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C23C16/48
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C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/48
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,967,501
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Hiroaki Hiramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming structures, semiconductor processing systems, an...
Patent number
11,959,173
Issue date
Apr 16, 2024
ASM IP Holding B.V.
Amir Kajbafvala
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quantum printing nanostructures within carbon nanopores
Patent number
11,939,671
Issue date
Mar 26, 2024
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Plasma processing method
Patent number
11,915,951
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Laser-assisted metal-organic chemical vapor deposition devices and...
Patent number
11,846,024
Issue date
Dec 19, 2023
OHIO STATE INNOVATION FOUNDATION
Hongping Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of protecting a magnetic layer of a magnetic recording medium
Patent number
11,848,037
Issue date
Dec 19, 2023
National University of Singapore
Barbaros Oezyilmaz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Graphene printing
Patent number
11,834,739
Issue date
Dec 5, 2023
Hewlett-Packard Development Company, L.P.
Robert Ionescu
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Depositive shielding for fiducial protection from redeposition
Patent number
11,817,395
Issue date
Nov 14, 2023
FEI Company
Sean Morgan-Jones
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for forming a patterned layer of carbon, metho...
Patent number
11,807,937
Issue date
Nov 7, 2023
ASML Netherlands B.V.
Sonia Castellanos Ortega
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for depositing anti-coking protective coatings on aerospace...
Patent number
11,794,382
Issue date
Oct 24, 2023
Applied Materials, Inc.
David A. Britz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of making a multi-composition fiber
Patent number
11,788,213
Issue date
Oct 17, 2023
FREE FORM FIBERS, LLC
Shay L. Harrison
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Solid precursor feed system for thin film depositions
Patent number
11,781,216
Issue date
Oct 10, 2023
MetOx Technologies, Inc.
Mikhail Novozhilov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Composite tape with LCVD-formed additive material in constituent la...
Patent number
11,761,085
Issue date
Sep 19, 2023
FREE FORM FIBERS, LLC
John L. Schneiter
B32 - LAYERED PRODUCTS
Information
Patent Grant
Cobalt precursors
Patent number
11,761,086
Issue date
Sep 19, 2023
Entegris, Inc.
Thomas H. Baum
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Forming high carbon content flowable dielectric film with low proce...
Patent number
11,756,786
Issue date
Sep 12, 2023
International Business Machines Corporation
Benjamin D. Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Quantum printing apparatus and method of using same
Patent number
11,746,412
Issue date
Sep 5, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition of thick inorganic coating on a polarizer
Patent number
11,746,418
Issue date
Sep 5, 2023
Moxtek, Inc.
Matthew R. Linford
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Precursors and flowable CVD methods for making low-k films to fill...
Patent number
11,735,413
Issue date
Aug 22, 2023
VERSUM MATERIALS US, LLC
Manchao Xiao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus
Patent number
11,732,360
Issue date
Aug 22, 2023
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
Takahiro Hiramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System for surface modification by laser diffusion
Patent number
11,692,270
Issue date
Jul 4, 2023
University of Central Florida Research Foundation, Inc.
Rajan Vaidyanathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quantum printing nanostructures within carbon nanopores
Patent number
11,680,317
Issue date
Jun 20, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Grant
High power wafer cooling
Patent number
11,670,483
Issue date
Jun 6, 2023
Axcelis Technologies, Inc.
Joseph Ferrara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of utilizing a degassing chamber to reduce arsenic outgassin...
Patent number
11,649,559
Issue date
May 16, 2023
Applied Materials, Inc.
Xinyu Bao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming structures using a neutral beam
Patent number
11,643,724
Issue date
May 9, 2023
ASM IP Holding B.V.
Tomohiro Kubota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quantum printing nanostructures within carbon nanopores
Patent number
11,643,723
Issue date
May 9, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Thermal reflector device for semiconductor fabrication tool
Patent number
11,637,027
Issue date
Apr 25, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Wei Hung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method for processing substrates
Patent number
11,629,407
Issue date
Apr 18, 2023
ASM IP Holding B.V.
Dieter Pierreux
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heating zone separation for reactant evaporation system
Patent number
11,624,113
Issue date
Apr 11, 2023
ASM IP Holding B.V.
Carl Louis White
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Light irradiation type heat treatment apparatus including oxygen an...
Patent number
11,621,178
Issue date
Apr 4, 2023
SCREEN Holdings Co., Ltd.
Takayuki Aoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film laminate, thin film device and multilayer substrate
Patent number
11,594,668
Issue date
Feb 28, 2023
TDK Corporation
Kenta Ishii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
2D Layered Thin Film Structure
Publication number
20240117487
Publication date
Apr 11, 2024
NATIONAL APPLIED RESEARCH LABORATORIES
Shu-Ju Tsai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR MONITORING A CONDITION OF LAMPS USED IN SEM...
