Changing the direction of the conveying path

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H01L21/67715

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67715Changing the direction of the conveying path

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for automated wafer carrier handling
- Patent number 12,322,628
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system and control method of transport system
- Patent number 12,301,144
- Issue date May 13, 2025
- Canon Kabushiki Kaisha
- Ryuji Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and vacuum processing method using the...
- Patent number 12,288,709
- Issue date Apr 29, 2025
- Samsung Display Co., Ltd.
- Kyung Hoon Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic transfer apparatus and fabrication method of the same
- Patent number 12,266,555
- Issue date Apr 1, 2025
- Korea University Research and Business Foundation
- Tae-Yeon Seong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport facility
- Patent number 12,187,536
- Issue date Jan 7, 2025
- Daifuku Co., Ltd.
- Yuichi Morimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport facility
- Patent number 12,154,807
- Issue date Nov 26, 2024
- Daifuku Co., Ltd.
- Hiroshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier vehicle system
- Patent number 12,148,643
- Issue date Nov 19, 2024
- Murata Machinery, Ltd.
- Yasuhisa Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system
- Patent number 12,131,930
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Asaf Schlezinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Traveling vehicle system
- Patent number 12,116,021
- Issue date Oct 15, 2024
- Murata Machinery, Ltd.
- Haruki Ogo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Traveling vehicle system
- Patent number 12,103,570
- Issue date Oct 1, 2024
- Murata Machinery, Ltd.
- Haruki Ogo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System configurations for fabrication of micro-LED displays
- Patent number 12,062,735
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Hou T. Ng
- B08 - CLEANING
Information Patent Grant
Bridge apparatus and method for semiconductor die transfer
- Patent number 11,967,515
- Issue date Apr 23, 2024
- Rohinni, Inc.
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic transfer apparatus and fabrication method of the same
- Patent number 11,961,750
- Issue date Apr 16, 2024
- Korea University Research and Business Foundation
- Tae-Yeon Seong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for automated wafer carrier handling
- Patent number 11,915,958
- Issue date Feb 27, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Traveling vehicle and traveling vehicle system
- Patent number 11,904,887
- Issue date Feb 20, 2024
- Murata Machinery, Ltd.
- Munekuni Oshima
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,869,791
- Issue date Jan 9, 2024
- Ulvac, Inc.
- Dai Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer cassette warehouse transportation structure system
- Patent number 11,764,091
- Issue date Sep 19, 2023
- EDDIE AND SONS TECHNOLOGY CO., LTD
- James Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,664,254
- Issue date May 30, 2023
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems for direct transfer of semiconductor device die
- Patent number 11,562,990
- Issue date Jan 24, 2023
- Rohinni, Inc.
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Direct transfer of semiconductor devices from a substrate
- Patent number 11,515,293
- Issue date Nov 29, 2022
- Rohinni, LLC
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for contactless transportation of a device in...
- Patent number 11,508,595
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Henning Aust
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Method for transfer of semiconductor devices onto glass substrates
- Patent number 11,488,940
- Issue date Nov 1, 2022
- Rohinni, Inc.
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate receptacle storage method
- Patent number 11,476,143
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Akihiro Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceiling conveyance vehicle and ceiling conveyance vehicle system
- Patent number 11,417,555
- Issue date Aug 16, 2022
- Murata Machinery, Ltd.
- Haruki Ogo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device, transfer method and photolithography app...
- Patent number 11,367,636
- Issue date Jun 21, 2022
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Fulong Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation apparatus, laser irradiation method, and method o...
- Patent number 11,355,343
- Issue date Jun 7, 2022
- JSW AKTINA SYSTEM CO., LTD.
- Takahiro Mikami
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor wafer handling and transport
- Patent number 11,352,220
- Issue date Jun 7, 2022
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport facility
- Patent number 11,312,578
- Issue date Apr 26, 2022
- Daifuku Co., Ltd.
- Makoto Kono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for automated wafer carrier handling
- Patent number 11,295,973
- Issue date Apr 5, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bridge apparatus for semiconductor die transfer
- Patent number 11,282,730
- Issue date Mar 22, 2022
- Rohinni, LLC
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ARTICLE TRANSPORT FACILITY
