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Barrier, adhesion or liner layers
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H01L2221/1073
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L2221/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
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H01L2221/1073
Barrier, adhesion or liner layers
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Patents Grants
last 30 patents
Information
Patent Grant
Metal contact structure and method of forming the same in a semicon...
Patent number
11,854,874
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Hung Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Flexible and stretchable interconnects for flexible systems
Patent number
11,538,764
Issue date
Dec 27, 2022
The Regents of the University of California
Subramanian S. Iyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressurizing members for semiconductor package
Patent number
11,362,021
Issue date
Jun 14, 2022
JMJ KOREA CO., LTD.
Yun Hwa Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and method for fabricating the same
Patent number
11,133,248
Issue date
Sep 28, 2021
XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
Hyunyoung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatment to interface between metal film and BARC or photoresist
Patent number
11,081,365
Issue date
Aug 3, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Hao Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microelectronic devices with conductive contacts to silicide region...
Patent number
11,043,414
Issue date
Jun 22, 2021
Micron Technology, Inc.
Kenichi Kusumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for forming silicon oxide film on tungsten film
Patent number
10,636,649
Issue date
Apr 28, 2020
Tokyo Electron Limited
Kyungseok Ko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Package structure
Patent number
9,728,498
Issue date
Aug 8, 2017
Taiwan Semiconductor Manufacturing Co., Ltd
An-Jhih Su
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Metal Contact Structure and Method of Forming the Same in a Semicon...
Publication number
20240087953
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Hung Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRESSURIZED SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SAME
Publication number
20210280501
Publication date
Sep 9, 2021
JMJ KOREA CO., LTD.
Yun Hwa CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME
Publication number
20210143097
Publication date
May 13, 2021
XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
HYUNYOUNG KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLEXIBLE AND STRETCHABLE INTERCONNECTS FOR FLEXIBLE SYSTEMS
Publication number
20210074648
Publication date
Mar 11, 2021
The Regents of the University of California
Subramanian S. IYER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM
Publication number
20190043712
Publication date
Feb 7, 2019
TOKYO ELECTRON LIMITED
Kyungseok KO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...