by radiant heating of the substrate

Industry

CPC
C23C16/481

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/481by radiant heating of the substrate

Industries

Patents Grantslast 30 patents

Information Patent Grant
In situ real-time sensing and compensation of non-uniformities in s...
- Patent number 12,142,464
- Issue date Nov 12, 2024
- Lam Research Corporation
- Changyou Jing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,967,501
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of utilizing a degassing chamber to reduce arsenic outgassin...
- Patent number 11,649,559
- Issue date May 16, 2023
- Applied Materials, Inc.
- Xinyu Bao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal reflector device for semiconductor fabrication tool
- Patent number 11,637,027
- Issue date Apr 25, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Wei Hung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating zone separation for reactant evaporation system
- Patent number 11,624,113
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light irradiation type heat treatment apparatus including oxygen an...
- Patent number 11,621,178
- Issue date Apr 4, 2023
- SCREEN Holdings Co., Ltd.
- Takayuki Aoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxially coated semiconductor wafer of monocrystalline silicon a...
- Patent number 11,578,424
- Issue date Feb 14, 2023
- Siltronic AG
- Reinhard Schauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of site-specific deposition onto a free-standing carbon article
- Patent number 11,512,390
- Issue date Nov 29, 2022
- Rochester Institute of Technology
- Brian J. Landi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling a plasma process
- Patent number 11,447,868
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber components for epitaxial growth apparatus
- Patent number 11,441,236
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Shinichi Oki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radiation shield
- Patent number 11,417,545
- Issue date Aug 16, 2022
- ASM IP Holding B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for atomic layer deposition and method of forming thin fi...
- Patent number 11,339,473
- Issue date May 24, 2022
- Samsung Electronics Co., Ltd.
- Sang-Yub Ie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,261,528
- Issue date Mar 1, 2022
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and furnace opening assembly thereof
- Patent number 11,219,096
- Issue date Jan 4, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal reflector device for semiconductor fabrication tool
- Patent number 11,205,581
- Issue date Dec 21, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Wei Hung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing atomic layers on a substrate
- Patent number 11,149,352
- Issue date Oct 19, 2021
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Raymond Jacobus Wilhelmus Knaapen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for upper susceptor rings
- Patent number 11,124,879
- Issue date Sep 21, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yun-Jie Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for temperature control in plasma processing system
- Patent number 10,998,244
- Issue date May 4, 2021
- Tokyo Electron Limited
- Anton J. deVilliers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Upper cone for epitaxy chamber
- Patent number 10,978,324
- Issue date Apr 13, 2021
- Applied Materials, Inc.
- Shinichi Oki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optically heated substrate support assembly with removable optical...
- Patent number 10,973,088
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Vijay D. Parkhe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,934,622
- Issue date Mar 2, 2021
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reflector and susceptor assembly for chemical vapor deposition reactor
- Patent number 10,932,323
- Issue date Feb 23, 2021
- Alta Devices, Inc.
- Brian Burrows
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Processing chamber
- Patent number 10,923,386
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for substrate processing
- Patent number 10,914,007
- Issue date Feb 9, 2021
- NPS Corporation
- Dae Seok Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor support
- Patent number 10,837,121
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Richard O. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,748,782
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal reflector device for semiconductor fabrication tool
- Patent number 10,727,094
- Issue date Jul 28, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Wei Hung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for chemical vapor deposition (CVD) in a movable liner asse...
- Patent number 10,718,051
- Issue date Jul 21, 2020
- Alta Devices, Inc.
- Gregg Higashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing cobalt in a feature
- Patent number 10,714,388
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Jin Hee Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radiation shield
- Patent number 10,692,741
- Issue date Jun 23, 2020
- ASM IP Holdings B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240295024
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Makoto TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240254630
- Publication date Aug 1, 2024
- Kokusai Electric Corporation
- Hideo TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR MONITORING A CONDITION OF LAMPS USED IN SEM...
- Publication number 20240110283
- Publication date Apr 4, 2024
- ASM IP HOLDING, B.V.
- Peter Bryan Ruckle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY
- Publication number 20240040672
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Sathya Shrinivas CHARY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING ZONE SEPARATION FOR REACTANT EVAPORATION SYSTEM
- Publication number 20230235454
- Publication date Jul 27, 2023
- ASM IP HOLDING B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND METHOD OF USING THE SAME
- Publication number 20230203662
- Publication date Jun 29, 2023
- DENSO CORPORATION
- TATSUJI NAGAOKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZER ASSEMBLY
- Publication number 20230062455
- Publication date Mar 2, 2023
- Entegris, Inc.
- Benjamin Cardozo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR COOLING REACTION CHAMBERS IN SEMICONDUCTO...
- Publication number 20220415677
- Publication date Dec 29, 2022
- ASM IP HOLDING B.V.
- Junwei Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD
- Publication number 20220375772
- Publication date Nov 24, 2022
- ASM IP HOLDING B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Workpiece Processing Apparatus with Gas Showerhead Assembly
- Publication number 20220195601
- Publication date Jun 23, 2022
- Mattson Technology, Inc.
- Michael Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220154341
- Publication date May 19, 2022
- Kokusai Electric Corp.
- Satoshi TAKANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210292904
- Publication date Sep 23, 2021
- Kokusai Electric Corp.
- Satoshi TAKANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIALLY COATED SEMICONDUCTOR WAFER OF MONOCRYSTALLINE SILICON A...
- Publication number 20210087705
- Publication date Mar 25, 2021
- Siltronic AG
- Reinhard SCHAUER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING ZONE SEPARATION FOR REACTANT EVAPORATION SYSTEM
- Publication number 20210079527
- Publication date Mar 18, 2021
- ASM IP HOLDING B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210005477
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Ryou Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20200407851
- Publication date Dec 31, 2020
- Kokusai Electric Corporation
- Hiroaki HIRAMATSU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Thermal Reflector Device for Semiconductor Fabrication Tool
- Publication number 20200357664
- Publication date Nov 12, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Wei Hung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD
- Publication number 20200273729
- Publication date Aug 27, 2020
- ASM IP HOLDING B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR ATOMIC LAYER DEPOSITION AND METHOD OF FORMING THIN FI...
- Publication number 20200216953
- Publication date Jul 9, 2020
- Samsung Electronics Co., Ltd.
- Sang-Yub IE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Furnace Opening Assembly Thereof
- Publication number 20200187305
- Publication date Jun 11, 2020
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATES WITH SELF-ALIGNED BURIED DIELECTRIC AND POLYCRYSTALLINE...
- Publication number 20200176589
- Publication date Jun 4, 2020
- GLOBALFOUNDRIES Inc.
- Siva P. Adusumilli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Site-specific Deposition Onto a Free-Standing Carbon Article
- Publication number 20200017959
- Publication date Jan 16, 2020
- ROCHESTER INSTITUTE OF TECHNOLOGY
- Brian J. Landi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UPPER CONE FOR EPITAXY CHAMBER
- Publication number 20200020556
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- Shinichi OKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-CLEAN OF SILICON GERMANIUM FOR PRE-METAL CONTACT AT SOURCE AND...
- Publication number 20190326115
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- Bo ZHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heating assembly
- Publication number 20190295868
- Publication date Sep 26, 2019
- Beijing Chuangyu Technology Co., Ltd
- Changle Guan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT...
- Publication number 20190267262
- Publication date Aug 29, 2019
- SCREEN Holdings Co., Ltd.
- Takayuki AOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEGASSING CHAMBER FOR ARSENIC RELATED PROCESSES
- Publication number 20190169767
- Publication date Jun 6, 2019
- Applied Materials, Inc.
- Xinyu BAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR UPPER SUSCEPTOR RINGS
- Publication number 20190144997
- Publication date May 16, 2019
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Yun-Jie HSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR MANAGING A TEMPERATURE PROFILE USING REFLE...
- Publication number 20190145004
- Publication date May 16, 2019
- REC SILICON INC
- Timothy Troutman
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITING COBALT IN A FEATURE
- Publication number 20190122924
- Publication date Apr 25, 2019
- Applied Materials, Inc.
- Jin Hee PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by radiant heating of the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

