by means of a cart or a vehicule

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H01L21/67724

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67724by means of a cart or a vehicule

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Loader device and substrate transport system
- Patent number 12,365,095
- Issue date Jul 22, 2025
- Samsung Electronics Co., Ltd.
- Hyun Jae Kang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transport apparatus
- Patent number 12,327,745
- Issue date Jun 10, 2025
- Semes Co., Ltd.
- Jae Ik Cho
- B60 - VEHICLES IN GENERAL
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 12,315,751
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling transport vehicle in production factory, vehi...
- Patent number 12,286,304
- Issue date Apr 29, 2025
- Semes Co., Ltd.
- Jae Hyoung Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of controlling driving of transport vehicl...
- Patent number 12,275,309
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Jun Beom Lee
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Overhead conveyance system
- Patent number 12,272,582
- Issue date Apr 8, 2025
- Murata Machinery, Ltd.
- Yasuhisa Ito
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Device maintenance in semiconductor manufacturing environment
- Patent number 12,246,404
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Article transport vehicle, rail assembly, and article transport sys...
- Patent number 12,227,373
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Wan Hee Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Maintenance device, vacuum processing system, and maintenance method
- Patent number 12,198,962
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Takashi Dokan
- B08 - CLEANING
Information Patent Grant
Communication method, transport system, and communication device
- Patent number 12,198,957
- Issue date Jan 14, 2025
- Murata Machinery, Ltd.
- Wataru Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fume-removing device
- Patent number 12,176,230
- Issue date Dec 24, 2024
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stocker system for wafer cassette
- Patent number 12,176,232
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Guancyun Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Test management module and vehicle test system having the same
- Patent number 12,169,156
- Issue date Dec 17, 2024
- Semes Co., Ltd.
- Seung Wan An
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for wafer manufacturing process management
- Patent number 12,154,808
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Mei-Hsuan Lin
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Carrier vehicle system
- Patent number 12,148,643
- Issue date Nov 19, 2024
- Murata Machinery, Ltd.
- Yasuhisa Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for managing power of article transport vehicl...
- Patent number 12,131,931
- Issue date Oct 29, 2024
- Semes Co., Ltd.
- Ki Sub Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer system and a method for transporting wafers
- Patent number 12,125,727
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyance vehicle
- Patent number 12,119,249
- Issue date Oct 15, 2024
- Murata Machinery, Ltd.
- Eiji Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system and grid system
- Patent number 12,119,250
- Issue date Oct 15, 2024
- Murata Machinery, Ltd.
- Wataru Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection system
- Patent number 12,117,485
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Grant
Communication system, optical transmission device, and communicatio...
- Patent number 12,120,183
- Issue date Oct 15, 2024
- Hokuyo Automatic Co., Ltd.
- Toshiaki Hayashiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer vehicle system
- Patent number 12,110,188
- Issue date Oct 8, 2024
- Murata Machinery, Ltd.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system
- Patent number 12,111,636
- Issue date Oct 8, 2024
- Daifuku Co., Ltd.
- Koichi Hagiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for automated material handling management
- Patent number 12,094,741
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chieh Hsu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for operating conveying system
- Patent number 12,094,745
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yong-Jyu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport facility
- Patent number 12,091,257
- Issue date Sep 17, 2024
- Daifuku Co., Ltd.
- Koichi Hagiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overhead hoist transport device and method of using the same
- Patent number 12,094,744
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chuan Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport vehicle
- Patent number 12,087,607
- Issue date Sep 10, 2024
- Daifuku Co., Ltd.
- Daichi Tomida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overhead conveyance vehicle
- Patent number 12,057,338
- Issue date Aug 6, 2024
- Murata Machinery, Ltd.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport vehicle for suppressing vibration of goods, and goods tra...
- Patent number 12,020,966
- Issue date Jun 25, 2024
- Semes Co., Ltd.
- Jun Beom Lee
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
ACCOMMODATION DEVICE AND AUTOMATED TRANSPORT CARRIER AND OPERATION...
- Publication number 20250236158
- Publication date Jul 24, 2025
- Innolux Corporation
- Chien-Wei Chen
- B60 - VEHICLES IN GENERAL
Information Patent Application
DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20250205834
- Publication date Jun 26, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ACCOMMODATING DEVICE, AUTONOMOUS MOBILE ROBOT VEHICLE, AND TRANSPOR...
- Publication number 20250206534
- Publication date Jun 26, 2025
- InnoLux Corporation
- Chien-Wei CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLE TRANSPORT FACILITY
- Publication number 20250191947
- Publication date Jun 12, 2025
- SEMES CO., LTD.
- Mei Xiang JIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOVOLTAIC ROBOT
- Publication number 20250140589
- Publication date May 1, 2025
- SUZHOU JUNION INTELLIGENT TECHNOLOGY CO., LTD.
- Linxiao FU
- B60 - VEHICLES IN GENERAL
Information Patent Application
Positional Relationship Detection System
- Publication number 20250118581
- Publication date Apr 10, 2025
- DAIFUKU CO., LTD.
- Tomotaka Kinugawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINTENANCE DEVICE, VACUUM PROCESSING SYSTEM, AND MAINTENANCE METHOD
- Publication number 20250112073
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Takashi DOKAN
- B08 - CLEANING
Information Patent Application
STOCKER SYSTEM FOR WAFER CASSETTE
- Publication number 20250079218
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Guancyun LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FUME-REMOVING DEVICE
- Publication number 20250069925
- Publication date Feb 27, 2025
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR WAFER MANUFACTURING PROCESS MANAGEMENT
- Publication number 20250062147
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Rong Syuan FAN
- B60 - VEHICLES IN GENERAL
Information Patent Application
SUBSTRATE TRANSFER APPARATUS ALLOWING MOVEMENT BETWEEN LAYERS
- Publication number 20250029859
- Publication date Jan 23, 2025
- VM Inc.
- Sang Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport Vehicle
- Publication number 20250006532
- Publication date Jan 2, 2025
- DAIFUKU CO., LTD.
- Kyota Inazumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR AUTOMATED MATERIAL HANDLING MANAGEMENT
- Publication number 20240387214
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chieh Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS
- Publication number 20240387218
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING OHT VEHICLE
- Publication number 20240379395
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Application
OVERHEAD HOIST TRANSPORT DEVICE AND METHOD OF USING THE SAME
- Publication number 20240371671
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chuan Wei LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport Vehicle
- Publication number 20240339346
- Publication date Oct 10, 2024
- DAIFUKU CO., LTD.
- Yoshinari WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRIPPER MODULE FOR GRIPPING A CARRIER, SUBSTRATE TRANSFER APPARATUS...
- Publication number 20240222175
- Publication date Jul 4, 2024
- Semes Co., Ltd.
- Jaehyun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport Device
- Publication number 20240203772
- Publication date Jun 20, 2024
- DAIFUKU CO., LTD.
- Keita Inadome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CEILING STOCKER
- Publication number 20240194510
- Publication date Jun 13, 2024
- SEMES CO., LTD.
- Jin-Ho SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport Vehicle
- Publication number 20240153805
- Publication date May 9, 2024
- DAIFUKU CO., LTD.
- Yoshinari WADA
- B66 - HOISTING LIFTING HAULING
Information Patent Application
Gas Supply System
- Publication number 20240145283
- Publication date May 2, 2024
- DAIFUKU CO., LTD.
- Tadashi Nishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20240082964
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR OPERATING CONVEYING SYSTEM
- Publication number 20240087934
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- YONG-JYU LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER ROBOT SYSTEM AND THE TRANSFER ROBOT SYSTEM DRIVING METHOD
- Publication number 20240077878
- Publication date Mar 7, 2024
- SEMES CO., LTD.
- Seung Jun LEE
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
TURNTABLE FOR WAFER TRANSPORT SYSTEM
- Publication number 20240071797
- Publication date Feb 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Guancyun Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
- Publication number 20240071799
- Publication date Feb 29, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUAN WEI LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE...
- Publication number 20240038563
- Publication date Feb 1, 2024
- Samsung Electronics Co., Ltd.
- Jun Kyu LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEACHING METHOD
- Publication number 20240030052
- Publication date Jan 25, 2024
- SEMES CO., LTD.
- Kisub YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER INSPECTION SYSTEM
- Publication number 20240019487
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- H01 - BASIC ELECTRIC ELEMENTS

