Bearings

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CPC
G03F7/70816

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70816Bearings

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Magnetic levitation gravity compensation device
- Patent number 12,103,158
- Issue date Oct 1, 2024
- YinGuan Semiconductor Technology Co., LTD.
- Hui Meng
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Actuator device for use in a positioning system as well as such pos...
- Patent number 12,021,432
- Issue date Jun 25, 2024
- VDL Enabling Technologies Group B.V.
- Johannes Hubertus Antonius Van De Rijdt
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage system, lithographic apparatus, method for positioning and de...
- Patent number 11,860,552
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Stef Marten Johan Janssens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object stage bearing for lithographic apparatus
- Patent number 11,442,369
- Issue date Sep 13, 2022
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support of an optical unit
- Patent number 11,307,503
- Issue date Apr 19, 2022
- Carl Zeiss SMT GmbH
- Martin Vogt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration isolation system and lithographic apparatus
- Patent number 11,249,403
- Issue date Feb 15, 2022
- ASML Netherlands B.V.
- Franciscus Maria Joannes Linssen
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Bearing device, magnetic gravity compensator, vibration isolation s...
- Patent number 11,029,612
- Issue date Jun 8, 2021
- ASML Netherlands B.V.
- Maarten Hartger Kimman
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Substrate coating apparatus for floating substrate and method
- Patent number 10,991,608
- Issue date Apr 27, 2021
- Tokyo Electron Limited
- Yousuke Mine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration isolation device, lithographic apparatus and method to tu...
- Patent number 10,782,620
- Issue date Sep 22, 2020
- ASML Netherlands B.V.
- Alexander Petrus Josephus Van Lankvelt
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Exposure apparatus, movable body apparatus, flat-panel display manu...
- Patent number 10,725,389
- Issue date Jul 28, 2020
- Nikon Corporation
- Yasuo Aoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Displacement device
- Patent number 10,541,596
- Issue date Jan 21, 2020
- GUANGDONG JIXUN PRECISION EQUIPMENT CO., LTD.
- Chenyang Ding
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Movable body apparatus, exposure apparatus, and device manufacturin...
- Patent number 10,474,044
- Issue date Nov 12, 2019
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjustable magnetic buoyancy gravity compensator
- Patent number 10,415,639
- Issue date Sep 17, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Hanchuan Ji
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exposure apparatus, movable body apparatus, flat-panel display manu...
- Patent number 10,409,176
- Issue date Sep 10, 2019
- Nikon Corporation
- Yasuo Aoki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Bearing assembly for a lithography system, and lithography system
- Patent number 10,386,732
- Issue date Aug 20, 2019
- Carl Zeiss SMT GmbH
- Pascal Marsollek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration-assisted positioning stage
- Patent number 10,281,829
- Issue date May 7, 2019
- The Regents of the University of Michigan
- Chinedum E. Okwudire
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 10,191,388
- Issue date Jan 29, 2019
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Thermal conditioning unit, lithographic apparatus and device manufa...
- Patent number 10,191,395
- Issue date Jan 29, 2019
- ASML Neatherlands B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus with adjustable action of force on an optical module
- Patent number 10,175,581
- Issue date Jan 8, 2019
- Carl Zeiss SMT GmbH
- Yim-Bun Patrick Kwan
- G02 - OPTICS
Information Patent Grant
Movable body apparatus, exposure apparatus, and device manufacturin...
- Patent number 10,133,194
- Issue date Nov 20, 2018
- Nikon Corporation
- Yuichi Shibazaki
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 10,007,188
- Issue date Jun 26, 2018
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 9,977,350
- Issue date May 22, 2018
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Table device and conveyance device
- Patent number 9,933,108
- Issue date Apr 3, 2018
- NSK Ltd.
- Toshinori Satou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Drive for an XY-table and XY-table
- Patent number 9,923,445
- Issue date Mar 20, 2018
- Dr. Johannes Heidenhain GmbH
- René Klaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, movable body apparatus, flat-panel display manu...
- Patent number 9,921,496
- Issue date Mar 20, 2018
- Nikon Corporation
- Yasuo Aoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Table device and conveyance device
- Patent number 9,877,576
- Issue date Jan 30, 2018
- NSK Ltd.
- Toshinori Satou
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for fabricating pattern using supporting assembly with rolli...
- Patent number 9,857,689
- Issue date Jan 2, 2018
- United Microelectronics Corp.
- Chien-Ju Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, stage apparatus, and method of manufacturing...
- Patent number 9,823,587
- Issue date Nov 21, 2017
