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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/31138
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Patents Grants
last 30 patents
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Patent Grant
Manufacture method of array substrate, array substrate, and display...
Patent number
11,961,852
Issue date
Apr 16, 2024
HKC CORPORATION LIMITED
En-Tsung Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,955,336
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jing Hong Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,948,778
Issue date
Apr 2, 2024
Kokusai Electric Corporation
Hidehiro Yanai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Combined RF generator and RF solid-state matching network
Patent number
11,948,775
Issue date
Apr 2, 2024
ASM AMERICA, INC.
Imran Ahmed Bhutta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor package and method
Patent number
11,948,890
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Hao Tseng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and structure of middle layer removal
Patent number
11,923,199
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Nai-Chia Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming an interconnect structure
Patent number
11,901,226
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Wen-Kuei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
11,887,814
Issue date
Jan 30, 2024
HITACHI HIGH-TECH CORPORATION
Mamoru Yakushiji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self aligned multiple patterning
Patent number
11,881,402
Issue date
Jan 23, 2024
Applied Materials, Inc.
Lili Feng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and plasma processing apparatus
Patent number
11,881,410
Issue date
Jan 23, 2024
Tokyo Electron Limited
Yasutaka Hama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon-containing layer-forming composition, and method for produc...
Patent number
11,881,400
Issue date
Jan 23, 2024
Central Glass Company, Limited
Junya Nakatsuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film deposition apparatus for fine pattern forming
Patent number
11,881,379
Issue date
Jan 23, 2024
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Controlled degradation of a stimuli-responsive polymer film
Patent number
11,862,473
Issue date
Jan 2, 2024
Lam Research Corporation
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adjustable fastening device for plasma gas injectors
Patent number
11,854,769
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yung-Shun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
DC bias in plasma process
Patent number
11,854,766
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Sheng-Liang Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device having low-k carbon-c...
Patent number
11,848,198
Issue date
Dec 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Kai-Fang Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for processing workpiece
Patent number
11,823,903
Issue date
Nov 21, 2023
Tokyo Electron Limited
Yoshihide Kihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and element chip manufacturing method
Patent number
11,817,323
Issue date
Nov 14, 2023
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, component processing method, and subst...
Patent number
11,798,793
Issue date
Oct 24, 2023
Tokyo Electron Limited
Satoshi Ohuchida
B08 - CLEANING
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Patent Grant
Process and structure for source/drain contacts
Patent number
11,784,228
Issue date
Oct 10, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Meng-Huan Jao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus and processing method, and gas cluster generat...
Patent number
11,772,138
Issue date
Oct 3, 2023
Tokyo Electron Limited
Kazuya Dobashi
B08 - CLEANING
Information
Patent Grant
Semiconductor device and method of manufacture
Patent number
11,776,853
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist pattern trimming compositions and pattern formation met...
Patent number
11,754,927
Issue date
Sep 12, 2023
Rohm and Haas Electronic Materials LLC
Irvinder Kaur
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Semiconductor structure and fabrication method thereof
Patent number
11,756,795
Issue date
Sep 12, 2023
Semiconductor Manufacturing International (Shanghai) Corporation
Shiliang Ji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal atomic layer etching processes
Patent number
11,739,428
Issue date
Aug 29, 2023
ASM IP Holding B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal atomic layer etching processes
Patent number
11,739,427
Issue date
Aug 29, 2023
ASM IP Holding B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pattern formation method and semiconductor device manufacturing method
Patent number
11,735,431
Issue date
Aug 22, 2023
Kioxia Corporation
Yusuke Kasahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition of organic films
Patent number
11,728,175
Issue date
Aug 15, 2023
ASM IP Holding B.V.
Eva E. Tois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,721,522
Issue date
Aug 8, 2023
Tokyo Electron Limited
Kosuke Ogasawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning material including silicon-containing layer and method f...
Patent number
11,715,640
Issue date
Aug 1, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Szu-Ping Tung
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MODIFYING PATTERNED FEATURES USING A DIRECTIONAL ETCH
Publication number
20240136197
Publication date
Apr 25, 2024
Applied Materials, Inc.
Tassie Andersen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PACKAGES AND METHODS OF MANUFACTURING THEREOF
Publication number
20240120207
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Lung-Kai Mao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE SELECTIVE ETCHING TECHNOLOGY FOR THICK SOI DEVICES
Publication number
20240112914
Publication date
Apr 4, 2024
University of Electronic Science and Technology of China
Bo ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMATION OF SELF-ASSEMBLED MONOLAYER FOR SELECTIVE ETCHING PROCESS
Publication number
20240105462
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Hsiu CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
Publication number
20240096595
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Kazuhide HASEBE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240087890
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Lien HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF PATTERNIG SUBSTRATE, PATTERNED SUBSTRATE, A...
Publication number
20240072127
Publication date
Feb 29, 2024
MITSUBISHI CHEMICAL CORPORATION
Hiroshi FUKUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DC Bias in Plasma Process
Publication number
20240071722
Publication date
Feb 29, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Sheng-Liang Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240071772
Publication date
Feb 29, 2024
TOKYO ELECTRON LIMITED
Shinya ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMATION METHOD
Publication number
20240030025
Publication date
Jan 25, 2024
Tokyo Electron Limited
Shinichi IKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
Publication number
20240026548
Publication date
Jan 25, 2024
ASM IP HOLDING B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BY-SITE-COMENSATED ETCH BACK FOR LOCAL PLANARIZATION/TOPOGRAPHY ADJ...
Publication number
20240021430
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming Chyi Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE USING MULTI-LAYER H...
Publication number
20240014038
Publication date
Jan 11, 2024
NANYA TECHNOLOGY CORPORATION
YING-CHENG CHUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE USING MULTI-LAYER H...
Publication number
20240014040
Publication date
Jan 11, 2024
NANYA TECHNOLOGY CORPORATION
YING-CHENG CHUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBST...
Publication number
20240006168
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Satoshi OHUCHIDA
B08 - CLEANING
Information
Patent Application
MICROWAVE PROVIDING APPARATUS, SYSTEM INCLUDING THE SAME, AND METHO...
Publication number
20230402983
Publication date
Dec 14, 2023
SEMES CO., LTD.
Yoonseok Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS AND STRUCTURE FOR SOURCE/DRAIN CONTACTS
Publication number
20230387220
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Meng-Huan Jao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
Publication number
20230374671
Publication date
Nov 23, 2023
ASM IP HOLDING B.V.
Tom E. Blomberg
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
PATTERNING MATERIAL INCLUDING SILICON-CONTAINING LAYER AND METHOD F...
Publication number
20230377897
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Szu-Ping Tung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230377953
Publication date
Nov 23, 2023
Tokyo Electron Limited
Hiroki MURAKAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
Publication number
20230369076
Publication date
Nov 16, 2023
LAM RESEARCH CORPORATION
Dengliang Yang
B08 - CLEANING
Information
Patent Application
FABRICATION OF FINS USING VARIABLE SPACERS
Publication number
20230360923
Publication date
Nov 9, 2023
Adeia Semiconductor Solutions LLC
Kangguo Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STEP SUBSTRATE COATING COMPOSITION
Publication number
20230350299
Publication date
Nov 2, 2023
NISSAN CHEMICAL CORPORATION
Yuki MITSUTAKE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METALLIZATION IN INTEGRATED CIRCUITS
Publication number
20230352311
Publication date
Nov 2, 2023
TEXAS INSTRUMENTS INCORPORATED
Frances Ooi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE AND COMPOSITION
Publication number
20230341778
Publication date
Oct 26, 2023
JSR Corporation
Naoya NOSAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION OF ORGANIC FILMS
Publication number
20230343601
Publication date
Oct 26, 2023
ASM IP HOLDING B.V.
Eva E. Tois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION IMPLANTATION METHOD FOR REDUCING ROUGHNESS OF PATTERNED RESIST...
Publication number
20230335401
Publication date
Oct 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Patterning Features with Metal Based Resists
Publication number
20230326755
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Katie Lutker-Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING SILICON-CONTAINING METAL HARD MASK AND PATT...
Publication number
20230305405
Publication date
Sep 28, 2023
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AREA SELECTIVE ORGANIC MATERIAL REMOVAL
Publication number
20230307247
Publication date
Sep 28, 2023
ASM IP HOLDING B.V.
Mikko Ritala
H01 - BASIC ELECTRIC ELEMENTS