by purging residual gases from the reaction chamber or gas lines

Industry

CPC
C23C16/4408

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4408by purging residual gases from the reaction chamber or gas lines

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Particle coating methods and apparatus
- Patent number 12,146,217
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chalcogen precursors for deposition of silicon nitride
- Patent number 12,142,477
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Chandan Kr Barik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of area-selective deposition and method of fabricating an el...
- Patent number 12,116,667
- Issue date Oct 15, 2024
- SK Hynix Inc.
- Woo-Hee Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, method for manufacturing semiconductor device,...
- Patent number 12,119,219
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Hiroaki Ashizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of protective coatings for semiconductor pr...
- Patent number 12,104,246
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for epitaxially depositing a material on a substrate by flow...
- Patent number 12,091,749
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor process chamber contamination prevention system
- Patent number 12,090,503
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Chin Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, recording medium, substrate process...
- Patent number 12,084,760
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modulation of oxidation profile for substrate processing
- Patent number 12,087,573
- Issue date Sep 10, 2024
- Lam Research Corporation
- Gerald Joseph Brady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing a silicon carbide coated body
- Patent number 12,077,441
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Peter J. Guercio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of pure molybdenum films
- Patent number 12,080,558
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 12,074,045
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom-up metal nitride formation
- Patent number 12,068,164
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition processes
- Patent number 12,065,739
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making thin films of sodium fluorides and their derivativ...
- Patent number 12,065,738
- Issue date Aug 20, 2024
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD cycle time reduction using process chamber lid with tunable pum...
- Patent number 12,054,826
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for reducing effluent build-up in a pumping exh...
- Patent number 12,049,698
- Issue date Jul 30, 2024
- Lam Research Corporation
- Antonio Xavier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a laminate film by cyclical plasma-enhanced dep...
- Patent number 12,040,177
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for forming a layer comprising a transitional m...
- Patent number 12,031,206
- Issue date Jul 9, 2024
- ASM IP Holding, B.V.
- Maart van Druenen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment apparatus and manufacturing method of semicondu...
- Patent number 12,027,367
- Issue date Jul 2, 2024
- Kioxia Corporation
- Masayuki Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming method and film-forming apparatus
- Patent number 12,018,370
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Tatsuhiko Tanimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,018,373
- Issue date Jun 25, 2024
- Kokusai Electric Corporation
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Powder transfer apparatus, gas supply apparatus, and powder removal...
- Patent number 12,018,368
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Eiichi Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and cleaning method
- Patent number 12,018,366
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Shingo Hishiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus having exhaust gas decomposer, and e...
- Patent number 11,970,770
- Issue date Apr 30, 2024
- Jusung Engineering Co., Ltd.
- Dong Won Seo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,970,766
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source precursor vessel
- Patent number 11,959,168
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Jianqiu Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of lithium boron comprising nanocomposite s...
- Patent number 11,946,139
- Issue date Apr 2, 2024
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
- Patent number 11,932,939
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES
- Publication number 20240420965
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Shihsheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
- Publication number 20240417266
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Peter J. GUERCIO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
CONFORMAL SILICON OXIDE DEPOSITION USING AMINOSILANE AND CHLOROSILA...
- Publication number 20240410053
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A FILM ON A SURFACE OF A SUBSTRATE BY CYCLIC...
- Publication number 20240401190
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Do Han Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240401199
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
N-TYPE DOUBLE-SIDED SOLAR CELL PREPARATION METHOD
- Publication number 20240405151
- Publication date Dec 5, 2024
- Tongwei Solar (Meishan) Co., Ltd.
- Wenzhou XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
- Publication number 20240404822
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Gerald Joseph Brady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LANTHANIDE AND LANTHANIDE-LIKE TRANSITION METAL COMPLEXES
- Publication number 20240400598
- Publication date Dec 5, 2024
- Christoph WETZEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Homoleptic Bismuth Precursors For Depositing Bismuth Oxide Containi...
- Publication number 20240392433
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- Sergei V. Ivanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND METHOD
- Publication number 20240392438
- Publication date Nov 28, 2024
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- Xinyuan WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20240392437
- Publication date Nov 28, 2024
- Advanced Micro-Fabrication Equipment Inc. China
- Can XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD
- Publication number 20240384404
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jia-Wei XU
- B08 - CLEANING
Information Patent Application
FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240384412
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT BY USING ATOMIC LAYER...
- Publication number 20240387168
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- Jinwoo Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN
- Publication number 20240379347
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Mikko Ruoho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOTTOM-UP METAL NITRIDE FORMATION
- Publication number 20240379368
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
- Publication number 20240371672
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yongfei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240371631
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR AREAL SELECTIVE FORMING OF THIN FILM
- Publication number 20240368762
- Publication date Nov 7, 2024
- EGTM Co., Ltd.
- Ju Hwan Jeong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Deposition Processes
- Publication number 20240368763
- Publication date Nov 7, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT AND CARRIER DEVICE THEREOF
- Publication number 20240371676
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xiqiang TIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE MATERIAL AND METHOD OF PRODUCING THIN-FILM
- Publication number 20240360558
- Publication date Oct 31, 2024
- ADEKA CORPORATION
- Masaki ENZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
- Publication number 20240352580
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Zaoyuan Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITING APPARATUS AND ATOMIC LAYER DEPOSITING METHO...
- Publication number 20240352581
- Publication date Oct 24, 2024
- NEXUSBE CO., LTD
- Hag Young CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20240337022
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATION LAYER, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF
- Publication number 20240332535
- Publication date Oct 3, 2024
- SHENZHEN YUANSU OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Weizhen WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL REACTION DEVICE
- Publication number 20240309550
- Publication date Sep 19, 2024
- Shenzhen Naso Tech Co Ltd
- Yunzhang XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240309506
- Publication date Sep 19, 2024
- WONIK IPS CO., LTD.
- Jae Jin HAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240287672
- Publication date Aug 29, 2024
- Kokusai Electric Corporation
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DLC FILM DEPOSITION APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM I...
- Publication number 20240287668
- Publication date Aug 29, 2024
- Samsung Electronics Co., Ltd.
- Se Jun PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by purging residual gases from the reaction chamber or gas lines

