by using a condenser

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CPC
C23C16/4487

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/4487by using a condenser

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Patents Grantslast 30 patents

Information Patent Grant
Chemical delivery system and method of operating the chemical deliv...
- Patent number 11,746,413
- Issue date Sep 5, 2023
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical delivery system and method of operating the chemical deliv...
- Patent number 11,421,320
- Issue date Aug 23, 2022
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for generating a vapor for a CVD or PVD device
- Patent number 10,501,847
- Issue date Dec 10, 2019
- Aixtron SE
- Michael Long
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for generating a precursor for a semiconductor...
- Patent number 8,062,422
- Issue date Nov 22, 2011
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for providing gas to a processing chamber
- Patent number 7,678,194
- Issue date Mar 16, 2010
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical precursor ampoule for vapor deposition processes
- Patent number 7,597,758
- Issue date Oct 6, 2009
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for generating a chemical precursor
- Patent number 7,588,736
- Issue date Sep 15, 2009
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for providing precursor gas to a processing ch...
- Patent number 7,569,191
- Issue date Aug 4, 2009
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for providing precursor gas to a processing ch...
- Patent number 7,429,361
- Issue date Sep 30, 2008
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of generating PDMAT precursor
- Patent number 7,270,709
- Issue date Sep 18, 2007
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for providing gas to a processing chamber
- Patent number 7,186,385
- Issue date Mar 6, 2007
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of generating PDMAT precursor
- Patent number 6,905,541
- Issue date Jun 14, 2005
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nickel carbonyl vapour deposition apparatus and method
- Patent number 6,132,518
- Issue date Oct 17, 2000
- Chemical Vapour Deposition Systems, Inc.
- Miroslav Milinkovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Closed loop carbon monoxide self-contained nickel carbonyl depositi...
- Patent number 6,048,578
- Issue date Apr 11, 2000
- Chemical Vapour Deposition Systems, Inc.
- Miroslav Milinkovic
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 5,776,255
- Issue date Jul 7, 1998
- Canon Kabushiki Kaisha
- Tetsuo Asaba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical fiber fabrication method and apparatus
- Patent number 4,278,458
- Issue date Jul 14, 1981
- Bell Telephone Laboratories, Incorporated
- Paul B. O'Connor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactants delivery system for optical waveguide manufacturing
- Patent number 4,212,663
- Issue date Jul 15, 1980
- Corning Glass Works
- Mohd A. Aslami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
3901182
- Patent number 3,901,182
- Issue date Aug 26, 1975
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PRECURSOR RECOVERY MODULE
- Publication number 20240401193
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Shashank Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIV...
- Publication number 20220298629
- Publication date Sep 22, 2022
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIV...
- Publication number 20190177840
- Publication date Jun 13, 2019
- Entegris, Inc.
- David James ELDRIDGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR GENERATING A VAPOR FOR A CVD OR PVD DEVICE
- Publication number 20180148836
- Publication date May 31, 2018
- AIXTRON SE
- Michael LONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR GENERATING A PRECURSOR FOR A SEMICONDUCTOR...
- Publication number 20090151633
- Publication date Jun 18, 2009
- LING CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROVIDING PRECURSOR GAS TO A PROCESSING CH...
- Publication number 20090011129
- Publication date Jan 8, 2009
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES
- Publication number 20080216743
- Publication date Sep 11, 2008
- LING CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROVIDING PRECURSOR GAS TO A PROCESSING CH...
- Publication number 20070110898
- Publication date May 17, 2007
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROVIDING GAS TO A PROCESSING CHAMBER
- Publication number 20070089817
- Publication date Apr 26, 2007
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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APPARATUS AND METHOD FOR GENERATING A CHEMICAL PRECURSOR
- Publication number 20060257295
- Publication date Nov 16, 2006
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method and apparatus of generating PDMAT precursor
- Publication number 20050189072
- Publication date Sep 1, 2005
- APPLIED MATERIALS, INC.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method and apparatus of generating PDMAT precursor
- Publication number 20040014320
- Publication date Jan 22, 2004
- APPLIED MATERIALS, INC.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for providing gas to a processing chamber
- Publication number 20040013577
- Publication date Jan 22, 2004
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by using a condenser

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Chemical delivery system and method of operating the chemical deliv...

Chemical delivery system and method of operating the chemical deliv...

Apparatus and method for generating a vapor for a CVD or PVD device

Method and apparatus for generating a precursor for a semiconductor...

Method for providing gas to a processing chamber

Chemical precursor ampoule for vapor deposition processes

Apparatus and method for generating a chemical precursor

Method and apparatus for providing precursor gas to a processing ch...

Method and apparatus for providing precursor gas to a processing ch...

Method and apparatus of generating PDMAT precursor

Apparatus for providing gas to a processing chamber

Method and apparatus of generating PDMAT precursor

Nickel carbonyl vapour deposition apparatus and method

Closed loop carbon monoxide self-contained nickel carbonyl depositi...

Chemical vapor deposition apparatus

Optical fiber fabrication method and apparatus

Reactants delivery system for optical waveguide manufacturing

3901182

Patents Applicationslast 30 patents

LIQUID PRECURSOR RECOVERY MODULE

CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIV...

CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIV...

APPARATUS AND METHOD FOR GENERATING A VAPOR FOR A CVD OR PVD DEVICE

METHOD AND APPARATUS FOR GENERATING A PRECURSOR FOR A SEMICONDUCTOR...

METHOD AND APPARATUS FOR PROVIDING PRECURSOR GAS TO A PROCESSING CH...

CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES

METHOD AND APPARATUS FOR PROVIDING PRECURSOR GAS TO A PROCESSING CH...

METHOD FOR PROVIDING GAS TO A PROCESSING CHAMBER

APPARATUS AND METHOD FOR GENERATING A CHEMICAL PRECURSOR

Method and apparatus of generating PDMAT precursor

Method and apparatus of generating PDMAT precursor

Method and apparatus for providing gas to a processing chamber