Patent Grant
11562990
Semiconductor devices are electrical components that utilize semiconductor material, such as silicon, germanium, gallium arsenide, and the like. Semiconductor devices are typically manufactured as single discrete devices or as integrated circuits (ICs). Examples of single discrete devices include electrically-actuatable elements such as light-emitting diodes (LEDs), diodes, transistors, resistors, capacitors, fuses, and the like.
The fabrication of semiconductor devices typically involves an intricate manufacturing process with a myriad of steps. The end-product of the fabrication is a “packaged” semiconductor device. The “packaged” modifier refers to the enclosure and protective features built into the final product as well as the interface that enables the device in the package to be incorporated into an ultimate circuit.
The conventional fabrication process for semiconductor devices starts with handling a semiconductor wafer. The wafer is diced into a multitude of “unpackaged” semiconductor devices. The “unpackaged” modifier refers to an unenclosed semiconductor device without protective features. Herein, unpackaged semiconductor devices may be called semiconductor device dies, or just “dies” for simplicity. A single semiconductor wafer may be diced to create dies of various sizes, so as to form upwards of more than 100,000 or even 1,000,000 dies from the semiconductor wafer (depending on the starting size of the semiconductor), and each die has a certain quality. The unpackaged dies are then “packaged” via a conventional fabrication process discussed briefly below. The actions between the wafer handling and the packaging may be referred to as “die preparation.”
In some instances, the die preparation may include sorting the dies via a “pick and place process,” whereby diced dies are picked up individually and sorted into bins. The sorting may be based on the forward voltage capacity of the die, the average power of the die, and/or the wavelength of the die.
Typically, the packaging involves mounting a die into a plastic or ceramic package (e.g., mold or enclosure). The packaging also includes connecting the die contacts to pins/wires for interfacing/interconnecting with ultimate circuitry. The packaging of the semiconductor device is typically completed by sealing the die to protect it from the environment (e.g., dust).
A product manufacturer then places packaged semiconductor devices in product circuitry. Due to the packaging, the devices are ready to be “plugged in” to the circuit assembly of the product being manufactured. Additionally, while the packaging of the devices protects them from elements that might degrade or destroy the devices, the packaged devices are inherently larger (e.g., in some cases, around 10 times the thickness and 10 times the area, resulting in 100 times the volume) than the die found inside the package. Thus, the resulting circuit assembly cannot be any thinner than the packaging of the semiconductor devices.
The Detailed Description is set forth with reference to the accompanying figures. In the figures, the left-most digit(s) of a reference number identifies the figure in which the reference number first appears. The use of the same reference numbers in different figures indicates similar or identical items. Furthermore, the drawings may be considered as providing an approximate depiction of the relative sizes of the individual components within individual figures. However, the drawings are not to scale, and the relative sizes of the individual components, both within individual figures and between the different figures, may vary from what is depicted. In particular, some of the figures may depict components as a certain size or shape, while other figures may depict the same components on a larger scale or differently shaped for the sake of clarity.
This disclosure is directed to a machine that directly transfers and affixes semiconductor device dies to a circuit and to the process for achieving the same, as well as to the circuit having dies affixed thereto (as the output product). In some instances, the machine functions to transfer unpackaged dies directly from a substrate such as a “wafer tape” to a product substrate, such as a circuit substrate. The direct transfer of unpackaged dies may significantly reduce the thickness of an end product compared to a similar product produced by conventional means, as well as the amount of time and/or cost to manufacture the product substrate.
For the purpose of this description, the term “substrate” refers to any substance on which, or to which, a process or action occurs. Further, the term “product” refers to the desired output from a process or action, regardless of the state of completion. Thus, a product substrate refers to any substance on which, or to which, a process or action is caused to occur for a desired output.
In an embodiment, the machine may secure a product substrate for receiving “unpackaged” dies, such as LEDs, transferred from the wafer tape, for example. In an effort to reduce the dimensions of the products using the dies, the dies are very small and thin, for example, a die may be about 50 microns thick. Due to the relatively small size of the dies, the machine includes components that function to precisely align both the wafer tape carrying the dies and the product substrate to ensure accurate placement and/or avoid product material waste. In some instances, the components that align the product substrate and the dies on the wafer tape may include a set of frames in which the wafer tape and the product substrate are secured respectively and conveyed individually to a position of alignment such that a specific die on the wafer tape is transferred to a specific spot on the product substrate.
The frame that conveys the product substrate may travel in various directions, including horizontal directions and/or vertical directions, or even directions that would permit transfer to a curved surface. The frame that conveys the wafer tape may travel in various directions also. A system of gears, tracks, motors, and/or other elements may be used to secure and convey the frames carrying the product substrate and the wafer tape respectively to align the product substrate with the wafer tape in order to place a die on the correct position of the product substrate. Each frame system may also be moved to an extraction position in order to facilitate extraction of the wafer tape and the product substrate upon completion of the transfer process.
In some instances, the machine may further include a transfer mechanism for transferring the dies directly from the wafer tape to the product substrate without “packaging” the dies. The transfer mechanism may be disposed vertically above the wafer tape so as to press down on the dies via the wafer tape toward the product substrate. This process of pressing down on the dies may cause the dies to peel off of the wafer tape, starting at the sides of the dies until the dies separate from the wafer tape to be attached to the product substrate. That is, by reducing the adhesion force between the die and the wafer tape, and increasing the adhesion force between the die and the product substrate, the die may be transferred.
