by chemical means

Patents Grantslast 30 patents

  • Information Patent Grant

    MEMS devices and methods of forming same

    • Patent number 8,742,595
    • Issue date Jun 3, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Bruce C. S. Chou
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    MEMS devices and methods of forming same

    • Patent number 8,497,148
    • Issue date Jul 30, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Bruce C. S. Chou
    • B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents