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CPC
C23C16/48

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/48by irradiation

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ real-time sensing and compensation of non-uniformities in s...
- Patent number 12,142,464
- Issue date Nov 12, 2024
- Lam Research Corporation
- Changyou Jing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming structures using a neutral beam
- Patent number 12,129,548
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer functional fiber and method of making
- Patent number 12,133,465
- Issue date Oct 29, 2024
- FREE FORM FIBERS, LLC
- Joseph Pegna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Superconductor flux pinning without columnar defects
- Patent number 12,120,964
- Issue date Oct 15, 2024
- MetOx International, Inc.
- Mikhail Novozhilov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,104,251
- Issue date Oct 1, 2024
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Window for chemical vapor deposition systems and related methods
- Patent number 12,084,770
- Issue date Sep 10, 2024
- GlobalWafers Co., Ltd.
- Chun-Chin Tu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surfacing materials and method of manufacture, including a textured...
- Patent number 12,076,746
- Issue date Sep 3, 2024
- WILSONART LLC
- Muyuan M Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for long-term storage of information and storage medium ther...
- Patent number 12,070,818
- Issue date Aug 27, 2024
- Ceramic Data Solutions GmbH
- Martin Kunze
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for deposition of silicon-conta...
- Patent number 12,049,695
- Issue date Jul 30, 2024
- VERSUM MATERIALS US, LLC
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and ion beam irradiati...
- Patent number 12,040,155
- Issue date Jul 16, 2024
- Kioxia Corporation
- Junichi Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming method of component and substrate processing system
- Patent number 11,981,993
- Issue date May 14, 2024
- Tokyo Electron Limited
- Michishige Saito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Quantum printing methods
- Patent number 11,981,994
- Issue date May 14, 2024
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Supplemental energy for low temperature processes
- Patent number 11,981,999
- Issue date May 14, 2024
- Applied Materials, Inc.
- David K. Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for chemical vapour deposition
- Patent number 11,970,765
- Issue date Apr 30, 2024
- Ionautics AB
- Henrik Pedersen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,967,501
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming structures, semiconductor processing systems, an...
- Patent number 11,959,173
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quantum printing nanostructures within carbon nanopores
- Patent number 11,939,671
- Issue date Mar 26, 2024
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Plasma processing method
- Patent number 11,915,951
- Issue date Feb 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laser-assisted metal-organic chemical vapor deposition devices and...
- Patent number 11,846,024
- Issue date Dec 19, 2023
- OHIO STATE INNOVATION FOUNDATION
- Hongping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of protecting a magnetic layer of a magnetic recording medium
- Patent number 11,848,037
- Issue date Dec 19, 2023
- National University of Singapore
- Barbaros Oezyilmaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene printing
- Patent number 11,834,739
- Issue date Dec 5, 2023
- Hewlett-Packard Development Company, L.P.
- Robert Ionescu
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Depositive shielding for fiducial protection from redeposition
- Patent number 11,817,395
- Issue date Nov 14, 2023
- FEI Company
- Sean Morgan-Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming a patterned layer of carbon, metho...
- Patent number 11,807,937
- Issue date Nov 7, 2023
- ASML Netherlands B.V.
- Sonia Castellanos Ortega
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing anti-coking protective coatings on aerospace...
- Patent number 11,794,382
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- David A. Britz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making a multi-composition fiber
- Patent number 11,788,213
- Issue date Oct 17, 2023
- FREE FORM FIBERS, LLC
- Shay L. Harrison
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid precursor feed system for thin film depositions
- Patent number 11,781,216
- Issue date Oct 10, 2023
- MetOx Technologies, Inc.
- Mikhail Novozhilov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite tape with LCVD-formed additive material in constituent la...
- Patent number 11,761,085
- Issue date Sep 19, 2023
- FREE FORM FIBERS, LLC
- John L. Schneiter
- B32 - LAYERED PRODUCTS
Information Patent Grant
Cobalt precursors
- Patent number 11,761,086
- Issue date Sep 19, 2023
- Entegris, Inc.
- Thomas H. Baum
- C07 - ORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
Method for Long-Term Storage of Information and Storage Medium Ther...
- Publication number 20240416458
- Publication date Dec 19, 2024
- Ceramic Data Solution GmbH
- Martin Kunze
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GENERATION OF AN ACTIVE OXYGEN SPECIES
- Publication number 20240417858
- Publication date Dec 19, 2024
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS
- Publication number 20240401201
- Publication date Dec 5, 2024
- GLOBALWAFERS CO., LTD.
- Chun-Chin Tu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240371612
- Publication date Nov 7, 2024
- JUSUNG ENGINEERING CO., LTD.
- Young Rok KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR SELECTIVE ATOMIC LAYER DEPOSITION
- Publication number 20240368759
- Publication date Nov 7, 2024
- Lotus Applied Technology, LLC
- ERIC DICKEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...
- Publication number 20240337011
- Publication date Oct 10, 2024
- BETONE TECHNOLOGY SHANGHAI, INC.
- Yongjun FENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF COATING A COATING REGION ON A FRONT SURFACE OF A SUBSTRAT...
- Publication number 20240327979
- Publication date Oct 3, 2024
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRAPHENE COATED NON-METALLIC SURFACES, DEVICES AND METHOD THEREOF
- Publication number 20240301554
- Publication date Sep 12, 2024
- 2D GENERATION LTD.
- Doron Yaacov NAVEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR PRODUCING A METAL STRUCTURE
- Publication number 20240295021
- Publication date Sep 5, 2024
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Thomas KLOTZBÜCHER
- G02 - OPTICS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240295024
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Makoto TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240254630
- Publication date Aug 1, 2024
- Kokusai Electric Corporation
- Hideo TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESTORING METHOD OF CONSUMED COMPONENT
- Publication number 20240254620
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Michishige Saito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVI...
- Publication number 20240240317
- Publication date Jul 18, 2024
- The Regents of the University of Colorado, a Body Corporate
- Steven George
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTO...
- Publication number 20240234096
- Publication date Jul 11, 2024
- Samsung Electronics Co., Ltd.
- Nam Jin CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240234178
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Daiki KIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...
- Publication number 20240209510
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- G01 - MEASURING TESTING
Information Patent Application
CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...
- Publication number 20240209544
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRODUCING COATED TEXTILES USING PHOTO-INITIATED CHEMICAL VAPOR DEPO...
- Publication number 20240209567
- Publication date Jun 27, 2024
- Soliyarn, Inc.
- Trisha Lionel Andrew
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20240213041
- Publication date Jun 27, 2024
- SEMES CO., LTD.
- Taeshin KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
2D Layered Thin Film Structure
- Publication number 20240117487
- Publication date Apr 11, 2024
- NATIONAL APPLIED RESEARCH LABORATORIES
- Shu-Ju Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR MONITORING A CONDITION OF LAMPS USED IN SEM...
- Publication number 20240110283
- Publication date Apr 4, 2024
- ASM IP HOLDING, B.V.
- Peter Bryan Ruckle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER ARRANGEMENTS WITH LASER SOURCES, SEMICONDUCTOR PROCESSING S...
- Publication number 20240112930
- Publication date Apr 4, 2024
- ASM IP HOLDING, B.V.
- Fan Gao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...
- Publication number 20240062990
- Publication date Feb 22, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Sean Kashy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240060185
- Publication date Feb 22, 2024
- Samsung Electronics Co., Ltd.
- Yeontae KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...
- Publication number 20240035163
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Felix LANGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY
- Publication number 20240040672
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Sathya Shrinivas CHARY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL
- Publication number 20240035161
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHO...
- Publication number 20240011150
- Publication date Jan 11, 2024
- ASML NETHERLANDS B.V.
- Sonia CASTELLANOS ORTEGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING MODULE AND LASER BEAM PROVIDING METHOD
- Publication number 20240006167
- Publication date Jan 4, 2024
- SEMES CO., LTD.
- Kwang Ryul KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
- Publication number 20230366083
- Publication date Nov 16, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY

by irradiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film formation method and film formation device

In situ real-time sensing and compensation of non-uniformities in s...

Method of forming structures using a neutral beam

Multilayer functional fiber and method of making

Superconductor flux pinning without columnar defects

Substrate processing method and substrate processing apparatus

Window for chemical vapor deposition systems and related methods

Surfacing materials and method of manufacture, including a textured...

Method for long-term storage of information and storage medium ther...

Chamber architecture for epitaxial deposition and advanced epitaxia...

Compositions and methods using same for deposition of silicon-conta...

Method of manufacturing semiconductor device and ion beam irradiati...

Forming method of component and substrate processing system

Quantum printing methods

Supplemental energy for low temperature processes

Method and apparatus for chemical vapour deposition

Substrate processing apparatus and method of manufacturing semicond...

Methods of forming structures, semiconductor processing systems, an...

Quantum printing nanostructures within carbon nanopores

Plasma processing method

Laser-assisted metal-organic chemical vapor deposition devices and...

Method of protecting a magnetic layer of a magnetic recording medium

Graphene printing

Depositive shielding for fiducial protection from redeposition

Method and apparatus for forming a patterned layer of carbon, metho...

Methods for depositing anti-coking protective coatings on aerospace...

Method of making a multi-composition fiber

Solid precursor feed system for thin film depositions

Composite tape with LCVD-formed additive material in constituent la...

Cobalt precursors

Patents Applicationslast 30 patents

Method for Long-Term Storage of Information and Storage Medium Ther...

GENERATION OF AN ACTIVE OXYGEN SPECIES

WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS

SUBSTRATE PROCESSING APPARATUS

METHODS AND SYSTEMS FOR SELECTIVE ATOMIC LAYER DEPOSITION

MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...

METHOD OF COATING A COATING REGION ON A FRONT SURFACE OF A SUBSTRAT...

GRAPHENE COATED NON-METALLIC SURFACES, DEVICES AND METHOD THEREOF

METHOD AND SYSTEM FOR PRODUCING A METAL STRUCTURE

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

RESTORING METHOD OF CONSUMED COMPONENT

ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVI...

PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTO...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...

CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...

PRODUCING COATED TEXTILES USING PHOTO-INITIATED CHEMICAL VAPOR DEPO...

SUBSTRATE PROCESSING DEVICE

2D Layered Thin Film Structure

SYSTEMS AND METHODS FOR MONITORING A CONDITION OF LAMPS USED IN SEM...

CHAMBER ARRANGEMENTS WITH LASER SOURCES, SEMICONDUCTOR PROCESSING S...

ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...

SUBSTRATE PROCESSING APPARATUS

METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...

TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY

ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHO...

SUBSTRATE PROCESSING MODULE AND LASER BEAM PROVIDING METHOD

QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES