by evaporation using carrier gas in contact with the source material

Industry

CPC
C23C16/4481

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4481by evaporation using carrier gas in contact with the source material

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for making a vapor of precise concentration by...
- Patent number 11,965,243
- Issue date Apr 23, 2024
- CeeVee Tech, LLC
- Egbert G. Woelk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organo tin compound for thin film deposition and method for forming...
- Patent number 11,958,874
- Issue date Apr 16, 2024
- EGTM CO., LTD.
- Jang Keun Sim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,926,894
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pigments having a vapor deposited colorant
- Patent number 11,891,524
- Issue date Feb 6, 2024
- Viavi Solutions Inc.
- Alberto Argoitia
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vaporizer and method for manufacture thereof
- Patent number 11,885,017
- Issue date Jan 30, 2024
- WELCON INC.
- Yutaka Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ampoule for a semiconductor manufacturing precursor
- Patent number 11,859,281
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid vaporizer
- Patent number 11,788,190
- Issue date Oct 17, 2023
- ASM IP Holding B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 11,773,485
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus, source supply apparatus, and film forming m...
- Patent number 11,753,720
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Yuichi Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flavor inhaler and atomizing unit
- Patent number 11,712,065
- Issue date Aug 1, 2023
- Japan Tobacco Inc.
- Takuma Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery device, methods of manufacture and methods of use th...
- Patent number 11,680,318
- Issue date Jun 20, 2023
- Edwards Semiconductor Solutions LLC
- Egbert Woelk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus
- Patent number 11,670,688
- Issue date Jun 6, 2023
- FLOSFIA INC.
- Tokiyoshi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery systems for solid and liquid materials
- Patent number 11,661,653
- Issue date May 30, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Yumin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating zone separation for reactant evaporation system
- Patent number 11,624,113
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid vaporization/supply system of metal halide for thin film depo...
- Patent number 11,613,809
- Issue date Mar 28, 2023
- KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Atsushi Itsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing oxygen-free passivated titanium or titanium-al...
- Patent number 11,612,936
- Issue date Mar 28, 2023
- University of Science and Technology Beijing
- Fang Yang
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 11,584,990
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ampoule for a semiconductor manufacturing precursor
- Patent number 11,578,406
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizable source material container and solid vaporization/supply...
- Patent number 11,566,326
- Issue date Jan 31, 2023
- KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Atsushi Itsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a microelectronic device, and related systems an...
- Patent number 11,551,926
- Issue date Jan 10, 2023
- Micron Technology, Inc.
- Farrell M. Good
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer
- Patent number 11,535,934
- Issue date Dec 27, 2022
- Hitachi Metals, Ltd.
- Akira Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming films on substrates
- Patent number 11,505,863
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sensor array, apparatus for dispensing a vapor phase reactant to a...
- Patent number 11,430,674
- Issue date Aug 30, 2022
- ASM IP Holding B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,377,732
- Issue date Jul 5, 2022
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentration control apparatus, zero point adjustment method, and...
- Patent number 11,365,480
- Issue date Jun 21, 2022
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery device, methods of manufacture and methods of use th...
- Patent number 11,345,997
- Issue date May 31, 2022
- Ceres Technologies, Inc.
- Egbert Woelk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor source using solutions of precursors in tertiary amines
- Patent number 11,319,452
- Issue date May 3, 2022
- President and Fellows of Harvard College
- Roy Gerald Gordon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 11,293,096
- Issue date Apr 5, 2022
- Kokusai Electric Corporation
- Atsushi Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Source gas supply apparatus, film forming apparatus, and source gas...
- Patent number 11,248,296
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Satoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High efficiency vapor transport sublimation source using baffles co...
- Patent number 11,196,030
- Issue date Dec 7, 2021
- Universal Display Corporation
- William E. Quinn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...
- Publication number 20240124972
- Publication date Apr 18, 2024
- Samsung Electronics Co., Ltd.
- Kyungrim KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PIGMENTS HAVING A VAPOR DEPOSITED COLORANT