Publication number
20240110283
Publication date
Apr 4, 2024
ASM IP HOLDING, B.V.
Peter Bryan Ruckle
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHAMBER ARRANGEMENTS WITH LASER SOURCES, SEMICONDUCTOR PROCESSING S...
Publication number
20240112930
Publication date
Apr 4, 2024
ASM IP HOLDING, B.V.
Fan Gao
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...
Publication number
20240062990
Publication date
Feb 22, 2024
APPLIED MATERIALS ISRAEL LTD.
Sean Kashy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240060185
Publication date
Feb 22, 2024
Samsung Electronics Co., Ltd.
Yeontae KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...
Publication number
20240035163
Publication date
Feb 1, 2024
Carl Zeiss SMT GMBH
Felix LANGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY
Publication number
20240040672
Publication date
Feb 1, 2024
Applied Materials, Inc.
Sathya Shrinivas CHARY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL
Publication number
20240035161
Publication date
Feb 1, 2024
Applied Materials, Inc.
Zhepeng CONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHO...
Publication number
20240011150
Publication date
Jan 11, 2024
ASML NETHERLANDS B.V.
Sonia CASTELLANOS ORTEGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING MODULE AND LASER BEAM PROVIDING METHOD
Publication number
20240006167
Publication date
Jan 4, 2024
SEMES CO., LTD.
Kwang Ryul KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
Publication number
20230366083
Publication date
Nov 16, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
CVD REACTOR WITH TEMPERATURE-CONTROLLABLE GAS INLET REGION
Publication number
20230332292
Publication date
Oct 19, 2023
AIXTRON SE
Philip HENS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION OF FLOWABLE SICN FILMS BY PLASMA ENHANCED ATOMIC LAYER D...
Publication number
20230335392
Publication date
Oct 19, 2023
ASM IP HOLDING B.V.
Shinya Yoshimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MANUFACTURING METHOD OF ELECTRODE FOR ELECTROCHEMICAL REACTION, ELE...
Publication number
20230290963
Publication date
Sep 14, 2023
Kangwon University-Industry Cooperation Foundation
Insoo CHOI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
QUANTUM PRINTING METHODS
Publication number
20230279542
Publication date
Sep 7, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
ADDITIVE CHEMICAL VAPOR DEPOSITION METHODS AND SYSTEMS
Publication number
20230279544
Publication date
Sep 7, 2023
TCM Research Ltd.
Dmitri S. Terekhov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...
Publication number
20230250531
Publication date
Aug 10, 2023
ASM IP HOLDING B.V.
Tomohiro Kubota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEATING ZONE SEPARATION FOR REACTANT EVAPORATION SYSTEM
Publication number
20230235454
Publication date
Jul 27, 2023
ASM IP HOLDING B.V.
Carl Louis White
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION APPARATUS AND METHOD OF USING THE SAME
Publication number
20230203662
Publication date
Jun 29, 2023
DENSO CORPORATION
TATSUJI NAGAOKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LASER-ENHANCED CHEMICAL VAPOR DEPOSITION
Publication number
20230203660
Publication date
Jun 29, 2023
River Electro-Optics, LLC
Rodney S. Harris
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATES
Publication number
20230175136
Publication date
Jun 8, 2023
ASM IP HOLDING B.V.
Dieter Pierreux
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SOLID PRECURSOR FEED SYSTEM FOR THIN FILM DEPOSITIONS
Publication number
20230160059
Publication date
May 25, 2023
MetOx Technologies, Inc.
Mikhail NOVOZHILOV
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
A SEED LAYER, A HETEROSTRUCTURE COMPRISING THE SEED LAYER AND A MET...
Publication number
20230154747
Publication date
May 18, 2023
National University of Singapore
Barbaros OEZYILMAZ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Quantum Printing Apparatus and Method of Using Same
Publication number
20230074549
Publication date
Mar 9, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
VAPORIZER ASSEMBLY
Publication number
20230062455
Publication date
Mar 2, 2023
Entegris, Inc.
Benjamin Cardozo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and Methods for Roll-to-Roll (R2R) Plasma Enhanced/Activa...
Publication number
20230047633
Publication date
Feb 16, 2023
Nano-Master, Inc.
Birol Kuyel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and Methods for Roll-to-Roll (R2R) Plasma Enhanced/Activa...
Publication number
20230047186
Publication date
Feb 16, 2023
Nano-Master, Inc.
Birol Kuyel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...
Publication number
20230023396
Publication date
Jan 26, 2023
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LAMP FILAMENT HAVING A PITCH GRADIENT AND METHOD OF MAKING
Publication number
20230017852
Publication date
Jan 19, 2023
Applied Materials, Inc.
Vilen K. NESTOROV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR COOLING REACTION CHAMBERS IN SEMICONDUCTO...
Publication number
20220415677
Publication date
Dec 29, 2022
ASM IP HOLDING B.V.
Junwei Su
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...