Bottom of trenches or holes

Industry

CPC
H01J2237/281

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/281Bottom of trenches or holes

Industries

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus and image acquiring method
- Patent number 12,148,594
- Issue date Nov 19, 2024
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,142,457
- Issue date Nov 12, 2024
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection of probabilistic process windows
- Patent number 12,142,454
- Issue date Nov 12, 2024
- Fractilla, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-source charged particle illumination apparatus
- Patent number 12,125,671
- Issue date Oct 22, 2024
- ASML Netherlands B.V.
- Stijn Wilem Herman Karel Steenbrink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
- Patent number 12,125,669
- Issue date Oct 22, 2024
- ASML Netherlands B.V.
- Ning Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 12,087,541
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image contrast enhancement in sample inspection
- Patent number 12,087,542
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross-talk cancellation in multiple charged-particle beam inspection
- Patent number 12,080,513
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Wei Fang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection apparatus and method
- Patent number 12,072,181
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Yan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method, inspection system, and semiconductor fabrication...
- Patent number 12,055,861
- Issue date Aug 6, 2024
- Samsung Electronics Co., Ltd.
- Kihyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,046,446
- Issue date Jul 23, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Chiba
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Analyzing a sidewall of hole milled in a sample to determine thickn...
- Patent number 12,033,831
- Issue date Jul 9, 2024
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
- Patent number RE50001
- Issue date Jun 4, 2024
- FIBICS INCORPORATED
- Michael William Phaneuf
Information Patent Grant
Electron beam probing techniques and related structures
- Patent number 11,996,336
- Issue date May 28, 2024
- Micron Technology, Inc.
- Amitava Majumdar
- G11 - INFORMATION STORAGE
Information Patent Grant
System and method for generating and analyzing roughness measuremen...
- Patent number 11,996,265
- Issue date May 28, 2024
- Fractilla, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement and correction of optical aberrations in charged partic...
- Patent number 11,990,315
- Issue date May 21, 2024
- FEI Company
- Erik Franken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample preparation system and method for electron microscope observ...
- Patent number 11,990,314
- Issue date May 21, 2024
- SANYU ELECTRON CO., LTD.
- Shinsuke Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle assessment tool, inspection method
- Patent number 11,984,295
- Issue date May 14, 2024
- ASML Netherlands B.V.
- Marco Jan-Jaco Wieland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of measuring variation, inspection system, computer program,...
- Patent number 11,966,168
- Issue date Apr 23, 2024
- ASML Netherlands B.V.
- Antoine Gaston Marie Kiers
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
- Patent number 11,961,703
- Issue date Apr 16, 2024
- NuFlare Technology, Inc.
- Chosaku Noda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replaceable module for a charged particle apparatus
- Patent number 11,961,698
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Christiaan Otten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for image enhancement for a multi-beam charged-...
- Patent number 11,961,700
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Maikel Robert Goosen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus using charged particle beams
- Patent number 11,961,697
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
- Patent number 11,961,709
- Issue date Apr 16, 2024
- FEI Company
- Ali Mohammadi-Gheidari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed charged-particle beam system
- Patent number 11,942,302
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Arno Jan Bleeker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analysis method and analysis system of voltage contrast defect
- Patent number 11,927,625
- Issue date Mar 12, 2024
- Powerchip Semiconductor Manufacturing Corporation
- Yue-Ying Yen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
- Patent number 11,929,232
- Issue date Mar 12, 2024
- ASML Netherlands B.V.
- Frank Nan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lateral recess measurement in a semiconductor specimen
- Patent number 11,921,063
- Issue date Mar 5, 2024
- Applied Materials Israel Ltd.
- Michael Chemama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
- Patent number 11,923,168
- Issue date Mar 5, 2024
- FIBICS INCORPORATED
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope device and electron beam inspection ap...
- Patent number 11,908,657
- Issue date Feb 20, 2024
- Zhongke Jingyuan Electron Limited
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20240379325
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS AND METHOD
- Publication number 20240369356
- Publication date Nov 7, 2024
- ASML NETHERLANDS B.V.
- Yan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES
- Publication number 20240355685
- Publication date Oct 24, 2024
- Micron Technology, Inc.
- Amitava Majumdar
- G11 - INFORMATION STORAGE
Information Patent Application
ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...
- Publication number 20240347315
- Publication date Oct 17, 2024
- Fuji Electric Co., Ltd.
- Yusuke SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
- Publication number 20240339289
- Publication date Oct 10, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Adar Sonn-Segev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY
- Publication number 20240339293
- Publication date Oct 10, 2024
- Oxford Instruments Nanotechnology Tools Limited
- Peter Statham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...
- Publication number 20240339295
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Tzu-Chao CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
- Publication number 20240312757
- Publication date Sep 19, 2024
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM
- Publication number 20240304411
- Publication date Sep 12, 2024
- WINBOND ELECTRONICS CORP.
- Yen-Chiao CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...
- Publication number 20240282547
- Publication date Aug 22, 2024
- NuFlare Technology, Inc.
- Koichi ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...
- Publication number 20240272099
- Publication date Aug 15, 2024
- Carl Zeiss SMT GMBH
- Daniel Schwarz
- G01 - MEASURING TESTING
Information Patent Application
Method of Dispositioning and Control of a Semiconductor Manufacturi...
- Publication number 20240258066
- Publication date Aug 1, 2024
- FRACTILIA, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
- Publication number 20240249912
- Publication date Jul 25, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
- Publication number 20240249911
- Publication date Jul 25, 2024
- HITACHI HIGH-TECH CORPORATION
- Teruo KOHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Gun and Charged Particle Beam Apparatus
- Publication number 20240212966
- Publication date Jun 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Tomoya IGARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPUTER SYSTEM, DIMENSION MEASUREMENT METHOD, AND STORAGE MEDIUM
- Publication number 20240200939
- Publication date Jun 20, 2024
- Hitachi High-Tech Corporation
- Yutaka Okuyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING...
- Publication number 20240203688
- Publication date Jun 20, 2024
- Samsung Electronics Co., Ltd.
- Kunsu KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION
- Publication number 20240186107
- Publication date Jun 6, 2024
- Bernardo KASTRUP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
- Publication number 20240177966
- Publication date May 30, 2024
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PRECISION IN STEREOSCOPIC MEASUREMENTS USING A PRE-DEPOSITION LAYER
- Publication number 20240153738
- Publication date May 9, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
- Publication number 20240128047
- Publication date Apr 18, 2024
- Hitachi High-Tech Corporation
- Masahiro YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MI...
- Publication number 20240128050
- Publication date Apr 18, 2024
- FEI Company
- Yuchen DENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
- Publication number 20240094150
- Publication date Mar 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Dror Shemesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
- Publication number 20240087838
- Publication date Mar 14, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
- Publication number 20240087842
- Publication date Mar 14, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...
- Publication number 20240079202
- Publication date Mar 7, 2024
- ASML NETHERLANDS B.V.
- Martijn Petrus, Christianus VAN HEUMEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE (SEM) MEASUREMENT METHOD AND APPARATUS
- Publication number 20240079206
- Publication date Mar 7, 2024
- Samsung Electronics Co., Ltd.
- Kihyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASSESSMENT SYSTEM, METHOD OF ASSESSING
- Publication number 20240079205
- Publication date Mar 7, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20240062986
- Publication date Feb 22, 2024
- Hitachi High-Tech Corporation
- Naho TERAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
- Publication number 20240055223
- Publication date Feb 15, 2024
- KIOXIA Corporation
- Chihiro IDA
- H01 - BASIC ELECTRIC ELEMENTS

