Changing chemical properties of treated surfaces

Industry

CPC
H01J2237/338

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/338Changing chemical properties of treated surfaces

Industries

Patents Grantslast 30 patents

Information Patent Grant
Oxidative conversion in atomic layer deposition processes
- Patent number 12,087,574
- Issue date Sep 10, 2024
- Lam Research Corporation
- Douglas Walter Agnew
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitriding apparatus and nitriding method
- Patent number 12,033,836
- Issue date Jul 9, 2024
- Kobe Steel, Ltd.
- Maiko Abe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,009,217
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Tsuyoshi Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for etching metal nitrides
- Patent number 12,009,224
- Issue date Jun 11, 2024
- ASM IP Holding B.V.
- Ren-Jie Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a gap-fill layer by plasma-assisted deposition
- Patent number 11,972,944
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ash rate recovery method in plasma strip chamber
- Patent number 11,955,318
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Yongkwan Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for hydrogen sulfide dissociation in electric arc
- Patent number 11,875,975
- Issue date Jan 16, 2024
- REDSHIFT ENERGY, INC.
- Alexander Gutsol
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate joining method, substrate joining system and method for c...
- Patent number 11,837,444
- Issue date Dec 5, 2023
- BONDTECH CO., LTD.
- Akira Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of treating a surface of a polymer material by atmospheric...
- Patent number 11,830,707
- Issue date Nov 28, 2023
- Corning Incorporated
- Jiangwei Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite materials systems
- Patent number 11,767,414
- Issue date Sep 26, 2023
- LytEn, Inc.
- Michael W. Stowell
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Producing method for producing magnesium hydride, power generation...
- Patent number 11,643,704
- Issue date May 9, 2023
- SE CORPORATION
- Tsutomu Takizawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
System and method of water purification and hydrogen peroxide gener...
- Patent number 11,535,532
- Issue date Dec 27, 2022
- Dmitry Medvedev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing a gap-fill layer by plasma-assisted deposition
- Patent number 11,482,412
- Issue date Oct 25, 2022
- ASM IP Holding B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer chuck and processing arrangement
- Patent number 11,387,081
- Issue date Jul 12, 2022
- Infineon Technologies AG
- Rudolf Kogler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite materials systems
- Patent number 11,352,481
- Issue date Jun 7, 2022
- LytEn, Inc.
- Michael W. Stowell
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Methods of treating a surface of a polymer material by atmospheric...
- Patent number 11,170,980
- Issue date Nov 9, 2021
- Corning Incorporated
- Jiangwei Feng
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Plasma polymerization apparatus and plasma polymerization method us...
- Patent number 11,133,159
- Issue date Sep 28, 2021
- Ming Chi University of Technology
- Jang-Hsing Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coatings
- Patent number 11,041,087
- Issue date Jun 22, 2021
- P2i Ltd
- Stephen Richard Coulson
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Composite materials systems containing carbon and resin
- Patent number 10,907,031
- Issue date Feb 2, 2021
- LytEn, Inc.
- Michael W. Stowell
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Substrate treatment apparatus, method of manufacturing semiconducto...
- Patent number 10,804,221
- Issue date Oct 13, 2020
- TOSHIBA MEMORY CORPORATION
- Fuyuma Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-thermal multiple plasma gate devices
- Patent number 10,703,654
- Issue date Jul 7, 2020
- Pear Labs LLC
- Christopher D. Hruska
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Wafer chuck and processing arrangement
- Patent number 10,629,416
- Issue date Apr 21, 2020
- Infineon Technologies AG
- Rudolf Kogler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite materials systems containing carbon and resin
- Patent number 10,472,497
- Issue date Nov 12, 2019
- Lyten, Inc.
- Michael W. Stowell
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Plasma nitriding apparatus
- Patent number 10,443,117
- Issue date Oct 15, 2019
- IHI Corporation
- Norimitsu Kameya
- F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...
Information Patent Grant
Coatings
- Patent number 10,421,876
- Issue date Sep 24, 2019
- P2i Ltd
- Stephen Richard Coulson
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 10,403,478
- Issue date Sep 3, 2019
- Kokusai Electric Corporation
- Hidehiro Yanai
- B08 - CLEANING
Information Patent Grant
Method for producing contact areas on a semiconductor substrate
- Patent number 10,332,850
- Issue date Jun 25, 2019
- IMEC
- Eric Beyne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor with inductive excitation of plasma and efficient re...
- Patent number 10,090,134
- Issue date Oct 2, 2018
- Mattson Technology, Inc.
- Valery Godyak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck apparatus
- Patent number 9,721,822
- Issue date Aug 1, 2017
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treated object modifying apparatus, printing apparatus, printing sy...
