by measuring path difference independently from interferometer

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G01B9/02071

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GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means

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G01B9/02071by measuring path difference independently from interferometer

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System and method for correcting optical path length measurement er...
- Patent number 11,920,928
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Kenji Nagai
- G01 - MEASURING TESTING
Information Patent Grant
Thickness evaluation method of cell sheet
- Patent number 11,906,301
- Issue date Feb 20, 2024
- SCREEN Holdings Co., Ltd.
- Ryo Hasebe
- G01 - MEASURING TESTING
Information Patent Grant
Spatial accuracy correction method and apparatus
- Patent number 11,366,448
- Issue date Jun 21, 2022
- Mitutoyo Corporation
- Shinichiro Yanaka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Spatial accuracy correction method and apparatus
- Patent number 11,366,447
- Issue date Jun 21, 2022
- Mitutoyo Corporation
- Shinichiro Yanaka
- G05 - CONTROLLING REGULATING
Information Patent Grant
Optical coherence tomographic device comprising dual correction bea...
- Patent number 11,243,066
- Issue date Feb 8, 2022
- Tomey Corporation
- Masahiro Yamanari
- G01 - MEASURING TESTING
Information Patent Grant
Automatic calibration optical interferometer and automatic calibrat...
- Patent number 10,890,429
- Issue date Jan 12, 2021
- Industrial Technology Research Institute
- Hung Chih Chiang
- G01 - MEASURING TESTING
Information Patent Grant
Position measurement system, zeroing method, lithographic apparatus...
- Patent number 10,883,816
- Issue date Jan 5, 2021
- ASML Netherlands B.V.
- Maarten Jozef Jansen
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for calculating a height map of a surface of an o...
- Patent number 10,636,157
- Issue date Apr 28, 2020
- Mitutoyo Corporation
- Johannes Anna Quaedackers
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Swept-source optical coherence tomography (SS-OCT) phase stabilizat...
- Patent number 10,627,212
- Issue date Apr 21, 2020
- Kabushiki Kaisha Topcon
- Jonathan J. Liu
- G01 - MEASURING TESTING
Information Patent Grant
Optical coherence tomography microscopy apparatus and method for de...
- Patent number 10,215,552
- Issue date Feb 26, 2019
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Robert Snel
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Self calibration for mirror positioning in optical MEMS interferome...
- Patent number 9,658,053
- Issue date May 23, 2017
- Si-Ware Systems
- Mostafa Medhat
- G02 - OPTICS
Information Patent Grant
Self calibration for mirror positioning in optical MEMS interferome...
- Patent number 9,658,107
- Issue date May 23, 2017
- Si-Ware Systems
- Momen Anwar
- G02 - OPTICS
Information Patent Grant
Systems and methods for phase measurements
- Patent number 9,528,817
- Issue date Dec 27, 2016
- Massachusetts Institute of Technology
- Christopher Fang-Yen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Profilometer with partial coherence interferometer adapted for avoi...
- Patent number 9,091,523
- Issue date Jul 28, 2015
- Quality Vision International, Inc.
- David B. Kay
- G01 - MEASURING TESTING
Information Patent Grant
Grazing incidence interferometer
- Patent number 8,913,250
- Issue date Dec 16, 2014
- Mitutoyo Corporation
- Reiya Ootao
- G01 - MEASURING TESTING
Information Patent Grant
Technique to determine mirror position in optical interferometers
- Patent number 8,873,125
- Issue date Oct 28, 2014
- Si-Ware Systems
- Bassam A. Saadany
- G01 - MEASURING TESTING
Information Patent Grant
System and method for optical coherence tomography
- Patent number 8,810,797
- Issue date Aug 19, 2014
- Agfa HealthCare N.V.
- Rainer Nebosis
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring wear rate
- Patent number 8,730,482
- Issue date May 20, 2014
- Tokyo Electron Limited
- Tatsuo Matsudo
- G01 - MEASURING TESTING
Information Patent Grant
Compact fiber optic geometry for a counter chirp FMCW coherent lase...
- Patent number 8,687,173
- Issue date Apr 1, 2014
- Nikon Metrology NV
- Mina Rezk
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for phase measurements
- Patent number 8,334,982
- Issue date Dec 18, 2012
- Massachusetts Institute of Technology
- Christopher Fang-Yen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Interference measuring device
- Patent number 8,248,593
- Issue date Aug 21, 2012
- Hamamatsu Photonics K.K.
- Toyohiko Yamauchi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for measurement of the axial length of an eye
- Patent number 8,199,329
- Issue date Jun 12, 2012
- Lumetrics, Inc
- Todd F. Blalock
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Surface characteristic determining apparatus
- Patent number 8,077,324
- Issue date Dec 13, 2011
- University of Huddersfield of Queensgate
- Jiang Xiangqian
- G01 - MEASURING TESTING
Information Patent Grant
Real-time effective-wavelength error correction for HDVSI
- Patent number 7,956,630
- Issue date Jun 7, 2011
- Veeco Instruments, Inc.
- Dong Chen
- G01 - MEASURING TESTING
Information Patent Grant
Real-time scanner-nonlinearity error correction for HDVSI
- Patent number 7,898,672
- Issue date Mar 1, 2011
- Veeco Instruments, Inc.
- Dong Chen
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for measurement of the axial length of an eye
- Patent number 7,884,946
- Issue date Feb 8, 2011
- Lumetrics, Inc.
- Todd F. Blalock
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Colorimetric three-dimensional microscopy
- Patent number 7,659,991
- Issue date Feb 9, 2010
- Heliotis AG
- Peter Seitz
- G01 - MEASURING TESTING
Information Patent Grant
Position-measuring device for determining the position of two objec...
- Patent number 7,639,366
- Issue date Dec 29, 2009
- Dr. Johannes Heidenhain GmbH
- Erwin Spanner
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for phase measurements
- Patent number 7,557,929
- Issue date Jul 7, 2009
- Massachusetts Institute of Technology
- Christopher M. Fang-Yen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Systems and methods for phase measurements
- Patent number 7,365,858
- Issue date Apr 29, 2008
- Massachusetts Institute of Technology
- Christopher M. Fang-Yen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR CORRECTING OPTICAL PATH LENGTH MEASUREMENT ER...
- Publication number 20220357146
- Publication date Nov 10, 2022
- TOKYO ELECTRON LIMITED
- Kenji NAGAI
- G01 - MEASURING TESTING
Information Patent Application
THICKNESS EVALUATION METHOD OF CELL SHEET
- Publication number 20220090909
- Publication date Mar 24, 2022
- SCREEN Holdings Co., Ltd.
- Ryo Hasebe
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATIC CALIBRATION OPTICAL INTERFEROMETER AND AUTOMATIC CALIBRAT...
- Publication number 20200208958
- Publication date Jul 2, 2020
- Industrial Technology Research Institute
- Hung Chih CHIANG
- G01 - MEASURING TESTING
Information Patent Application
POSITION MEASUREMENT SYSTEM, ZEROING METHOD, LITHOGRAPHIC APPARATUS...
- Publication number 20200191552
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Maarten Jozef JANSEN
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL COHERENCE TOMOGRAPHIC DEVICE
- Publication number 20190195614
- Publication date Jun 27, 2019
- TOMEY CORPORATION
- Masahiro YAMANARI
- G01 - MEASURING TESTING
Information Patent Application
SPATIAL ACCURACY CORRECTION METHOD AND APPARATUS
- Publication number 20190187660
- Publication date Jun 20, 2019
- MITUTOYO CORPORATION
- Shinichiro YANAKA
- G05 - CONTROLLING REGULATING
Information Patent Application
SPATIAL ACCURACY CORRECTION METHOD AND APPARATUS
- Publication number 20190187661
- Publication date Jun 20, 2019
- MITUTOYO CORPORATION
- Shinichiro YANAKA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT APPARATUS FOR MEASURING SHAPE OF TARGET OBJECT, SYSTEM...
- Publication number 20180195858
- Publication date Jul 12, 2018
- Canon Kabushiki Kaisha
- Yuya Nishikawa
- G01 - MEASURING TESTING
Information Patent Application
Self Calibration for mirror positioning in Optical MEMS Interferome...
- Publication number 20140139839
- Publication date May 22, 2014
- SI-WARE SYSTEMS
- Mostafa Medhat
- G02 - OPTICS
Information Patent Application
