by etching with a plasma

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CPC
C23C16/0245

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/0245by etching with a plasma

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Patents Grantslast 30 patents

Information Patent Grant
Protection method and device for secondary battery, secondary batte...
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- Issue date Jan 7, 2025
- CONTEMPORARY AMPEREX TECHNOLOGY (HONG KONG) LIMITED
- Ting Li
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Information Patent Grant
Methods for depositing blocking layers on metal surfaces
- Patent number 12,131,900
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
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Integrated epitaxy and preclean system
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- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
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Electrostatic chucking process
- Patent number 12,100,609
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Sarah Michelle Bobek
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Information Patent Grant
Method for conditioning a plasma processing chamber
- Patent number 12,060,636
- Issue date Aug 13, 2024
- Lam Research Corporation
- Chiara Helena Catherina Giammanco MacPherson
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Information Patent Grant
Apparatus and method for manufacturing metal gate structures
- Patent number 12,054,823
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- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Yu Lee
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Information Patent Grant
Singapore diamond preparation method
- Patent number 12,018,362
- Issue date Jun 25, 2024
- Shanghai Zhengshi Technology Co., Ltd.
- Weidong Man
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Information Patent Grant
Method for forming nanostructures on a surface and optical element
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- Issue date May 14, 2024
- Carl Zeiss SMT GmbH
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Selective cobalt deposition on copper surfaces
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Information Patent Grant
Solid electrolytic capacitor containing a vapor-deposited barrier film
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- Issue date Apr 2, 2024
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- Jan Petrzilek
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Information Patent Grant
Method of manufacturing semiconductor device
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- Issue date Apr 2, 2024
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- Yonghee Kim
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Information Patent Grant
Providing multifunctional shutter disk above the workpiece in the m...
- Patent number 11,920,237
- Issue date Mar 5, 2024
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Information Patent Grant
Percolation doping of inorganic-organic frameworks for multiple dev...
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Information Patent Grant
Method and device for depositing silicon onto substrates
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- ASM IP Holding B.V.
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition with passivation treatment
- Patent number 11,834,741
- Issue date Dec 5, 2023
- The Board of Trustees of the Leland Stanford Junior University
- Friedrich B. Prinz
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Films including a water-soluble layer and a vapor-deposited organic...
- Patent number 11,738,367
- Issue date Aug 29, 2023
- The Procter & Gamble Company
- Emily Charlotte Boswell
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Multi-functional protective coating
- Patent number 11,742,186
- Issue date Aug 29, 2023
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method, materials and process for native oxide removal and regrowth...
- Patent number 11,598,000
- Issue date Mar 7, 2023
- Applied Materials, Inc.
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Information Patent Grant
Etching method and plasma processing apparatus
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- Issue date Mar 7, 2023
- Tokyo Electron Limited
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Information Patent Grant
Multi-layer protective coating
- Patent number 11,587,772
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- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
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Information Patent Grant
Coated razor blades comprising graphene
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Information Patent Grant
Shutter disk having lamp, power, and/or gas modules arranged at the...
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- Taiwan Semiconductor Manufacturing Co.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Films including a water-soluble layer and a vapor-deposited inorgan...
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- Issue date Oct 18, 2022
- The Procter & Gamble Company
- Emily Charlotte Boswell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for generating highly repetitive pulsed plasmas
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- PlasmaNano Corporation
- Jaeyoung Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing blocking layers on metal surfaces
- Patent number 11,417,515
- Issue date Aug 16, 2022
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber for etching low k and other dielectric films
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- Issue date Aug 9, 2022
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective cobalt deposition on copper surfaces
- Patent number 11,384,429
- Issue date Jul 12, 2022
- Applied Materials, Inc.
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Information Patent Grant
Surface modified depth controlled deposition for plasma based depos...
- Patent number 11,373,862
- Issue date Jun 28, 2022
- Lam Research Corporation
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Information Patent Grant
Surface roughness for flowable CVD film
- Patent number 11,367,614
- Issue date Jun 21, 2022
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- Jinrui Guo
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Information Patent Grant
Processing system and processing method
- Patent number 11,302,521
- Issue date Apr 12, 2022
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

