Beam shaping

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CPC
H01L21/02678

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02678Beam shaping

Industries

Patents Grantslast 30 patents

Information Patent Grant
Laser annealing method, laser annealing device, and crystallized si...
- Patent number 12,148,616
- Issue date Nov 19, 2024
- V. Technology Co., Ltd.
- Jun Gotoh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for laser annealing
- Patent number 12,148,615
- Issue date Nov 19, 2024
- Coherent Lasersystems GmbH & Co. KG
- Paul Van Der Wilt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation apparatus and laser irradiation method
- Patent number 12,040,186
- Issue date Jul 16, 2024
- Samsung Display Co., Ltd.
- Hiroshi Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation method and laser irradiation apparatus
- Patent number 11,854,804
- Issue date Dec 26, 2023
- Samsung Display Co., Ltd.
- Hiroshi Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and method of processing thin films
- Patent number 11,600,491
- Issue date Mar 7, 2023
- IPG Photonics Corporation
- Limanov Alexander
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser crystallizing apparatus
- Patent number 11,532,476
- Issue date Dec 20, 2022
- Samsung Display Co., Ltd.
- Akifumi Sangu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Doped diamond Semiconductor and method of manufacture using laser a...
- Patent number 11,495,664
- Issue date Nov 8, 2022
- Adamantite Technologies LLC
- Eric David Bauswell
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods of manufacturing low-temperature polysilicon thin film and...
- Patent number 11,374,113
- Issue date Jun 28, 2022
- HKC CORPORATION LIMITED
- Jianfeng Shan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation method and laser irradiation apparatus
- Patent number 11,227,764
- Issue date Jan 18, 2022
- Samsung Display Co., Ltd.
- Hiroshi Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser crystallizing apparatus
- Patent number 10,991,580
- Issue date Apr 27, 2021
- Samsung Display Co., Ltd.
- Akifumi Sangu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing method, laser annealing apparatus, and thin film tr...
- Patent number 10,971,361
- Issue date Apr 6, 2021
- V. Technology Co., Ltd.
- Michinobu Mizumura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing method, laser annealing apparatus, and thin film tr...
- Patent number 10,950,437
- Issue date Mar 16, 2021
- V Technology Co., Ltd.
- Michinobu Mizumura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing method
- Patent number 10,937,651
- Issue date Mar 2, 2021
- SAKAI DISPLAY PRODUCTS CORPORATION
- Masakazu Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation apparatus, thin film transistor, and method of ma...
- Patent number 10,896,817
- Issue date Jan 19, 2021
- V Technology Co. Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing display, display, and liquid crystal televi...
- Patent number 10,879,279
- Issue date Dec 29, 2020
- The Japan Steel Works, Ltd.
- Naoyuki Kobayashi
- G02 - OPTICS
Information Patent Grant
Laser annealing apparatus, and fabrication methods of polycrystalli...
- Patent number 10,872,767
- Issue date Dec 22, 2020
- BOE Technology Group Co., Ltd.
- Jingshuai Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thin film transistor and method of fabricating the same, array subs...
- Patent number 10,818,797
- Issue date Oct 27, 2020
- BOE Technology Group Co., Ltd.
- Shengguang Ban
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing thin film transistor and mask for use in t...
- Patent number 10,818,492
- Issue date Oct 27, 2020
- V Technology Co., Ltd.
- Michinobu Mizumura
- G02 - OPTICS
Information Patent Grant
Laser annealing device and laser annealing method
- Patent number 10,811,286
- Issue date Oct 20, 2020
- Sakai Display Products Corporation
- Hidetoshi Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making thin film transistor, thin film transistor, back...
- Patent number 10,804,405
- Issue date Oct 13, 2020
- BOE Technology Group Co., Ltd.
