by evaporation using carrier gas in contact with the source material

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CPC
C23C16/4481

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4481by evaporation using carrier gas in contact with the source material

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method of forming a semiconductor layer
- Patent number 12,224,175
- Issue date Feb 11, 2025
- Infineon Technologies AG
- Olaf Fiedler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and device for providing vapor
- Patent number 12,188,122
- Issue date Jan 7, 2025
- Singulus Technologies AG
- Oliver Hohn
- G05 - CONTROLLING REGULATING
Information Patent Grant
Ion source having different modes of operation
- Patent number 12,154,766
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process apparatus including gas supplier and method of operating th...
- Patent number 12,128,395
- Issue date Oct 29, 2024
- Samsung Electronics Co., Ltd.
- Dongsik Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for making a vapor of precise concentration by...
- Patent number 12,104,252
- Issue date Oct 1, 2024
- CeeVee Tech, LLC
- Egbert G. Woelk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,087,598
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene films from carbon sources
- Patent number 12,077,437
- Issue date Sep 3, 2024
- Energy & Environmental Research Center Foundation
- Alexander Azenkeng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 12,054,825
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solids vaporizer
- Patent number 12,037,684
- Issue date Jul 16, 2024
- Entegris, Inc.
- Benjamin Cardozo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and arrangement for forming a transition metal dichalcogenid...
- Patent number 12,006,569
- Issue date Jun 11, 2024
- Agency for Science, Technology and Research
- Swee Liang Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for making a vapor of precise concentration by...
- Patent number 11,965,243
- Issue date Apr 23, 2024
- CeeVee Tech, LLC
- Egbert G. Woelk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organo tin compound for thin film deposition and method for forming...
- Patent number 11,958,874
- Issue date Apr 16, 2024
- EGTM CO., LTD.
- Jang Keun Sim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,926,894
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pigments having a vapor deposited colorant
- Patent number 11,891,524
- Issue date Feb 6, 2024
- Viavi Solutions Inc.
- Alberto Argoitia
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vaporizer and method for manufacture thereof
- Patent number 11,885,017
- Issue date Jan 30, 2024
- WELCON INC.
- Yutaka Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ampoule for a semiconductor manufacturing precursor
- Patent number 11,859,281
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid vaporizer
- Patent number 11,788,190
- Issue date Oct 17, 2023
- ASM IP Holding B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 11,773,485
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus, source supply apparatus, and film forming m...
- Patent number 11,753,720
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Yuichi Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flavor inhaler and atomizing unit
- Patent number 11,712,065
- Issue date Aug 1, 2023
- Japan Tobacco Inc.
- Takuma Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery device, methods of manufacture and methods of use th...
- Patent number 11,680,318
- Issue date Jun 20, 2023
- Edwards Semiconductor Solutions LLC
- Egbert Woelk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus
- Patent number 11,670,688
- Issue date Jun 6, 2023
- FLOSFIA INC.
- Tokiyoshi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery systems for solid and liquid materials
- Patent number 11,661,653
- Issue date May 30, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Yumin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating zone separation for reactant evaporation system
- Patent number 11,624,113
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid vaporization/supply system of metal halide for thin film depo...
- Patent number 11,613,809
- Issue date Mar 28, 2023
- KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Atsushi Itsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing oxygen-free passivated titanium or titanium-al...
- Patent number 11,612,936
- Issue date Mar 28, 2023
- University of Science and Technology Beijing
- Fang Yang
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 11,584,990
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ampoule for a semiconductor manufacturing precursor
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- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizable source material container and solid vaporization/supply...
- Patent number 11,566,326
- Issue date Jan 31, 2023
- KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Atsushi Itsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ORGANIC VAPOR JET PRINTING SYSTEM
- Publication number 20250024746
- Publication date Jan 16, 2025
- THE REGENTS OF THE UNIVERSITY OF MICHIGAN, INNOVATION PARTNERSHIPS
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
- Publication number 20250011930
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Kentaro GOSHIMA
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PROCESS APPARATUS INCLUDING GAS SUPPLIER AND METHOD OF OPERATING TH...
- Publication number 20250010257