SYSTEMS AND METHODS FOR PHASE MEASUREMENTS
- Publication number 20130265585
- Publication date Oct 10, 2013
- Christopher Fang-Yen
- G01 - MEASURING TESTING
Information Patent Application
SURFACE SHAPE MEASUREMENT METHOD AND MEASUREMENT APPARATUS
- Publication number 20130235385
- Publication date Sep 12, 2013
- Canon Kabushiki Kaisha
- Masaki NAKAJIMA
- G01 - MEASURING TESTING
Information Patent Application
GRAZING INCIDENCE INTERFEROMETER
- Publication number 20120327425
- Publication date Dec 27, 2012
- Mitutoyo Corporation
- Reiya Ootao
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL INTERFEROMETER
- Publication number 20120002210
- Publication date Jan 5, 2012
- Foss Analytical A/S
- Hans Villemoes Andersen
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING WEAR RATE
- Publication number 20110235056
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Tatsuo Matsudo
- G01 - MEASURING TESTING
Information Patent Application
TECHNIQUE TO DETERMINE MIRROR POSITION IN OPTICAL INTERFEROMETERS
- Publication number 20110222067
- Publication date Sep 15, 2011
- SI-WARE SYSTEMS
- Bassam A. Saadany
- G02 - OPTICS
Information Patent Application
COMPACT FIBER OPTIC GEOMETRY FOR A COUNTER CHIRP FMCW COHERENT LASE...
- Publication number 20110205523
- Publication date Aug 25, 2011
- NIKON METROLOGY N.V.
- Mina Rezk
- G02 - OPTICS
Information Patent Application
APPARATUS FOR MEASUREMENT OF THE AXIAL LENGTH OF AN EYE
- Publication number 20110090461
- Publication date Apr 21, 2011
- LUMETRICS, INC.
- Todd F. BLALOCK
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
INTERFERENCE MEASURING DEVICE
- Publication number 20100309479
- Publication date Dec 9, 2010
- HAMAMATSU PHOTONICS K. K.
- Toyohiko Yamauchi
- G02 - OPTICS
Information Patent Application
SYSTEMS AND METHODS FOR PHASE MEASUREMENTS
- Publication number 20100094135
- Publication date Apr 15, 2010
- Massachusetts Institute of Technology
- Christopher M. Fang-Yen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
System and Method for Optical Coherence Tomography
- Publication number 20100091295
- Publication date Apr 15, 2010
- AGFA HEALTHCARE NV
- Rainer Nebosis
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for measurement of the axial length of an eye
- Publication number 20090268213
- Publication date Oct 29, 2009
- Lumetrics, Inc.
- Todd F. Blalock
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SURFACE CHARACTERISTIC DETERMINING APPARATUS
- Publication number 20090207416
- Publication date Aug 20, 2009
- Jiang Xiangqian
- G01 - MEASURING TESTING
Information Patent Application
Colorimetric three-dimensional microscopy
- Publication number 20080049234
- Publication date Feb 28, 2008
- Peter Seitz
- G02 - OPTICS
Information Patent Application
Position-measuring device for determining the position of two objec...
- Publication number 20060262315
- Publication date Nov 23, 2006
- Erwin Spanner
- G01 - MEASURING TESTING
Information Patent Application
Systems and methods for phase measurements
- Publication number 20050105097
- Publication date May 19, 2005
- Massachusetts Institute of Technology
- Christopher M. Fang-Yen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Systems and methods for phase measurements
- Publication number 20050057756
- Publication date Mar 17, 2005
- Massachusetts Institute of Technology
- Christopher M. Fang-Yen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Apparatus and method for measuring digital imager, package and wafe...
- Publication number 20030227632
- Publication date Dec 11, 2003
- Eastman Kodak Company
- Michael A. Marcus
- G01 - MEASURING TESTING
Information Patent Application
Methods and apparatus for interferometric dimensional metrology
- Publication number 20030090677
- Publication date May 15, 2003
- Christopher James Evans
- G01 - MEASURING TESTING
Information Patent Application
DOPPLER FLOW IMAGING USING OPTICAL COHERENCE TOMOGRAPHY
- Publication number 20030023153
- Publication date Jan 30, 2003
- JOSEPH A. IZATT
- G01 - MEASURING TESTING
Information Patent Application
Scanning interferometry with reference signal
- Publication number 20020196450
- Publication date Dec 26, 2002
- Artur Olszak
- G01 - MEASURING TESTING

