Batch transfer of wafers

Industry

CPC
H01L21/67781

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67781Batch transfer of wafers

Industries

Patents Grantslast 30 patents

Information Patent Grant
Intelligent customizable wet processing system
- Patent number 12,198,946
- Issue date Jan 14, 2025
- Yangtze Memory Technologies Co., Ltd.
- Gonglian Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,183,613
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Kouzou Kanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit enclosure system
- Patent number 12,165,905
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses for executing a direct transfer of a semiconductor devi...
- Patent number 12,165,895
- Issue date Dec 10, 2024
- Cowles Semi, LLC
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus with linear bearing
- Patent number 12,142,505
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Systems and methods for air flow optimization in environment for se...
- Patent number 12,142,507
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate processing system and subst...
- Patent number 12,142,506
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,093,021
- Issue date Sep 17, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus and method for cleaning semiconductor wafers
- Patent number 12,068,149
- Issue date Aug 20, 2024
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,018,373
- Issue date Jun 25, 2024
- Kokusai Electric Corporation
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer treatment device
- Patent number 12,014,937
- Issue date Jun 18, 2024
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transferring LED
- Patent number 11,978,650
- Issue date May 7, 2024
- LG Display Co., Ltd.
- Seong Kyong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable device and an adjustable storage box
- Patent number 11,972,962
- Issue date Apr 30, 2024
- DLY Technologies Inc.
- Shih Feng Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system having a front opening unified pod (FOUP) load lock
- Patent number 11,923,217
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing arrangement and method for adjusting gas flow
- Patent number 11,923,225
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical feeding and wafer inserting integrated machine
- Patent number 11,915,956
- Issue date Feb 27, 2024
- TIANJIN HUANBO SCIENCE AND TECHNOLOGY CO., LTD
- Lihui Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer method and transfer system for transferring substrate betw...
- Patent number 11,908,717
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Masakazu Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated guided vehicle with multistage loading structure
- Patent number 11,891,254
- Issue date Feb 6, 2024
- Samsung Electronics Co., Ltd.
- Bosung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and recording medium
- Patent number 11,876,010
- Issue date Jan 16, 2024
- Kokusai Electric Corporation
- Tadashi Okazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical batch furnace assembly
- Patent number 11,876,008
- Issue date Jan 16, 2024
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,856,655
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Hirofumi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer carrier, wafer access device and wafer carrier and access ass...
- Patent number 11,817,342
- Issue date Nov 14, 2023
- DLY Technologies Inc.
- Shih Feng Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer unit, and apparatus and method for treating substrate
- Patent number 11,804,386
- Issue date Oct 31, 2023
- Semes Co., Ltd.
- Young Hun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,747,789
- Issue date Sep 5, 2023
- Kokusai Electric Corporation
- Naofumi Ohashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Systems, devices, and methods for air flow optimization including a...
- Patent number 11,735,455
- Issue date Aug 22, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses for executing a direct transfer of a semiconductor devi...
- Patent number 11,728,195
- Issue date Aug 15, 2023
- Rohinni, Inc.
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system
- Patent number 11,710,652
- Issue date Jul 25, 2023
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch processing oven and operating methods
- Patent number 11,688,621
- Issue date Jun 27, 2023
- YIELD ENGINEERING SYSTEMS, INC.
- Mark William Curry
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate treating apparatus
- Patent number 11,676,842
- Issue date Jun 13, 2023
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contactless wafer separator
- Patent number 11,664,257
- Issue date May 30, 2023
- Intel Corporation
- Varshalaxmi Bhatt Dhruvkumar
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESS KIT ENCLOSURE SYSTEM
- Publication number 20250087524
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250087515
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Kouzou KANAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPL...
- Publication number 20250079210
- Publication date Mar 6, 2025
- Kokusai Electric Corporation
- Shinichiro MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSTURE TURNING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUD...
- Publication number 20250038029
- Publication date Jan 30, 2025
- SCREEN Holdings Co., Ltd.
- Akihiro IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM
- Publication number 20250029861
- Publication date Jan 23, 2025
- SCREEN Holdings Co., Ltd.
- Akihiro IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NESTING ATMOSPHERIC ROBOT ARMS FOR HIGH THROUGHPUT
- Publication number 20250029860
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250006535
- Publication date Jan 2, 2025
- SCREEN Holdings Co., Ltd.
- Akihiro IWASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT SYSTEM
- Publication number 20250006536
- Publication date Jan 2, 2025
- SCREEN Holdings Co., Ltd.
- Akihiro IWASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...
- Publication number 20240387221
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT ASSEMBLY FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBER
- Publication number 20240371673
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Aditya Chuttar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20240371965
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Yuan KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS
- Publication number 20240355614
- Publication date Oct 24, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TREATMENT DEVICE
- Publication number 20240304468
- Publication date Sep 12, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20240258147
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Kenji AMAHISA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRODUCTION LINE FOR PRODUCING SOLAR CELL
- Publication number 20240250203
- Publication date Jul 25, 2024
- LAPLACE RENEWABLE ENERGY TECHNOLOGY CO., LTD.
- Jiaji LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240234189
- Publication date Jul 11, 2024
- SCREEN Holdings Co., Ltd.
- Tomohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW
- Publication number 20240203771
- Publication date Jun 20, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT (IC) FABRICATED IN A HIGH MIX ENVIRONMENT
- Publication number 20240203799
- Publication date Jun 20, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Vinod Anumareddy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT FOR HANDLING FLAT SUBSTRATES AS WELL AS ALIGNMENT FACILITY
- Publication number 20240178045
- Publication date May 30, 2024
- Uwe BEIER
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105486
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Kenji AMAHISA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER CHUCK AND METHODS OF FORMING AND USING THEREOF
- Publication number 20240096678
- Publication date Mar 21, 2024
- Intel Corporation
- Deniz TURAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatuses for executing a direct transfer of a semiconductor devi...
- Publication number 20240038564
- Publication date Feb 1, 2024
- Rohinni, LLC
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICALLY ACTIVATED OBJECT MASS TRANSFER USING MULTIPLE OPTICAL ENE...
- Publication number 20240038574
- Publication date Feb 1, 2024
- Palo Alto Research Center Incorporated
- Christopher L. Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CASSETTE HOUSING, PROBER, SERVER RACK, AND STORAGE SYSTEM
- Publication number 20240014061
- Publication date Jan 11, 2024
- KIOXIA Corporation
- Tatsuro HITOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE SYSTEM
- Publication number 20240014062
- Publication date Jan 11, 2024
- KIOXIA Corporation
- Tatsuro HITOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230420280
- Publication date Dec 28, 2023
- SCREEN Holdings Co., Ltd.
- Tadashi MAEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...
- Publication number 20230386877
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230359175
- Publication date Nov 9, 2023
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL FEEDING AND WAFER INSERTING INTEGRATED MACHINE
- Publication number 20230274961
- Publication date Aug 31, 2023
- TIANJIN HUANBO SCIENCE AND TECHNOLOGY CO., LTD
- Lihui JIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND RECOR...
- Publication number 20230268213
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS

Batch transfer of wafers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Intelligent customizable wet processing system

Substrate processing system and substrate processing method

Process kit enclosure system

Apparatuses for executing a direct transfer of a semiconductor devi...

Transport apparatus with linear bearing

Systems and methods for air flow optimization in environment for se...

Substrate transfer apparatus, substrate processing system and subst...

Substrate processing apparatus, method of manufacturing semiconduct...

Apparatus and method for cleaning semiconductor wafers

Substrate processing apparatus

Wafer treatment device

Apparatus for transferring LED

Adjustable device and an adjustable storage box

Processing system having a front opening unified pod (FOUP) load lock

Processing arrangement and method for adjusting gas flow

Vertical feeding and wafer inserting integrated machine

Transfer method and transfer system for transferring substrate betw...

Automated guided vehicle with multistage loading structure

Substrate processing apparatus and recording medium

Vertical batch furnace assembly

Substrate processing apparatus and substrate processing method

Wafer carrier, wafer access device and wafer carrier and access ass...

Transfer unit, and apparatus and method for treating substrate

Substrate processing apparatus, method of manufacturing semiconduct...

Systems, devices, and methods for air flow optimization including a...

Apparatuses for executing a direct transfer of a semiconductor devi...

Transport system

Batch processing oven and operating methods

Substrate treating apparatus

Contactless wafer separator

Patents Applicationslast 30 patents

PROCESS KIT ENCLOSURE SYSTEM

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

DISPLAY PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPL...

POSTURE TURNING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUD...

SUBSTRATE TREATMENT SYSTEM

NESTING ATMOSPHERIC ROBOT ARMS FOR HIGH THROUGHPUT

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE TREATMENT SYSTEM

SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...

LIFT ASSEMBLY FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBER

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS

WAFER TREATMENT DEVICE

SUBSTRATE PROCESSING SYSTEM

PRODUCTION LINE FOR PRODUCING SOLAR CELL

SUBSTRATE PROCESSING METHOD

PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW

INTEGRATED CIRCUIT (IC) FABRICATED IN A HIGH MIX ENVIRONMENT

ROBOT FOR HANDLING FLAT SUBSTRATES AS WELL AS ALIGNMENT FACILITY

SUBSTRATE TREATING APPARATUS

CARRIER CHUCK AND METHODS OF FORMING AND USING THEREOF

Apparatuses for executing a direct transfer of a semiconductor devi...

OPTICALLY ACTIVATED OBJECT MASS TRANSFER USING MULTIPLE OPTICAL ENE...

CASSETTE HOUSING, PROBER, SERVER RACK, AND STORAGE SYSTEM

STORAGE SYSTEM

SUBSTRATE TREATING APPARATUS

SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

VERTICAL FEEDING AND WAFER INSERTING INTEGRATED MACHINE

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND RECOR...