- Publication number 20250191947
- Publication date Jun 12, 2025
- SEMES CO., LTD.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250087513
- Publication date Mar 13, 2025
- EBARA CORPORATION
- Masaya SEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS ALLOWING MOVEMENT BETWEEN LAYERS
- Publication number 20250029859
- Publication date Jan 23, 2025
- VM Inc.
- Sang Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION SYSTEM
- Publication number 20240429078
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Asaf SCHLEZINGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC TRANSFER APPARATUS AND FABRICATION METHOD OF THE SAME
- Publication number 20240222173
- Publication date Jul 4, 2024
- Korea University Research and Business Foundation
- Tae-Yeon SEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR AUTOMATED WAFER CARRIER HANDLING
- Publication number 20240153806
- Publication date May 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MAN...
- Publication number 20240128109
- Publication date Apr 18, 2024
- Samsung Electronics Co., Ltd.
- Ji Hun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND METHOD FOR MANUFACTURI...
- Publication number 20240120198
- Publication date Apr 11, 2024
- JSW Aktina System Co., Ltd.
- Yoshihiro YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TURNTABLE FOR WAFER TRANSPORT SYSTEM
- Publication number 20240071797
- Publication date Feb 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Guancyun Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER SYSTEM AND CONTROL METHOD THEREOF
- Publication number 20240059497
- Publication date Feb 22, 2024
- SEMES CO., LTD.
- In Su JO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATH SETTING SYSTEM, PATH SETTING METHOD, AND SOFTWARE
- Publication number 20230343624
- Publication date Oct 26, 2023
- TOKYO ELECTRON LIMITED
- Yoshinori IGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRAVELING VEHICLE SYSTEM AND TRAVELING VEHICLE CONTROL METHOD
- Publication number 20230242166
- Publication date Aug 3, 2023
- MURATA MACHINERY, LTD.
- Atsushi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOGISTICS SYSTEM IN FABRICATION FACILITY
- Publication number 20230215749
- Publication date Jul 6, 2023
- SEMES CO., LTD.
- Jin Ho LEE
- B66 - HOISTING LIFTING HAULING
Information Patent Application
CARRIER VEHICLE SYSTEM
- Publication number 20230170237
- Publication date Jun 1, 2023
- MURATA MACHINERY, LTD.
- Yasuhisa ITO
- B66 - HOISTING LIFTING HAULING
Information Patent Application
INSPECTION SYSTEM
- Publication number 20230075394
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Asaf SCHLEZINGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTE...
- Publication number 20230021035
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HASH OVERHEAD HOIST TRANSPORT RAIL SYSTEM AND METHODS OF OPERATING...
- Publication number 20220406638
- Publication date Dec 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Guancyun Li
- B66 - HOISTING LIFTING HAULING
Information Patent Application
METHOD AND APPARATUS FOR INTRODUCING A SUBSTRATE INTO A NIP
- Publication number 20220384228
- Publication date Dec 1, 2022
- Lumet Technologies LTD.
- Benzion LANDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR FABRICATION OF MICRO-LED DISPLAYS
- Publication number 20220293435
- Publication date Sep 15, 2022
- Applied Materials, Inc.
- Hou T. Ng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION OF MICRO-LED DISPLAYS WITH REWORK OR TRANSFER LINE
- Publication number 20220293441
- Publication date Sep 15, 2022
- Applied Materials, Inc.
- Hou T. Ng
- B08 - CLEANING
Information Patent Application
MAGNETIC TRANSFER APPARATUS AND FABRICATION METHOD OF THE SAME
- Publication number 20220246458
- Publication date Aug 4, 2022
- Korea University Research and Business Foundation
- Tae-Yeon SEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER CASSETTE WAREHOUSE TRANSPORTATION STRUCTURE SYSTEM
- Publication number 20220246450
- Publication date Aug 4, 2022
- Eddie and Sons Technology Co., Ltd
- James TENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BRIDGE APPARATUS AND METHOD FOR SEMICONDUCTOR DIE TRANSFER
- Publication number 20220216083
- Publication date Jul 7, 2022
- Rohinni, LLC
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR AUTOMATED WAFER CARRIER HANDLING
- Publication number 20220216075
- Publication date Jul 7, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220165596
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT SYSTEM AND CONTROL METHOD OF TRANSPORT SYSTEM
- Publication number 20220140762
- Publication date May 5, 2022
- Canon Kabushiki Kaisha
- Ryuji Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CEILING CONVEYANCE VEHICLE AND CEILING CONVEYANCE VEHICLE SYSTEM
- Publication number 20220020621
- Publication date Jan 20, 2022
- MURATA MACHINERY, LTD.
- Haruki OGO
- B61 - RAILWAYS
Information Patent Application
APPARATUS AND METHOD FOR AUTOMATED WAFER CARRIER HANDLING
- Publication number 20210249282
- Publication date Aug 12, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTACTLESS TRANSPORTATION OF A DEVICE IN...
- Publication number 20210225677
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Henning AUST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RECEPTACLE STORAGE METHOD
- Publication number 20210134636
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Akihiro Teramoto
- H01 - BASIC ELECTRIC ELEMENTS

Changing the direction of the conveying path

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for automated wafer carrier handling

Transport system and control method of transport system

Vacuum processing apparatus and vacuum processing method using the...

Magnetic transfer apparatus and fabrication method of the same

Article transport facility

Article transport facility

Carrier vehicle system

Inspection system

Traveling vehicle system

Traveling vehicle system

System configurations for fabrication of micro-LED displays

Bridge apparatus and method for semiconductor die transfer

Magnetic transfer apparatus and fabrication method of the same

Apparatus and method for automated wafer carrier handling

Traveling vehicle and traveling vehicle system

Vacuum processing apparatus

Semiconductor wafer cassette warehouse transportation structure system

Substrate processing apparatus and substrate processing method

Systems for direct transfer of semiconductor device die

Direct transfer of semiconductor devices from a substrate

Apparatus and method for contactless transportation of a device in...

Method for transfer of semiconductor devices onto glass substrates

Substrate processing apparatus and substrate receptacle storage method

Ceiling conveyance vehicle and ceiling conveyance vehicle system

Substrate transfer device, transfer method and photolithography app...

Laser irradiation apparatus, laser irradiation method, and method o...

Semiconductor wafer handling and transport

Article transport facility

Apparatus and method for automated wafer carrier handling

Bridge apparatus for semiconductor die transfer

Patents Applicationslast 30 patents

ARTICLE TRANSPORT FACILITY

TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSFER APPARATUS ALLOWING MOVEMENT BETWEEN LAYERS

INSPECTION SYSTEM

MAGNETIC TRANSFER APPARATUS AND FABRICATION METHOD OF THE SAME

APPARATUS AND METHOD FOR AUTOMATED WAFER CARRIER HANDLING

APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MAN...

CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND METHOD FOR MANUFACTURI...

TURNTABLE FOR WAFER TRANSPORT SYSTEM

TRANSFER SYSTEM AND CONTROL METHOD THEREOF

PATH SETTING SYSTEM, PATH SETTING METHOD, AND SOFTWARE

TRAVELING VEHICLE SYSTEM AND TRAVELING VEHICLE CONTROL METHOD

LOGISTICS SYSTEM IN FABRICATION FACILITY

CARRIER VEHICLE SYSTEM

INSPECTION SYSTEM

LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTE...

HASH OVERHEAD HOIST TRANSPORT RAIL SYSTEM AND METHODS OF OPERATING...

METHOD AND APPARATUS FOR INTRODUCING A SUBSTRATE INTO A NIP

SYSTEMS AND METHODS FOR FABRICATION OF MICRO-LED DISPLAYS

FABRICATION OF MICRO-LED DISPLAYS WITH REWORK OR TRANSFER LINE

MAGNETIC TRANSFER APPARATUS AND FABRICATION METHOD OF THE SAME

SEMICONDUCTOR WAFER CASSETTE WAREHOUSE TRANSPORTATION STRUCTURE SYSTEM

BRIDGE APPARATUS AND METHOD FOR SEMICONDUCTOR DIE TRANSFER

APPARATUS AND METHOD FOR AUTOMATED WAFER CARRIER HANDLING

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

TRANSPORT SYSTEM AND CONTROL METHOD OF TRANSPORT SYSTEM

CEILING CONVEYANCE VEHICLE AND CEILING CONVEYANCE VEHICLE SYSTEM

APPARATUS AND METHOD FOR AUTOMATED WAFER CARRIER HANDLING

APPARATUS AND METHOD FOR CONTACTLESS TRANSPORTATION OF A DEVICE IN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RECEPTACLE STORAGE METHOD