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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/281
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-source charged particle illumination apparatus
Patent number
12,125,671
Issue date
Oct 22, 2024
ASML Netherlands B.V.
Stijn Wilem Herman Karel Steenbrink
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
Patent number
12,125,669
Issue date
Oct 22, 2024
ASML Netherlands B.V.
Ning Ye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
12,087,541
Issue date
Sep 10, 2024
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image contrast enhancement in sample inspection
Patent number
12,087,542
Issue date
Sep 10, 2024
ASML Netherlands B.V.
Yixiang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cross-talk cancellation in multiple charged-particle beam inspection
Patent number
12,080,513
Issue date
Sep 3, 2024
ASML Netherlands B.V.
Wei Fang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection apparatus and method
Patent number
12,072,181
Issue date
Aug 27, 2024
ASML Netherlands B.V.
Yan Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection method, inspection system, and semiconductor fabrication...
Patent number
12,055,861
Issue date
Aug 6, 2024
Samsung Electronics Co., Ltd.
Kihyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,046,446
Issue date
Jul 23, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Chiba
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Analyzing a sidewall of hole milled in a sample to determine thickn...
Patent number
12,033,831
Issue date
Jul 9, 2024
Applied Materials Israel Ltd.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
Patent number
RE50001
Issue date
Jun 4, 2024
FIBICS INCORPORATED
Michael William Phaneuf
Information
Patent Grant
Electron beam probing techniques and related structures
Patent number
11,996,336
Issue date
May 28, 2024
Micron Technology, Inc.
Amitava Majumdar
G11 - INFORMATION STORAGE
Information
Patent Grant
System and method for generating and analyzing roughness measuremen...
Patent number
11,996,265
Issue date
May 28, 2024
Fractilla, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Measurement and correction of optical aberrations in charged partic...
Patent number
11,990,315
Issue date
May 21, 2024
FEI Company
Erik Franken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample preparation system and method for electron microscope observ...
Patent number
11,990,314
Issue date
May 21, 2024
SANYU ELECTRON CO., LTD.
Shinsuke Shibata
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,984,295
Issue date
May 14, 2024
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring variation, inspection system, computer program,...
Patent number
11,966,168
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
Patent number
11,961,703
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Chosaku Noda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Replaceable module for a charged particle apparatus
Patent number
11,961,698
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Christiaan Otten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for image enhancement for a multi-beam charged-...
Patent number
11,961,700
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Maikel Robert Goosen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,961,697
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
Patent number
11,961,709
Issue date
Apr 16, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed charged-particle beam system
Patent number
11,942,302
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Arno Jan Bleeker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
Patent number
11,929,232
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Frank Nan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Analysis method and analysis system of voltage contrast defect
Patent number
11,927,625
Issue date
Mar 12, 2024
Powerchip Semiconductor Manufacturing Corporation
Yue-Ying Yen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lateral recess measurement in a semiconductor specimen
Patent number
11,921,063
Issue date
Mar 5, 2024
Applied Materials Israel Ltd.
Michael Chemama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
Patent number
11,923,168
Issue date
Mar 5, 2024
FIBICS INCORPORATED
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,657
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for inspection
Patent number
11,875,966
Issue date
Jan 16, 2024
ASML Netherlands B.V.
Bernardo Kastrup
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,869,745
Issue date
Jan 9, 2024
HITACHI HIGH-TECH CORPORATION
Minami Shouji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
RE49784
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Weiming Ren
Patents Applications
last 30 patents
Information
Patent Application
ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES
Publication number
20240355685
Publication date
Oct 24, 2024
Micron Technology, Inc.
Amitava Majumdar
G11 - INFORMATION STORAGE
Information
Patent Application
ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...
Publication number
20240347315
Publication date
Oct 17, 2024
Fuji Electric Co., Ltd.
Yusuke SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
Publication number
20240339289
Publication date
Oct 10, 2024
APPLIED MATERIALS ISRAEL LTD.
Adar Sonn-Segev
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY
Publication number
20240339293
Publication date
Oct 10, 2024
Oxford Instruments Nanotechnology Tools Limited
Peter Statham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...
Publication number
20240339295
Publication date
Oct 10, 2024
ASML NETHERLANDS B.V.
Tzu-Chao CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
Publication number
20240312757
Publication date
Sep 19, 2024
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM
Publication number
20240304411
Publication date
Sep 12, 2024
WINBOND ELECTRONICS CORP.
Yen-Chiao CHEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...
Publication number
20240282547
Publication date
Aug 22, 2024
NuFlare Technology, Inc.
Koichi ISHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...
Publication number
20240272099
Publication date
Aug 15, 2024
Carl Zeiss SMT GMBH
Daniel Schwarz
G01 - MEASURING TESTING
Information
Patent Application
Method of Dispositioning and Control of a Semiconductor Manufacturi...
Publication number
20240258066
Publication date
Aug 1, 2024
FRACTILIA, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
Publication number
20240249912
Publication date
Jul 25, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
Publication number
20240249911
Publication date
Jul 25, 2024
HITACHI HIGH-TECH CORPORATION
Teruo KOHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Gun and Charged Particle Beam Apparatus
Publication number
20240212966
Publication date
Jun 27, 2024
HITACHI HIGH-TECH CORPORATION
Tomoya IGARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPUTER SYSTEM, DIMENSION MEASUREMENT METHOD, AND STORAGE MEDIUM
Publication number
20240200939
Publication date
Jun 20, 2024
Hitachi High-Tech Corporation
Yutaka Okuyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING...
Publication number
20240203688
Publication date
Jun 20, 2024
Samsung Electronics Co., Ltd.
Kunsu KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTION
Publication number
20240186107
Publication date
Jun 6, 2024
Bernardo KASTRUP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
Publication number
20240177966
Publication date
May 30, 2024
Fibics Incorporated
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PRECISION IN STEREOSCOPIC MEASUREMENTS USING A PRE-DEPOSITION LAYER
Publication number
20240153738
Publication date
May 9, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MI...
Publication number
20240128050
Publication date
Apr 18, 2024
FEI Company
Yuchen DENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
Publication number
20240094150
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Dror Shemesh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
Publication number
20240087838
Publication date
Mar 14, 2024
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
Publication number
20240087842
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...
Publication number
20240079202
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Martijn Petrus, Christianus VAN HEUMEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE (SEM) MEASUREMENT METHOD AND APPARATUS
Publication number
20240079206
Publication date
Mar 7, 2024
Samsung Electronics Co., Ltd.
Kihyun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ASSESSMENT SYSTEM, METHOD OF ASSESSING
Publication number
20240079205
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20240062986
Publication date
Feb 22, 2024
Hitachi High-Tech Corporation
Naho TERAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
Publication number
20240055223
Publication date
Feb 15, 2024
KIOXIA Corporation
Chihiro IDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL DEVICE
Publication number
20240038485
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL SYSTEM AND METHOD OF OPERATING AN ELECTRON-OPTICAL...
Publication number
20240029995
Publication date
Jan 25, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS