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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/1415
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Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods for electron beam focusing in electron beam add...
Patent number
12,148,592
Issue date
Nov 19, 2024
General Electric Company
John Scott Price
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,657
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for electron beam focusing in electron beam add...
Patent number
11,837,428
Issue date
Dec 5, 2023
General Electric Company
John Scott Price
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Axial alignment assembly, and charged particle microscope comprisin...
Patent number
11,773,905
Issue date
Oct 3, 2023
FEI Company
Pleun Dona
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multipole unit and charged particle beam device
Patent number
11,769,649
Issue date
Sep 26, 2023
HITACHI HIGH-TECH CORPORATION
Masanori Mita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Objective lens arrangement usable in particle-optical systems
Patent number
11,527,379
Issue date
Dec 13, 2022
Carl Zeiss Microscopy GmbH
Rainer Knippelmeyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic field free sample plane for charged particle microscope
Patent number
11,450,505
Issue date
Sep 20, 2022
FEI Company
Alexander Henstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam optical system, exposure apparatus, exposure...
Patent number
11,276,546
Issue date
Mar 15, 2022
Nikon Corporation
Takehisa Yahiro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning magnet design with enhanced efficiency
Patent number
11,114,270
Issue date
Sep 7, 2021
Axcelis Technologies, Inc.
Bo Vanderberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source
Patent number
11,075,053
Issue date
Jul 27, 2021
ASML Netherlands B.V.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic lens and exciting current control method
Patent number
10,923,312
Issue date
Feb 16, 2021
Focus-eBeam Technology (Beijing) Co., Ltd.
Wei He
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Objective lens arrangement usable in particle-optical systems
Patent number
10,622,184
Issue date
Apr 14, 2020
Carl Zeiss Microscopy GmbH
Rainer Knippelmeyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source
Patent number
10,468,227
Issue date
Nov 5, 2019
Hermes-Microvision, Inc.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gun lens design in a charged particle microscope
Patent number
10,410,827
Issue date
Sep 10, 2019
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source
Patent number
10,032,600
Issue date
Jul 24, 2018
Hermes-Microvision, Inc.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source
Patent number
9,812,283
Issue date
Nov 7, 2017
Hermes-Microvision, Inc.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source
Patent number
9,799,484
Issue date
Oct 24, 2017
Hermes-Microvision, Inc.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Techniques and apparatus for manipulating an ion beam
Patent number
9,793,087
Issue date
Oct 17, 2017
Varian Semiconductor Equipment Associates, Inc.
James S. Buff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source
Patent number
9,754,760
Issue date
Sep 5, 2017
Hermes Microvision Inc.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Combined multipole magnet and dipole scanning magnet
Patent number
9,620,327
Issue date
Apr 11, 2017
Axcelis Technologies, Inc.
Edward C. Eisner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic lens for focusing a beam of charged particles
Patent number
9,595,359
Issue date
Mar 14, 2017
FEI Company
Ondrej Shanel
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Ion implantation apparatus
Patent number
9,520,265
Issue date
Dec 13, 2016
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Takanori Yagita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Notched magnetic lens for improved sample access in an SEM
Patent number
9,443,693
Issue date
Sep 13, 2016
KLA-Tencor Corporation
Christopher M. Sears
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multipole lens, method of fabricating same, and charged particle be...
Patent number
9,396,904
Issue date
Jul 19, 2016
Jeol Ltd.
Yuji Kohno
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Charged particle beam apparatus
Patent number
9,384,940
Issue date
Jul 5, 2016
Hitachi High-Technologies Corporation
Muneyuki Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multipole lens, aberration corrector, and electron microscope
Patent number
9,349,565
Issue date
May 24, 2016
Jeol Ltd.
Hidetaka Sawada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged particle beams with multi-axis magnetic...
Patent number
9,105,440
Issue date
Aug 11, 2015
Hermes-Microvision, Inc.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-axis magnetic lens for focusing a plurality of charged partic...
Patent number
9,000,394
Issue date
Apr 7, 2015
Hermes-Microvision, Inc.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam devices
Patent number
8,859,992
Issue date
Oct 14, 2014
Carl Zeiss NTS Limited
Stewart John Bean
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-axis magnetic lens for focusing a plurality of charged partic...
Patent number
8,835,867
Issue date
Sep 16, 2014
Hermes-Microvision, Inc.
Zhongwei Chen
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
ELECTRON BEAM MICROSCOPE
Publication number
20240304410
Publication date
Sep 12, 2024
CARL ZEISS MICROSCOPY GMBH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR DEMAGNETIZING MAGNETIC...