- Zhi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-temperature polysilicon (LTPS), thin film transistor (TFT), and...
- Patent number 10,699,905
- Issue date Jun 30, 2020
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Xiangyang Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doped diamond SemiConductor and method of manufacture using laser a...
- Patent number 10,700,165
- Issue date Jun 30, 2020
- Adamantite Technologies LLC
- Eric David Bauswell
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Laser irradiation apparatus, method for manufacturing semiconductor...
- Patent number 10,658,185
- Issue date May 19, 2020
- The Japan Steel Works, Ltd.
- Ryo Shimizu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing device
- Patent number 10,651,049
- Issue date May 12, 2020
- Kyushu University, National University Corporation
- Hiroshi Ikenoue
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser beam irradiation device, thin-film transistor, and method of...
- Patent number 10,608,115
- Issue date Mar 31, 2020
- V. Technology Co., Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compound semiconductor solar cell and method of manufacturing the same
- Patent number 10,566,473
- Issue date Feb 18, 2020
- LG Electronics Inc.
- Jinhee Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of laser irradiation, laser irradiation apparatus, and metho...
- Patent number 10,488,671
- Issue date Nov 26, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing thin film transistor and display panel
- Patent number 10,453,876
- Issue date Oct 22, 2019
- Sakai Display Products Corporation
- Nobutake Nodera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser polycrystallization apparatus
- Patent number 10,403,499
- Issue date Sep 3, 2019
- Samsung Display Co., Ltd.
- Emil Aslanov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser crystallizing apparatus
- Patent number 10,347,484
- Issue date Jul 9, 2019
- Samsung Display Co., Ltd.
- Joo Woan Cho
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
VARIABLE-PULSE-WIDTH FLAT-TOP LASER DEVICE AND OPERATING METHOD THE...
- Publication number 20240207973
- Publication date Jun 27, 2024
- EO TECHNICS CO., LTD.
- Kyu Dong SUNG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Doped Diamond SemiConductor and Method of Manufacture Using Laser A...
- Publication number 20230187502
- Publication date Jun 15, 2023
- Adamantite Technologies LLC
- Eric David Bauswell
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHODS FOR THERMAL TREATMENT OF A SEMICONDUCTOR LAYER IN SEMICONDU...
- Publication number 20230138575
- Publication date May 4, 2023
- Yangtze Memory Technologies Co., Ltd.
- Kun ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE-PULSE-WIDTH FLAT-TOP LASER DEVICE AND OPERATING METHOD THE...
- Publication number 20230069985
- Publication date Mar 9, 2023
- EO TECHNICS CO., LTD.
- Kyu Dong SUNG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR LASER ANNEALING
- Publication number 20220359197
- Publication date Nov 10, 2022
- COHERENT LASERSYSTEMS GMBH & CO. KG
- Paul VAN DER WILT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER CRYSTALLIZATION APPARATUS
- Publication number 20220214531
- Publication date Jul 7, 2022
- SAMSUNG DISPLAY CO., LTD.
- Akifumi SANGU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER CRYSTALLIZATION APPARATUS AND LASER CRYSTALLIZATION METHOD US...
- Publication number 20220120938
- Publication date Apr 21, 2022
- SAMSUNG DISPLAY CO., LTD.
- Dong Eon Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION APPARATUS, LASER IRRADIATION METHOD, AND METHOD F...
- Publication number 20220122844
- Publication date Apr 21, 2022
- The Japan Steel Works, Ltd.
- Hiroaki IMAMURA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS
- Publication number 20220115233
- Publication date Apr 14, 2022
- SAMSUNG DISPLAY CO., LTD.
- Hiroshi OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD
- Publication number 20220084823
- Publication date Mar 17, 2022
- SAMSUNG DISPLAY CO., LTD.
- HIROSHI OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING METHOD, LASER ANNEALING DEVICE, AND CRYSTALLIZED SI...
- Publication number 20220005692
- Publication date Jan 6, 2022
- V TECHNOLOGY CO., LTD.
- Jun GOTOH
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRAY SUBSTRATE, METHOD FOR MANUFACTURING THE SAME, AND DISPLAY DEVICE
- Publication number 20210408074
- Publication date Dec 30, 2021
- Beijing BOE Technology Development Co., Ltd.
- Chen Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR CRYSTALLINE THIN FILM AND LA...
- Publication number 20210366710
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Kaname IMOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER CRYSTALLIZING APPARATUS
- Publication number 20210257215
- Publication date Aug 19, 2021
- SAMSUNG DISPLAY CO., LTD.
- AKIFUMI SANGU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS AND METHOD OF PROCESSING THIN FILMS
- Publication number 20210098255
- Publication date Apr 1, 2021
- IPG Photonics Corporation
- LIMANOV Alexander
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING DEVICE, LASER ANNEALING METHOD, AND ACTIVE MATRIX S...
- Publication number 20200402823
- Publication date Dec 24, 2020
- Sakai Display Products Corporation
- NOBUTAKE NODERA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS OF MANUFACTURING LOW-TEMPERATURE POLYSILICON THIN FILM AND...
- Publication number 20200395469
- Publication date Dec 17, 2020
- HKC CORPORATION LIMITED
- Jianfeng SHAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Doped Diamond SemiConductor and Method of Manufacture Using Laser A...
- Publication number 20200335586
- Publication date Oct 22, 2020
- Eric David Bauswell
- B82 - NANO-TECHNOLOGY
Information Patent Application
LASER IRRADIATION DEVICE, LASER IRRADIATION METHOD AND PROJECTION MASK
- Publication number 20200194260
- Publication date Jun 18, 2020
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION DEVICE, PROJECTION MASK, LASER IRRADIATION METHOD...
- Publication number 20200168642
- Publication date May 28, 2020
- V Technology Co., Ltd.
- Michinobu Mizumura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LOW-TEMPERATURE POLYSILICON (LTPS), THIN FILM TRANSISTOR (TFT), AND...
- Publication number 20200168456
- Publication date May 28, 2020
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Xiangyang XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING METHOD
- Publication number 20200043731
- Publication date Feb 6, 2020
- SAKAI DISPLAY PRODUCTS CORPORATION
- MASAKAZU TANAKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER IRRADIATION DEVICE, METHOD OF MANUFACTURING THIN FILM TRANSIS...
- Publication number 20200020530
- Publication date Jan 16, 2020
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING DEVICE AND LASER ANNEALING METHOD
- Publication number 20190348310
- Publication date Nov 14, 2019
- Sakai Display Products Corporation
- Hidetoshi NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR...
- Publication number 20190189449
- Publication date Jun 20, 2019
- THE JAPAN STEEL WORKS, LTD
- Ryo SHIMIZU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER CRYSTALLIZING APPARATUS
- Publication number 20190172713
- Publication date Jun 6, 2019
- SAMSUNG DISPLAY CO., LTD.
- AKIFUMI SANGU
- G02 - OPTICS
Information Patent Application
METHOD FOR MANUFACTURING THIN FILM TRANSISTOR AND MASK FOR USE IN T...
- Publication number 20190035629
- Publication date Jan 31, 2019
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- G02 - OPTICS
Information Patent Application
LASER ANNEALING DEVICE
- Publication number 20180350622
- Publication date Dec 6, 2018
- Kyushu University, National University Corporation
- Hiroshi IKENOUE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Thin Film Transistor And Method Of Manufacturing Thin Film Transistor
- Publication number 20180212065
- Publication date Jul 26, 2018
- SAKAI DISPLAY PRODUCTS CORPORATION
- Yoshiaki Matsushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING APPARATUS, AND FABRICATION METHODS OF POLYCRYSTALLI...
- Publication number 20180151360
- Publication date May 31, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Jingshuai WANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Beam shaping

