being electrostatic; Electrostatically deformable vacuum chucks

Industry

CPC
G03F7/70708

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70708being electrostatic; Electrostatically deformable vacuum chucks

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and electrostatic clamp designs
- Patent number 12,174,552
- Issue date Dec 24, 2024
- ASML Holding N.V.
- Victor Antonio Perez-Falcon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of clamping a substrate to a clamping system, a substrate ho...
- Patent number 12,158,704
- Issue date Dec 3, 2024
- ASML Netherlands B.V.
- Abraham Alexander Soethoudt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Operating method for preventing photomask particulate contamination
- Patent number 12,066,765
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jui-Chieh Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate support, lithographic apparatus and loading method
- Patent number 12,032,301
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Johannes Onvlee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for lithography in semiconductor fabrication
- Patent number 12,025,918
- Issue date Jul 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Kuan Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object table comprising an electrostatic clamp
- Patent number 12,028,000
- Issue date Jul 2, 2024
- ASML Netherlands B.V.
- Jan-Gerard Cornelis Van Der Toorn
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate holder and methods of use
- Patent number 12,009,246
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chi Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
- Patent number 11,960,213
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Object table, a stage apparatus and a lithographic apparatus
- Patent number 11,880,144
- Issue date Jan 23, 2024
- ASML Netherlands B.V.
- Sander Jeroen Hermanussen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder and method of manufacturing a substrate holder
- Patent number 11,754,929
- Issue date Sep 12, 2023
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Object table comprising an electrostatic clamp
- Patent number 11,637,512
- Issue date Apr 25, 2023
- ASML Netherlands B.V.
- Jan-Gerard Cornelis Van Der Toorn
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
- Patent number 11,628,498
- Issue date Apr 18, 2023
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Substrate support, lithographic apparatus and loading method
- Patent number 11,556,063
- Issue date Jan 17, 2023
- ASML Netherlands B.V.
- Johannes Onvlee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and apparatus for lithography in semiconductor fabrication
- Patent number 11,550,228
- Issue date Jan 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Kuan Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor apparatus and method of operating the same for preven...
- Patent number 11,506,985
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jui-Chieh Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electrostatic holding apparatus with a layered composite electrode...
- Patent number 11,508,601
- Issue date Nov 22, 2022
- ASML Netherlands B.V.
- Lars Ziegenhagen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder and method of manufacturing a substrate holder
- Patent number 11,376,663
- Issue date Jul 5, 2022
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Conformal stage
- Patent number 11,353,800
- Issue date Jun 7, 2022
- Onto Innovation Inc.
- J. Casey Donaher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of in-situ particle removal in a lithograp...
- Patent number 11,333,984
- Issue date May 17, 2022
- ASML Netherlands B.V.
- Richard Joseph Bruls
- B08 - CLEANING
Information Patent Grant
Apparatus and method for removing particles in semiconductor manufa...
- Patent number 11,256,181
- Issue date Feb 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yueh-Lin Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
- Patent number 11,235,388
- Issue date Feb 1, 2022
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Substrate holder, substrate support and method of clamping a substr...
- Patent number 11,187,998
- Issue date Nov 30, 2021
- ASML Netherlands B.V.
- Abraham Alexander Soethoudt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for lithography in semiconductor fabrication
- Patent number 11,121,018
- Issue date Sep 14, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chueh-Chi Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for processing a substrate using the same
- Patent number 11,079,690
- Issue date Aug 3, 2021
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Hyun-Suk Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for cleaning reticle stage
- Patent number 11,054,756
- Issue date Jul 6, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method cleaning a support inside a lithography ap...
- Patent number 11,048,175
- Issue date Jun 29, 2021
- ASML Holding N.V.
- Victor Antonio Perez-Falcon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for converting backside surface roughness to fron...
- Patent number 11,036,147
- Issue date Jun 15, 2021
- KLA Corporation
- Jian Shen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for lithography in semiconductor fabrication
- Patent number 10,962,881
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Kuan Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,908,518
- Issue date Feb 2, 2021
