by purging residual gases from the reaction chamber or gas lines

Industry

CPC
C23C16/4408

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4408by purging residual gases from the reaction chamber or gas lines

Industries

Patents Grantslast 30 patents

Information Patent Grant
Particle coating methods and apparatus
- Patent number 12,146,217
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chalcogen precursors for deposition of silicon nitride
- Patent number 12,142,477
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Chandan Kr Barik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of area-selective deposition and method of fabricating an el...
- Patent number 12,116,667
- Issue date Oct 15, 2024
- SK Hynix Inc.
- Woo-Hee Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, method for manufacturing semiconductor device,...
- Patent number 12,119,219
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Hiroaki Ashizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of protective coatings for semiconductor pr...
- Patent number 12,104,246
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for epitaxially depositing a material on a substrate by flow...
- Patent number 12,091,749
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor process chamber contamination prevention system
- Patent number 12,090,503
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Chin Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, recording medium, substrate process...
- Patent number 12,084,760
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modulation of oxidation profile for substrate processing
- Patent number 12,087,573
- Issue date Sep 10, 2024
- Lam Research Corporation
- Gerald Joseph Brady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing a silicon carbide coated body
- Patent number 12,077,441
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Peter J. Guercio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of pure molybdenum films
- Patent number 12,080,558
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 12,074,045
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom-up metal nitride formation
- Patent number 12,068,164
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition processes
- Patent number 12,065,739
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making thin films of sodium fluorides and their derivativ...
- Patent number 12,065,738
- Issue date Aug 20, 2024
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD cycle time reduction using process chamber lid with tunable pum...
- Patent number 12,054,826
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for reducing effluent build-up in a pumping exh...
- Patent number 12,049,698
- Issue date Jul 30, 2024
- Lam Research Corporation
- Antonio Xavier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a laminate film by cyclical plasma-enhanced dep...
- Patent number 12,040,177
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for forming a layer comprising a transitional m...
- Patent number 12,031,206
- Issue date Jul 9, 2024
- ASM IP Holding, B.V.
- Maart van Druenen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment apparatus and manufacturing method of semicondu...
- Patent number 12,027,367
- Issue date Jul 2, 2024
- Kioxia Corporation
- Masayuki Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming method and film-forming apparatus
- Patent number 12,018,370
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Tatsuhiko Tanimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,018,373
- Issue date Jun 25, 2024
- Kokusai Electric Corporation
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Powder transfer apparatus, gas supply apparatus, and powder removal...
- Patent number 12,018,368
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Eiichi Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and cleaning method
- Patent number 12,018,366
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Shingo Hishiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus having exhaust gas decomposer, and e...
- Patent number 11,970,770
- Issue date Apr 30, 2024
- Jusung Engineering Co., Ltd.
- Dong Won Seo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,970,766
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source precursor vessel
- Patent number 11,959,168
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Jianqiu Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of lithium boron comprising nanocomposite s...
- Patent number 11,946,139
- Issue date Apr 2, 2024
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
- Patent number 11,932,939
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD
- Publication number 20240384404
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jia-Wei XU
- B08 - CLEANING
Information Patent Application
FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240384412
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT BY USING ATOMIC LAYER...
- Publication number 20240387168
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- Jinwoo Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN
- Publication number 20240379347
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Mikko Ruoho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOTTOM-UP METAL NITRIDE FORMATION
- Publication number 20240379368
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
- Publication number 20240371672
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yongfei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240371631
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR AREAL SELECTIVE FORMING OF THIN FILM
- Publication number 20240368762
- Publication date Nov 7, 2024
- EGTM Co., Ltd.
- Ju Hwan Jeong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Deposition Processes
- Publication number 20240368763
- Publication date Nov 7, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT AND CARRIER DEVICE THEREOF
- Publication number 20240371676
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xiqiang TIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE MATERIAL AND METHOD OF PRODUCING THIN-FILM
- Publication number 20240360558
- Publication date Oct 31, 2024
- ADEKA CORPORATION
- Masaki ENZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
- Publication number 20240352580
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Zaoyuan Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITING APPARATUS AND ATOMIC LAYER DEPOSITING METHO...
- Publication number 20240352581
- Publication date Oct 24, 2024
- NEXUSBE CO., LTD
- Hag Young CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20240337022
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATION LAYER, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF
- Publication number 20240332535
- Publication date Oct 3, 2024
- SHENZHEN YUANSU OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Weizhen WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL REACTION DEVICE
- Publication number 20240309550
- Publication date Sep 19, 2024
- Shenzhen Naso Tech Co Ltd
- Yunzhang XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240309506
- Publication date Sep 19, 2024
- WONIK IPS CO., LTD.
- Jae Jin HAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240287672
- Publication date Aug 29, 2024
- Kokusai Electric Corporation
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DLC FILM DEPOSITION APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM I...
- Publication number 20240287668
- Publication date Aug 29, 2024
- Samsung Electronics Co., Ltd.
- Se Jun PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER CLEANING APPARATUS AND METHOD
- Publication number 20240279802
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Jung-Min LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER
- Publication number 20240279805
- Publication date Aug 22, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR DELIVERY SYSTEM WITH SELECTIVE FILTRATION AND METHOD OF U...
- Publication number 20240279801
- Publication date Aug 22, 2024
- EUGENUS, INC.
- Chong Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING DISPLAY DEVICE
- Publication number 20240274625
- Publication date Aug 15, 2024
- SAMSUNG DISPLAY CO., LTD.
- Yungbin CHUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING GROUP III-NITRIDE SEMICONDUCTOR
- Publication number 20240266168
- Publication date Aug 8, 2024
- SCREEN Holdings Co., Ltd.
- Masaki INABA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXYGEN-DOPED AMORPHOUS CARBON FILM AND METHOD FOR DEPOSITING THE SAME
- Publication number 20240263311
- Publication date Aug 8, 2024
- TES CO., LTD.
- Seong-Pyo CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...
- Publication number 20240254655
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTION METHOD AND DEVICE FOR SECONDARY BATTERY, SECONDARY BATTE...
- Publication number 20240258584
- Publication date Aug 1, 2024
- CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED
- Ting LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20240258086
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Tadashi MITSUNARI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR DELIVERY SYSTEM FOR SEMICONDUCTOR DEVICE FORMATION
- Publication number 20240247374
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Shashidhara Patel H B
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADJUSTABLE CROSS-FLOW PROCESS CHAMBER LID
- Publication number 20240247373
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by purging residual gases from the reaction chamber or gas lines

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Particle coating methods and apparatus

Chalcogen precursors for deposition of silicon nitride

Method of area-selective deposition and method of fabricating an el...

Film forming method, method for manufacturing semiconductor device,...

Substrate processing apparatus and method of manufacturing semicond...

Atomic layer deposition of protective coatings for semiconductor pr...

Method for epitaxially depositing a material on a substrate by flow...

Semiconductor process chamber contamination prevention system

Method of processing substrate, recording medium, substrate process...

Modulation of oxidation profile for substrate processing

Process for manufacturing a silicon carbide coated body

Low temperature deposition of pure molybdenum films

Prevention of contamination of substrates during gas purging

Bottom-up metal nitride formation

Vapor deposition processes

Method of making thin films of sodium fluorides and their derivativ...

ALD cycle time reduction using process chamber lid with tunable pum...

Systems and methods for reducing effluent build-up in a pumping exh...

Methods for forming a laminate film by cyclical plasma-enhanced dep...

Methods and systems for forming a layer comprising a transitional m...

Substrate treatment apparatus and manufacturing method of semicondu...

Film-forming method and film-forming apparatus

Substrate processing apparatus

Powder transfer apparatus, gas supply apparatus, and powder removal...

Substrate processing apparatus and cleaning method

Substrate processing apparatus having exhaust gas decomposer, and e...

Sequential infiltration synthesis apparatus

Solid source precursor vessel

Atomic layer deposition of lithium boron comprising nanocomposite s...

Lids and lid assembly kits for atomic layer deposition chambers

Patents Applicationslast 30 patents

SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD

FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT BY USING ATOMIC LAYER...

SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN

BOTTOM-UP METAL NITRIDE FORMATION

SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD FOR AREAL SELECTIVE FORMING OF THIN FILM

Vapor Deposition Processes

SEMICONDUCTOR PROCESSING EQUIPMENT AND CARRIER DEVICE THEREOF

REACTIVE MATERIAL AND METHOD OF PRODUCING THIN-FILM

SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE

ATOMIC LAYER DEPOSITING APPARATUS AND ATOMIC LAYER DEPOSITING METHO...

FILM FORMING APPARATUS AND FILM FORMING METHOD

PASSIVATION LAYER, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF

EPITAXIAL REACTION DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

DLC FILM DEPOSITION APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM I...

PROCESS CHAMBER CLEANING APPARATUS AND METHOD

METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER

PRECURSOR DELIVERY SYSTEM WITH SELECTIVE FILTRATION AND METHOD OF U...

METHOD AND APPARATUS FOR MANUFACTURING DISPLAY DEVICE

METHOD OF MANUFACTURING GROUP III-NITRIDE SEMICONDUCTOR

OXYGEN-DOPED AMORPHOUS CARBON FILM AND METHOD FOR DEPOSITING THE SAME

EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...

PROTECTION METHOD AND DEVICE FOR SECONDARY BATTERY, SECONDARY BATTE...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

PRECURSOR DELIVERY SYSTEM FOR SEMICONDUCTOR DEVICE FORMATION

ADJUSTABLE CROSS-FLOW PROCESS CHAMBER LID