by liquid etching only

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CPC
H01L21/32134

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/32134by liquid etching only

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Contact structure for semiconductor device
- Patent number 12,354,913
- Issue date Jul 8, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yun-Yu Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate structure passivating species drive-in method and structure fo...
- Patent number 12,354,876
- Issue date Jul 8, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsiao-Kuan Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment of spin on organic material to improve wet resistance
- Patent number 12,347,727
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Yang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End point detection method and apparatus for anisotropic etching us...
- Patent number 12,347,663
- Issue date Jul 1, 2025
- SanDisk Technologies, Inc.
- Shoichi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical liquid preparation device, and substrate processing device
- Patent number 12,337,289
- Issue date Jun 24, 2025
- SCREEN Holdings Co., Ltd.
- Hajime Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of manufacturing thereof
- Patent number 12,336,271
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacture
- Patent number 12,334,350
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Meng-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus, substrate treatment method, substrat...
- Patent number 12,322,600
- Issue date Jun 3, 2025
- SCREEN Holdings Co., Ltd.
- Hideji Naohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching liquid for titanium and/or titanium alloy, method for etchi...
- Patent number 12,308,249
- Issue date May 20, 2025
- Mitsubishi Gas Chemical Company, Inc.
- Yukihide Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming semiconductor device structures
- Patent number 12,308,292
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacture
- Patent number 12,308,248
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jian-Jou Lian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor package
- Patent number 12,300,509
- Issue date May 13, 2025
- Samsung Electronics Co., Ltd.
- Junyong Chung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Etching compositions and methods for fabricating semiconductor devi...
- Patent number 12,297,385
- Issue date May 13, 2025
- Samsung Electronics Co., Ltd.
- Min Hyung Cho
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Semiconductor device with self-aligned vias
- Patent number 12,293,944
- Issue date May 6, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chien-Han Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming patterns on a substrate
- Patent number 12,288,694
- Issue date Apr 29, 2025
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Pierre Montmeat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching solution, method for treating substrate with the etching so...
- Patent number 12,288,693
- Issue date Apr 29, 2025
- Tokuyama Corporation
- Manami Oshio
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Interconnect structure for insertion loss reduction in signal trans...
- Patent number 12,283,488
- Issue date Apr 22, 2025
- Yuan Ze University
- Cheng En Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Different via configurations for different via interface requirements
- Patent number 12,278,188
- Issue date Apr 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Che Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,272,557
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuei-Lun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon etching solution and method for producing silicon device us...
- Patent number 12,269,980
- Issue date Apr 8, 2025
- Tokuyama Corporation
- Yoshiki Seike
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Semiconductor device and method for fabricating the same
- Patent number 12,261,198
- Issue date Mar 25, 2025
- SK Hynix Inc.
- Jun Hyuk Seo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor structure having two N-type devices and two P-type de...
- Patent number 12,256,568
- Issue date Mar 18, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xiaojie Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacture
- Patent number 12,255,107
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yao-Wen Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer treatment liquid and production method thereof
- Patent number 12,247,298
- Issue date Mar 11, 2025
- Tokuyama Corporation
- Tomoaki Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wet etch apparatus
- Patent number 12,249,520
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hong-Ting Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 12,249,517
- Issue date Mar 11, 2025
- Hon Hai Precision Industry Co., Ltd.
- Kuang-Hao Chiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical solution, etching method, and method for manufacturing sem...
- Patent number 12,243,751
- Issue date Mar 4, 2025
- Kioxia Corporation
- Hakuba Kitagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hard mask removal without damaging top epitaxial layer
- Patent number 12,243,770
- Issue date Mar 4, 2025
- International Business Machines Corporation
- Chanro Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical solution, method for manufacturing chemical solution, and...
- Patent number 12,234,399
- Issue date Feb 25, 2025
- FUJIFILM Corporation
- Nobuaki Sugimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional memory device with doped semiconductor bridge str...
- Patent number 12,225,720
- Issue date Feb 11, 2025
- SanDisk Technologies LLC
- Ryousuke Itou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LUBRICANT FOR FILTRATION CONTAINING ONIUM IONS