- Canon Kabushiki Kaisha
- Tadashi Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,810,995
- Issue date Nov 7, 2017
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical apparatus with adjustable action of force on an optical module
- Patent number 9,766,549
- Issue date Sep 19, 2017
- Carl Zeiss SMT GmbH
- Yim-Bun Patrick Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH POS...
- Publication number 20240339910
- Publication date Oct 10, 2024
- VDL Enabling Technologies Group B.V.
- Johannes Hubertus Antonius VAN DE RIJDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DE...
- Publication number 20240168394
- Publication date May 23, 2024
- ASML NETHERLANDS B.V.
- Stef Marten Johan JANSSENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AN ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH...
- Publication number 20230107002
- Publication date Apr 6, 2023
- VDL Enabling Technologies Group B.V.
- Johannes Hubertus Antonius VAN DE RIJDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROPHOBIC MEMBRANE STRUCTURES, HYDROPHOBIC MEMBRANE STRUCTURE DET...
- Publication number 20220317580
- Publication date Oct 6, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- ChengKai HO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VIBRATION ISOLATION SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20210181639
- Publication date Jun 17, 2021
- ASML NETHERLANDS B.V.
- Franciscus Maria Joannes LINSSEN
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SUPPORT OF AN OPTICAL UNIT
- Publication number 20210116823
- Publication date Apr 22, 2021
- Carl Zeiss SMT GMBH
- Martin Vogt
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS, MOVABLE BODY APPARATUS, FLAT-PANEL DISPLAY MANU...
- Publication number 20200356015
- Publication date Nov 12, 2020
- Nikon Corporation
- Yasuo AOKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Object Stage Bearing for Lithographic Apparatus
- Publication number 20200333717
- Publication date Oct 22, 2020
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION S...
- Publication number 20200049203
- Publication date Feb 13, 2020
- ASML NETHERLANDS B.V.
- Maarten Hartger KIMMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, MOVABLE BODY APPARATUS, FLAT-PANEL DISPLAY MANU...
- Publication number 20190369507
- Publication date Dec 5, 2019
- Nikon Corporation
- Yasuo AOKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURIN...
- Publication number 20190079415
- Publication date Mar 14, 2019
- Nikon Corporation
- Yuichi Shibazaki
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
BEARING ASSEMBLY FOR A LITHOGRAPHY SYSTEM, AND LITHOGRAPHY SYSTEM
- Publication number 20190079417
- Publication date Mar 14, 2019
- Carl Zeiss SMT GMBH
- Pascal Marsollek
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20180299788
- Publication date Oct 18, 2018
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...
- Publication number 20180259860
- Publication date Sep 13, 2018
- Nikon Corporation
- Andrew J. HAZELTON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DISPLACEMENT DEVICE
- Publication number 20180212505
- Publication date Jul 26, 2018
- GUANGDONG JIXUN PRECISION EQUIPMENT CO., LTD.
- Chenyang DING
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL APPARATUS WITH ADJUSTABLE ACTION OF FORCE ON AN OPTICAL MODULE
- Publication number 20180129138
- Publication date May 10, 2018
- Carl Zeiss SMT GMBH
- Yim-Bun Patrick Kwan
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180039185
- Publication date Feb 8, 2018
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
ADJUSTABLE MAGNETIC BUOYANCY GRAVITY COMPENSATOR
- Publication number 20180010633
- Publication date Jan 11, 2018
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Hanchuan JI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170123326
- Publication date May 4, 2017
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140340666
- Publication date Nov 20, 2014
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...
- Publication number 20140320831
- Publication date Oct 30, 2014
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20140293252
- Publication date Oct 2, 2014
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140211176
- Publication date Jul 31, 2014
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140211177
- Publication date Jul 31, 2014
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
SPLIT TYPE AEROSTATIC BEARING
- Publication number 20140016886
- Publication date Jan 16, 2014
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Jinchun Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Linear Stage and Metrology Architecture for Reflective Electron Bea...
- Publication number 20130342827
- Publication date Dec 26, 2013
- KLA-Tencor Corporation
- Upendra Ummethala
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL WRITER FOR FLEXIBLE FOILS
- Publication number 20130335504
- Publication date Dec 19, 2013
- Micronic Mydata AB
- Torbjorn Sandstrom
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20130250257
- Publication date Sep 26, 2013
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20130229637
- Publication date Sep 5, 2013
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20130215403
- Publication date Aug 22, 2013
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Magnetic levitation gravity compensation device

