TREA

by evaporation without using carrier gas in contact with the source material

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  • CPC
  • C23C16/4485
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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4485by evaporation without using carrier gas in contact with the source material
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...
    • Publication number 20240096615
    • Publication date Mar 21, 2024
    • Kokusai Electric Corporation
    • Akinori TANAKA
    • H01 - BASIC ELECTRIC ELEMENTS
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    SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS
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    • Publication date Feb 15, 2024
    • L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
    • Toshiyuki NAKAGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SOLID SOURCE METAL-ORGANIC MOLECULAR BEAM EPITAXY FOR DEPOSITION OF...
    • Publication number 20230407520
    • Publication date Dec 21, 2023
    • Regents of the University of Minnesota
    • Bharat Jalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SOLID SOURCE SUBLIMATOR
    • Publication number 20230383402
    • Publication date Nov 30, 2023
    • ASM IP HOLDING B.V.
    • Eric James Shero
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TRAY ASSEMBLIES FOR PRECURSOR DELIVERY SYSTEMS AND RELATED METHODS
    • Publication number 20230366085
    • Publication date Nov 16, 2023
    • Entegris, Inc.
    • Benjamin Harrison Olson
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SOLID SOURCE SUBLIMATOR
    • Publication number 20230313370
    • Publication date Oct 5, 2023
    • ASM IP HOLDING B.V.
    • Eric James Shero
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus and Method of Manufacturing Oxide Film and Display Appara...
    • Publication number 20230220547
    • Publication date Jul 13, 2023
    • LG Display Co., Ltd.
    • Jaeyoon PARK
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SOLID SOURCE SUBLIMATOR
    • Publication number 20230183861
    • Publication date Jun 15, 2023
    • ASM IP HOLDING B.V.
    • Eric James Shero
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS
    • Publication number 20230183856
    • Publication date Jun 15, 2023
    • ASM IP Holding B.V.
    • Ivo Johannes Raaijmakers
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEATER DESIGN SOLUTIONS FOR CHEMICAL DELIVERY SYSTEMS
    • Publication number 20230175128
    • Publication date Jun 8, 2023
    • LAM RESEARCH CORPORATION
    • Davinder Sharma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
    • Publication number 20230077197
    • Publication date Mar 9, 2023
    • Kokusai Electric Corporation
    • Akinori TANAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR DELIVERY SYSTEMS, PRECURSOR SUPPLY PACKAGES, AND RELATED...
    • Publication number 20230068384
    • Publication date Mar 2, 2023
    • Entegris, Inc.
    • Paolo Moreschini
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COMPOSITE COATING AND FABRICATION METHOD THEREOF
    • Publication number 20230027265
    • Publication date Jan 26, 2023
    • NANO AND ADVANCED MATERIALS INSTITUTE LIMITED
    • Song WANG
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    LOW TEMPERATURE GROWTH OF TRANSITION METAL CHALCOGENIDES
    • Publication number 20220411918
    • Publication date Dec 29, 2022
    • Applied Materials, Inc.
    • Chandan Das
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS AND A METHOD OF FORMING...
    • Publication number 20220389578
    • Publication date Dec 8, 2022
    • ASM IP HOLDING B.V.
    • Jan Willem Maes
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...
    • Publication number 20220351988
    • Publication date Nov 3, 2022
    • Applied Materials, Inc.
    • ALEXANDER LERNER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE TREATING METHOD
    • Publication number 20220307130
    • Publication date Sep 29, 2022
    • SCREEN Holdings Co., Ltd.
    • Shogo Kunieda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD
    • Publication number 20220259730
    • Publication date Aug 18, 2022
    • UNIVERSITETET I OSLO
    • Henrik Hovde SØNSTEBY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD
    • Publication number 20220251703
    • Publication date Aug 11, 2022
    • SHOWA DENKO K.K.
    • Takanori AOKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR SOURCE ARRANGEMENT AND ATOMIC LAYER DEPOSITION APPARATUS
    • Publication number 20220243328
    • Publication date Aug 4, 2022
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR SUPPLY CHAMBER
    • Publication number 20220220614
    • Publication date Jul 14, 2022
    • BENEQ OY
    • Johannes WESSLIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ENHANCED NB3SN SURFACES FOR SUPERCONDUCING CAVITIES
    • Publication number 20220151055
    • Publication date May 12, 2022
    • FERMI RESEARCH ALLIANCE, LLC
    • Sam Posen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
    • Publication number 20220042170
    • Publication date Feb 10, 2022
    • Kokusai Electric Corporation
    • Kosuke TAKAGI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Systems And Methods For Continuous Deposition
    • Publication number 20210363642
    • Publication date Nov 25, 2021
    • Redwire Space, Inc.
    • Patrick Flowers
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma Assisted Parylene Deposition
    • Publication number 20210340672
    • Publication date Nov 4, 2021
    • HZO, Inc.
    • Robert Eugene Askin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GRAPHENE SYNTHESIS
    • Publication number 20210292891
    • Publication date Sep 23, 2021
    • Commonwealth Scientific and Industrial Research Organisation
    • Dong Han Seo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CATALYTIC CHEMICAL VAPOUR DEPOSITION
    • Publication number 20210198110
    • Publication date Jul 1, 2021
    • AGT Management & Engineering AG
    • Aida FUENTE-CUESTA
    • B82 - NANO-TECHNOLOGY
  • Information Patent Application

    FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES
    • Publication number 20210198783
    • Publication date Jul 1, 2021
    • First Solar, Inc.
    • Markus Eberhard Beck
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHEMICAL SUPPLY APPARATUS, METHOD FOR REMOVING PARTICLES FROM CHEMI...
    • Publication number 20210130951
    • Publication date May 6, 2021
    • Semes Co., LTD.
    • Yong Hoon HONG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPORIZER, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTUR...
    • Publication number 20210079523
    • Publication date Mar 18, 2021
    • Kokusai Electric Corporation
    • Hirohisa YAMAZAKI
    • H01 - BASIC ELECTRIC ELEMENTS