- Publication number 20240117194
- Publication date Apr 11, 2024
- VIAVI SOLUTIONS INC.
- Alberto Argoitia
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SEMICONDUCTOR MANUFACTURING MONITORING PROCESS
- Publication number 20240035164
- Publication date Feb 1, 2024
- ASM IP HOLDING, B.V.
- Jan Deckers
- G01 - MEASURING TESTING
Information Patent Application
LIQUID VAPORIZER
- Publication number 20240026538
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION SOURCE HAVING DIFFERENT MODES OF OPERATION
- Publication number 20230395357
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DELIVERY DEVICE
- Publication number 20230374657
- Publication date Nov 23, 2023
- LAM RESEARCH CORPORATION
- Thadeous BAMFORD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ESTIMATING REMAINING AMOUNT OF SOLID RAW MATAERIAL, METH...
- Publication number 20230366084
- Publication date Nov 16, 2023
- TOKYO ELECTRON LIMITED
- Yuji OBATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF CERAMIC LAYERS USING LIQUID ORGANOMETALLIC PRECURSORS
- Publication number 20230295796
- Publication date Sep 21, 2023
- X-ENERGY, LLC
- Howard Taery Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method of Manufacturing Oxide Film and Display Appara...
- Publication number 20230220547
- Publication date Jul 13, 2023
- LG Display Co., Ltd.
- Jaeyoon PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION APPARATUS AND METHOD OF USING THE SAME
- Publication number 20230203662
- Publication date Jun 29, 2023
- DENSO CORPORATION
- TATSUJI NAGAOKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-TEMPERATURE QUARTZ INSERT DESIGN FOR CONTROLLING MATERIAL INPUT
- Publication number 20230183860
- Publication date Jun 15, 2023
- Massachusetts Institute of Technology
- Vladimir BULOVIC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE SOLID SOURCE REACTANT DELIVERY SYSTEMS FOR VAPOR DEPOSITION...
- Publication number 20230175127
- Publication date Jun 8, 2023
- ASM IP HOLDING B.V.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOURCE GAS SUPPLY METHOD, SOURCE GAS SUPPLY MECHANISM, AND FILM FOR...
- Publication number 20230167555
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Tomoyuki GOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOTTOM FED SUBLIMATION BED FOR HIGH SATURATION EFFICIENCY IN SEMICO...
- Publication number 20230160064
- Publication date May 25, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL SUPPLY SYSTEM
- Publication number 20230151486
- Publication date May 18, 2023
- Tokyo Electron Limited
- Eiichi KOMORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING HEXAGONAL BORON NITRIDE COATINGS AND COMPOSITIONS...
- Publication number 20230125793
- Publication date Apr 27, 2023
- William Marsh Rice University
- Jun Lou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR
- Publication number 20230126780
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPRESSIBLE TRAY FOR SOLID CHEMICAL VAPORIZING CHAMBER
- Publication number 20230115177
- Publication date Apr 13, 2023
- Entegris, Inc.
- Scott L. Battle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMICROBIAL NANOLAMINATES USING VAPOR DEPOSITED METHODS
- Publication number 20230072705
- Publication date Mar 9, 2023
- Prerna Goradia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING FILMS ON SUBSTRATES
- Publication number 20230042777
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Bottom Fed Sublimation Bed for High Saturation Efficiency in Semico...
- Publication number 20230002893
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID PRECURSOR VAPOR PRESSURE CONTROL
- Publication number 20220411925
- Publication date Dec 29, 2022
- ASM IP HOLDING B.V.
- Michael Schmotzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR
- Publication number 20220411924
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- William J. Durand
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Bottom Fed Sublimation Bed for High Saturation Efficiency in Semico...
- Publication number 20220403512
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANO TIN COMPOUND FOR THIN FILM DEPOSITION AND METHOD FOR FORMING...
- Publication number 20220402946
- Publication date Dec 22, 2022
- EGTM Co., Ltd.
- Jang Keun SIM
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SENSOR ARRAY, APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A...
- Publication number 20220406625
- Publication date Dec 22, 2022
- ASM IP HOLDING B.V.
- Yoshio SUSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY SYSTEM AND RAW MATERIAL GAS SUPPLY METHOD
- Publication number 20220396873
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Tsuneyuki OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING GAS CONCENTRATING APPARA...
- Publication number 20220372623
- Publication date Nov 24, 2022
- TOKYO ELECTRON LIMITED
- Muneo HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT WITH SOLID MATE...
- Publication number 20220349054
- Publication date Nov 3, 2022
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des Procedes Ge...
- Kohei TARUTANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220336213
- Publication date Oct 20, 2022
- Kokusai Electric Corporation
- Yoshitomo HASHIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by evaporation using carrier gas in contact with the source material

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for making a vapor of precise concentration by...

Organo tin compound for thin film deposition and method for forming...

Reactant vaporizer and related systems and methods

Pigments having a vapor deposited colorant

Vaporizer and method for manufacture thereof

Ampoule for a semiconductor manufacturing precursor

Liquid vaporizer

Bottom fed sublimation bed for high saturation efficiency in semico...

Film forming apparatus, source supply apparatus, and film forming m...

Flavor inhaler and atomizing unit

Vapor delivery device, methods of manufacture and methods of use th...

Semiconductor apparatus

Vapor delivery systems for solid and liquid materials

Heating zone separation for reactant evaporation system

Solid vaporization/supply system of metal halide for thin film depo...

Method for preparing oxygen-free passivated titanium or titanium-al...

Bottom fed sublimation bed for high saturation efficiency in semico...

Ampoule for a semiconductor manufacturing precursor

Vaporizable source material container and solid vaporization/supply...

Methods of forming a microelectronic device, and related systems an...

Vaporizer

Methods for forming films on substrates

Sensor array, apparatus for dispensing a vapor phase reactant to a...

Reactant vaporizer and related systems and methods

Concentration control apparatus, zero point adjustment method, and...

Vapor delivery device, methods of manufacture and methods of use th...

Vapor source using solutions of precursors in tertiary amines

Substrate processing apparatus, method for manufacturing semiconduc...

Source gas supply apparatus, film forming apparatus, and source gas...

High efficiency vapor transport sublimation source using baffles co...

Patents Applicationslast 30 patents

CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...

PIGMENTS HAVING A VAPOR DEPOSITED COLORANT

SEMICONDUCTOR MANUFACTURING MONITORING PROCESS

LIQUID VAPORIZER

ION SOURCE HAVING DIFFERENT MODES OF OPERATION

VAPOR DELIVERY DEVICE

METHOD FOR ESTIMATING REMAINING AMOUNT OF SOLID RAW MATAERIAL, METH...

DEPOSITION OF CERAMIC LAYERS USING LIQUID ORGANOMETALLIC PRECURSORS

Apparatus and Method of Manufacturing Oxide Film and Display Appara...

FILM FORMATION APPARATUS AND METHOD OF USING THE SAME

HIGH-TEMPERATURE QUARTZ INSERT DESIGN FOR CONTROLLING MATERIAL INPUT

REMOTE SOLID SOURCE REACTANT DELIVERY SYSTEMS FOR VAPOR DEPOSITION...

SOURCE GAS SUPPLY METHOD, SOURCE GAS SUPPLY MECHANISM, AND FILM FOR...

BOTTOM FED SUBLIMATION BED FOR HIGH SATURATION EFFICIENCY IN SEMICO...

RAW MATERIAL SUPPLY SYSTEM

METHOD OF MAKING HEXAGONAL BORON NITRIDE COATINGS AND COMPOSITIONS...

AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR

COMPRESSIBLE TRAY FOR SOLID CHEMICAL VAPORIZING CHAMBER

ANTIMICROBIAL NANOLAMINATES USING VAPOR DEPOSITED METHODS

METHODS FOR FORMING FILMS ON SUBSTRATES

Bottom Fed Sublimation Bed for High Saturation Efficiency in Semico...

LIQUID PRECURSOR VAPOR PRESSURE CONTROL

AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR

Bottom Fed Sublimation Bed for High Saturation Efficiency in Semico...

ORGANO TIN COMPOUND FOR THIN FILM DEPOSITION AND METHOD FOR FORMING...

SENSOR ARRAY, APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A...

RAW MATERIAL GAS SUPPLY SYSTEM AND RAW MATERIAL GAS SUPPLY METHOD

SUBSTRATE PROCESSING APPARATUS, PROCESSING GAS CONCENTRATING APPARA...

SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT WITH SOLID MATE...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...