Membership
Tour
Register
Log in
by deposition
Follow
Industry
CPC
H01L21/28194
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/28194
by deposition
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Precursor solution for thin film deposition and thin film forming m...
Patent number
11,972,941
Issue date
Apr 30, 2024
SK TRICHEM
Chang Sung Hong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device including buried gate structure and method for...
Patent number
11,943,912
Issue date
Mar 26, 2024
SK Hynix Inc.
Dong-Soo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,929,403
Issue date
Mar 12, 2024
Kabushiki Kaisha Toshiba
Masaharu Shimabayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective capping processes and structures formed thereby
Patent number
11,830,742
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Chien Chi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Negative capacitance transistor having a multilayer ferroelectric s...
Patent number
11,784,235
Issue date
Oct 10, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hsing Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for depositing a hafnium lanthanum oxide film on a substrat...
Patent number
11,769,664
Issue date
Sep 26, 2023
ASM IP Holding B.V.
Tatiana Ivanova
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of manufacturing the same
Patent number
11,742,199
Issue date
Aug 29, 2023
Renesas Electronics Corporation
Kazuhiko Segi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a semiconductor device structure and related se...
Patent number
11,695,054
Issue date
Jul 4, 2023
ASM IP Holding B.V.
Chiyu Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming doped metal oxide films on a substrate by cyclic...
Patent number
11,658,030
Issue date
May 23, 2023
ASM IP Holding B.V.
Tom Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Germanium mediated de-oxidation of silicon
Patent number
11,651,956
Issue date
May 16, 2023
PSIQUANTUM, CORP.
Yong Liang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-k feature formation processes and structures formed thereby
Patent number
11,640,978
Issue date
May 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Wan-Yi Kao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Epitaxial strontium titanate on silicon
Patent number
11,615,954
Issue date
Mar 28, 2023
PSIQUANTUM, CORP.
Yong Liang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Material having single crystal perovskite, device including the sam...
Patent number
11,615,955
Issue date
Mar 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Bo-Yu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuits with doped gate dielectrics
Patent number
11,605,537
Issue date
Mar 14, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Liang Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Area selective CVD of metallic films using precursor gases and inhi...
Patent number
11,584,986
Issue date
Feb 21, 2023
The Board of Trustees of the University of Illinois
John R. Abelson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Smooth titanium nitride layers and methods of forming the same
Patent number
11,587,784
Issue date
Feb 21, 2023
Eugenus, Inc.
Sung-Hoon Jung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicon intermixing layer for blocking diffusion
Patent number
11,587,791
Issue date
Feb 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Chieh Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
PMOS high-K metal gates
Patent number
11,552,177
Issue date
Jan 10, 2023
Applied Materials, Inc.
Srinivas Gandikota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FinFET having a gate dielectric comprising a multi-layer structure...
Patent number
11,532,718
Issue date
Dec 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Hsuan Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shield gate trench power device and method for making the same
Patent number
11,522,063
Issue date
Dec 6, 2022
Shanghai Huahong Grace Semiconductor Manufacturing Corporation
Yafeng Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making a semiconductor device including etching of a meta...
Patent number
11,515,169
Issue date
Nov 29, 2022
HITACHI HIGH-TECH CORPORATION
Yoshihide Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
11,508,572
Issue date
Nov 22, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Yi Chou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conformal and smooth titanium nitride layers and methods of forming...
Patent number
11,482,413
Issue date
Oct 25, 2022
Eugenus, Inc.
Sung-Hoon Jung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gate spacer structures and methods for forming the same
Patent number
11,437,493
Issue date
Sep 6, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun Hsiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device with negative capacitance comprising ferroelec...
Patent number
11,398,567
Issue date
Jul 26, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Wilman Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device including buried gate structure and method for...
Patent number
11,393,824
Issue date
Jul 19, 2022
SK Hynix Inc.
Dong-Soo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate spacer structures and methods for forming the same
Patent number
11,393,914
Issue date
Jul 19, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun Hsiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective capping processes and structures formed thereby
Patent number
11,380,542
Issue date
Jul 5, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Chien Chi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Negative capacitance transistor having a multilayer ferroelectric s...
Patent number
11,349,008
Issue date
May 31, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hsing Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nanosheet field effect transistors with partial inside spacers
Patent number
11,342,446
Issue date
May 24, 2022
Tessera, Inc.
Michael A. Guillorn
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP
Publication number
20240097005
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Hang Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH METAL LAYERS
Publication number
20240079401
Publication date
Mar 7, 2024
Monolithic 3D Inc.