In some embodiments, the transfer mechanism may include an elongated rod, such as a pin or needle that may be cyclically actuated against the wafer tape to push the wafer tape, and simultaneously thrust against a die attached to the wafer tape, from a top side of the wafer tape. Thus, the needle (or pin) acts as a thrust pin. The needle may be sized so as to be no wider than a width of the die being transferred. Although in other instances, the width of the needle may wider, or any other dimension. When the end of the needle contacts the wafer tape, the wafer tape may experience a local deflection at the area between the die and the wafer tape. Inasmuch as the deflection is highly localized and rapidly performed, the portion of the wafer tape that does not receive pressure from the needle may begin to flex away from the surface of the die. This partial separation may thus cause the die to lose sufficient contact with the wafer tape, so as to be released from the wafer tape. Moreover, in some instances, the deflection of the wafer tape may be so minimal, as to maintain an entirety of the surface area of the die in contact with the wafer tape, while still causing the opposing surface of the die to extend beyond a plane of extension of the corresponding surface of the adjacent dies to avoid unintentional transfer of the adjacent dies.
Alternatively, or additionally, the machine may further include a fixing mechanism for affixing the separated, “unpackaged” dies to the product substrate. In some instances, the product substrate may have thereon a circuit trace to which the dies are transferred and affixed. The fixing mechanism may include a device that emits energy, such as a laser, to melt/soften the material of the circuit trace on the product substrate. Moreover, in some instances, the laser may be used to activate/harden the material of the circuit trace. Thus, the fixing mechanism may be actuated before, and/or after the die is in contact with the material of the circuit trace. Accordingly, upon actuation of the transfer mechanism to release a die onto the product substrate, the energy emitting device may also be activated so as to prepare the trace material to receive the die. The activation of the energy emitting device may further enhance the release and capture of the die from the wafer tape so as to begin formation of a semiconductor product on the product substrate.
First Example Embodiment of a Direct Transfer Apparatus
Inasmuch as
During a transfer operation, the conveyance mechanisms 202, 204 may be positioned such that a space between a surface of a product substrate carried by the product substrate conveyance mechanism 202 and a surface of a wafer tape carried by the wafer tape conveyance mechanism 204 may be more or less than 1 mm, depending on various other aspects of the apparatus 200, including the amount of deflection that occurs by components during the transfer operation, as described herein below. In some instances, the respective opposing surfaces of the wafer tape and the product substrate may be the most prominent structures in comparison to the supporting structures of the conveyance mechanisms 202, 204. That is, in order to avoid a collision between components of the machine and products thereon, which might be caused by movable parts (e.g., the conveyance mechanisms 202, 204), a distance between the respective surfaces of the wafer tape and product substrate may be less than a distance between either of the surfaces and any other opposing structural component.
As depicted, and in some instances, the transfer mechanism 206 may be disposed vertically above the wafer tape conveyance mechanism 204, and the fixing mechanism 208 may be disposed vertically beneath the product substrate conveyance mechanism 202. It is contemplated that in some embodiments, one or both of the transfer mechanism 206 and the fixing mechanism 208 may be oriented in different positions than the positions illustrated in
The product substrate conveyance mechanism 202 may be used to secure a product substrate 210. Herein, the term “product substrate” may include, but is not limited to: a wafer tape (for example, to presort the dies and create sorted die sheets for future use); a paper or polymer substrate formed as a sheet or other non-planar shape, where the polymer—translucent or otherwise—may be selected from any suitable polymers, including, but not limited to, a silicone, an acrylic, a polyester, a polycarbonate, etc.; a circuit board (such as a printed circuit board (PCB)); a string or thread circuit, which may include a pair of conductive wires or “threads” extending in parallel; and a cloth material of cotton, nylon, rayon, leather, etc. The choice of material of the product substrate may include durable materials, flexible materials, rigid materials, and other materials with which the transfer process is successful and which maintain suitability for the end use of the product substrate. The product substrate 210 may be formed solely or at least partially of conductive material such that the product substrate 210 acts as a conductive circuit for forming a product. The potential types of product substrate may further include items, such as glass bottles, vehicle windows, or sheets of glass.
In an embodiment as depicted in
The circuit trace 212 may be formed from a conductive ink disposed via screen printing, inkjet printing, laser printing, manual printing, or other printing means. Further, the circuit trace 212 may be pre-cured and semi-dry or dry to provide additional stability, while still being activatable for die conductivity purposes. A wet conductive ink may also be used to form the circuit trace 212, or a combination of wet and dry ink may be used for the circuit trace 212. Alternatively, or additionally, the circuit trace 212 may be pre-formed as a wire trace, or photo-etched, or from molten material formed into a circuit pattern and subsequently adhered, embedded, or otherwise secured to the product substrate 210.
The material of the circuit trace 212 may include, but is not limited to, silver, copper, gold, carbon, conductive polymers, etc. In some instances, the circuit trace 212 may include a silver-coated copper particle. A thickness of the circuit trace 212 may vary depending on the type of material used, the intended function and appropriate strength or flexibility to achieve that function, the energy capacity, the size of the LED, etc. For example, a thickness of the circuit trace may range from about 5 microns to 20 microns, from about 7 microns to 15 microns, or from about 10 microns to 12 microns.
Accordingly, in one non-limiting example, the product substrate 210 may be a flexible, translucent polyester sheet having a desired circuit pattern screen printed thereon using a silver-based conductive ink material to form the circuit trace 212.
The product substrate conveyance mechanism 202 may include a product substrate conveyor frame 214 for securing a product substrate holder frame 216. The structure of the product substrate holder frame 216 may vary significantly depending on the type and properties (e.g., shape, size, elasticity, etc.) of the product substrate being used. Inasmuch as the product substrate 210 may be a flexible material, product substrate 210 may be held under tension in the product substrate holder frame 216, so as to create a more rigid surface upon which a transfer operation, discussed herein below, is performed. In the above example, the rigidity created by the tension in the product substrate 210 may increase the placement accuracy when transferring components.
In some instances, using a durable or more rigid material for the product substrate 210, naturally provides a firm surface for component placement accuracy. In contrast, when the product substrate 210 is allowed to sag, wrinkles and/or other discontinuities may form in the product substrate 210 and interfere with the pre-set pattern of the circuit trace 212, to the extent that the transfer operation may be unsuccessful.
While the means of holding the product substrate 210 may vary greatly,
The product substrate conveyor frame 214 may be conveyed in at least three directions—two directions in the horizontal plane and vertically as well. The conveyance may be accomplished via a system of motors, rails, and gears (none of which are shown). As such, the product substrate tensioner frame 216 may be conveyed to and held in a specific position as directed and/or programmed and controlled by a user of the apparatus 200.
The wafer tape conveyance mechanism 204 may be implemented to secure a wafer tape 218 having dies 220 (i.e., semiconductor device dies) thereon. The wafer tape 218 may be conveyed in multiple directions to the specific transfer positions for the transfer operation via a wafer tape conveyor frame 222. Similar to the product substrate conveyor frame 214, the wafer tape conveyor frame 222 may include a system of motors, rails, and gears (none of which are shown).
The unpackaged semiconductor dies 220 for transfer may be extremely small. Indeed, the height of the dies 220 may range from 12.5 to 200 microns, or from 25 to 100 microns, or from 50 to 80 microns.
Due to the micro size of the dies, when the wafer tape 218 has been conveyed to the appropriate transfer position, a gap spacing between the wafer tape 218 and the product substrate 210 may range from about 0.25 mm to 1.50 mm, or about 0.50 mm to 1.25 mm, or about 0.75 mm to 1.00 mm, for example. A minimum gap spacing may depend on factors including: a thickness of the die being transferred, a stiffness of the wafer tape involved, an amount of deflection of the wafer tape needed to provide adequate capture and release of the die, a proximity of the adjacent dies, etc. As the distance between the wafer tape 218 and the product substrate 210 decreases, a speed of the transfer operation may also decrease due to the reduced cycle time (discussed further herein) of the transfer operation. Such a decrease in the duration of a transfer operation may therefore increase a rate of die transfers. For example, the die transfer rate may range from about 6-20 dies placed per second.
Furthermore, the wafer tape conveyor frame 222 may secure a wafer tape holder frame 224, which may stretch and hold the wafer tape 218 under tension. As illustrated in
The material used for the wafer tape 218 may include a material having elastic properties, such as a rubber or silicone, for example. Furthermore, inasmuch as temperature of the environment and the wafer tape 218 itself may contribute to potential damage to the wafer tape 218 during the transfer process, a material having properties that are resistant to temperature fluctuation may be advantageous. Additionally, in some instances, the wafer tape 218 may be stretched slightly so as to create a separation or gap between individual dies 220 to assist in the transfer operation. A surface of the wafer tape 218 may include a sticky substance via which the dies 220 may be removably adhered to the wafer tape 218.
The dies 220 on the wafer tape 218 may include dies that were individually cut from a solid semiconductor wafer and then placed onto the wafer tape 218 to secure the dies. In such a situation, the dies may have been pre-sorted and explicitly organized on the wafer tape 218, in order, for example, to assist in the transfer operation. In particular, the dies 220 may be arranged sequentially as to the expected order of transfer to the product substrate 210. Such pre-arrangement of the dies 220 on the wafer tape 218 may reduce the amount of travel that would otherwise occur between the product substrate conveyance mechanism 202 and the wafer tape conveyance mechanism 204. Additionally, or alternatively, the dies on the wafer tape 218 may have been pre-sorted to include only dies having substantially equivalent performance properties. In this case, efficiency of the supply chain may be increased and thus, travel time of the wafer tape conveyance mechanism 204 may be reduced to a minimum.
In some instances, materials used for the dies may include, but is not limited to, silicon carbide, gallium nitride, a coated silicon oxide, etc. Furthermore, sapphire or silicon may be used as a die as well. Additionally, as indicated above, a “die” may be representative herein of an electrically actuatable element generally.
In some embodiments, the wafer tape 218 may include dies that are not pre-sorted, but rather are formed by simply cutting a semiconductor directly on wafer tape, and then leaving the dies on the wafer tape without “picking and placing” to sort the dies depending on the respective performance quality of the dies. In such a situation, the dies on the wafer tape may be mapped to describe the exact relative locations of the different quality dies. Therefore, in some instances, it may be unnecessary to use wafer tape having pre-sorted dies. In such a case, the amount of time and travel for the wafer tape conveyance mechanism 204 to move between particular dies for each sequential transfer operation may increase. This may be caused in part by the varying quality of the dies dispersed within the area of the semiconductor, which means that a die of a specific quality for the next transfer operation may not be immediately adjacent to the previously transferred die. Thus, the wafer tape conveyance mechanism 204 may move the wafer tape 218 further to align an appropriate die of a specific quality for transfer than would be necessary for a wafer tape 218 containing dies of substantially equivalent quality.
In further regard to the dies 220 on the wafer tape 218, in some instances, a data map of the dies 220 may be provided with the wafer tape 218. The data map may include a digital file providing information that describes the specific quality and location of each die on the wafer tape 218. The data map file may be input into a processing system in communication with the apparatus 200, whereby the apparatus 200 may be controlled/programmed to seek the correct die 220 on the wafer tape 218 for transfer to the product substrate 210.
A transfer operation is performed, in part, via the transfer mechanism 206, which is a die separation device for assisting in separation of dies from the wafer tape 218. The actuation of the transfer mechanism 206 may cause one or more dies 220 to be released from the wafer tape 218 and to be captured by the product substrate 210. In some instances, the transfer mechanism 206 may operate by pressing an elongated rod, such as a pin or a needle 226 into a top surface of the wafer tape 218 against a die 220. The needle 226 may be connected to a needle actuator 228. The needle actuator 228 may include a motor connected to the needle 226 to drive the needle 226 toward the wafer tape 218 at predetermined/programmed times.
In view of the function of the needle 226, the needle 226 may include a material that is sufficiently durable to withstand repetitive, rapid, minor impacts while minimizing potential harm to the dies 220 upon impact. For example, the needle 226 may include a metal, a ceramic, a plastic, etc. Additionally, a tip of the needle 226 may have a particular shape profile, which may affect the ability of the needle to function repetitively without frequently breaking either the tip or damaging the wafer tape 218 or the dies 220. The profile shape of the tip of the needle is discussed in greater detail below with respect to
In a transfer operation, the needle 226 may be aligned with a die 220, as depicted in
To the extent that the transfer process may include a rapidly repeated set of steps including a cyclical actuation of the needle 226 pressing upon a die 220, a method of the process is described in detail herein below with respect to
Turning back to
Additionally, in some instances, the support 230 may be disposed adjacent to the upper surface of the wafer tape 218. As such, when the needle 226 is retracted from pressing on the wafer tape 218 during a transfer operation, a base surface of the support 230 (having the at least one opening 234 therein) may come into contact with the upper surface of the wafer tape 218, thereby preventing upward deflection of the wafer tape 218. This upward deflection may be caused in the event where the needle 226 pierces at least partially into the wafer tape 218, and while retracting, the wafer tape is stuck to the tip of the needle 226. Thus, the support 230 may reduce the time it takes to move to the next die 220. A wall perimeter shape of the support 230 may be cylindrical or any other shape that may be accommodated in the apparatus 200. Accordingly, the support 230 may be disposed between the needle 226 and an upper surface of the wafer tape 218.
With respect to the effect of temperature on the integrity of the wafer tape 218, it is contemplated that a temperature of support 230 may be adjusted so as to regulate the temperature of the needle 226 and the wafer tape 218, at least near the point of the transfer operation. Accordingly, the temperature of the support 230 may be heated or cooled, and a material of the support 230 may be selected to maximize thermal conductivity. For example, the support 230 may be formed of aluminum, or another relatively high thermal conductivity metal or comparable material, whereby the temperature may be regulated to maintain consistent results of the transfer operations. In some instances, air may be circulated within the support 230 to assist in regulating the temperature of a local portion of the wafer tape 218. Additionally, or alternatively, a fiber optic cable 230a may be inserted into the needle retraction support 230, and may further be against the needle 226 to assist in temperature regulation of the wafer tape 218 and/or the needle 226.
As indicated above, fixing mechanism 208 may assist in affixing the die 220 to the circuit trace 212 on a surface of the product substrate 210.
In a non-limiting example, as depicted in
Upon actuation of a predetermined controlled pulse duration of the laser 236, the circuit trace 212 may begin to cure (and/or melt or soften) to an extent that a fusing bond may form between the material of the circuit trace 212 and the electrical contact terminals (not shown) on the die 220. This bond further assists in separating the unpackaged die 220 from the wafer tape 218, as well as simultaneously affixing the die 220 to the product substrate 210. Additionally, the laser 236 may cause some heat transfer on the wafer tape 218, thereby reducing adhesion of the die 220 to the wafer tape 218 and thus assisting in the transfer operation.
In other instances, dies may be released and fixed to the product substrates in many ways, including using a laser having a predetermined wavelength or a focused light (e.g., IR, UV, broadband/multispectral) for heating/activating circuit traces to thereby cure an epoxy or phase change bond materials, or for deactivating/releasing a die from wafer tape, or for initiating some combination of reactions. Additionally, or alternatively, a specific wavelength laser or light may be used to pass through one layer of the system and interact with another layer. Furthermore, a vacuum may be implemented to pull a die from the wafer tape, and air pressure may be implemented to push the die onto a product substrate, potentially including a rotary head between the die wafer substrate and the product substrate. In yet another instance, ultrasonic vibration may be combined with pressure to cause the die to bond to the circuit traces.
Similar to the needle retraction support 230, the fixing mechanism may also include a product substrate support 238, which may be disposed between the laser 236 and the bottom surface of the product substrate 210. The support 238 may include an opening 240 at a base end thereof and an opening 242 at an upper end thereof. For example, the support 238 may be formed as a ring or hollow cylinder. The support may further include structure to secure a lens (not shown) to assist in directing the laser. The laser 236 emits the light through the openings 240, 242 to reach the product substrate 210. Furthermore, the upper end of the sidewalls of the support 238 may be disposed in direct contact with or closely adjacent to the bottom surface of the product substrate 210. Positioned as such, the support 238 may help to prevent damage from occurring to the product substrate 210 during the stroke of the needle 226 at the time of a transfer operation. In some instances, during the transfer operation, the portion of the bottom surface of the product substrate 210 that is aligned with the support 238 may contact the support 238, which thereby provides resistance against the incoming motion of the die 220 being pressed by the needle 226. Moreover, the support 238 may be movable in a direction of the vertical axis to be able to adjust a height thereof so as to raise and lower support 238 as necessary, including to a height of the product substrate 210.
In addition to the above features, apparatus 200 may further include a first sensor 244, from which apparatus 200 receives information regarding the dies 220 on the wafer tape 218. In order to determine which die is to be used in the transfer operation, the wafer tape 218 may have a bar code (not shown) or other identifier, which is read or otherwise detected. The identifier may provide die map data to the apparatus 200 via the first sensor 244.
As shown in
In some instances, the first sensor 244 may be able to identify the precise location and type of die 220 that is being sensed. This information may be used to provide instructions to the wafer tape conveyor frame 222 indicating the exact location to which the wafer tape 218 should be conveyed in order to perform the transfer operation. Sensor 244 may be one of many types of sensors, or a combination of sensor types to better perform multiple functions. Sensor 244 may include, but is not limited to: a laser range finder, or an optical sensor, such as a non-limiting example of a high-definition optical camera having micro photography capabilities.
Moreover, in some instances, a second sensor 246 may also be included in apparatus 200. The second sensor 246 may be disposed with respect to the product substrate 210 so as to detect the precise position of the circuit trace 212 on the product substrate 210. This information may then be used to determine any positional adjustment needed to align the product substrate 210 between the transfer mechanism 206 and the fixing mechanism 208 so that the next transfer operation occurs in the correct location on the circuit trace 212. This information may further be relayed to the apparatus 200 to coordinate conveying the product substrate 210 to a correct position, while simultaneously conveying instructions to the wafer tape conveyor frame 222. A variety of sensors are also contemplated for sensor 246 including optical sensors, such as one non-limiting example of a high-definition optical camera having micro photography capabilities.
Depending on the type of sensor used for the first and second sensors 244, 246, the first or second sensors may further be able to test the functionality of transferred dies. Alternatively, an additional tester sensor (not shown) may be incorporated into the structure of apparatus 200 to test individual dies before removing the product substrate 210 from the apparatus 200.
Furthermore, in some examples, multiple independently-actuatable needles and/or lasers may be implemented in a machine in order to transfer and fix multiple dies at a given time. The multiple needles and/or lasers may be independently movable within a three-dimensional space. Multiple die transfers may be done synchronously (multiple needles going down at the same time), or concurrently but not necessarily synchronously (e.g., one needle going down while the other is going up, which arrangement may balance better the components and minimize vibration). Control of the multiple needles and/or lasers may be coordinated to avoid collisions between the plurality of components. Moreover, in other examples, the multiple needles and/or lasers may be arranged in fixed positions relative to each other.
Example Needle Tip Profile
As mentioned above, a profile shape of the tip 300 of a needle is discussed with respect to
Other needle tip profiles are contemplated and may have different advantages depending on various factors associated with the transfer operation. For example, the needle tip 300 may be more blunt to mirror the width of the die or more pointed so as to press in a smaller area of the wafer tape.
Example Needle Actuation Performance Profile
Illustrated in
In some instances, prior to a transfer operation, a fully retracted needle tip may be idle at approximately 2000 μm above the surface of the wafer tape. After a varying amount of time, the needle tip may descend rapidly to rest in the ready state at approximately 750 μm above the surface of the wafer tape. After another undetermined amount of time at the ready state, the needle tip may descend again to contact the die and press the wafer tape with the die down to a height of approximately −1000 μm, whereat the die may be transferred to the product substrate.
The dotted vertical line at the start of the laser on section indicates that the laser may come on at some point between the beginning of the descent from the ready phase and the bottom of the stroke of the needle tip. For example, the laser may turn on at approximately 50% of the way through the descent. In some instances, by turning the laser on early, for example before the needle begins to descend, the circuit trace may begin to soften prior to contact with the die so as to form a stronger bond, or additionally, the die wafer may be affected or prepared during this time. The phase in which the laser turns on may last approximately 20 ms (“milliseconds”). At the bottom of the stroke, where the laser is on, that phase may be a bonding phase between the die and the product substrate. This bonding phase may allow the circuit trace to attach to the die contacts, which stiffens quickly after the laser is turned off. As such, the die may be bonded to the product substrate.
The bonding phase may last approximately 30 ms. Thereafter, the laser may be turned off and the needle may ascend to the ready phase rapidly. Conversely, the laser may be turned off before the needle begins to ascend, or at some point during the ascent of the needle tip back to the ready phase, the laser may be turned off. After the ascent of the needle tip to the ready phase, the height of the needle tip may overshoot and bounce back under the height of the ready phase somewhat buoyantly. While some of the buoyancy may be attributed to the speed at which the needle tip ascends to the ready phase, the speed and the buoyancy may be intentional in order to assist in retracting a tip of the needle from a surface of the wafer tape in the case where the needle has pierced the wafer tape and may be stuck therein.
As depicted in
Example Product Substrate
As similarly described above with respect to the wafer tape, in order to determine where to convey the product substrate 502 to perform the transfer operation, the product substrate 502 may have a bar code (not shown) or other identifier, which is read or otherwise detected. The identifier may provide circuit trace data to the apparatus. The product substrate 502 may further include datum points 506. Datum points 506 may be visual indicators for sensing by the product substrate sensor (for example, second sensor 246 in
Additionally, dies 508 are depicted in
Simplified Example Direct Transfer System
A simplified example of an embodiment of a direct transfer system 600 is illustrated in
In some instances, the PC 602 communicates with data store 604 to receive information and data useful in the transfer process of directly transferring dies from a wafer tape in wafer tape mechanism 606 using the transfer mechanism 610 on to a product substrate in the product substrate mechanism 608 whereat the dies may be fixed upon the product substrate via actuation of a laser or other energy-emitting device located in the fixing mechanism 612. PC 602 may also serve as a receiver, compiler, organizer, and controller of data being relayed to and from each of the wafer tape mechanism 606, the product substrate mechanism 608, the transfer mechanism 610, and the fixing mechanism 612. PC 602 may further receive directed information from a user of the transfer system 600.