- Publication number 20250235805
- Publication date Jul 24, 2025
- Tokuyama Corporation
- Tomoaki SATO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ETCHING COMPOSITIONS AND METHODS FOR FABRICATING SEMICONDUCTOR DEVI...
- Publication number 20250236793
- Publication date Jul 24, 2025
- Samsung Electronics Co., Ltd.
- Min Hyung CHO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PELLICLE FOR EUV APPLICATIONS
- Publication number 20250237941
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Hsun Tsai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE WITH SELF-ALIGNED VIAS
- Publication number 20250239487
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Han Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Different Via Configurations for Different Via Interface Requirements
- Publication number 20250239527
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Che Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE RESISTANCE IMPROVEMENT AND METHOD THEREOF
- Publication number 20250241001
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ju-Li Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION, METHOD FOR TREATING OBJECT TO BE TREATED, AND METHOD F...
- Publication number 20250230358
- Publication date Jul 17, 2025
- FUJIFILM CORPORATION
- Atsushi Mizutani
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Contact Structure For Semiconductor Device
- Publication number 20250226263
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yun-Yu HSIEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR TREATMENT LIQUID FOR REMOVING RUTHENIUM SILICIDE
- Publication number 20250215574
- Publication date Jul 3, 2025
- Tokuyama Corporation
- Yuzan SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING COMPOSITION, ETCHING METHOD USING SAME, AND METHOD FOR MANU...
- Publication number 20250215318
- Publication date Jul 3, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Po Ting CHOU
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ETCHING COMPOSITION, METHOD OF ETCHING METAL-CONTAINING LAYER USING...
- Publication number 20250215575
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- Byungjoon KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250210373
- Publication date Jun 26, 2025
- SCREEN Holdings Co., Ltd.
- Keisuke TAKAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20250194225
- Publication date Jun 12, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yao-Wen Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL SOLUTION, ETCHING METHOD, AND METHOD FOR MANUFACTURING SEM...
- Publication number 20250183049
- Publication date Jun 5, 2025
- KIOXIA Corporation
- Hakuba KITAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROELECTRONIC DEVICES COMPRISING SILICON CARBON MATERIALS AND REL...
- Publication number 20250183176
- Publication date Jun 5, 2025
- Micron Technology, Inc.
- Vivek Y. Yadav
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250174467
- Publication date May 29, 2025
- Semes Co., Ltd.
- Min Jung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, MANUFACTURING METHOD, AND SUBSTRATE PR...
- Publication number 20250174468
- Publication date May 29, 2025
- SEMES CO., LTD.
- Yong Hoon HONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING SOLUTION COMPOSITION AND ETCHING METHOD
- Publication number 20250154661
- Publication date May 15, 2025
- Hiroki INAZUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
- Publication number 20250140570
- Publication date May 1, 2025
- SCREEN Holdings Co., Ltd.
- Dai UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING COMPOSITION, METHOD OF ETCHING METAL-CONTAINING FILM BY USI...
- Publication number 20250129288
- Publication date Apr 24, 2025
- Samsung Electronics Co., LTD
- Cheol HAM
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
MICROELECTRONIC ASSEMBLY FROM PROCESSED SUBSTRATE
- Publication number 20250125196
- Publication date Apr 17, 2025
- ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
- Cyprian Emeka Uzoh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ETCHING COMPOSITIONS
- Publication number 20250101303
- Publication date Mar 27, 2025
- Fujifilm Electronic Materials U.S.A., Inc.
- Jieying Jiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET PROCESSING WITH AUTOMATIC PROCESS CONTROL
- Publication number 20250105036
- Publication date Mar 27, 2025
- Yield Engineering Systems, Inc.
- Venugopal Govindarajulu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NESTED AND NON-NESTED SEI MESSAGES IN VIDEO BITSTREAMS
- Publication number 20250088671
- Publication date Mar 13, 2025
- Beijing Bytedance Network Technology Co., Ltd.
- Ye-Kui Wang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SEMICONDUCTOR PROCESSING SOLUTION
- Publication number 20250084309
- Publication date Mar 13, 2025
- Tokuyama Corporation
- Yuzan SUZUKI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20250069897
- Publication date Feb 27, 2025
- SEMES CO., LTD.
- Min Jung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING PATTERNS ON A SUBSTRATE
- Publication number 20250062134
- Publication date Feb 20, 2025
- Commissariat a I'Energie Atomique et aux Energies Alternatives
- Pierre Montmeat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250054782
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Takumi HONDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL-RESISTANT PROTECTIVE FILM-FORMING COMPOSITION HAVING CATEC...
- Publication number 20250034427
- Publication date Jan 30, 2025
- NISSAN CHEMICAL CORPORATION
- Shun KUBODERA
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
ETCHING COMPOSITION, METAL-CONTAINING FILM ETCHING METHOD USING THE...
- Publication number 20250011650
- Publication date Jan 9, 2025
- Samsung Electronics Co., Ltd.
- Cheol HAM
- H01 - BASIC ELECTRIC ELEMENTS

