by purging residual gases from the reaction chamber or gas lines

Industry

CPC
C23C16/4408

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4408by purging residual gases from the reaction chamber or gas lines

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Epitaxial growth methods and structures thereof
- Patent number 12,369,374
- Issue date Jul 22, 2025
- Taiwan Semicoductor Manufacturing Co., Ltd.
- Tetsuji Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and method of forming metal oxide layer using...
- Patent number 12,359,313
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,359,314
- Issue date Jul 15, 2025
- Kokusai Electric Corporation
- Shin Sone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,351,905
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Ryota Ifuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming plasma coating
- Patent number 12,347,652
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Lance A. Scudder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a layer of aluminum nitride (ALN) on a structu...
- Patent number 12,338,545
- Issue date Jun 24, 2025
- COMMISSARIAT L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Maxime Legallais
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boat transfer method and heat treatment apparatus
- Patent number 12,334,380
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Shingo Hishiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purge controlling system
- Patent number 12,334,363
- Issue date Jun 17, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- Chen-Wei Ku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming metal oxide layer using deposition apparatus
- Patent number 12,331,398
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,325,915
- Issue date Jun 10, 2025
- Picosun Oy
- Timo Vähä-Ojala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for thermal deposition silicon-...
- Patent number 12,320,001
- Issue date Jun 3, 2025
- VERSUM MATERIALS US, LLC
- Chandra Haripin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Step coverage using an inhibitor molecule for high aspect ratio str...
- Patent number 12,312,677
- Issue date May 27, 2025
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Wontae Noh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of producing single-layer transition metal selenide
- Patent number 12,305,277
- Issue date May 20, 2025
- City University of Hong Kong
- Thuc Hue Ly
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for purge clean of low pressure furnace
- Patent number 12,305,276
- Issue date May 20, 2025
- Shanghai Huali Microelectronics Corporation
- Yuhong Lang
- B08 - CLEANING
Information Patent Grant
High temperature atomic layer deposition of silicon-containing film
- Patent number 12,297,115
- Issue date May 13, 2025
- VERSUM MATERIALS US, LLC
- Meiliang Wang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Chemical source vessel with dip tube
- Patent number 12,297,540
- Issue date May 13, 2025
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Throughput improvement with interval conditioning purging
- Patent number 12,291,777
- Issue date May 6, 2025
- Lam Research Corporation
- Chun-Hao Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas dispenser and deposition apparatus using the same
- Patent number 12,281,385
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of SiOC thin films
- Patent number 12,272,546
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Toshiya Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for depositing a layer
- Patent number 12,255,053
- Issue date Mar 18, 2025
- ASM IP Holding B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to eliminate of deposition on wafer bevel and backside
- Patent number 12,255,054
- Issue date Mar 18, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming thin film using surface protection material
- Patent number 12,247,289
- Issue date Mar 11, 2025
- EGTM CO., LTD.
- Geun Su Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase coating technology for pharmaceutical abuse deterrent f...
- Patent number 12,233,169
- Issue date Feb 25, 2025
- Applied Materials, Inc.
- Colin C. Neikirk
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process kits and related methods for processing chambers to facilit...
- Patent number 12,221,696
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for performing an in-situ etch of reaction ch...
- Patent number 12,203,166
- Issue date Jan 21, 2025
- ASM IP Holding B.V.
- Amit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC epitaxial wafer and method of manufacturing SiC epitaxial wafer...
- Patent number 12,188,152
- Issue date Jan 7, 2025
- Resonac Corporation
- Kensho Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protection method and device for secondary battery, secondary batte...
- Patent number 12,191,458
- Issue date Jan 7, 2025
- CONTEMPORARY AMPEREX TECHNOLOGY (HONG KONG) LIMITED
- Ting Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing silicon oxide films
- Patent number 12,188,121
- Issue date Jan 7, 2025
- ASM Genitech Korea Ltd.
- Tae Ho Yoon
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for manufacturing semiconductor device, and film-forming device
- Patent number 12,173,401
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Zeyuan Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle coating methods and apparatus
- Patent number 12,146,217
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION APPARATUS WITH DETECTION SYSTEM AND METHODS
- Publication number 20250232992
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Ming-Yao HSIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250223692
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY METHOD OF SUBSTRATE PROCESSING APPARATUS
- Publication number 20250223695
- Publication date Jul 10, 2025
- JUSUNG ENGINEERING CO., LTD.
- Chul Joo HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Heat Insulating Structure, Method o...
- Publication number 20250215561
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Gas Supply Assembly, Substrate Proc...
- Publication number 20250215568
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250215563
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Takashi YOKOGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING S...
- Publication number 20250215565
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Jocelyn Kofi Brobbey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR FORMING A THRESHOLD VOLTAGE SHIFTI...
- Publication number 20250218783
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Giuseppe Alessio Verni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXHAUST STRUCTURE, EXHAUST SYSTEM, PROCESSING APPARATUS, AND METHOD...
- Publication number 20250215562
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Masakazu SAKATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20250210328
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Sho KUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...
- Publication number 20250210343
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Marina Mariano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITOR ELECTRODE FORMING METHOD
- Publication number 20250210358
- Publication date Jun 26, 2025
- Jusung Engineering Co., Ltd.
- Jeong Soo JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AREA SELECTIVE DEPOSITION
- Publication number 20250197991
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Sabrina Myriam Guillemot Wack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20250201526
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUMING STSTEM, SEMICONDUCTOR PROCESS DEVICE AND VACUUMING METHOD...
- Publication number 20250197993
- Publication date Jun 19, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xiaobin SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR IMPROVED DEPOSITION PRODUCTS
- Publication number 20250197997
- Publication date Jun 19, 2025
- LOTUS APPLIED TECHNOLOGY
- ERIC DICKEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDE-FREE CO-REACTANTS FOR MOLYBDENUM FILM DEPOSITION
- Publication number 20250188611
- Publication date Jun 12, 2025
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITION OF A THIN SULFIDE LAYER OF A TRANSITION METAL...
- Publication number 20250188644
- Publication date Jun 12, 2025
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Stéphane Cadot
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING THIN FILM
- Publication number 20250188607
- Publication date Jun 12, 2025
- Samsung Electronics Co., Ltd.
- Jungmin Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250188617
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Yuki TAIRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIDEWALL PASSIVATION USING ALDEHYDE OR ISOCYANATE CHEMISTRY FOR HIG...
- Publication number 20250188600
- Publication date Jun 12, 2025
- LAM RESEARCH CORPORATION
- Eric A. Hudson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON NITRIDE FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250188604
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Kazuki GOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20250179641
- Publication date Jun 5, 2025
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- Ren ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL AND PHOSPHOROUS CONTAINING FILMS AND METHODS AND SYSTEMS FOR...
- Publication number 20250183030
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE BOTTOM-UP FILL
- Publication number 20250183054
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Guannan Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE INHIBITION ATOMIC LAYER DEPOSITION
- Publication number 20250179632
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Tao ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS RECYCLING
- Publication number 20250171900
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING THIN FILM USING ORGANOMETALLIC COMPOUND AND THIN...
- Publication number 20250154651
- Publication date May 15, 2025
- HANSOL CHEMICAL CO., LTD
- Jeong-Do OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR FOR FORMING METAL THIN FILM, MANUFACTURING METHOD USING T...
- Publication number 20250154648
- Publication date May 15, 2025
- Samsung Electronics Co., Ltd.
- Hyunwoo KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM FORMING COMPOSITION INCLUDING ALUMINUM COMPOUND, METHOD O...
- Publication number 20250157809
- Publication date May 15, 2025
- Samsung Electronics Co., Ltd.
- Daeun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by purging residual gases from the reaction chamber or gas lines

