by exposing the substrates to reactive gases intermittently

Industry

CPC
C23C14/0073

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0073by exposing the substrates to reactive gases intermittently

Industries

Patents Grantslast 30 patents

Information Patent Grant
Coating with enhanced sliding properties
- Patent number 11,629,306
- Issue date Apr 18, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Jurgen Ramm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inorganic graded barrier film and methods for their manufacture
- Patent number 10,745,795
- Issue date Aug 18, 2020
- Agency for Science, Technology and Research
- Senthil Kumar Ramadas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hard lubricating coating film and hard lubricating coating film-cov...
- Patent number 10,227,687
- Issue date Mar 12, 2019
- OSG Corporation
- Mei Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Coating with enhanced sliding properties
- Patent number 10,041,017
- Issue date Aug 7, 2018
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Jurgen Ramm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing acoustic wave device
- Patent number 9,584,088
- Issue date Feb 28, 2017
- Murata Manufacturing Co., Ltd.
- Taku Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing α crystal structure-based alumina films
- Patent number 9,260,776
- Issue date Feb 16, 2016
- Kobe Steel, Ltd.
- Toshimitsu Kohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chromium nitride ion-plating coating and its production method, as...
- Patent number 8,597,797
- Issue date Dec 3, 2013
- Kabushiki Kaisha Riken
- Takuma Sekiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-timing method for depositing oxynitride films by reactive R.F....
- Patent number 8,372,250
- Issue date Feb 12, 2013
- National Science and Technology Development Agency
- Jiti Nukeaw
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing alumna coating film having alpha-type crystal...
- Patent number 7,967,957
- Issue date Jun 28, 2011
- Kobe Steel, Ltd.
- Toshimitsu Kohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturable reliable diffusion-barrier
- Patent number 7,674,707
- Issue date Mar 9, 2010
- Texas Instruments Incorporated
- Noel M. Russell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid cycle time gas burster
- Patent number 7,300,558
- Issue date Nov 27, 2007
- Seagate Technology LLC
- Charles F. Brucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Long-Term sputtering method
- Patent number 6,860,974
- Issue date Mar 1, 2005
- Canon Kabushiki Kaisha
- Hiroshi Echizen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low pressure coated article with polymeric basecoat having the appe...
- Patent number 6,764,775
- Issue date Jul 20, 2004
- Vapor Technologies, Inc.
- Guocun Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming refractory metal-silicon-nitrogen capacitors and...
- Patent number 6,707,097
- Issue date Mar 16, 2004
- International Business Machines Corporation
- Cyril Cabral
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic film
- Patent number 6,632,520
- Issue date Oct 14, 2003
- Matsushita Electric Industrial Co., Ltd.
- Masayoshi Hiramoto
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Optical information recording medium and method of manufacturing th...
- Patent number 6,607,869
- Issue date Aug 19, 2003
- Matsushita Electric Industrial Co., Ltd.
- Rie Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated article with polymeric basecoat having the appearance of sta...
- Patent number 6,558,816
- Issue date May 6, 2003
- Vapor Technologies, Inc.
- Guocun Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated article having the appearance of stainless steel
- Patent number 6,548,192
- Issue date Apr 15, 2003
- Vapor Technologies, Inc.
- Guocun Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming refractory metal-silicon-nitrogen capacitors and...
- Patent number 6,524,908
- Issue date Feb 25, 2003
- International Business Machines Corporation
- Cyril Cabral
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating transparent conductive ITO film
- Patent number 6,425,990
- Issue date Jul 30, 2002
- Anelva Corporation
- Keizi Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a multilayer film
- Patent number 6,217,723
- Issue date Apr 17, 2001
- U.S. Philips Corporation
- Pascal J. H. Bloemen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Article having a decorative and protective multi-layer coating
- Patent number 5,989,730
- Issue date Nov 23, 1999
- Masco Corporation
- Rolin W. Sugg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Disordered coating with cubic boron nitride dispersed therein
- Patent number 5,928,771
- Issue date Jul 27, 1999
- Diamond Black Technologies, Inc.
- A. Bruce DeWald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer material, anti-erosion and anti-abrasion coating incorpo...
- Patent number 5,702,829
- Issue date Dec 30, 1997
- Commissariat a l'Energie Atomique
- Serge Paidassi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer material, anti-erosion and anti-abrasion coating incorpo...
- Patent number 5,547,767
- Issue date Aug 20, 1996
- Commissariat a l'Energie Atomique
- Serge Paidassi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum nitride deposition using an AlN/Al sputter cycle technique
- Patent number 5,232,571
- Issue date Aug 3, 1993
- Iowa State University Research Foundation, Inc.
- Steve D. Braymen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for reducing the reflectivity of sputtered films
- Patent number 5,128,009
- Issue date Jul 7, 1992
- Siemens Aktiengesellschaft
- Hellmut Joswig
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homogeneous fine grained metal film on substrate and manufacturing...
- Patent number 4,923,526
- Issue date May 8, 1990
- Mitsubishi Denki Kabushiki Kaisha
- Hiroshi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homogeneous fine grained metal film on substrate and manufacturing...
- Patent number 4,726,983
- Issue date Feb 23, 1988
- Mitsubishi Denki Kabushiki Kaisha
- Hiroshi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid rate reactive sputtering of metallic compounds
- Patent number 4,428,812
- Issue date Jan 31, 1984
- Borg-Warner Corporation
- William D. Sproul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20220403503
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING WITH ENHANCED SLIDING PROPERTIES
- Publication number 20190024005
- Publication date Jan 24, 2019
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Jurgen Ramm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM TRANSISTOR, ARRAY SUBSTRATE, AND DISPLAY APPARATUS, AND T...
- Publication number 20180033642
- Publication date Feb 1, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiaoyong LU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARD LUBRICATING COATING FILM AND HARD LUBRICATING COATING FILM-COV...
- Publication number 20170037502
- Publication date Feb 9, 2017
- OSG Corporation
- Mei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING WITH ENHANCED SLIDING PROPERTIES
- Publication number 20150011444
- Publication date Jan 8, 2015
- OERLIKON TRADING AG, TRUBBACH
- Jurgen Ramm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CONTROLLING LITHIUM UNIFORMITY
- Publication number 20130015054
- Publication date Jan 17, 2013
- SAGE Electrochromics, Inc.
- Erik Bjornard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CONTROLLING LITHIUM UNIFORMITY
- Publication number 20120255855
- Publication date Oct 11, 2012
- SAGE Electrochromics, Inc.
- Erik Bjornard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PRODUCING ALPHA CRYSTAL STRUCTURE-BASED ALUMINA FILMS
- Publication number 20110220486
- Publication date Sep 15, 2011
- Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel Ltd)
- Toshimitsu KOHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INORGANIC GRADED BARRIER FILM AND METHODS FOR THEIR MANUFACTURE
- Publication number 20110151173
- Publication date Jun 23, 2011
- AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
- Senthil Kumar Ramadas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYERED COATED CUTTING TOOL
- Publication number 20110135898
- Publication date Jun 9, 2011
- Sandvik Intellectual Property AB
- Johan BÖHLMARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHROMIUM NITRIDE ION-PLATING COATING AND ITS PRODUCTION METHOD, AS...
- Publication number 20100295251
- Publication date Nov 25, 2010
- Takuma Sekiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURABLE RELIABLE DIFFUSION-BARRIER
- Publication number 20090166865
- Publication date Jul 2, 2009
- Noel M. RUSSELL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas-timing method for depositing oxynitride films by reactive R.F....
- Publication number 20090026065
- Publication date Jan 29, 2009
- National Science Technology Development Agency
- Jiti Nukeaw
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTER DEPOSITION OF A TRANSPARENT CONDUCTIVE FILM
- Publication number 20080153280
- Publication date Jun 26, 2008
- APPLIED MATERIALS, INC.
- Yanping Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR REACTIVE SPUTTERING
- Publication number 20070151842
- Publication date Jul 5, 2007
- FLUENS CORPORATION
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING CONDUCTIVE COMPLEX OXIDE LAYER, AND METHOD...
- Publication number 20070095653
- Publication date May 3, 2007
- SEIKO EPSON CORPORATION
- Koji OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Anode reactive dual magnetron sputtering
- Publication number 20070068794
- Publication date Mar 29, 2007
- Barret Lippey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for preparing alumna coating film having alpha-type crystal...
- Publication number 20060006059
- Publication date Jan 12, 2006
- KABUSHIKI KAISHA KOBE SEIKO SHO
- Toshimitsu Kohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rapid cycle time gas burster
- Publication number 20050082161
- Publication date Apr 21, 2005
- Seagate Technology LLC
- Charles F. Brucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film and method for producing the same
- Publication number 20030211360
- Publication date Nov 13, 2003
- Masayoshi Hiramoto
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Method for forming refractory metal-silicon-nitrogen capacitors and...
- Publication number 20030107075
- Publication date Jun 12, 2003
- International Business Machines Corporation
- Cyril Cabral
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Long-term sputtering method
- Publication number 20030085116
- Publication date May 8, 2003
- Hiroshi Echizen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming refractory metal-silicon-nitrogen capacitors and...
- Publication number 20020185689
- Publication date Dec 12, 2002
- International Business Machines Corporation
- Cyril Cabral
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low pressure coated article having the appearance of stainless steel
- Publication number 20020146597
- Publication date Oct 10, 2002
- Guocun Chen
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Coated article having the appearance of stainless steel
- Publication number 20020146579
- Publication date Oct 10, 2002
- Guocun Chen
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Coated article with polymeric basecoat having the appearance of sta...
- Publication number 20020146595
- Publication date Oct 10, 2002
- Guocun Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low pressure coated article with polymeric basecoat having the appe...
- Publication number 20020146596
- Publication date Oct 10, 2002
- Guocun Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by exposing the substrates to reactive gases intermittently