Bottom of trenches or holes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam apparatus and image acquiring method

Charged particle beam device

Detection of probabilistic process windows

Multi-source charged particle illumination apparatus

Thermal-aided inspection by advanced charge controller module in a...

Apparatus of plural charged-particle beams

Image contrast enhancement in sample inspection

Cross-talk cancellation in multiple charged-particle beam inspection

Inspection apparatus and method

Inspection method, inspection system, and semiconductor fabrication...

Charged particle beam device

Analyzing a sidewall of hole milled in a sample to determine thickn...

Method and system for cross-sectioning a sample with a preset thick...

Electron beam probing techniques and related structures

System and method for generating and analyzing roughness measuremen...

Measurement and correction of optical aberrations in charged partic...

Sample preparation system and method for electron microscope observ...

Charged particle assessment tool, inspection method

Method of measuring variation, inspection system, computer program,...

Multiple electron-beam image acquisition apparatus and multiple ele...

Replaceable module for a charged particle apparatus

Systems and methods for image enhancement for a multi-beam charged-...

Apparatus using charged particle beams

Charged particle beam device for inspection of a specimen with a pl...

Pulsed charged-particle beam system

Analysis method and analysis system of voltage contrast defect

Systems and methods for charged particle flooding to enhance voltag...

Lateral recess measurement in a semiconductor specimen

Microscopy imaging method for 3D tomography with predictive drift t...

Scanning electron microscope device and electron beam inspection ap...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

INSPECTION APPARATUS AND METHOD

ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES

ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...

FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS

IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY

METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...

SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...

HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...

Method of Dispositioning and Control of a Semiconductor Manufacturi...

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE

Charged Particle Gun and Charged Particle Beam Apparatus

COMPUTER SYSTEM, DIMENSION MEASUREMENT METHOD, AND STORAGE MEDIUM

APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING...

METHOD AND APPARATUS FOR INSPECTION

MICROSCOPY IMAGING METHOD AND SYSTEM

PRECISION IN STEREOSCOPIC MEASUREMENTS USING A PRE-DEPOSITION LAYER

Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...

METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MI...

NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES

MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...

DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...

SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...

SCANNING ELECTRON MICROSCOPE (SEM) MEASUREMENT METHOD AND APPARATUS

ASSESSMENT SYSTEM, METHOD OF ASSESSING

Charged Particle Beam Device

INSPECTION DEVICE AND INSPECTION METHOD