- Patent number 9,566,802
- Issue date Feb 14, 2017
- Ricoh Company, Ltd.
- Kengo Tsubaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN
- Publication number 20240379347
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Mikko Ruoho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INSULATING FILM FORMING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20240321571
- Publication date Sep 26, 2024
- TOKYO ELECTRON LIMITED
- Daisuke OBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240321563
- Publication date Sep 26, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Shigeki MATSUNAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INDPENDENT DILUTION INJECT FOR REMOTE PLASMA OXIDATION
- Publication number 20240297022
- Publication date Sep 5, 2024
- Applied Materials, Inc.
- Hansel LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20240254617
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Sena FUJITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240234132
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Yusuke TERUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR...
- Publication number 20240194487
- Publication date Jun 13, 2024
- Hitachi High-Tech Corporation
- Yu Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING GRAPHENE
- Publication number 20240181568
- Publication date Jun 6, 2024
- ASUSTEK COMPUTER INC.
- Yun-Wei TSAI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
A Device and Method For Generating A Plasma Jet
- Publication number 20240188208
- Publication date Jun 6, 2024
- Universiteit Gent
- Yuliia Onyshchenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING ATOMIC LAYER
- Publication number 20240177972
- Publication date May 30, 2024
- Research & Business Foundation SUNGKYUNKWAN UNIVERSITY
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240047180
- Publication date Feb 8, 2024
- Kokusai Electric Corporation
- Daisuke HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE MATERIALS SYSTEMS
- Publication number 20240010818
- Publication date Jan 11, 2024
- Lyten, Inc.
- Michael W. Stowell
- C01 - INORGANIC CHEMISTRY
Information Patent Application
PLASMA ENHANCED TUNGSTEN NUCLEATION FOR LOW RESISTIVITY
- Publication number 20240006236
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Tsung-Han YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT OF TUNGSTEN SURFACE FOR TUNGSTEN GAP-FILL
- Publication number 20230420295
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Tsung-Han YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230395371
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Kazumasa IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING AN ELECTRODE STRUCTURE AND APPARATUS FOR FABR...
- Publication number 20230360932
- Publication date Nov 9, 2023
- Samsung Electronics Co., Ltd.
- Dohyung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS-DELIVERY ASSEMBLY AND REACTOR SYSTEM INCLUDING SAME
- Publication number 20230326722
- Publication date Oct 12, 2023
- ASM IP HOLDING B.V.
- Thomas Fitzgerald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAL STRUCTURE, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFA...
- Publication number 20230274916
- Publication date Aug 31, 2023
- Kokusai Electric Corporation
- Takayuki SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230245869
- Publication date Aug 3, 2023
- Kokusai Electric Corporation
- Tetsuaki INADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION
- Publication number 20230215702
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Vladimir Nagorny
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE JOINING METHOD, SUBSTRATE JOINING SYSTEM AND METHOD FOR C...
- Publication number 20230136771
- Publication date May 4, 2023
- BONDTECH CO., LTD.
- Akira YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING WITH TUNABLE NITRIDATION
- Publication number 20230127138
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Wei LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IGNITION CONTROLLING METHOD, FILM FORMING METHOD, AND FILM FORMING...
- Publication number 20230129976
- Publication date Apr 27, 2023
- TOKYO ELECTRON LIMITED
- Takeshi KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230097621
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Hiroto IGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A GAP-FILL LAYER BY PLASMA-ASSISTED DEPOSITION
- Publication number 20230065627
- Publication date Mar 2, 2023
- ASM IP HOLDING B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC-SCALE MATERIALS PROCESSING BASED ON ELECTRON BEAM INDUCED ET...
- Publication number 20230059730
- Publication date Feb 23, 2023
- University of Maryland, College Park
- Gottlieb S. OEHRLEIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DECOMPOSITION OF MOLECULES
- Publication number 20230015528
- Publication date Jan 19, 2023
- Epirus, Inc.
- Harry Bourne Marr
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL OXIDE DIRECTIONAL REMOVAL
- Publication number 20230015080
- Publication date Jan 19, 2023
- Applied Materials, Inc.
- Baiwei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ME...
- Publication number 20220406572
- Publication date Dec 22, 2022
- Tokyo Electron Limited
- Kenichi OYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BONDING SYSTEM AND SURFACE MODIFICATION METHOD
- Publication number 20220384386
- Publication date Dec 1, 2022
- TOKYO ELECTRON LIMITED
- Yuji Mimura
- H01 - BASIC ELECTRIC ELEMENTS

Changing chemical properties of treated surfaces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Oxidative conversion in atomic layer deposition processes

Nitriding apparatus and nitriding method

Substrate processing method and substrate processing apparatus

Apparatus and method for etching metal nitrides

Method for depositing a gap-fill layer by plasma-assisted deposition

Ash rate recovery method in plasma strip chamber

Method and device for hydrogen sulfide dissociation in electric arc

Substrate joining method, substrate joining system and method for c...

Methods of treating a surface of a polymer material by atmospheric...

Composite materials systems

Producing method for producing magnesium hydride, power generation...

System and method of water purification and hydrogen peroxide gener...

Method for depositing a gap-fill layer by plasma-assisted deposition

Wafer chuck and processing arrangement

Composite materials systems

Methods of treating a surface of a polymer material by atmospheric...

Plasma polymerization apparatus and plasma polymerization method us...

Coatings

Composite materials systems containing carbon and resin

Substrate treatment apparatus, method of manufacturing semiconducto...

Non-thermal multiple plasma gate devices

Wafer chuck and processing arrangement

Composite materials systems containing carbon and resin

Plasma nitriding apparatus

Coatings

Plasma processing apparatus and method of manufacturing semiconduct...

Method for producing contact areas on a semiconductor substrate

Plasma reactor with inductive excitation of plasma and efficient re...

Electrostatic chuck apparatus

Treated object modifying apparatus, printing apparatus, printing sy...

Patents Applicationslast 30 patents

SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN

INSULATING FILM FORMING METHOD AND SUBSTRATE PROCESSING SYSTEM

FILM FORMING APPARATUS

INDPENDENT DILUTION INJECT FOR REMOTE PLASMA OXIDATION

FILM FORMATION METHOD AND FILM FORMATION DEVICE

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

PLASMA PROCESSING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR...

METHOD FOR PRODUCING GRAPHENE

A Device and Method For Generating A Plasma Jet

METHOD FOR ETCHING ATOMIC LAYER

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

COMPOSITE MATERIALS SYSTEMS

PLASMA ENHANCED TUNGSTEN NUCLEATION FOR LOW RESISTIVITY

TREATMENT OF TUNGSTEN SURFACE FOR TUNGSTEN GAP-FILL

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF FABRICATING AN ELECTRODE STRUCTURE AND APPARATUS FOR FABR...

GAS-DELIVERY ASSEMBLY AND REACTOR SYSTEM INCLUDING SAME

SEAL STRUCTURE, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFA...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION

SUBSTRATE JOINING METHOD, SUBSTRATE JOINING SYSTEM AND METHOD FOR C...

PLASMA PROCESSING WITH TUNABLE NITRIDATION

IGNITION CONTROLLING METHOD, FILM FORMING METHOD, AND FILM FORMING...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD FOR DEPOSITING A GAP-FILL LAYER BY PLASMA-ASSISTED DEPOSITION

ATOMIC-SCALE MATERIALS PROCESSING BASED ON ELECTRON BEAM INDUCED ET...

SYSTEMS AND METHODS FOR DECOMPOSITION OF MOLECULES

METAL OXIDE DIRECTIONAL REMOVAL

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ME...

BONDING SYSTEM AND SURFACE MODIFICATION METHOD