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Epitaxial growth methods and structures thereof

Deposition apparatus and method of forming metal oxide layer using...

Method of manufacturing semiconductor device, substrate processing...

Film forming method and film forming apparatus

Method for forming plasma coating

Method for producing a layer of aluminum nitride (ALN) on a structu...

Boat transfer method and heat treatment apparatus

Purge controlling system

Method of forming metal oxide layer using deposition apparatus

Substrate processing apparatus and method

Compositions and methods using same for thermal deposition silicon-...

Step coverage using an inhibitor molecule for high aspect ratio str...

Methods of producing single-layer transition metal selenide

Method for purge clean of low pressure furnace

High temperature atomic layer deposition of silicon-containing film

Chemical source vessel with dip tube

Throughput improvement with interval conditioning purging

Gas dispenser and deposition apparatus using the same

Formation of SiOC thin films

Methods and systems for depositing a layer

Methods to eliminate of deposition on wafer bevel and backside

Method for forming thin film using surface protection material

Vapor phase coating technology for pharmaceutical abuse deterrent f...

Process kits and related methods for processing chambers to facilit...

Apparatus and methods for performing an in-situ etch of reaction ch...

SiC epitaxial wafer and method of manufacturing SiC epitaxial wafer...

Protection method and device for secondary battery, secondary batte...

Method of depositing silicon oxide films

Method for manufacturing semiconductor device, and film-forming device

Particle coating methods and apparatus

Patents Applicationslast 30 patents

DEPOSITION APPARATUS WITH DETECTION SYSTEM AND METHODS

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

GAS SUPPLY METHOD OF SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus, Heat Insulating Structure, Method o...

Substrate Processing Apparatus, Gas Supply Assembly, Substrate Proc...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING S...

METHOD, SYSTEM AND APPARATUS FOR FORMING A THRESHOLD VOLTAGE SHIFTI...

EXHAUST STRUCTURE, EXHAUST SYSTEM, PROCESSING APPARATUS, AND METHOD...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...

CAPACITOR ELECTRODE FORMING METHOD

AREA SELECTIVE DEPOSITION

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

VACUUMING STSTEM, SEMICONDUCTOR PROCESS DEVICE AND VACUUMING METHOD...

METHODS AND SYSTEMS FOR IMPROVED DEPOSITION PRODUCTS

HALIDE-FREE CO-REACTANTS FOR MOLYBDENUM FILM DEPOSITION

METHOD OF DEPOSITION OF A THIN SULFIDE LAYER OF A TRANSITION METAL...

METHOD OF MANUFACTURING THIN FILM

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SIDEWALL PASSIVATION USING ALDEHYDE OR ISOCYANATE CHEMISTRY FOR HIG...

BORON NITRIDE FILM FORMING METHOD AND FILM FORMING APPARATUS

SEMICONDUCTOR DEVICE

METAL AND PHOSPHOROUS CONTAINING FILMS AND METHODS AND SYSTEMS FOR...

SELECTIVE BOTTOM-UP FILL

SURFACE INHIBITION ATOMIC LAYER DEPOSITION

PROCESS GAS RECYCLING

METHOD OF FORMING THIN FILM USING ORGANOMETALLIC COMPOUND AND THIN...

PRECURSOR FOR FORMING METAL THIN FILM, MANUFACTURING METHOD USING T...

THIN-FILM FORMING COMPOSITION INCLUDING ALUMINUM COMPOUND, METHOD O...