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Laser annealing method, laser annealing device, and crystallized si...

Method and apparatus for laser annealing

Laser irradiation apparatus and laser irradiation method

Laser irradiation method and laser irradiation apparatus

Laser apparatus and method of processing thin films

Laser crystallizing apparatus

Doped diamond Semiconductor and method of manufacture using laser a...

Methods of manufacturing low-temperature polysilicon thin film and...

Laser irradiation method and laser irradiation apparatus

Laser crystallizing apparatus

Laser annealing method, laser annealing apparatus, and thin film tr...

Laser annealing method, laser annealing apparatus, and thin film tr...

Laser annealing method

Laser irradiation apparatus, thin film transistor, and method of ma...

Method of manufacturing display, display, and liquid crystal televi...

Laser annealing apparatus, and fabrication methods of polycrystalli...

Thin film transistor and method of fabricating the same, array subs...

Method for manufacturing thin film transistor and mask for use in t...

Laser annealing device and laser annealing method

Method for making thin film transistor, thin film transistor, back...

Low-temperature polysilicon (LTPS), thin film transistor (TFT), and...

Doped diamond SemiConductor and method of manufacture using laser a...

Laser irradiation apparatus, method for manufacturing semiconductor...

Laser annealing device

Laser beam irradiation device, thin-film transistor, and method of...

Compound semiconductor solar cell and method of manufacturing the same

Method of laser irradiation, laser irradiation apparatus, and metho...

Method for manufacturing thin film transistor and display panel

Laser polycrystallization apparatus

Laser crystallizing apparatus

Patents Applicationslast 30 patents

VARIABLE-PULSE-WIDTH FLAT-TOP LASER DEVICE AND OPERATING METHOD THE...

Doped Diamond SemiConductor and Method of Manufacture Using Laser A...

METHODS FOR THERMAL TREATMENT OF A SEMICONDUCTOR LAYER IN SEMICONDU...

VARIABLE-PULSE-WIDTH FLAT-TOP LASER DEVICE AND OPERATING METHOD THE...

METHOD AND APPARATUS FOR LASER ANNEALING

LASER CRYSTALLIZATION APPARATUS

LASER CRYSTALLIZATION APPARATUS AND LASER CRYSTALLIZATION METHOD US...

LASER IRRADIATION APPARATUS, LASER IRRADIATION METHOD, AND METHOD F...

LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS

LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD

LASER ANNEALING METHOD, LASER ANNEALING DEVICE, AND CRYSTALLIZED SI...

ARRAY SUBSTRATE, METHOD FOR MANUFACTURING THE SAME, AND DISPLAY DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR CRYSTALLINE THIN FILM AND LA...

LASER CRYSTALLIZING APPARATUS

LASER APPARATUS AND METHOD OF PROCESSING THIN FILMS

LASER ANNEALING DEVICE, LASER ANNEALING METHOD, AND ACTIVE MATRIX S...

METHODS OF MANUFACTURING LOW-TEMPERATURE POLYSILICON THIN FILM AND...

Doped Diamond SemiConductor and Method of Manufacture Using Laser A...

LASER IRRADIATION DEVICE, LASER IRRADIATION METHOD AND PROJECTION MASK

LASER IRRADIATION DEVICE, PROJECTION MASK, LASER IRRADIATION METHOD...

LOW-TEMPERATURE POLYSILICON (LTPS), THIN FILM TRANSISTOR (TFT), AND...

LASER ANNEALING METHOD

LASER IRRADIATION DEVICE, METHOD OF MANUFACTURING THIN FILM TRANSIS...

LASER ANNEALING DEVICE AND LASER ANNEALING METHOD

LASER IRRADIATION APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR...

LASER CRYSTALLIZING APPARATUS

METHOD FOR MANUFACTURING THIN FILM TRANSISTOR AND MASK FOR USE IN T...

LASER ANNEALING DEVICE

Thin Film Transistor And Method Of Manufacturing Thin Film Transistor

LASER ANNEALING APPARATUS, AND FABRICATION METHODS OF POLYCRYSTALLI...