Note that, while
Additional details of the interaction of the components of the transfer system 600 are described with respect to
Detailed Example Direct Transfer System
A schematic of the communication pathways between the respective elements of a transfer system 700 may be described as follows.
The direct transfer system may include a personal computer (PC) 702 (or server, data input device, user interface, etc.), which may receive communication from, and provide communication to a data store 704. The PC 702 may further communicate with a first cell manager 706 (illustrated as “Cell Manager 1”) and a second cell manager 708 (illustrated as “Cell Manager 2”). Therefore, the PC 702 may control and synchronize the instructions between the first cell manager 706 and the second cell manager 708.
PC 702 may include processors and memory components with which instructions may be executed to perform various functions with respect to the first and second cell managers 706, 708, as well as data store 704. In some instances, PC 702 may include a project manager 710 and a needle profile definer 712.
Project manager 710 may receive input from the first and second cell managers 706, 708 and data store 704 to organize the direct transfer process and maintain smooth functioning with respect to orientation and alignment of the product substrate with respect to the wafer tape and the dies thereon.
Needle profile definer 712 may contain data regarding the needle stroke performance profile, which may be used to instruct the transfer mechanism regarding the desired needle stroke performance according to the specific dies on the loaded wafer tape and the pattern of the circuit trace on the product substrate. Additional details of the needle profile definer 712 are discussed further herein below.
Turning back to data store 704, data store 704 may include memory containing data such as a die map 714, which may be specific to the wafer tape loaded in the wafer tape mechanism. As explained previously, a die map may describe the relative locations of each die on the wafer tape and the quality thereof for the purpose of providing a pre-organized description of the location of specific dies. Further, data store 704 may also include memory containing circuit CAD files 716. Circuit CAD files 716 may contain data regarding a specific circuit trace pattern on the loaded product substrate.
Project manager 710 may receive the die map 714 and circuit CAD files 716 from the data store 704, and may relay the respective information to the first and second cell managers 706, 708, respectively.
In an embodiment, the first cell manager 706 may use the die map 714 from data store 704 via a die manager 718. More specifically, die manager 718 may compare die map 714 with the information received by a sensor manager 720, and based thereon, may provide instructions to a motion manager 722 regarding the location of a particular die. Sensor manager 720 may receive data regarding the actual location of dies on the wafer tape from a die detector 724. Sensor manager 720 may also instruct the die detector 724 to look for a particular die in a particular location according to die map 714. The die detector 724 may include a sensor such as the second sensor 244 in
Upon reaching the instructed location, the first robot 726 may communicate the completion of its movement to a needle controlboard manager 728. Additionally, the needle control board manager 728 may directly communicate with the PC 702 to coordinate the execution of the transfer operation. At the time of the execution of the transfer operation, the PC 702 may instruct the needle control board manager 728 to activate the needle actuator/needle 730, thereby causing the needle to perform a stroke in accordance with the loaded needle profile in the needle profile definer 712. The needle controlboard manager 728 may also activate the laser control/laser 732, thereby causing the laser to emit a beam toward the product substrate as the needle presses down a die via the wafer tape to execute the transfer operation. As indicated above, the activation of the laser control/laser 732 may occur prior to, simultaneously, during, or after activation, or even a complete actuation, of the needle stroke.
Accordingly, the first cell manager 706 may pass through a plurality of states including: determining where to tell the first robot 726 to go; telling the first robot 726 to go to the determined location; turning on the needle; activating the fixing device; and resetting.
Prior to execution of the transfer operation, the project manager 710 may relay the data of the circuit CAD files 716 to the second cell manager 708. The second cell manager 708 may include a sensor manager 734 and a motion manager 736. Using the circuit CAD files 716, the sensor manager 734 may instruct the substrate alignment sensor 738 to find the datum points on the product substrate and thereby detect and orient the product substrate according to the location of the circuit trace thereon. The sensor manager 734 may receive confirmation or updated location information of the circuit trace pattern on the product substrate. The sensor manager 734 may coordinate with the motion manager 736 to provide instructions to a second robot 740 (illustrated as “Robot 2”) to convey the product substrate to an alignment position (i.e., a transfer fixing position) for execution of the transfer operation. Thus, the circuit CAD files 716 may assist the project manager 710 in aligning the product substrate with respect to the wafer tape such that the dies may be accurately transferred to the circuit trace thereon.
Accordingly, the second cell manager 708 may pass through a plurality of states including: determining where to tell the second robot 740 to go; telling the second robot 740 to go to the determined location; and resetting.
It is understood that additional and alternative communication pathways between all or fewer than all of the various components of the direct transfer system 700 described above are possible.
Example Direct Transfer Method
A method 800 of executing a direct transfer process, in which one or more dies is directly transferred from a wafer tape to a product substrate, is illustrated in
A step of loading a wafer tape into a wafer tape conveyor mechanism 804 may also be included in method 800. Loading the wafer tape into the wafer tape conveyor mechanism may include controlling the wafer tape conveyor mechanism to move to a load position, which is also known as an extract position. The wafer tape may be secured in the wafer tape conveyor mechanism in the load position. The wafer tape may be loaded so that the dies of the semiconductor are facing downward toward the product substrate conveyor mechanism.