Publication number
20240274395
Publication date
Aug 15, 2024
Hitachi High-Tech Corporatiom
Shingo HAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Adjustable Permanent Magnetic Lens Having Thermal Control Device
Publication number
20240021403
Publication date
Jan 18, 2024
IMS Nanofabrication GmbH
Dietmar Puchberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Adjustable Permanent Magnetic Lens Having Shunting Device
Publication number
20230360878
Publication date
Nov 9, 2023
IMS Nanofabrication GmbH
Dietmar Puchberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
Publication number
20230005704
Publication date
Jan 5, 2023
Zhongke Jingyuan Electron Limited, Beijing (CN)
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multipole Unit and Charged Particle Beam Device
Publication number
20220270844
Publication date
Aug 25, 2022
HITACHI HIGH-TECH CORPORATION
Masanori MITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC FIELD FREE SAMPLE PLANE FOR CHARGED PARTICLE MICROSCOPE
Publication number
20220199353
Publication date
Jun 23, 2022
FEI Company
Alexander Henstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE SOURCE
Publication number
20220068589
Publication date
Mar 3, 2022
ASML NETHERLANDS B.V.
Shuai LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
Publication number
20200243296
Publication date
Jul 30, 2020
CARL ZEISS MICROSCOPY GMBH
Rainer KNIPPELMEYER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE SOURCE
Publication number
20200126753
Publication date
Apr 23, 2020
ASML NETHERLANDS B.V.
Shuai LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM OPTICAL SYSTEM, EXPOSURE APPARATUS, EXPOSURE...
Publication number
20200051774
Publication date
Feb 13, 2020
Nikon Corporation
Takehisa YAHIRO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MAGNETIC LENS AND EXCITING CURRENT CONTROL METHOD
Publication number
20190295808
Publication date
Sep 26, 2019
Focus-eBeam Technology (Beijing) Co., Ltd.
Wei He
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Source
Publication number
20190057833
Publication date
Feb 21, 2019
HERMES MICROVISION, INC.
Shuai LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Source
Publication number
20170125202
Publication date
May 4, 2017
HERMES MICROVISION INC.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Source
Publication number
20170125204
Publication date
May 4, 2017
HERMES MICROVISION INC.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES AND APPARATUS FOR MANIPULATING AN ION BEAM
Publication number
20170076908
Publication date
Mar 16, 2017
Varian Semiconductor Equipment Associates, Inc.
James S. Buff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Combined Multipole Magnet and Dipole Scanning Magnet
Publication number
20160189913
Publication date
Jun 30, 2016
Axcelis Technologies, Inc.
Edward C. Eisner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multipole Lens, Aberration Corrector, and Electron Microscope
Publication number
20150332889
Publication date
Nov 19, 2015
JEOL Ltd.
Hidetaka SAWADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20150294833
Publication date
Oct 15, 2015
Hitachi High-Technologies Corporation
Muneyuki Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multipole Lens, Method of Fabricating Same, and Charged Particle Be...
Publication number
20150287566
Publication date
Oct 8, 2015
JEOL Ltd.
Yuji Kohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE MICRO-MACHINED MULTI-POLE ELECTROMAGNETS
Publication number
20150129772
Publication date
May 14, 2015
The Regents of the University of California
Robert N. Candler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC...
Publication number
20150060662
Publication date
Mar 5, 2015
HERMES MICROVISION, INC.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC LENS FOR FOCUSING A BEAM OF CHARGED PARTICLES
Publication number
20150021476
Publication date
Jan 22, 2015
FEI Company
Ondrej Shanel
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
ELECTROMAGNETIC LENS FOR ELECTRON BEAM EXPOSURE APPARATUS
Publication number
20140166893
Publication date
Jun 19, 2014
Advantest Corporation
Akio Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Configurable Charged-Particle Apparatus
Publication number
20140110597
Publication date
Apr 24, 2014
FEI Company
Lubomir Tuma
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Partic...
Publication number
20130248730
Publication date
Sep 26, 2013
HERMES MICROVISION, INC.
Weiming Ren
B82 - NANO-TECHNOLOGY
Information
Patent Application
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Partic...
Publication number
20130181138
Publication date
Jul 18, 2013
HERMES MICROVISION, INC.
Zhongwei Chen
B82 - NANO-TECHNOLOGY
Information
Patent Application
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Partic...
Publication number
20130153782
Publication date
Jun 20, 2013
HERMES MICROVISION, INC.
Weiming Ren
B82 - NANO-TECHNOLOGY
Information
Patent Application
Vector Potential Photoelectron Microscope
Publication number
20120298861
Publication date
Nov 29, 2012
Raymond Browning
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC...
Publication number
20120145917
Publication date
Jun 14, 2012
Hermes Microvision, Inc.
ZHONGWEI CHEN
H01 - BASIC ELECTRIC ELEMENTS