In situ real-time sensing and compensation of non-uniformities in s...

Substrate processing apparatus and method of manufacturing semicond...

Method of utilizing a degassing chamber to reduce arsenic outgassin...

Thermal reflector device for semiconductor fabrication tool

Heating zone separation for reactant evaporation system

Light irradiation type heat treatment apparatus including oxygen an...

Epitaxially coated semiconductor wafer of monocrystalline silicon a...

Method of site-specific deposition onto a free-standing carbon article

Method for controlling a plasma process

Chamber components for epitaxial growth apparatus

Radiation shield

Apparatus for atomic layer deposition and method of forming thin fi...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and furnace opening assembly thereof

Thermal reflector device for semiconductor fabrication tool

Method and apparatus for depositing atomic layers on a substrate

Systems and methods for upper susceptor rings

System and method for temperature control in plasma processing system

Upper cone for epitaxy chamber

Optically heated substrate support assembly with removable optical...

Substrate processing apparatus

Reflector and susceptor assembly for chemical vapor deposition reactor

Processing chamber

Method and apparatus for substrate processing

Susceptor support

Method of manufacturing semiconductor device

Thermal reflector device for semiconductor fabrication tool

Methods for chemical vapor deposition (CVD) in a movable liner asse...

Method and apparatus for depositing cobalt in a feature

Radiation shield

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SYSTEMS AND METHODS FOR MONITORING A CONDITION OF LAMPS USED IN SEM...

TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY

HEATING ZONE SEPARATION FOR REACTANT EVAPORATION SYSTEM

FILM FORMATION APPARATUS AND METHOD OF USING THE SAME

VAPORIZER ASSEMBLY

APPARATUS AND METHODS FOR COOLING REACTION CHAMBERS IN SEMICONDUCTO...

RADIATION SHIELD

Workpiece Processing Apparatus with Gas Showerhead Assembly

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

EPITAXIALLY COATED SEMICONDUCTOR WAFER OF MONOCRYSTALLINE SILICON A...

HEATING ZONE SEPARATION FOR REACTANT EVAPORATION SYSTEM

SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus and Method of Manufacturing Semicond...

Thermal Reflector Device for Semiconductor Fabrication Tool

RADIATION SHIELD

APPARATUS FOR ATOMIC LAYER DEPOSITION AND METHOD OF FORMING THIN FI...

Substrate Processing Apparatus and Furnace Opening Assembly Thereof

SUBSTRATES WITH SELF-ALIGNED BURIED DIELECTRIC AND POLYCRYSTALLINE...

Method of Site-specific Deposition Onto a Free-Standing Carbon Article

UPPER CONE FOR EPITAXY CHAMBER

PRE-CLEAN OF SILICON GERMANIUM FOR PRE-METAL CONTACT AT SOURCE AND...

Heating assembly

LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT...

DEGASSING CHAMBER FOR ARSENIC RELATED PROCESSES

SYSTEMS AND METHODS FOR UPPER SUSCEPTOR RINGS

APPARATUS AND METHOD FOR MANAGING A TEMPERATURE PROFILE USING REFLE...

METHOD AND APPARATUS FOR DEPOSITING COBALT IN A FEATURE