Actuator device for use in a positioning system as well as such pos...

Stage system, lithographic apparatus, method for positioning and de...

Object stage bearing for lithographic apparatus

Support of an optical unit

Vibration isolation system and lithographic apparatus

Bearing device, magnetic gravity compensator, vibration isolation s...

Substrate coating apparatus for floating substrate and method

Vibration isolation device, lithographic apparatus and method to tu...

Exposure apparatus, movable body apparatus, flat-panel display manu...

Displacement device

Movable body apparatus, exposure apparatus, and device manufacturin...

Adjustable magnetic buoyancy gravity compensator

Exposure apparatus, movable body apparatus, flat-panel display manu...

Bearing assembly for a lithography system, and lithography system

Vibration-assisted positioning stage

Exposure apparatus, and device manufacturing method

Thermal conditioning unit, lithographic apparatus and device manufa...

Optical apparatus with adjustable action of force on an optical module

Movable body apparatus, exposure apparatus, and device manufacturin...

Exposure apparatus and device manufacturing method

Environmental system including vacuum scavenge for an immersion lit...

Table device and conveyance device

Drive for an XY-table and XY-table

Exposure apparatus, movable body apparatus, flat-panel display manu...

Table device and conveyance device

Method for fabricating pattern using supporting assembly with rolli...

Lithography apparatus, stage apparatus, and method of manufacturing...

Exposure apparatus and device manufacturing method

Optical apparatus with adjustable action of force on an optical module

Patents Applicationslast 30 patents

ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH POS...

STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DE...

AN ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH...

HYDROPHOBIC MEMBRANE STRUCTURES, HYDROPHOBIC MEMBRANE STRUCTURE DET...

VIBRATION ISOLATION SYSTEM AND LITHOGRAPHIC APPARATUS

SUPPORT OF AN OPTICAL UNIT

EXPOSURE APPARATUS, MOVABLE BODY APPARATUS, FLAT-PANEL DISPLAY MANU...

Object Stage Bearing for Lithographic Apparatus

BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION S...

EXPOSURE APPARATUS, MOVABLE BODY APPARATUS, FLAT-PANEL DISPLAY MANU...

MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURIN...

BEARING ASSEMBLY FOR A LITHOGRAPHY SYSTEM, AND LITHOGRAPHY SYSTEM

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...

DISPLACEMENT DEVICE

OPTICAL APPARATUS WITH ADJUSTABLE ACTION OF FORCE ON AN OPTICAL MODULE

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

ADJUSTABLE MAGNETIC BUOYANCY GRAVITY COMPENSATOR

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

SPLIT TYPE AEROSTATIC BEARING

Linear Stage and Metrology Architecture for Reflective Electron Bea...

OPTICAL WRITER FOR FLEXIBLE FOILS

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD