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Contact Plug with Impurity Variation
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Publication number 20240021471
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Publication date Jan 18, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chung-Chiang Wu
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma Etching
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Publication number 20230197457
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Publication date Jun 22, 2023
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SPTS TECHNOLOGIES LIMITED
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ALEX WOOD
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Publication number 20220367263
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Publication date Nov 17, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chung-Chiang Wu
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H01 - BASIC ELECTRIC ELEMENTS
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DOPING OF METAL BARRIER LAYERS
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Publication number 20210351072
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Publication date Nov 11, 2021
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Applied Materials, Inc.
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Lu Chen
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H01 - BASIC ELECTRIC ELEMENTS
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BI-LAYER LINER FOR METALLIZATION
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Publication number 20210202310
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Publication date Jul 1, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Huei-Wen Hsieh
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Publication number 20210134667
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Publication date May 6, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chung-Chiang Wu
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H01 - BASIC ELECTRIC ELEMENTS
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ETCHING METHOD
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Publication number 20210134604
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Publication date May 6, 2021
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TOKYO ELECTRON LIMITED
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Takayuki KATSUNUMA
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H01 - BASIC ELECTRIC ELEMENTS
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GRADIENT ATOMIC LAYER DEPOSITION
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Publication number 20200279771
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Publication date Sep 3, 2020
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chia-Pang Kuo
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H01 - BASIC ELECTRIC ELEMENTS