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Particle coating methods and apparatus

Chalcogen precursors for deposition of silicon nitride

Method of area-selective deposition and method of fabricating an el...

Film forming method, method for manufacturing semiconductor device,...

Substrate processing apparatus and method of manufacturing semicond...

Atomic layer deposition of protective coatings for semiconductor pr...

Method for epitaxially depositing a material on a substrate by flow...

Semiconductor process chamber contamination prevention system

Method of processing substrate, recording medium, substrate process...

Modulation of oxidation profile for substrate processing

Process for manufacturing a silicon carbide coated body

Low temperature deposition of pure molybdenum films

Prevention of contamination of substrates during gas purging

Bottom-up metal nitride formation

Vapor deposition processes

Method of making thin films of sodium fluorides and their derivativ...

ALD cycle time reduction using process chamber lid with tunable pum...

Systems and methods for reducing effluent build-up in a pumping exh...

Methods for forming a laminate film by cyclical plasma-enhanced dep...

Methods and systems for forming a layer comprising a transitional m...

Substrate treatment apparatus and manufacturing method of semicondu...

Film-forming method and film-forming apparatus

Substrate processing apparatus

Powder transfer apparatus, gas supply apparatus, and powder removal...

Substrate processing apparatus and cleaning method

Substrate processing apparatus having exhaust gas decomposer, and e...

Sequential infiltration synthesis apparatus

Solid source precursor vessel

Atomic layer deposition of lithium boron comprising nanocomposite s...

Lids and lid assembly kits for atomic layer deposition chambers

Patents Applicationslast 30 patents

METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

CONFORMAL SILICON OXIDE DEPOSITION USING AMINOSILANE AND CHLOROSILA...

METHODS FOR DEPOSITING A FILM ON A SURFACE OF A SUBSTRATE BY CYCLIC...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

N-TYPE DOUBLE-SIDED SOLAR CELL PREPARATION METHOD

MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING

LANTHANIDE AND LANTHANIDE-LIKE TRANSITION METAL COMPLEXES

Homoleptic Bismuth Precursors For Depositing Bismuth Oxide Containi...

SUBSTRATE TREATING APPARATUS AND METHOD

VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD

SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD

FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT BY USING ATOMIC LAYER...

SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN

BOTTOM-UP METAL NITRIDE FORMATION

SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD FOR AREAL SELECTIVE FORMING OF THIN FILM

Vapor Deposition Processes

SEMICONDUCTOR PROCESSING EQUIPMENT AND CARRIER DEVICE THEREOF

REACTIVE MATERIAL AND METHOD OF PRODUCING THIN-FILM

SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE

ATOMIC LAYER DEPOSITING APPARATUS AND ATOMIC LAYER DEPOSITING METHO...

FILM FORMING APPARATUS AND FILM FORMING METHOD

PASSIVATION LAYER, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF

EPITAXIAL REACTION DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

DLC FILM DEPOSITION APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM I...