by purging residual gases from the reaction chamber or gas lines

Industry

CPC
C23C16/4408

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4408by purging residual gases from the reaction chamber or gas lines

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus having exhaust gas decomposer, and e...
- Patent number 11,970,770
- Issue date Apr 30, 2024
- Jusung Engineering Co., Ltd.
- Dong Won Seo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,970,766
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source precursor vessel
- Patent number 11,959,168
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Jianqiu Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of lithium boron comprising nanocomposite s...
- Patent number 11,946,139
- Issue date Apr 2, 2024
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
- Patent number 11,932,939
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate processing method and non...
- Patent number 11,926,893
- Issue date Mar 12, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for modulating film uniformity
- Patent number 11,913,113
- Issue date Feb 27, 2024
- Lam Research Corporation
- Pulkit Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentration control system, concentration control method and prog...
- Patent number 11,906,984
- Issue date Feb 20, 2024
- Horiba Stec, Co., Ltd.
- Kotaro Takijiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming vanadium nitride-containing layer
- Patent number 11,898,243
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Pia Homm Jara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced chemical vapor deposition method of forming lithium...
- Patent number 11,898,244
- Issue date Feb 13, 2024
- Samsung Electronics Co., Ltd.
- Jooho Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homoleptic lanthanide deposition precursors
- Patent number 11,866,824
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing silicon-containing films
- Patent number 11,851,756
- Issue date Dec 26, 2023
- VERSUM MATERIALS US, LLC
- Ming Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of pure molybenum films
- Patent number 11,854,813
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus capable of adjusting inner pressure...
- Patent number 11,846,025
- Issue date Dec 19, 2023
- Kokusai Electric Corporation
- Masamichi Yachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Layer forming method and apparatus
- Patent number 11,830,730
- Issue date Nov 28, 2023
- ASM IP Holding B.V.
- Arjen Klaver
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device, subs...
- Patent number 11,827,979
- Issue date Nov 28, 2023
- Kokusai Electric Corporation
- Keigo Nishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for atomic layer deposition
- Patent number 11,814,727
- Issue date Nov 14, 2023
- ASM IP Holding B.V.
- Eric Jen Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 11,810,805
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical treatment, deposition and/or infiltration apparatus and me...
- Patent number 11,802,338
- Issue date Oct 31, 2023
- ASM IP Holding B.V.
- Robert Huggare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Water droplet erosion resistant coatings for turbine blades and oth...
- Patent number 11,795,830
- Issue date Oct 24, 2023
- Hardide PLC
- Yuri Zhuk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC epitaxial wafer and method of manufacturing SiC epitaxial wafer
- Patent number 11,795,577
- Issue date Oct 24, 2023
- Resonac Corporation
- Kensho Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical source vessel with dip tube
- Patent number 11,781,221
- Issue date Oct 10, 2023
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor process chamber contamination prevention system
- Patent number 11,779,949
- Issue date Oct 10, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Chin Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 11,784,044
- Issue date Oct 10, 2023
- Kokusai Electric Corporation
- Takeo Hanashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous spatial atomic layer deposition process and apparatus fo...
- Patent number 11,773,487
- Issue date Oct 3, 2023
- ALD NANOSOLUTIONS, INC.
- Joseph Allen Spencer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD cycle time reduction using process chamber lid with tunable pum...
- Patent number 11,767,590
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum(0) precursors for deposition of molybdenum films
- Patent number 11,760,768
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Chandan Kr Barik
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
ALD apparatus, method and valve
- Patent number 11,761,082
- Issue date Sep 19, 2023
- Picosun Oy
- Marko Pudas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating shaft sealing device and processing apparatus for semicond...
- Patent number 11,764,102
- Issue date Sep 19, 2023
- Sealink Corp.
- Hee Jang Rhee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming layer, metal oxide transistor and...
- Patent number 11,732,354
- Issue date Aug 22, 2023
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Myung Mo Sung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240141484
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Yasuaki KOMAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...
- Publication number 20240145301
- Publication date May 2, 2024
- Soulbrain Co., LTD
- Chang Bong YEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS SYSTEM AND METHOD OF CLEANING THE SAME
- Publication number 20240141481
- Publication date May 2, 2024
- Samsung Electronics Co., Ltd.
- IREH SEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
- Publication number 20240141486
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS, SYSTEMS, AND METHODS OF USING AN ATMOSPHERIC EPITAXIAL D...
- Publication number 20240141483
- Publication date May 2, 2024
- Applied Materials, Inc.
- Thomas ACKERMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI OVERLAPPING DISK AND RING
- Publication number 20240141487
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CALORIMETRY METHOD TO MEASURE CHEMICAL REACTION HEAT IN ALD/ALE PRO...
- Publication number 20240110285
- Publication date Apr 4, 2024
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20240102162
- Publication date Mar 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Yi CHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20240105446
- Publication date Mar 28, 2024
- Kokusai Electric Corporation
- Takaaki NODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20240093370
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Masahiro TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR DEPOSITING SILICON-CONTAINING FILMS
- Publication number 20240093366
- Publication date Mar 21, 2024
- VERSUM MATERIALS US, LLC
- MING LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND S...
- Publication number 20240093368
- Publication date Mar 21, 2024
- Samsung Electronics Co., Ltd.
- HONGTAEK LIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240093372
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Tadashi TAKASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240096617
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Kimihiko Nakatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240076777
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND EXHAUST SYSTEM CAPABLE OF ADJUST...
- Publication number 20240076780
- Publication date Mar 7, 2024
- Kokusai Electric Corporation
- Masamichi YACHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS
- Publication number 20240071817
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Ruitong Xiong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DIRECT FORMATION OF ORIGAMI 3D GRAPHENE ON COPPER FOIL U...
- Publication number 20240052481
- Publication date Feb 15, 2024
- City University of Hong Kong
- Thuc Hue LY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHARED RPS CLEAN AND BYPASS DELIVERY ARCHITECTURE
- Publication number 20240047185
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Abhijit A. Kangude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS
- Publication number 20240047215
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBS...
- Publication number 20240035155
- Publication date Feb 1, 2024
- Kokusai Electric Corporation
- Keigo NISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR AUTO CORRECTION OF SUBSTRATE MISALIGNMENT
- Publication number 20240035162
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF
- Publication number 20240026540
- Publication date Jan 25, 2024
- Samsung Electronics Co., Ltd.
- Jungkuk LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Purge Ring for Reduced Substrate Backside Deposition
- Publication number 20240018648
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Geraldine VASQUEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20230420249
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Shota CHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS SPATIAL ATOMIC LAYER DEPOSITION PROCESS AND APPARATUS FO...
- Publication number 20230416914
- Publication date Dec 28, 2023
- ALD Nanosolutions, Inc.
- Joseph Allen Spencer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL INCLUDING SEAL
- Publication number 20230416918
- Publication date Dec 28, 2023
- Christopher GAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...
- Publication number 20230407478
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS ATMOSPHERIC PRESSURE CVD TOW COATER PROCESS WITH IN-SITU...
- Publication number 20230407469
- Publication date Dec 21, 2023
- Raytheon Technologies Corporation
- Ying She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL SOURCE VESSEL WITH DIP TUBE
- Publication number 20230407480
- Publication date Dec 21, 2023
- ASM IP HOLDING B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by purging residual gases from the reaction chamber or gas lines

