3901182

Information

• Patent Grant
• 3901182

• References
• Source

• Patent Number

  3,901,182

• Date Filed

  Not available

• Date Issued

  Tuesday, August 26, 1975
  49 years ago

• CPC

  • C23C16/4487 - by using a condenser
  • C23C16/24 - Deposition of silicon only
  • C23C16/4482 - by bubbling of carrier gas through liquid source material
  • C30B25/02 - Epitaxial-layer growth
  • C30B29/06 - Silicon
  • Y10S118/90 - Semiconductor vapor doping
  • Y10T137/6579 - Circulating fluid in heat exchange relationship

• US Classifications

  • 118 - Coating apparatus
  • 137 - Fluid handling
  • 203 - Distillation: processes, separatory