- Publication date Jan 9, 2025
- Samsung Electronics Co., Ltd.
- Dongsik Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MAKING A VAPOR OF PRECISE CONCENTRATION BY...
- Publication number 20240417850
- Publication date Dec 19, 2024
- CeeVee Tech, LLC
- Egbert G. WOELK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID PRECURSOR RECOVERY MODULE
- Publication number 20240401193
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Shashank Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND METHOD
- Publication number 20240392438
- Publication date Nov 28, 2024
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- Xinyuan WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR DISPENSING A GAS PHASE OF A SOLID PRECURSOR
- Publication number 20240368758
- Publication date Nov 7, 2024
- Air Liquide Electronics Systems
- Sonia PLAZA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE CHEMICAL VAPORIZER
- Publication number 20240360554
- Publication date Oct 31, 2024
- ASM IP HOLDING B.V.
- Davide Proserpio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL PRECURSOR BUBBLER ASSEMBLY WITH ROUTING STRUCTURE
- Publication number 20240350986
- Publication date Oct 24, 2024
- William L. Kimmerle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLIDS VAPORIZER
- Publication number 20240327978
- Publication date Oct 3, 2024
- Entegris, Inc.
- Benjamin Cardozo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM IMIDO ALKYL/ALLYL COMPLEXES FOR DEPOSITION OF MOLYBDENUM...
- Publication number 20240301548
- Publication date Sep 12, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Teruo BEPPU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND ARRANGEMENT FOR FORMING A TRANSITION METAL DICHALCOGENID...
- Publication number 20240301550
- Publication date Sep 12, 2024
- Agency for Science, Technology and Research
- Swee Liang Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY SYSTEM, POWDER RAW MATERIAL REPLENISHING ME...
- Publication number 20240263305
- Publication date Aug 8, 2024
- Tokyo Electron Limited
- Eiichi KOMORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A SYSTEM AND METHOD FOR MASS FLOW MEASUREMENT AND CONTROL OF PROCES...
- Publication number 20240263313
- Publication date Aug 8, 2024
- Inficon, Inc.
- Steve Lakeman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBLIMATION GAS SUPPLY SYSTEM AND SUBLIMATION GAS SUPPLY METHOD WIT...
- Publication number 20240247372
- Publication date Jul 25, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Xingyong ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS
- Publication number 20240209501
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-DISC CHEMICAL VAPOR DEPOSITION SYSTEM
- Publication number 20240175132
- Publication date May 30, 2024
- VEECO INSTRUMENTS INC.
- Ajit Paranjpe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EMBEDDING METHOD AND PROCESSING SYSTEM
- Publication number 20240153818
- Publication date May 9, 2024
- Tokyo Electron Limited
- Masato SAKAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...
- Publication number 20240141498
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...
- Publication number 20240124972
- Publication date Apr 18, 2024
- Samsung Electronics Co., Ltd.
- Kyungrim KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PIGMENTS HAVING A VAPOR DEPOSITED COLORANT
- Publication number 20240117194
- Publication date Apr 11, 2024
- VIAVI SOLUTIONS INC.
- Alberto Argoitia
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SEMICONDUCTOR MANUFACTURING MONITORING PROCESS
- Publication number 20240035164
- Publication date Feb 1, 2024
- ASM IP HOLDING, B.V.
- Jan Deckers
- G01 - MEASURING TESTING
Information Patent Application
LIQUID VAPORIZER
- Publication number 20240026538
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION SOURCE HAVING DIFFERENT MODES OF OPERATION
- Publication number 20230395357
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DELIVERY DEVICE
- Publication number 20230374657
- Publication date Nov 23, 2023
- LAM RESEARCH CORPORATION
- Thadeous BAMFORD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ESTIMATING REMAINING AMOUNT OF SOLID RAW MATAERIAL, METH...
- Publication number 20230366084
- Publication date Nov 16, 2023
- TOKYO ELECTRON LIMITED
- Yuji OBATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF CERAMIC LAYERS USING LIQUID ORGANOMETALLIC PRECURSORS
- Publication number 20230295796
- Publication date Sep 21, 2023
- X-ENERGY, LLC
- Howard Taery Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method of Manufacturing Oxide Film and Display Appara...
- Publication number 20230220547
- Publication date Jul 13, 2023
- LG Display Co., Ltd.
- Jaeyoon PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION APPARATUS AND METHOD OF USING THE SAME
- Publication number 20230203662
- Publication date Jun 29, 2023
- DENSO CORPORATION
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Information Patent Application
HIGH-TEMPERATURE QUARTZ INSERT DESIGN FOR CONTROLLING MATERIAL INPUT
- Publication number 20230183860
- Publication date Jun 15, 2023
- Massachusetts Institute of Technology
- Vladimir BULOVIC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by evaporation using carrier gas in contact with the source material

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method of forming a semiconductor layer

Process and device for providing vapor

Ion source having different modes of operation

Process apparatus including gas supplier and method of operating th...