- ASML Holding N.V.
- Santiago E. Delpuerto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
- Patent number 10,898,955
- Issue date Jan 26, 2021
- ASME NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240411235
- Publication date Dec 12, 2024
- Samsung Electronics Co., Ltd.
- Dae Geun YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20240396476
- Publication date Nov 28, 2024
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
CLAMP FOR HOLDING AN OBJECT AND METHOD
- Publication number 20240385536
- Publication date Nov 21, 2024
- ASML Netherlands B.V.
- Thomas Poiesz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT
- Publication number 20240337956
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Lucas Christiaan Johan HEIJMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER AND METHODS OF USE
- Publication number 20240304488
- Publication date Sep 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chi TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER AND METHOD
- Publication number 20240264540
- Publication date Aug 8, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van de Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...
- Publication number 20240264533
- Publication date Aug 8, 2024
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Application
BIASABLE ELECTROSTATIC CHUCK
- Publication number 20240234108
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Paneendra Prakash Bhat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE RESTRAINING SYSTEM
- Publication number 20240234196
- Publication date Jul 11, 2024
- ASML NETHERLANDS B.V.
- Marinus Augustinus Christiaan VERSCHUREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, PATTERN FORMING METHOD, AND METHOD OF MANUFACTUR...
- Publication number 20240201606
- Publication date Jun 20, 2024
- KIOXIA Corporation
- Masaki MITSUYASU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLAMP ELECTRODE MODIFICATION FOR IMPROVED OVERLAY
- Publication number 20240176254
- Publication date May 30, 2024
- ASML NETHERLANDS B.V.
- Keane Michael LEVY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS
- Publication number 20240142885
- Publication date May 2, 2024
- ASML NETHERLANDS B.V.
- Sander Jeroen HERMANUSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE RESTRAINING SYSTEM
- Publication number 20240136218
- Publication date Apr 25, 2024
- ASML NETHERLANDS B.V.
- Marinus Augustinus Christiaan VERSCHUREN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING MECHANISM AND EXPOSURE APPARATUS
- Publication number 20240033881
- Publication date Feb 1, 2024
- Ushio Denki Kabushiki Kaisha
- Kenji Ishida
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
- Publication number 20240027915
- Publication date Jan 25, 2024
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Application
ELECTROSTATIC CLAMP
- Publication number 20240012341
- Publication date Jan 11, 2024
- ASML NETHERLANDS B.V.
- Gustaaf Galein VAN EDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM AND METHOD INCLUDING THERMAL MANAGEMENT
- Publication number 20240004316
- Publication date Jan 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Wei WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE EXCHANGE DEVICE WITH RETICLE LEVITATION
- Publication number 20230395409
- Publication date Dec 7, 2023
- Massachusetts Institute of Technology
- David L. Trumper
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...
- Publication number 20230384694
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Abdullah ALIKHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE V...
- Publication number 20230314962
- Publication date Oct 5, 2023
- ASML Holding N.V.
- Tammo UITTERDIJK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...
- Publication number 20230251579
- Publication date Aug 10, 2023
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20230246568
- Publication date Aug 3, 2023
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
OBJECT HOLDER, ELECTROSTATIC SHEET AND METHOD FOR MAKING AN ELECTRO...
- Publication number 20230236518
- Publication date Jul 27, 2023
- ASML NETHERLANDS B.V.
- Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION
- Publication number 20230152713
- Publication date May 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Kuan WU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE SUPPORT, LITHOGRAPHIC APPARATUS AND LOADING METHOD
- Publication number 20230134837
- Publication date May 4, 2023
- ASML NETHERLANDS B.V.
- Johannes ONVLEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER, TOOL AND METHOD OF MANUFACTURING AN OBJECT HOLDER
- Publication number 20230105002
- Publication date Apr 6, 2023
- ASML NETHERLANDS B.V.
- Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPERATING METHOD FOR PREVENTING PHOTOMASK PARTICULATE CONTAMINATION
- Publication number 20230073062
- Publication date Mar 9, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chieh CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR MANUFACTURING A DOUBLE-SIDED ELECTROSTATIC...
- Publication number 20230021360
- Publication date Jan 26, 2023
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLAMP ASSEMBLY
- Publication number 20230008915
- Publication date Jan 12, 2023
- ASML NETHERLANDS B.V.
- Ronald Van Der Wilk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
- Publication number 20220331862
- Publication date Oct 20, 2022
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis LAFARRE
- B22 - CASTING POWDER METALLURGY