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus having exhaust gas decomposer, and e...

Sequential infiltration synthesis apparatus

Solid source precursor vessel

Atomic layer deposition of lithium boron comprising nanocomposite s...

Lids and lid assembly kits for atomic layer deposition chambers

Substrate processing apparatus, substrate processing method and non...

Method and apparatus for modulating film uniformity

Concentration control system, concentration control method and prog...

Method of forming vanadium nitride-containing layer

Plasma-enhanced chemical vapor deposition method of forming lithium...

Homoleptic lanthanide deposition precursors

Methods for depositing silicon-containing films

Low temperature deposition of pure molybenum films

Substrate processing apparatus capable of adjusting inner pressure...

Layer forming method and apparatus

Cleaning method, method of manufacturing semiconductor device, subs...

Systems and methods for atomic layer deposition

Prevention of contamination of substrates during gas purging

Chemical treatment, deposition and/or infiltration apparatus and me...

Water droplet erosion resistant coatings for turbine blades and oth...

SiC epitaxial wafer and method of manufacturing SiC epitaxial wafer

Chemical source vessel with dip tube

Semiconductor process chamber contamination prevention system

Method of processing substrate, method of manufacturing semiconduct...

Continuous spatial atomic layer deposition process and apparatus fo...

ALD cycle time reduction using process chamber lid with tunable pum...

Molybdenum(0) precursors for deposition of molybdenum films

ALD apparatus, method and valve

Rotating shaft sealing device and processing apparatus for semicond...

Method and apparatus for forming layer, metal oxide transistor and...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...

SEMICONDUCTOR PROCESS SYSTEM AND METHOD OF CLEANING THE SAME

APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...

APPARATUS, SYSTEMS, AND METHODS OF USING AN ATMOSPHERIC EPITAXIAL D...

EPI OVERLAPPING DISK AND RING

CALORIMETRY METHOD TO MEASURE CHEMICAL REACTION HEAT IN ALD/ALE PRO...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

COMPOSITIONS AND METHODS FOR DEPOSITING SILICON-CONTAINING FILMS

EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND S...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND EXHAUST SYSTEM CAPABLE OF ADJUST...

ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS

METHOD FOR DIRECT FORMATION OF ORIGAMI 3D GRAPHENE ON COPPER FOIL U...

SHARED RPS CLEAN AND BYPASS DELIVERY ARCHITECTURE

LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBS...

SYSTEM AND METHOD FOR AUTO CORRECTION OF SUBSTRATE MISALIGNMENT

SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF

Purge Ring for Reduced Substrate Backside Deposition

FILM FORMING METHOD

CONTINUOUS SPATIAL ATOMIC LAYER DEPOSITION PROCESS AND APPARATUS FO...

PEDESTAL INCLUDING SEAL

PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...

CONTINUOUS ATMOSPHERIC PRESSURE CVD TOW COATER PROCESS WITH IN-SITU...

CHEMICAL SOURCE VESSEL WITH DIP TUBE