Method and apparatus for making a vapor of precise concentration by...

Substrate processing apparatus

Graphene films from carbon sources

Bottom fed sublimation bed for high saturation efficiency in semico...

Solids vaporizer

Method and arrangement for forming a transition metal dichalcogenid...

Vaporizer, substrate processing apparatus and method for manufactur...

Method and apparatus for making a vapor of precise concentration by...

Organo tin compound for thin film deposition and method for forming...

Reactant vaporizer and related systems and methods

Pigments having a vapor deposited colorant

Vaporizer and method for manufacture thereof

Ampoule for a semiconductor manufacturing precursor

Liquid vaporizer

Bottom fed sublimation bed for high saturation efficiency in semico...

Film forming apparatus, source supply apparatus, and film forming m...

Flavor inhaler and atomizing unit

Vapor delivery device, methods of manufacture and methods of use th...

Semiconductor apparatus

Vapor delivery systems for solid and liquid materials

Heating zone separation for reactant evaporation system

Solid vaporization/supply system of metal halide for thin film depo...

Method for preparing oxygen-free passivated titanium or titanium-al...

Bottom fed sublimation bed for high saturation efficiency in semico...

Ampoule for a semiconductor manufacturing precursor

Vaporizable source material container and solid vaporization/supply...

Patents Applicationslast 30 patents

ORGANIC VAPOR JET PRINTING SYSTEM

Substrate Processing Apparatus, Substrate Processing Method, Method...

PROCESS APPARATUS INCLUDING GAS SUPPLIER AND METHOD OF OPERATING TH...

METHOD AND APPARATUS FOR MAKING A VAPOR OF PRECISE CONCENTRATION BY...

LIQUID PRECURSOR RECOVERY MODULE

SUBSTRATE TREATING APPARATUS AND METHOD

DEVICE AND METHOD FOR DISPENSING A GAS PHASE OF A SOLID PRECURSOR

SOLID SOURCE CHEMICAL VAPORIZER

CHEMICAL PRECURSOR BUBBLER ASSEMBLY WITH ROUTING STRUCTURE

SOLIDS VAPORIZER

MOLYBDENUM IMIDO ALKYL/ALLYL COMPLEXES FOR DEPOSITION OF MOLYBDENUM...

METHOD AND ARRANGEMENT FOR FORMING A TRANSITION METAL DICHALCOGENID...

RAW MATERIAL GAS SUPPLY SYSTEM, POWDER RAW MATERIAL REPLENISHING ME...

A SYSTEM AND METHOD FOR MASS FLOW MEASUREMENT AND CONTROL OF PROCES...

SUBLIMATION GAS SUPPLY SYSTEM AND SUBLIMATION GAS SUPPLY METHOD WIT...

REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS

MULTI-DISC CHEMICAL VAPOR DEPOSITION SYSTEM

EMBEDDING METHOD AND PROCESSING SYSTEM

METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...

CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...

PIGMENTS HAVING A VAPOR DEPOSITED COLORANT

SEMICONDUCTOR MANUFACTURING MONITORING PROCESS

LIQUID VAPORIZER

ION SOURCE HAVING DIFFERENT MODES OF OPERATION

VAPOR DELIVERY DEVICE

METHOD FOR ESTIMATING REMAINING AMOUNT OF SOLID RAW MATAERIAL, METH...

DEPOSITION OF CERAMIC LAYERS USING LIQUID ORGANOMETALLIC PRECURSORS

Apparatus and Method of Manufacturing Oxide Film and Display Appara...

FILM FORMATION APPARATUS AND METHOD OF USING THE SAME

HIGH-TEMPERATURE QUARTZ INSERT DESIGN FOR CONTROLLING MATERIAL INPUT