by liquid etching only

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Contact structure for semiconductor device

Gate structure passivating species drive-in method and structure fo...

Treatment of spin on organic material to improve wet resistance

End point detection method and apparatus for anisotropic etching us...

Chemical liquid preparation device, and substrate processing device

Semiconductor devices and methods of manufacturing thereof

Semiconductor device and method of manufacture

Substrate treatment apparatus, substrate treatment method, substrat...

Etching liquid for titanium and/or titanium alloy, method for etchi...

Methods of forming semiconductor device structures

Semiconductor device and method of manufacture

Method of manufacturing semiconductor package

Etching compositions and methods for fabricating semiconductor devi...

Semiconductor device with self-aligned vias

Method for forming patterns on a substrate

Etching solution, method for treating substrate with the etching so...

Interconnect structure for insertion loss reduction in signal trans...

Different via configurations for different via interface requirements

Semiconductor device and method

Silicon etching solution and method for producing silicon device us...

Semiconductor device and method for fabricating the same

Semiconductor structure having two N-type devices and two P-type de...

Semiconductor device and method of manufacture

Semiconductor wafer treatment liquid and production method thereof

Wet etch apparatus

Manufacturing method of semiconductor structure

Chemical solution, etching method, and method for manufacturing sem...

Hard mask removal without damaging top epitaxial layer

Chemical solution, method for manufacturing chemical solution, and...

Three-dimensional memory device with doped semiconductor bridge str...

Patents Applicationslast 30 patents

LUBRICANT FOR FILTRATION CONTAINING ONIUM IONS

ETCHING COMPOSITIONS AND METHODS FOR FABRICATING SEMICONDUCTOR DEVI...

PELLICLE FOR EUV APPLICATIONS

SEMICONDUCTOR DEVICE WITH SELF-ALIGNED VIAS

Different Via Configurations for Different Via Interface Requirements

GATE RESISTANCE IMPROVEMENT AND METHOD THEREOF

COMPOSITION, METHOD FOR TREATING OBJECT TO BE TREATED, AND METHOD F...

Contact Structure For Semiconductor Device

SEMICONDUCTOR TREATMENT LIQUID FOR REMOVING RUTHENIUM SILICIDE

ETCHING COMPOSITION, ETCHING METHOD USING SAME, AND METHOD FOR MANU...

ETCHING COMPOSITION, METHOD OF ETCHING METAL-CONTAINING LAYER USING...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

CHEMICAL SOLUTION, ETCHING METHOD, AND METHOD FOR MANUFACTURING SEM...

MICROELECTRONIC DEVICES COMPRISING SILICON CARBON MATERIALS AND REL...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, MANUFACTURING METHOD, AND SUBSTRATE PR...

ETCHING SOLUTION COMPOSITION AND ETCHING METHOD

SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS

ETCHING COMPOSITION, METHOD OF ETCHING METAL-CONTAINING FILM BY USI...

MICROELECTRONIC ASSEMBLY FROM PROCESSED SUBSTRATE

ETCHING COMPOSITIONS

WET PROCESSING WITH AUTOMATIC PROCESS CONTROL

NESTED AND NON-NESTED SEI MESSAGES IN VIDEO BITSTREAMS

SEMICONDUCTOR PROCESSING SOLUTION

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

METHOD FOR FORMING PATTERNS ON A SUBSTRATE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CHEMICAL-RESISTANT PROTECTIVE FILM-FORMING COMPOSITION HAVING CATEC...

ETCHING COMPOSITION, METAL-CONTAINING FILM ETCHING METHOD USING THE...