patent Grant
Devices, systems, and methods of generating and providing a target...
Patent number
11,551,347
Issue date
Jan 10, 2023
Corning Incorporated
David L Aronstein
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
MEMBRANE CLEANING APPARATUS
Publication number
20240142871
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Andrey NIKIPELOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20240118607
Publication date
Apr 11, 2024
SEMES CO.,LTD
Hyun YOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE AND METHOD FOR PHOTOMASK CLEANING AND FLIPPING
Publication number
20240118608
Publication date
Apr 11, 2024
Chun-Jung Chiu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING METHOD FOR PHOTO MASKS AND APPARATUS THEREFOR
Publication number
20240085781
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsin-Chang LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR REMOVING A PARTICLE FROM A PHOTOLITHOGRAPH...
Publication number
20240077800
Publication date
Mar 7, 2024
Carl Zeiss SMT GMBH
Christof Baur
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPONENT FOR USE IN A LITHOGRAPHIC APPARATUS, METHOD OF PROTECTING...
Publication number
20240027925
Publication date
Jan 25, 2024
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PHOTOMASK PROCESSING
Publication number
20240027894
Publication date
Jan 25, 2024
Applied Materials, Inc.
Banqiu WU
B08 - CLEANING
Information
Patent Application
TRAINING METHOD AND APPARATUS FOR LITHOGRAPHIC MASK GENERATION MODE...
Publication number
20240019777
Publication date
Jan 18, 2024
TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
Xingyu MA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FRAME, PELLICLE, AND METHOD FOR PEELING PELLICLE
Publication number
20240012323
Publication date
Jan 11, 2024
Shin-Etsu Chemical Co., Ltd.
Yu YANASE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FRAME, PELLICLE, AND METHOD FOR PEELING PELLICLE
Publication number
20240004287
Publication date
Jan 4, 2024
Shin-Etsu Chemical Co., Ltd.
Yu YANASE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEMBRANE FOR EUV LITHOGRAPHY
Publication number
20240004283
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Maxim Aleksandrovich Nasalevich
G02 - OPTICS
Information
Patent Application
PELLICLE FRAME, PELLICLE, AND METHOD FOR PEELING PELLICLE
Publication number
20240004286
Publication date
Jan 4, 2024
Shin-Etsu Chemical Co., Ltd.
Yu YANASE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FRAME, PELLICLE, AND METHOD FOR PEELING PELLICLE
Publication number
20240004285
Publication date
Jan 4, 2024
Shin-Etsu Chemical Co., Ltd.
Yu YANASE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR CLEANING POT-SHAPED HOLLOW BODIES, IN PARTICULAR TRAN...
Publication number
20230402298
Publication date
Dec 14, 2023
Gunter HAAS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUIT AND METHOD OF FORMING THE SAME
Publication number
20230385518
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
John LIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPTICAL COMPONENT FOR DEEP ULTRAVIOLET LIGHT SOURCE
Publication number
20230375934
Publication date
Nov 23, 2023
CYMER, LLC
John Theodore Melchior
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
Publication number
20230367206
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing company Ltd.
WU-HUNG KO
B08 - CLEANING
Information
Patent Application
METHOD OF FABRICATING AND SERVICING A PHOTOMASK
Publication number
20230341767
Publication date
Oct 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Fu YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE AND METHOD FOR CLEANING PELLICLE FRAME AND MEMBRANE
Publication number
20230333465
Publication date
Oct 19, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Kun-Lung Hsieh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARTICLE REMOVING ASSEMBLY AND METHOD OF CLEANING MASK FOR LITHOGRAPHY
Publication number
20230314963
Publication date
Oct 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Yang LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEMBRANE CLEANING APPARATUS
Publication number
20230311173
Publication date
Oct 5, 2023
ASML NETHERLANDS B.V.
Andrey NIKIPELOV
B08 - CLEANING
Information
Patent Application
METHOD FOR MANUFACTURING ELEMENT SUBSTRATE, ELEMENT SUBSTRATE, AND...
Publication number
20230311493
Publication date
Oct 5, 2023
Canon Kabushiki Kaisha
Tetsushi Ishikawa
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
REDUCE MASK DEFECT IMPACT BY CONTAMINATION DECOMPOSE
Publication number
20230280665
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi-Hung LIAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK
Publication number
20230280666
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Hui LI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR CLEANING SUBSTRATE
Publication number
20230278077
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing company Ltd.
HAO-MING CHANG
B08 - CLEANING
Information
Patent Application
RETICLE CLEANING DEVICE AND METHOD OF USE
Publication number
20230266680
Publication date
Aug 24, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Che-Chang HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSP...
Publication number
20230251581
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Jui HUANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE MASK AND FABRICATING METHOD THEREOF
Publication number
20230229072
Publication date
Jul 20, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsiao-Chen WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE CLEANING APPARATUS AND PELLICLE CLEANING METHOD USING THE...
Publication number
20230205078
Publication date
Jun 29, 2023
Samsung Electronics Co., Ltd.
Byunghoon LEE
B08 - CLEANING
Information
Patent Application
Debris Removal From High Aspect Structures
Publication number
20230158555
Publication date
May 25, 2023
Bruker Nano, Inc.
Tod Evan Robinson
G01 - MEASURING TESTING