Zvi Or-Bach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20240055260
Publication date
Feb 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Peng-Soon LIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ISOLATION STRUCTURES IN MULTI-GATE FIELD-EFFECT TRANSISTORS
Publication number
20240047518
Publication date
Feb 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Yeh CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
2-D MATERIAL SEMICONDUCTOR DEVICE
Publication number
20240030034
Publication date
Jan 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Yen LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING ISOLATION STRUCTURE FORMED OF LOW-K DIE...
Publication number
20240030281
Publication date
Jan 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Szu-Hua Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE STRUCTURE OF SEMICONDUCTOR DEVICE AND METHOD OF FORMING SAME
Publication number
20240021693
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Kuei-Lun Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FORMING THE SAME
Publication number
20230420328
Publication date
Dec 28, 2023
Vanguard International Semiconductor Corporation
Hsiu-Mei YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING THE SAME
Publication number
20230395369
Publication date
Dec 7, 2023
EUGENUS, INC.
Sung-Hoon Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...
Publication number
20230352556
Publication date
Nov 2, 2023
ASM IP HOLDING B.V.
Chiyu Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OXIDE INSULATOR FILM, ELECTRONIC DEVICE AND METHOD FOR PRODUCING EL...
Publication number
20230326624
Publication date
Oct 12, 2023
Panasonic Intellectual Property Management Co., Ltd.
Takashi SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Low-k Feature Formation Processes and Structures Formed Thereby
Publication number
20230275136
Publication date
Aug 31, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Wan-Yi Kao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING DOPED METAL OXIDE FILMS ON A SUBSTRATE BY CYCLIC...
Publication number
20230260784
Publication date
Aug 17, 2023
ASM IP HOLDING B.V.
Tom Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONFORMAL AND SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING...
Publication number
20230215725
Publication date
Jul 6, 2023
EUGENUS, INC.
Sung-Hoon Jung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EPITAXIAL STRONTIUM TITANATE ON SILICON
Publication number
20230197443
Publication date
Jun 22, 2023
Psiquantum, Corp.
Yong Liang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FINFETS HAVING VARIOUS DIFFERENT THICKNESSES OF GATE OXIDES AND REL...
Publication number
20230141716
Publication date
May 11, 2023
Micron Technology, Inc.
Hyuck Soo Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FINFET HAVING A GATE DIELECTRIC COMPRISING A MULTI-LAYER STRUCTURE...
Publication number
20230124471
Publication date
Apr 20, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Hsuan Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20230115597
Publication date
Apr 13, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Yi CHOU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Silicon Intermixing Layer for Blocking Diffusion
Publication number
20230116357
Publication date
Apr 13, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Chieh Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR PRE-DEPOSITION TREATMENT OF A WORK-FUNCTION METAL LAYER
Publication number
20230106314
Publication date
Apr 6, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-Yen TSAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PMOS HIGH-K METAL GATES
Publication number
20230097400
Publication date
Mar 30, 2023
Applied Materials, Inc.
Srinivas Gandikota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20230061260
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Yen LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL CAPS FOR GATE STRUCTURES
Publication number
20230010065
Publication date
Jan 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Hang Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20220375782
Publication date
Nov 24, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Yi CHOU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GATE SPACER STRUCTURES AND METHODS FOR FORMING THE SAME
Publication number
20220336629
Publication date
Oct 20, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun Hsiung TSAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Selective Capping Processes and Structures Formed Thereby
Publication number
20220328309
Publication date
Oct 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Chien CHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE WITH NANOFOG OXIDE ADHERED TO INERT OR WEAK...
Publication number
20220319830
Publication date
Oct 6, 2022
The Regents of the University of California
Iljo Kwak
B82 - NANO-TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE INCLUDING BURIED GATE STRUCTURE AND METHOD FOR...
Publication number
20220320102
Publication date
Oct 6, 2022
SK HYNIX INC.
Dong-Soo KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NANOSHEET FIELD EFFECT TRANSISTORS WITH PARTIAL INSIDE SPACERS
Publication number
20220320316
Publication date
Oct 6, 2022
TESSERA LLC
Michael A. Guillorn
B82 - NANO-TECHNOLOGY
Information
Patent Application
Negative Capacitance Transistor Having A Multilayer Ferroelectric S...
Publication number
20220285521
Publication date
Sep 8, 2022
Taiwan Semiconductor Manufacturing Co., LTD
Chi-Hsing Hsu
H01 - BASIC ELECTRIC ELEMENTS