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Avoiding deleterious effects due to interactions between particles and tube elements
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CPC
H01J2237/0213
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/0213
Avoiding deleterious effects due to interactions between particles and tube elements
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