by means of a cart or a vehicule

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Loader device and substrate transport system

Transport apparatus

System for a semiconductor fabrication facility and method for oper...

Method of controlling transport vehicle in production factory, vehi...

Apparatus for and method of controlling driving of transport vehicl...

Overhead conveyance system

Device maintenance in semiconductor manufacturing environment

Article transport vehicle, rail assembly, and article transport sys...

Maintenance device, vacuum processing system, and maintenance method

Communication method, transport system, and communication device

Fume-removing device

Stocker system for wafer cassette

Test management module and vehicle test system having the same

System and method for wafer manufacturing process management

Carrier vehicle system

Apparatus and method for managing power of article transport vehicl...

Wafer transfer system and a method for transporting wafers

Conveyance vehicle

Transport system and grid system

Wafer inspection system

Communication system, optical transmission device, and communicatio...

Transfer vehicle system

Transport system

System and method for automated material handling management

Method for operating conveying system

Article transport facility

Overhead hoist transport device and method of using the same

Article transport vehicle

Overhead conveyance vehicle

Transport vehicle for suppressing vibration of goods, and goods tra...

Patents Applicationslast 30 patents

ACCOMMODATION DEVICE AND AUTOMATED TRANSPORT CARRIER AND OPERATION...

DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT

ACCOMMODATING DEVICE, AUTONOMOUS MOBILE ROBOT VEHICLE, AND TRANSPOR...

ARTICLE TRANSPORT FACILITY

PHOTOVOLTAIC ROBOT

Positional Relationship Detection System

MAINTENANCE DEVICE, VACUUM PROCESSING SYSTEM, AND MAINTENANCE METHOD

STOCKER SYSTEM FOR WAFER CASSETTE

FUME-REMOVING DEVICE

SYSTEM AND METHOD FOR WAFER MANUFACTURING PROCESS MANAGEMENT

SUBSTRATE TRANSFER APPARATUS ALLOWING MOVEMENT BETWEEN LAYERS

Transport Vehicle

SYSTEM AND METHOD FOR AUTOMATED MATERIAL HANDLING MANAGEMENT

WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS

METHOD FOR CLEANING OHT VEHICLE

OVERHEAD HOIST TRANSPORT DEVICE AND METHOD OF USING THE SAME

Transport Vehicle

GRIPPER MODULE FOR GRIPPING A CARRIER, SUBSTRATE TRANSFER APPARATUS...

Transport Device

CEILING STOCKER

Transport Vehicle

Gas Supply System

DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT

METHOD FOR OPERATING CONVEYING SYSTEM

TRANSFER ROBOT SYSTEM AND THE TRANSFER ROBOT SYSTEM DRIVING METHOD

TURNTABLE FOR WAFER TRANSPORT SYSTEM

SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...

SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE...

TEACHING METHOD

WAFER INSPECTION SYSTEM