being the lower part of the bonding apparatus, i.e. holding means for the bodies to be connected

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  • Information Patent Application

    METHOD FOR BONDING WAFERS AND BONDING TOOL

    • Publication number 20190148333
    • Publication date May 16, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chien-Chih CHEN
    • H01 - BASIC ELECTRIC ELEMENTS