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CPC
C23C16/48

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/48by irradiation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Vapor phase growth method using reflector with changeable pattern
- Patent number 12,338,543
- Issue date Jun 24, 2025
- NUFLARE TECHNOLOGY, INC.
- Yoshitaka Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of repairing ceramic composite articles
- Patent number 12,331,395
- Issue date Jun 17, 2025
- RTX Corporation
- Olivier H. Sudre
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Index-gradient structures with nanovoided materials and correspondi...
- Patent number 12,326,541
- Issue date Jun 10, 2025
- Meta Platforms Technologies, LLC
- Andrew John Ouderkirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming a patterned layer of material
- Patent number 12,325,911
- Issue date Jun 10, 2025
- ASML Netherlands B.V.
- Tamara Druzhinina
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High purity fiber feedstock for loose grain production
- Patent number 12,312,682
- Issue date May 27, 2025
- FREE FORM FIBERS, LLC
- Shay L. Harrison
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Enhanced deposition rate by thermal isolation cover for GIS manipul...
- Patent number 12,308,207
- Issue date May 20, 2025
- Applied Materials Israel Ltd.
- Sean Kashy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming system and film forming method
- Patent number 12,297,539
- Issue date May 13, 2025
- Tokyo Electron Limited
- Syuji Nozawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Fiber structures with embedded sensors
- Patent number 12,241,160
- Issue date Mar 4, 2025
- FREE FORM FIBERS, LLC
- Joseph Pegna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature-controlled surface with a cryo-nanomanipulator for impr...
- Patent number 12,230,473
- Issue date Feb 18, 2025
- Applied Materials Israel Ltd.
- Yehuda Zur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lamp filament having a pitch gradient and method of making
- Patent number 12,198,922
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Vilen K. Nestorov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activa...
- Patent number 12,195,850
- Issue date Jan 14, 2025
- Nano-Master, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, gas nozzle and method of manufactur...
- Patent number 12,188,124
- Issue date Jan 7, 2025
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and film forming appar...
- Patent number 12,191,193
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activa...
- Patent number 12,180,586
- Issue date Dec 31, 2024
- NanoMaster, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for synthesising core-shell silicon-germanium nanoparticles...
- Patent number 12,183,910
- Issue date Dec 31, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Nathalie Herlin-Boime
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ real-time sensing and compensation of non-uniformities in s...
- Patent number 12,142,464
- Issue date Nov 12, 2024
- Lam Research Corporation
- Changyou Jing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming structures using a neutral beam
- Patent number 12,129,548
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer functional fiber and method of making
- Patent number 12,133,465
- Issue date Oct 29, 2024
- FREE FORM FIBERS, LLC
- Joseph Pegna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Superconductor flux pinning without columnar defects
- Patent number 12,120,964
- Issue date Oct 15, 2024
- MetOx International, Inc.
- Mikhail Novozhilov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,104,251
- Issue date Oct 1, 2024
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Window for chemical vapor deposition systems and related methods
- Patent number 12,084,770
- Issue date Sep 10, 2024
- GlobalWafers Co., Ltd.
- Chun-Chin Tu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surfacing materials and method of manufacture, including a textured...
- Patent number 12,076,746
- Issue date Sep 3, 2024
- WILSONART LLC
- Muyuan M Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for long-term storage of information and storage medium ther...
- Patent number 12,070,818
- Issue date Aug 27, 2024
- Ceramic Data Solutions GmbH
- Martin Kunze
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for deposition of silicon-conta...
- Patent number 12,049,695
- Issue date Jul 30, 2024
- VERSUM MATERIALS US, LLC
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and ion beam irradiati...
- Patent number 12,040,155
- Issue date Jul 16, 2024
- Kioxia Corporation
- Junichi Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming method of component and substrate processing system
- Patent number 11,981,993
- Issue date May 14, 2024
- Tokyo Electron Limited
- Michishige Saito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Quantum printing methods
- Patent number 11,981,994
- Issue date May 14, 2024
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Supplemental energy for low temperature processes
- Patent number 11,981,999
- Issue date May 14, 2024
- Applied Materials, Inc.
- David K. Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Compositions and Methods Using Same for Deposition of Silicon-Conta...
- Publication number 20250188605
- Publication date Jun 12, 2025
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...
- Publication number 20250183066
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Abbas RASTEGAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAYER DEPOSITION APPARATUS AND LAYER DEPOSITION METHOD
- Publication number 20250137136
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Hunyong Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMEN...
- Publication number 20250129511
- Publication date Apr 24, 2025
- Advanced Micro-Fabrication Equipment Inc. China
- Heng TAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF REPAIRING EXTREME ULTRAVIOLET PHOTOMASKS
- Publication number 20250130490
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Hui HSIEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hard X-ray Compatible Chamber for High Temperature In-Situ Material...
- Publication number 20250109498
- Publication date Apr 3, 2025
- UChicago Argonne, LLC
- Katherine J. Harmon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION-RESISTANT MEMBER PRODUCTION METHOD AND LASER CVD DEVICE
- Publication number 20250101591
- Publication date Mar 27, 2025
- NIPPON LIGHT METAL COMPANY, LTD.
- Masanori ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING APPARATUS, PROCESS CHAMBER, AND METHOD OF COATING A SUBSTRA...
- Publication number 20250101592
- Publication date Mar 27, 2025
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFAC...
- Publication number 20250092522
- Publication date Mar 20, 2025
- Samsung Electronics Co., Ltd.
- Jinbum Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE MULTIPLE FILAMENT ION BEAM DEPOSITION SYSTEM
- Publication number 20250087441
- Publication date Mar 13, 2025
- INTEVAC, INC.
- Thomas P. Nolan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...
- Publication number 20250069866
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Changyou JING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF OPERATING THEREOF
- Publication number 20250046632
- Publication date Feb 6, 2025
- Rohm Co., Ltd.
- Makoto TAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...
- Publication number 20250034709
- Publication date Jan 30, 2025
- Semsysco GmbH
- Andreas Gleissner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-SUBSTRATE PROCESSING SYSTEM
- Publication number 20250034708
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Quantum Printing Nanostructures Within Carbon Nanopores
- Publication number 20250034702
- Publication date Jan 30, 2025
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for Long-Term Storage of Information and Storage Medium Ther...
- Publication number 20240416458
- Publication date Dec 19, 2024
- Ceramic Data Solution GmbH
- Martin Kunze
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GENERATION OF AN ACTIVE OXYGEN SPECIES
- Publication number 20240417858
- Publication date Dec 19, 2024
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS
- Publication number 20240401201
- Publication date Dec 5, 2024
- GLOBALWAFERS CO., LTD.
- Chun-Chin Tu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240371612
- Publication date Nov 7, 2024
- JUSUNG ENGINEERING CO., LTD.
- Young Rok KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR SELECTIVE ATOMIC LAYER DEPOSITION
- Publication number 20240368759
- Publication date Nov 7, 2024
- Lotus Applied Technology, LLC
- ERIC DICKEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...
- Publication number 20240337011
- Publication date Oct 10, 2024
- BETONE TECHNOLOGY SHANGHAI, INC.
- Yongjun FENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF COATING A COATING REGION ON A FRONT SURFACE OF A SUBSTRAT...
- Publication number 20240327979
- Publication date Oct 3, 2024
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRAPHENE COATED NON-METALLIC SURFACES, DEVICES AND METHOD THEREOF
- Publication number 20240301554
- Publication date Sep 12, 2024
- 2D GENERATION LTD.
- Doron Yaacov NAVEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR PRODUCING A METAL STRUCTURE
- Publication number 20240295021
- Publication date Sep 5, 2024
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Thomas KLOTZBÜCHER
- G02 - OPTICS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240295024
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Makoto TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240254630
- Publication date Aug 1, 2024
- Kokusai Electric Corporation
- Hideo TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESTORING METHOD OF CONSUMED COMPONENT
- Publication number 20240254620
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Michishige Saito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVI...
- Publication number 20240240317
- Publication date Jul 18, 2024
- The Regents of the University of Colorado, a Body Corporate
- Steven George
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTO...
- Publication number 20240234096
- Publication date Jul 11, 2024
- Samsung Electronics Co., Ltd.
- Nam Jin CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240234178
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Daiki KIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by irradiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vapor phase growth method using reflector with changeable pattern

Method of repairing ceramic composite articles

Index-gradient structures with nanovoided materials and correspondi...

Method and apparatus for forming a patterned layer of material

High purity fiber feedstock for loose grain production

Enhanced deposition rate by thermal isolation cover for GIS manipul...

Film forming system and film forming method

Fiber structures with embedded sensors

Temperature-controlled surface with a cryo-nanomanipulator for impr...

Lamp filament having a pitch gradient and method of making

Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activa...

Substrate processing apparatus, gas nozzle and method of manufactur...

Method of manufacturing semiconductor device and film forming appar...

Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activa...

Method for synthesising core-shell silicon-germanium nanoparticles...

Film formation method and film formation device

In situ real-time sensing and compensation of non-uniformities in s...

Method of forming structures using a neutral beam

Multilayer functional fiber and method of making

Superconductor flux pinning without columnar defects

Substrate processing method and substrate processing apparatus

Window for chemical vapor deposition systems and related methods

Surfacing materials and method of manufacture, including a textured...

Method for long-term storage of information and storage medium ther...

Chamber architecture for epitaxial deposition and advanced epitaxia...

Compositions and methods using same for deposition of silicon-conta...

Method of manufacturing semiconductor device and ion beam irradiati...

Forming method of component and substrate processing system

Quantum printing methods

Supplemental energy for low temperature processes

Patents Applicationslast 30 patents

Compositions and Methods Using Same for Deposition of Silicon-Conta...

PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...

LAYER DEPOSITION APPARATUS AND LAYER DEPOSITION METHOD

SEMICONDUCTOR PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMEN...

METHODS OF REPAIRING EXTREME ULTRAVIOLET PHOTOMASKS

Hard X-ray Compatible Chamber for High Temperature In-Situ Material...

CORROSION-RESISTANT MEMBER PRODUCTION METHOD AND LASER CVD DEVICE

COATING APPARATUS, PROCESS CHAMBER, AND METHOD OF COATING A SUBSTRA...

SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFAC...

ADJUSTABLE MULTIPLE FILAMENT ION BEAM DEPOSITION SYSTEM

IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...

HEAT TREATMENT APPARATUS AND METHOD OF OPERATING THEREOF

DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...

MULTI-SUBSTRATE PROCESSING SYSTEM

Quantum Printing Nanostructures Within Carbon Nanopores

Method for Long-Term Storage of Information and Storage Medium Ther...

GENERATION OF AN ACTIVE OXYGEN SPECIES

WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS

SUBSTRATE PROCESSING APPARATUS

METHODS AND SYSTEMS FOR SELECTIVE ATOMIC LAYER DEPOSITION

MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...

METHOD OF COATING A COATING REGION ON A FRONT SURFACE OF A SUBSTRAT...

GRAPHENE COATED NON-METALLIC SURFACES, DEVICES AND METHOD THEREOF

METHOD AND SYSTEM FOR PRODUCING A METAL STRUCTURE

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

RESTORING METHOD OF CONSUMED COMPONENT

ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVI...

PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTO...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...