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ELECTRICITY
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Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/28556
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Patents Grants
last 30 patents
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Patent Grant
Dynamic precursor dosing for atomic layer deposition
Patent number
11,970,772
Issue date
Apr 30, 2024
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming nickel silicide materials
Patent number
11,965,236
Issue date
Apr 23, 2024
Applied Materials, Inc.
Minrui Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective cobalt deposition on copper surfaces
Patent number
11,959,167
Issue date
Apr 16, 2024
Applied Materials, Inc.
Sang-Ho Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Combined RF generator and RF solid-state matching network
Patent number
11,948,775
Issue date
Apr 2, 2024
ASM AMERICA, INC.
Imran Ahmed Bhutta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Unconsumed precursor monitoring
Patent number
11,929,270
Issue date
Mar 12, 2024
Mohamed Buhary Rinzan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Methods of forming apparatuses having tungsten-containing structures
Patent number
11,923,305
Issue date
Mar 5, 2024
Micron Technology, Inc.
Luca Fumagalli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
11,915,936
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Wei Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Diamond semiconductor system and method
Patent number
11,915,934
Issue date
Feb 27, 2024
AKHAN SEMICONDUCTOR, INC.
Adam Khan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective formation of conductor nanowires
Patent number
11,908,789
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chao-Hsien Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interconnect structure having a carbon-containing barrier layer
Patent number
11,908,697
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company
Rueijer Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate structures for semiconductor devices
Patent number
11,901,242
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Liang Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fin field-effect transistor device and method of forming the same
Patent number
11,901,183
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Min-Hsiu Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Feature fill with nucleation inhibition
Patent number
11,901,227
Issue date
Feb 13, 2024
Lam Research Corporation
Anand Chandrashekar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and systems for depositing a layer comprising vanadium, nit...
Patent number
11,887,857
Issue date
Jan 30, 2024
ASM IP Holding B.V.
Dieter Pierreux
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor structure manufacturing method
Patent number
11,862,516
Issue date
Jan 2, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Huiwen Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method
Patent number
11,854,814
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Lien Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate structure, fin field-effect transistor, and method of manufact...
Patent number
11,855,083
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ji-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low temperature deposition of pure molybenum films
Patent number
11,854,813
Issue date
Dec 26, 2023
Applied Materials, Inc.
Kunal Bhatnagar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for homogenous intermixing of precursors in all...
Patent number
11,827,976
Issue date
Nov 28, 2023
Lam Research Corporation
Ilanit Fisher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing ruthenium-containing thin film and rutheniu...
Patent number
11,827,650
Issue date
Nov 28, 2023
DNF Co., Ltd.
Myong Woon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gate structure of semiconductor device and method of forming same
Patent number
11,824,100
Issue date
Nov 21, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Hsin-Yi Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
CVD based oxide-metal multi structure for 3D NAND memory devices
Patent number
11,817,320
Issue date
Nov 14, 2023
Applied Materials, Inc.
Susmit Singha Roy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
11,817,451
Issue date
Nov 14, 2023
INNOSCIENCE (ZHUHAI) TECHNOLOGY CO., LTD.
Qiyue Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal gate structure cutting process
Patent number
11,810,909
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Shiang-Bau Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a transition metal niobium nitride film on a su...
Patent number
11,810,788
Issue date
Nov 7, 2023
ASM IP Holding B.V.
Jerry Peijun Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated circuit device including capacitor with metal nitrate in...
Patent number
11,810,946
Issue date
Nov 7, 2023
Samsung Electronics Co., Ltd.
Jeonggyu Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate resistance improvement and method thereof
Patent number
11,810,978
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ju-Li Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...
Patent number
11,804,375
Issue date
Oct 31, 2023
Entegris, Inc.
Sangbum Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
11,799,012
Issue date
Oct 24, 2023
United Microelectronics Corp.
Chun-Chieh Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit device and electronic device including capacitor...
Patent number
11,798,980
Issue date
Oct 24, 2023
Samsung Electronics Co., Ltd.
Jeonggyu Song
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...
Publication number
20240145301
Publication date
May 2, 2024
Soulbrain Co., LTD
Chang Bong YEON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FIN FIELD-EFFECT TRANSISTOR DEVICE AND METHOD OF FORMING THE SAME
Publication number
20240136191
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Min-Hsiu Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA-ENHANCED MOLYBDENUM DEPOSITION
Publication number
20240102157
Publication date
Mar 28, 2024
Applied Materials, Inc.
TUERXUN AILIHUMAER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING GATE STRUCTURE AND METHOD OF MANUFACTURING...
Publication number
20240096883
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ji-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...
Publication number
20240096631
Publication date
Mar 21, 2024
Entegris, Inc.
Sangbum Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE STRUCTURE, FIN FIELD-EFFECT TRANSISTOR, AND METHOD OF MANUFACT...
Publication number
20240088144
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ji-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALL...
Publication number
20240084443
Publication date
Mar 14, 2024
LAM RESEARCH CORPORATION
Ilanit FISHER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONFORMAL MOLYBDENUM DEPOSITION
Publication number
20240060175
Publication date
Feb 22, 2024
Applied Materials, Inc.
Srinivas Gandikota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS
Publication number
20240047215
Publication date
Feb 8, 2024
Applied Materials, Inc.
Kunal Bhatnagar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH BORON- AND NITROGEN-CONTAINING...
Publication number
20240047523
Publication date
Feb 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Ming LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
Publication number
20240038829
Publication date
Feb 1, 2024
Samsung Electronics Co., Ltd.
Jiye BAEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A TRANSITION METAL NIOBIUM NITRIDE FILM ON A SU...
Publication number
20240030035
Publication date
Jan 25, 2024
ASM IP HOLDING B.V.
Jerry Peijun Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DIGITAL PEN WITH ENHANCED EDUCATIONAL AND THERAPEUTIC FEEDBACK
Publication number
20240030042
Publication date
Jan 25, 2024
Lauren Michelle Neubauer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Gate Structure of Semiconductor Device and Method of Forming Same
Publication number
20240021697
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsin-Yi Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240021682
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Li-Zhen YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING METAL NITRIDE FILM AND ELECTRONIC DEVICE IN...
Publication number
20230420490
Publication date
Dec 28, 2023
Samsung Electronics Co., Ltd.
Jeonggyu SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE RESISTANCE IMPROVEMENT AND METHOD THEREOF
Publication number
20230378360
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ju-Li Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE STRUCTURES FOR SEMICONDUCTOR DEVICES
Publication number
20230377993
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Liang CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Devices
Publication number
20230352308
Publication date
Nov 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Lien Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Gate Structure Passivating Species Drive-In Method and Structure Fo...
Publication number
20230317457
Publication date
Oct 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsiao-Kuan Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VAPOR DEPOSITION PROCESSES, REACTANTS AND DEPOSITION ASSEMBLIES
Publication number
20230307239
Publication date
Sep 28, 2023
ASM IP HOLDING, B.V.
Sean T. Barry
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TUNGSTEN DEFLUORINATION BY HIGH PRESSURE TREATMENT
Publication number
20230298893
Publication date
Sep 21, 2023
Applied Materials, Inc.
Keith Tatseun Wong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR DEPOSITION OF MOLYBDENUM FOR SOURCE/DRAIN C...
Publication number
20230298902
Publication date
Sep 21, 2023
ASM IP HOLDING B.V.
Jiyeon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY...
Publication number
20230265556
Publication date
Aug 24, 2023
ASM IP HOLDING B.V.
Matthias Minjauw
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH BARRIER LAYER
Publication number
20230268425
Publication date
Aug 24, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Yang WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES
Publication number
20230260783
Publication date
Aug 17, 2023
Samsung Electronics Co., Ltd.
Ji-woon Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE WITH PROTECTION LAYER AND METHOD FOR FABRICATI...
Publication number
20230253209
Publication date
Aug 10, 2023
NANYA TECHNOLOGY CORPORATION
MING-HUNG HSIEH
G11 - INFORMATION STORAGE
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR...
Publication number
20230253311
Publication date
Aug 10, 2023
KIOXIA Corporation
Masayuki KITAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE WITH PROTECTION LAYER
Publication number
20230253210
Publication date
Aug 10, 2023
NANYA TECHNOLOGY CORPORATION
MING-HUNG HSIEH
G11 - INFORMATION STORAGE
Information
Patent Application
METHOD OF TUNING FILM PROPERTIES OF METAL NITRIDE USING PLASMA
Publication number
20230245925
Publication date
Aug 3, 2023
Applied Materials, Inc.
Wenyi LIU
H01 - BASIC ELECTRIC ELEMENTS