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Coating with enhanced sliding properties

Inorganic graded barrier film and methods for their manufacture

Hard lubricating coating film and hard lubricating coating film-cov...

Coating with enhanced sliding properties

Method for manufacturing acoustic wave device

Method of producing α crystal structure-based alumina films

Chromium nitride ion-plating coating and its production method, as...

Gas-timing method for depositing oxynitride films by reactive R.F....

Method for preparing alumna coating film having alpha-type crystal...

Manufacturable reliable diffusion-barrier

Rapid cycle time gas burster

Long-Term sputtering method

Low pressure coated article with polymeric basecoat having the appe...

Method for forming refractory metal-silicon-nitrogen capacitors and...

Magnetic film

Optical information recording medium and method of manufacturing th...

Coated article with polymeric basecoat having the appearance of sta...

Coated article having the appearance of stainless steel

Method for forming refractory metal-silicon-nitrogen capacitors and...

Method for fabricating transparent conductive ITO film

Method of manufacturing a multilayer film

Article having a decorative and protective multi-layer coating

Disordered coating with cubic boron nitride dispersed therein

Multilayer material, anti-erosion and anti-abrasion coating incorpo...

Multilayer material, anti-erosion and anti-abrasion coating incorpo...

Aluminum nitride deposition using an AlN/Al sputter cycle technique

Process for reducing the reflectivity of sputtered films

Homogeneous fine grained metal film on substrate and manufacturing...

Homogeneous fine grained metal film on substrate and manufacturing...

Rapid rate reactive sputtering of metallic compounds

Patents Applicationslast 30 patents

FILM FORMING APPARATUS AND FILM FORMING METHOD

COATING WITH ENHANCED SLIDING PROPERTIES

THIN FILM TRANSISTOR, ARRAY SUBSTRATE, AND DISPLAY APPARATUS, AND T...

HARD LUBRICATING COATING FILM AND HARD LUBRICATING COATING FILM-COV...

COATING WITH ENHANCED SLIDING PROPERTIES

METHOD OF CONTROLLING LITHIUM UNIFORMITY

METHOD OF CONTROLLING LITHIUM UNIFORMITY

METHOD OF PRODUCING ALPHA CRYSTAL STRUCTURE-BASED ALUMINA FILMS

INORGANIC GRADED BARRIER FILM AND METHODS FOR THEIR MANUFACTURE

MULTILAYERED COATED CUTTING TOOL

CHROMIUM NITRIDE ION-PLATING COATING AND ITS PRODUCTION METHOD, AS...

MANUFACTURABLE RELIABLE DIFFUSION-BARRIER

Gas-timing method for depositing oxynitride films by reactive R.F....

REACTIVE SPUTTER DEPOSITION OF A TRANSPARENT CONDUCTIVE FILM

APPARATUS FOR REACTIVE SPUTTERING

METHOD FOR MANUFACTURING CONDUCTIVE COMPLEX OXIDE LAYER, AND METHOD...

Anode reactive dual magnetron sputtering

Method for preparing alumna coating film having alpha-type crystal...

Rapid cycle time gas burster

Film and method for producing the same

Method for forming refractory metal-silicon-nitrogen capacitors and...

Long-term sputtering method

Method for forming refractory metal-silicon-nitrogen capacitors and...

Low pressure coated article having the appearance of stainless steel

Coated article having the appearance of stainless steel

Coated article with polymeric basecoat having the appearance of sta...

Low pressure coated article with polymeric basecoat having the appe...