The method 800 may further include a step of preparing the product substrate to load into the product substrate conveyor mechanism 806. Preparing the product substrate may include a step of screen printing a circuit trace on the product substrate according to the pattern of the CAD files being loaded into the PC or data store. Additionally, datum points may be printed onto the circuit substrate in order to assist in the transfer process. The product substrate conveyor mechanism may be controlled to move to a load position, which is also known as an extraction position, whereat the product substrate may be loaded into the product substrate conveyor mechanism. The product substrate may be loaded so that the circuit trace faces toward the dies on the wafer. In some instances, for example, the product substrate may be delivered and placed in the load position by a conveyor (not shown) or other automated mechanism, such as in the style of an assembly line. Alternatively, the product substrate may be manually loaded by an operator.
Once the product substrate is properly loaded into the product substrate conveyor mechanism in the wafer tape is properly loaded into the wafer tape conveyor mechanism, a program to control the direct transfer of the dies from the wafer tape to the circuit trace of the product substrate may be executed via the PC to commence the direct transfer operation 808. The details of the direct transfer operation are described below.
Example Direct Transfer Operation Method
A method 900 of the direct transfer operation of causing dies to be transferred directly from the wafer tape (or other substrate holding dies, also called a “die substrate” for simplified description of
In order to determine which dies to place on the product substrate and where to place the dies on the product substrate, the PC may receive input regarding the identification of the product substrate and the identification of the die substrate containing the dies to be transferred 902. This input may be entered manually by a user, or the PC may send a request to the cell managers in control, respectively, of the product substrate alignment sensor and the die detector. The request may instruct the sensor to scan the loaded substrate for an identification marker, such as a barcode or QR code; and/or the request may instruct the detector to scan the loaded die substrate for an identification marker, such as a barcode or QR code.
Using the product substrate identification input, the PC may query the data store or other memory to match the respective identification markers of the product substrate and the die substrate and retrieve the associated data files 904. In particular, the PC may retrieve a circuit CAD file associated with the product substrate that describes the pattern of the circuit trace on the product substrate. The circuit CAD file may further contain data such as the number of, relative positions of, and respective quality requirement of, the dies to be transferred to the circuit trace. Likewise, the PC may retrieve a die map data file associated with the die substrate that provides a map of the relative locations of the specific dies on the die substrate.
In the process of executing a transfer of a die to the product substrate, the PC may determine the initial orientation of the product substrate and the die substrate relative to the transfer mechanism and the fixing mechanism 906. Within step 906, the PC may instruct the substrate alignment sensor to locate datum points on the product substrate. As discussed above, the datum points may be used as reference markers for determining the relative location and orientation of the circuit trace on the product substrate. Further, the PC may instruct the die detector to locate one or more reference points on the die substrate to determine the outlay of the dies.
Once the initial orientation of the product substrate and die substrate are determined, the PC may instruct the respective product substrate and die substrate conveyance mechanisms to orient the product substrate and die substrate, respectively, into a position of alignment with the transfer mechanism and the fixing mechanism 908.
The alignment step 908 may include determining the location of the portion of the circuit trace to which a die is to be transferred 910, and where the portion is located relative to the transfer fixing position 912. The transfer fixing position may be considered to be the point of alignment between the transfer mechanism and the fixing mechanism. Based on the data determined in steps 910 and 912, the PC may instruct the product substrate conveyance mechanism to convey the product substrate so as to align the portion of the circuit trace to which a die is to be transferred with the transfer fixing position 914.
The alignment step 908 may further include determining which die on the die substrate will be transferred 916, and where the die is located relative to the transfer fixing position 918. Based on the data determined in steps 916 and 918, the PC may instruct the wafer tape conveyance mechanism to convey the die substrate so as to align the die to be transferred with the transfer fixing position 920.
Once the die to be transferred from the die substrate and the portion of the circuit trace to which a die is to be transferred are aligned with the transfer mechanism and the fixing mechanism, the needle and the fixing device (e.g., laser) may be actuated 922 to effectuate the transfer of the die from the die substrate to the product substrate.
After a die is transferred, the PC may determine whether additional dies are to be transferred 924. In the case where another die is to be transferred, the PC may revert to step 908 and realign the product and die substrates accordingly for a subsequent transfer operation. In the case where there will not be another die transferred, the transfer process is ended 926.
Example Direct Transfer Conveyor/Assembly Line System
In an embodiment described with respect to
In some instances, operation stations of the conveyor system 1000 may include one or more printing stations 1004. As blank product substrates are conveyed to the printing station(s) 1004, a circuit trace may be printed thereon. In the case that there are multiple printing stations 1004, the multiple printing stations 1004 may be arranged serially, and may be configured to perform one or more printing operations each so as to form a complete circuit trace.
Additionally, in the conveyor system 1000, the product substrate conveyor frame 214 may be conveyed to one or more die transfer stations 1006. In the event that there are multiple die transfer stations 1006, the multiple die transfer stations 1006 may be arranged serially, and may be configured to perform one or more die transfers each. At the transfer station(s), the product substrates may have one or more dies transferred and affixed thereto via a transfer operation using one or more of the direct transfer apparatus embodiments described herein. For example, each transfer station 1006 may include a wafer tape conveyance mechanism, a transfer mechanism, and a fixing mechanism. In some instances, a circuit trace may have been previously prepared on the product substrate, and as such, the product substrate may be conveyed directly to the one or more transfer stations 1006.
In the transfer stations 1006, the wafer tape conveyance mechanism, the transfer mechanism, and the fixing mechanism may be aligned with respect to the conveyed product substrate conveyor frame 214 upon entering the station. In this situation, the transfer station 1006 components may repeatedly perform the same transfer operation in the same relative position on each product substrate as the plurality of product substrates are conveyed through the conveyor system 1000.