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LARGE GRAIN TUNGSTEN GROWTH IN FEATURES
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INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
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FABRICATION OF TRANSMISSION TARGET FOR REDUCING EFFECTS OF ELECTRON...
- Publication number 20240420913
- Publication date Dec 19, 2024
- National Technology & Engineering Solutions of Sandia, LLC
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- H01 - BASIC ELECTRIC ELEMENTS
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APPARATUS AND METHOD FOR MANUFACTURING METAL GATE STRUCTURES
- Publication number 20240337012
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Yu Lee
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Patterning Process
- Publication number 20240297041
- Publication date Sep 5, 2024
- Shin-Etsu Chemical Co., Ltd.
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240282571
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- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Lin Tsai
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PROTECTION METHOD AND DEVICE FOR SECONDARY BATTERY, SECONDARY BATTE...
- Publication number 20240258584
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- CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING A BLAZED GRATING
- Publication number 20240241296
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- Dispelix Oy
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SELECTIVE COBALT DEPOSITION ON COPPER SURFACES
- Publication number 20240218503
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- Applied Materials, Inc.
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DEPOSITION SYSTEM AND PROCESSING SYSTEM
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- Samsung Electronics Co., Ltd.
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MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
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- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER
- Publication number 20240167149
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- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR DEPOSITING SILICON ONTO SUBSTRATES
- Publication number 20240079231
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- ASM IP HOLDING B.V.
- John Tolle
- H01 - BASIC ELECTRIC ELEMENTS
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OXIDATION BARRIERS WITH CVD SOAK PROCESSES
- Publication number 20240018647
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Nicolas Louis BREIL
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SELECTIVE DEPOSITION OF METAL OXIDES USING SILANES AS AN INHIBITOR
- Publication number 20230386831
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ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR
- Publication number 20230369024
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- Taiwan Semiconductor Manufacturing Company, Ltd.
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INTEGRATED CLEANING AND SELECTIVE MOLYBDENUM DEPOSITION PROCESSES
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- Tuerxun Ailihumaer
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INTEGRATION OF VAPOR DEPOSITION PROCESS INTO PLASMA ETCH REACTOR
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PLASMA PROCESSING GAS, PLASMA PROCESSING METHOD, AND PLASMA PROCESS...
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ETCHING METHOD AND PLASMA PROCESSING APPARATUS
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- TOKYO ELECTRON LIMITED
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SELECTIVE TANTALUM NITRIDE DEPOSITION FOR BARRIER APPLICATIONS
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- Aaron Dangerfield
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ETCHING APPARATUS
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- Yang YANG
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Gate Structure Fabrication Techniques for Reducing Gate Structure W...
- Publication number 20230162973
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OPTICAL LAMINATE, ARTICLE AND METHOD OF MANUFACTURING OPTICAL LAMINATE
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DEPOSITION OF A THIN FILM NANOCRYSTALLINE DIAMOND ON A SUBSTRATE
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METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Methods For Depositing Blocking Layers On Metal Surfaces
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Information Patent Application
DIAMOND AND PREPARATION METHOD AND APPLICATION THEREOF
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- Weidong MAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by etching with a plasma

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Protection method and device for secondary battery, secondary batte...

Methods for depositing blocking layers on metal surfaces

Integrated epitaxy and preclean system

Electrostatic chucking process

Method for conditioning a plasma processing chamber

Apparatus and method for manufacturing metal gate structures

Singapore diamond preparation method

Method for forming nanostructures on a surface and optical element

Selective cobalt deposition on copper surfaces

Solid electrolytic capacitor containing a vapor-deposited barrier film

Method of manufacturing semiconductor device

Providing multifunctional shutter disk above the workpiece in the m...

Percolation doping of inorganic-organic frameworks for multiple dev...

Method and device for depositing silicon onto substrates

Atomic layer deposition with passivation treatment

Films including a water-soluble layer and a vapor-deposited organic...

Multi-functional protective coating

Method, materials and process for native oxide removal and regrowth...

Etching method and plasma processing apparatus

Multi-layer protective coating

Coated razor blades comprising graphene

Shutter disk having lamp, power, and/or gas modules arranged at the...

Films including a water-soluble layer and a vapor-deposited inorgan...

Method and apparatus for generating highly repetitive pulsed plasmas

Methods for depositing blocking layers on metal surfaces

Process chamber for etching low k and other dielectric films

Selective cobalt deposition on copper surfaces

Surface modified depth controlled deposition for plasma based depos...

Surface roughness for flowable CVD film

Processing system and processing method

Patents Applicationslast 30 patents

METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...

LARGE GRAIN TUNGSTEN GROWTH IN FEATURES

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

FABRICATION OF TRANSMISSION TARGET FOR REDUCING EFFECTS OF ELECTRON...

APPARATUS AND METHOD FOR MANUFACTURING METAL GATE STRUCTURES

Patterning Process

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

PROTECTION METHOD AND DEVICE FOR SECONDARY BATTERY, SECONDARY BATTE...

METHOD FOR FABRICATING A BLAZED GRATING

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES

DEPOSITION SYSTEM AND PROCESSING SYSTEM

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER

METHOD AND DEVICE FOR DEPOSITING SILICON ONTO SUBSTRATES

OXIDATION BARRIERS WITH CVD SOAK PROCESSES

SELECTIVE DEPOSITION OF METAL OXIDES USING SILANES AS AN INHIBITOR

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR

INTEGRATED CLEANING AND SELECTIVE MOLYBDENUM DEPOSITION PROCESSES

INTEGRATION OF VAPOR DEPOSITION PROCESS INTO PLASMA ETCH REACTOR

PLASMA PROCESSING GAS, PLASMA PROCESSING METHOD, AND PLASMA PROCESS...

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

SELECTIVE TANTALUM NITRIDE DEPOSITION FOR BARRIER APPLICATIONS

ETCHING APPARATUS

Gate Structure Fabrication Techniques for Reducing Gate Structure W...

OPTICAL LAMINATE, ARTICLE AND METHOD OF MANUFACTURING OPTICAL LAMINATE

DEPOSITION OF A THIN FILM NANOCRYSTALLINE DIAMOND ON A SUBSTRATE

METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Methods For Depositing Blocking Layers On Metal Surfaces

DIAMOND AND PREPARATION METHOD AND APPLICATION THEREOF