being electrostatic; Electrostatically deformable vacuum chucks

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Lithographic apparatus and electrostatic clamp designs

Method of clamping a substrate to a clamping system, a substrate ho...

Operating method for preventing photomask particulate contamination

Substrate support, lithographic apparatus and loading method

Method for lithography in semiconductor fabrication

Object table comprising an electrostatic clamp

Substrate holder and methods of use

Substrate holder, lithographic apparatus, device manufacturing meth...

Object table, a stage apparatus and a lithographic apparatus

Substrate holder and method of manufacturing a substrate holder

Object table comprising an electrostatic clamp

Substrate holder, lithographic apparatus, device manufacturing meth...

Substrate support, lithographic apparatus and loading method

System and apparatus for lithography in semiconductor fabrication

Semiconductor apparatus and method of operating the same for preven...

Electrostatic holding apparatus with a layered composite electrode...

Substrate holder and method of manufacturing a substrate holder

Conformal stage

Apparatus for and method of in-situ particle removal in a lithograp...

Apparatus and method for removing particles in semiconductor manufa...

Substrate holder, lithographic apparatus, device manufacturing meth...

Substrate holder, substrate support and method of clamping a substr...

Method and apparatus for lithography in semiconductor fabrication

Apparatus and method for processing a substrate using the same

Apparatus and method for cleaning reticle stage

Apparatus for and method cleaning a support inside a lithography ap...

System and method for converting backside surface roughness to fron...

Method and apparatus for lithography in semiconductor fabrication

Lithographic apparatus and method

Substrate holder, lithographic apparatus, device manufacturing meth...

Patents Applicationslast 30 patents

SEMICONDUCTOR MANUFACTURING APPARATUS

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP

CLAMP FOR HOLDING AN OBJECT AND METHOD

APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT

SUBSTRATE HOLDER AND METHODS OF USE

SUBSTRATE HOLDER AND METHOD

SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...

BIASABLE ELECTROSTATIC CHUCK

SUBSTRATE RESTRAINING SYSTEM

IMPRINT APPARATUS, PATTERN FORMING METHOD, AND METHOD OF MANUFACTUR...

CLAMP ELECTRODE MODIFICATION FOR IMPROVED OVERLAY

OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS

SUBSTRATE RESTRAINING SYSTEM

HOLDING MECHANISM AND EXPOSURE APPARATUS

SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER

ELECTROSTATIC CLAMP

LITHOGRAPHY SYSTEM AND METHOD INCLUDING THERMAL MANAGEMENT

RETICLE EXCHANGE DEVICE WITH RETICLE LEVITATION

VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...

SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE V...

SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METH...

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP

OBJECT HOLDER, ELECTROSTATIC SHEET AND METHOD FOR MAKING AN ELECTRO...

METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION

SUBSTRATE SUPPORT, LITHOGRAPHIC APPARATUS AND LOADING METHOD

OBJECT HOLDER, TOOL AND METHOD OF MANUFACTURING AN OBJECT HOLDER

OPERATING METHOD FOR PREVENTING PHOTOMASK PARTICULATE CONTAMINATION

SYSTEMS AND METHODS FOR MANUFACTURING A DOUBLE-SIDED ELECTROSTATIC...

CLAMP ASSEMBLY

SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER