Bombardment of substrates by reactive ion beams

Industry

CPC
C23C14/0052

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0052Bombardment of substrates by reactive ion beams

Industries

Patents Grantslast 30 patents

Information Patent Grant
Yttrium oxide based coating composition
- Patent number 11,920,234
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for forming nano-laminate optical coating
- Patent number 11,897,811
- Issue date Feb 13, 2024
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Yttrium oxide based coating composition
- Patent number 11,661,650
- Issue date May 30, 2023
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare-earth oxide based coatings based on ion assisted deposition
- Patent number 11,424,136
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for forming nano-laminate optical coating
- Patent number 11,236,013
- Issue date Feb 1, 2022
- Intevac, Inc.
- Terry Bluck
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Color film and method of forming the same
- Patent number 10,988,838
- Issue date Apr 27, 2021
- National Cheng Kung University
- Jyh-Ming Ting
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare-earth oxide based coatings based on ion assisted deposition
- Patent number 10,930,526
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Ion assisted deposition for rare-earth oxide based coatings
- Patent number 9,869,012
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making scratch resistant coated glass article including l...
- Patent number 8,283,041
- Issue date Oct 9, 2012
- Guardian Industries Corp.
- Vijayen S. Veerasamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric-layer-coated substrate and installation for production t...
- Patent number 7,820,017
- Issue date Oct 26, 2010
- Saint-Gobain Glass France
- Carole Baubet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making scratch resistant coated glass article including l...
- Patent number 7,566,481
- Issue date Jul 28, 2009
- Guardian Industries Corp.
- Vijayen S. Veerasamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photo mask blank and method of manufacturing the same
- Patent number 6,740,208
- Issue date May 25, 2004
- Hoya Corporation
- Mitsuhiro Kureishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing an optical thin film
- Patent number 6,635,155
- Issue date Oct 21, 2003
- Asahi Glass Company, Limited
- Masao Miyamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
UV absorbing/reflecting silver oxide layer, and method of making same
- Patent number 6,596,399
- Issue date Jul 22, 2003
- Guardian Industries Corp.
- Vijayen S. Veerasamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Technique for deposition of multilayer interference thin films usin...
- Patent number 6,425,987
- Issue date Jul 30, 2002
- National Science Council
- Cheng-Chung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making oxide barrier layer for a spin tunnel junction
- Patent number 6,296,741
- Issue date Oct 2, 2001
- International Business Machines Corporation
- Mustafa Pinarbasi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of insulating thin film by a plurality of ion beams
- Patent number 5,962,080
- Issue date Oct 5, 1999
- Read-Rite Corporation
- Minshen Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low pressure reactive magnetron sputtering apparatus and method
- Patent number 5,851,365
- Issue date Dec 22, 1998
- Corning OCA Corporation
- Michael A. Scobey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Very high vacuum magnetron sputtering method and apparatus for prec...
- Patent number 5,656,138
- Issue date Aug 12, 1997
- The Optical Corporation of America
- Michael A. Scobey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low pressure reactive magnetron sputtering apparatus and method
- Patent number 5,525,199
- Issue date Jun 11, 1996
- Optical Corporation of America
- Michael A. Scobey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing different materials on a substrate
- Patent number 5,454,919
- Issue date Oct 3, 1995
- GEC-Marconi Avionics Holdings Limited
- Roger Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion assisted deposition process including reactive source gassifica...
- Patent number 5,415,756
- Issue date May 16, 1995
- University of Houston
- John C. Wolfe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arrangement for the coating of substrates
- Patent number 5,122,252
- Issue date Jun 16, 1992
- Leybold Aktiengesellschaft
- Rudolph Latz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual ion beam deposition of amorphous semiconductor films
- Patent number 4,637,869
- Issue date Jan 20, 1987
- The Standard Oil Company
- David A. Glocker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
YTTRIUM OXIDE BASED COATING COMPOSITION
- Publication number 20230160055
- Publication date May 25, 2023
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR FORMING NANO-LAMINATE OPTICAL COATING
- Publication number 20220185726
- Publication date Jun 16, 2022
- INTEVAC, INC.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
YTTRIUM OXIDE BASED COATING COMPOSITION
- Publication number 20210317564
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
- Publication number 20210118703
- Publication date Apr 22, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLOR FILM AND METHOD OF FORMING THE SAME
- Publication number 20190323115
- Publication date Oct 24, 2019
- National Cheng Kung University
- Jyh-Ming TING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
- Publication number 20180100228
- Publication date Apr 12, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING OXIDE THIN FILM
- Publication number 20120125764
- Publication date May 24, 2012
- FURUKAWA ELECTRIC CO., LTD.
- Hiroyuki FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC-LAYER-COATED SUBSTRATE AND INSTALLATION FOR PRODUCTION T...
- Publication number 20110056825
- Publication date Mar 10, 2011
- SAINT-GOBAIN GLASS FRANCE
- Carole Baubet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of making scratch resistant coated glass article including l...
- Publication number 20090263667
- Publication date Oct 22, 2009
- Guardian Industries Corp.
- Vijayen S. Veerasamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM DEPOSITION METHOD
- Publication number 20090226735
- Publication date Sep 10, 2009
- SAINT-GOBAIN GLASS FRANCE
- Nicolas Nadaud
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL TRANSMISSION FILTER WITH EXTENDED OUT-OF-BAND BLOCKING
- Publication number 20080055717
- Publication date Mar 6, 2008
- Atul Pradhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nonvolatile memory device, layer deposition apparatus and method of...
- Publication number 20070196984
- Publication date Aug 23, 2007
- SAMSUNG ELECTRONICS CO., LTD.
- Jung-hyun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR REACTIVE SPUTTERING
- Publication number 20070151842
- Publication date Jul 5, 2007
- FLUENS CORPORATION
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dielectric-layer-coated substrate and installation for production t...
- Publication number 20060275612
- Publication date Dec 7, 2006
- SAINT-GOBAIN GLASS FRANCE
- Carole Baubet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dielectric-layer-coated substrate and installation for production t...
- Publication number 20060234064
- Publication date Oct 19, 2006
- SAINT-GOBAIN GLASS FRANCE
- Carole Baubet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing of a mask blank for EUV photolithography a...
- Publication number 20060008749
- Publication date Jan 12, 2006
- Frank Sobel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of making scratch resistant coated glass article including l...
- Publication number 20060003545
- Publication date Jan 5, 2006
- Guardian Industries Corp.
- Vijayen S. Veerasamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion-beam deposition process for manufacturing multi-layered attenua...
- Publication number 20040115343
- Publication date Jun 17, 2004
- Peter Francis Carcia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion-beam deposition process for manufacturing binary photomask blanks
- Publication number 20040106049
- Publication date Jun 3, 2004
- Peter Francis Carcia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hexagonal boron nitride film with low dielectric constant, layer di...
- Publication number 20040058199
- Publication date Mar 25, 2004
- MITSUBISHI HEAVY INDUSTRIES LTD.
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for preparing an optical thin film
- Publication number 20020108848
- Publication date Aug 15, 2002
- ASAHI GLASS COMPANY, LIMITED
- Masao Miyamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UV absorbing/reflecting silver oxide layer, and method of making same
- Publication number 20020068167
- Publication date Jun 6, 2002
- Vijayen S. Veerasamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Photo mask blank and method of manufacturing the same
- Publication number 20020068228
- Publication date Jun 6, 2002
- Hoya Corporation
- Mitsuhiro Kureishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hexagonal boron nitride film with low dielectric constant, layer di...
- Publication number 20020000556
- Publication date Jan 3, 2002
- Mitsubishi Heavy Industries, Ltd.
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Bombardment of substrates by reactive ion beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Yttrium oxide based coating composition

System for forming nano-laminate optical coating

Yttrium oxide based coating composition

Rare-earth oxide based coatings based on ion assisted deposition

System for forming nano-laminate optical coating

Color film and method of forming the same

Rare-earth oxide based coatings based on ion assisted deposition

Ion assisted deposition for rare-earth oxide based coatings

Method of making scratch resistant coated glass article including l...

Dielectric-layer-coated substrate and installation for production t...

Method of making scratch resistant coated glass article including l...

Photo mask blank and method of manufacturing the same

Method for preparing an optical thin film

UV absorbing/reflecting silver oxide layer, and method of making same

Technique for deposition of multilayer interference thin films usin...

Method of making oxide barrier layer for a spin tunnel junction

Deposition of insulating thin film by a plurality of ion beams

Low pressure reactive magnetron sputtering apparatus and method

Very high vacuum magnetron sputtering method and apparatus for prec...

Low pressure reactive magnetron sputtering apparatus and method

Depositing different materials on a substrate

Ion assisted deposition process including reactive source gassifica...

Arrangement for the coating of substrates

Dual ion beam deposition of amorphous semiconductor films

Patents Applicationslast 30 patents

YTTRIUM OXIDE BASED COATING COMPOSITION

SYSTEM FOR FORMING NANO-LAMINATE OPTICAL COATING

YTTRIUM OXIDE BASED COATING COMPOSITION

RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION

COLOR FILM AND METHOD OF FORMING THE SAME

RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION

METHOD FOR PRODUCING OXIDE THIN FILM

DIELECTRIC-LAYER-COATED SUBSTRATE AND INSTALLATION FOR PRODUCTION T...

Method of making scratch resistant coated glass article including l...

VACUUM DEPOSITION METHOD

OPTICAL TRANSMISSION FILTER WITH EXTENDED OUT-OF-BAND BLOCKING

Nonvolatile memory device, layer deposition apparatus and method of...

APPARATUS FOR REACTIVE SPUTTERING

Dielectric-layer-coated substrate and installation for production t...

Dielectric-layer-coated substrate and installation for production t...

Method for manufacturing of a mask blank for EUV photolithography a...

Method of making scratch resistant coated glass article including l...

Ion-beam deposition process for manufacturing multi-layered attenua...

Ion-beam deposition process for manufacturing binary photomask blanks

Hexagonal boron nitride film with low dielectric constant, layer di...

Method for preparing an optical thin film

UV absorbing/reflecting silver oxide layer, and method of making same

Photo mask blank and method of manufacturing the same

Hexagonal boron nitride film with low dielectric constant, layer di...