by measuring path difference independently from interferometer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and method for correcting optical path length measurement er...

Thickness evaluation method of cell sheet

Spatial accuracy correction method and apparatus

Spatial accuracy correction method and apparatus

Optical coherence tomographic device comprising dual correction bea...

Automatic calibration optical interferometer and automatic calibrat...

Position measurement system, zeroing method, lithographic apparatus...

Method and system for calculating a height map of a surface of an o...

Swept-source optical coherence tomography (SS-OCT) phase stabilizat...

Optical coherence tomography microscopy apparatus and method for de...

Self calibration for mirror positioning in optical MEMS interferome...

Self calibration for mirror positioning in optical MEMS interferome...

Systems and methods for phase measurements

Profilometer with partial coherence interferometer adapted for avoi...

Grazing incidence interferometer

Technique to determine mirror position in optical interferometers

System and method for optical coherence tomography

Method for measuring wear rate

Compact fiber optic geometry for a counter chirp FMCW coherent lase...

Systems and methods for phase measurements

Interference measuring device

Apparatus for measurement of the axial length of an eye

Surface characteristic determining apparatus

Real-time effective-wavelength error correction for HDVSI

Real-time scanner-nonlinearity error correction for HDVSI

Apparatus for measurement of the axial length of an eye

Colorimetric three-dimensional microscopy

Position-measuring device for determining the position of two objec...

Systems and methods for phase measurements

Systems and methods for phase measurements

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR CORRECTING OPTICAL PATH LENGTH MEASUREMENT ER...

THICKNESS EVALUATION METHOD OF CELL SHEET

AUTOMATIC CALIBRATION OPTICAL INTERFEROMETER AND AUTOMATIC CALIBRAT...

POSITION MEASUREMENT SYSTEM, ZEROING METHOD, LITHOGRAPHIC APPARATUS...

OPTICAL COHERENCE TOMOGRAPHIC DEVICE

SPATIAL ACCURACY CORRECTION METHOD AND APPARATUS

SPATIAL ACCURACY CORRECTION METHOD AND APPARATUS

MEASUREMENT APPARATUS FOR MEASURING SHAPE OF TARGET OBJECT, SYSTEM...

Self Calibration for mirror positioning in Optical MEMS Interferome...

SYSTEMS AND METHODS FOR PHASE MEASUREMENTS

SURFACE SHAPE MEASUREMENT METHOD AND MEASUREMENT APPARATUS

GRAZING INCIDENCE INTERFEROMETER

OPTICAL INTERFEROMETER

METHOD FOR MEASURING WEAR RATE

TECHNIQUE TO DETERMINE MIRROR POSITION IN OPTICAL INTERFEROMETERS

COMPACT FIBER OPTIC GEOMETRY FOR A COUNTER CHIRP FMCW COHERENT LASE...

APPARATUS FOR MEASUREMENT OF THE AXIAL LENGTH OF AN EYE

INTERFERENCE MEASURING DEVICE

SYSTEMS AND METHODS FOR PHASE MEASUREMENTS

System and Method for Optical Coherence Tomography

Apparatus for measurement of the axial length of an eye

SURFACE CHARACTERISTIC DETERMINING APPARATUS

Colorimetric three-dimensional microscopy

Position-measuring device for determining the position of two objec...

Systems and methods for phase measurements

Systems and methods for phase measurements

Apparatus and method for measuring digital imager, package and wafe...

Methods and apparatus for interferometric dimensional metrology

DOPPLER FLOW IMAGING USING OPTICAL COHERENCE TOMOGRAPHY

Scanning interferometry with reference signal