Moreover, the conveyor system 1000 may further include one or more finishing stations 1008 to which the product substrate may be conveyed to have final processing performed. The type, amount, and duration of the final processing may depend on the features of the product and the properties of the materials used to make the product. For example, the product substrate may receive additional curing time, a protective coating, additional components, etc., at the finishing station(s) 1008.
Second Example Embodiment of a Direct Transfer Apparatus
In another embodiment of a direct transfer apparatus, as seen in
The product substrate reel system may include one or two circuit trace reels 1106 that are wound with a “string circuit,” which may include a pair of adjacently wound conductive strings or wires as the product substrate 1104. In an instance with only one reel, the reel 1106 may be located on a first side of the transfer position, and the pair of conductive strings (1104) may be wound around the single reel 1106. Alternatively, there may be two circuit trace reels 1106 located on the first side of the transfer position, where each reel 1106 contains a single strand of the string circuit and the strands are then brought together to pass through the transfer position.
Regardless of whether one reel 1106 or two reels 1106 are implemented, the die transfer process of forming the string circuit may be substantially similar in each case. In particular, the conductive strings of the product substrate 1104 may be threaded from the reel(s) 1106 across the transfer position and may be fed into a finishing device 1108. In some instances, the finishing device 1108 may be: a coating device to receive a protective coating, for example, of a translucent or transparent plastic; or a curing apparatus, which may finish curing the string circuit as a part of final processing of the product. Additionally, or alternatively, the circuit string may be fed onto another reel, which may wind up the string circuit thereon before final processing of the string circuit. As the conductive strings of the product substrate 1104 are pulled through the transfer position, the transfer mechanism 206 may be actuated to perform a needle stroke (as described above) to transfer dies 220 to the conductive strings of the product substrate 1104 so that electrical contact terminals of the dies 220 are placed, respectively, on the adjacent strings, and the fixing mechanism 208 may be actuated to affix the dies 220 in position.
Furthermore, apparatus 1100 may include tensioning rollers 1110 on which the conductive strings of the product substrate 1104 may be supported and further tensioned against. Thus, the tensioning rollers 1110 may assist in maintaining tension in the formed string circuit so as to enhance the die transfer accuracy.
In
Third Example Embodiment of a Direct Transfer Apparatus
In an additional embodiment of a direct transfer apparatus, as seen in
In the case where a single reel 1204 is used, a transfer operation may include conveying the product substrate 210 via the product substrate conveyance mechanism 202 substantially as described above, using motors, tracks, and gears. However, the wafer tape conveyance mechanism 1202 may include a substantially static mechanism, in that, while the dies 220 may be fed continuously through the transfer position by unrolling the substrate 1206 from reel 1204, the reel 1204 itself main remain in a fixed position. In some instances, the tension of the substrate 1206 may be maintained for stability purposes by tensioning rollers 1208, and/or a tensioning reel 1210, which may be disposed on a side of the apparatus 1200 opposite the reel 1204. The tensioning reel 1210 may roll up the substrate 1206 after the dies have been transferred. Alternatively, the tension may be maintained by any other suitable means to secure the substrate 1206 so as to assist in pulling it through the transfer position after each transfer operation to cycle through the dies 220.
In an embodiment where multiple reels 1204 are used, each reel 1204 may be disposed laterally adjacent to other reels 1204. Each reel 1204 may be paired with a specific transfer mechanism 206 and a specific fixing mechanism 208. In this case, each respective set of transfer mechanisms and fixing mechanisms may be arranged with respect to the product substrate 210 such that multiple dies may be placed in multiple locations on the same product substrate 210 simultaneously. For example, in some instances, the respective transfer positions (i.e., the alignment between a transfer mechanism and a corresponding fixing mechanism) may be in a line, offset, or staggered so as to accommodate various circuit trace patterns.
Regardless of whether one reel 1204 or a plurality of reels 1204 are implemented, the die transfer operation may be relatively similar to the transfer operation as described above with respect to the first example embodiment of the direct transfer apparatus 200. For instance, the product substrate 210 may be conveyed to a transfer position (die fixing position) in the same manner as described above via the product substrate conveyance mechanism 202, the transfer mechanism(s) 206 may perform a needle stroke to transfer the die 220 from the die substrate 1206 to the product substrate 210, and the fixing mechanism 208 may be actuated to assist in affixing the die 220 to the product substrate 210.
Note that in an embodiment with a plurality of reels 1204, a circuit trace pattern may be such that not every transfer mechanism may need to be actuated simultaneously. Accordingly, multiple transfer mechanisms may be actuated intermittently as the product substrate is conveyed to various positions for transfer.
Fourth Example Embodiment of a Direct Transfer Apparatus
The transfer mechanism 1302 may include a collet 1304 that picks the dies 220, one or more at a time, from the wafer tape 218 and rotates about an axis A that extends through arm 1306. For example,
In some instances, the transfer mechanism 1302 may include two or more collets (not shown) extending from the arm in different directions. In such an embodiment, the collets may be indexed rotatingly 360 degrees through the collet stop locations and picking and transferring a die every time a collet passes the wafer tape 218.
Additionally, the one or more collets 1304 may pick and release the dies 220 from the wafer tape using positive and negative vacuum pressure through the collet 1304.
Although several embodiments have been described in language specific to structural features and/or methodological acts, it is to be understood that the claims are not necessarily limited to the specific features or acts described. Rather, the specific features and acts are disclosed as illustrative forms of implementing the claimed subject matter. Furthermore, the use of the term “may” herein is used to indicate the possibility of certain features being used in one or more various embodiments, but not necessarily in all embodiments.
This application is a divisional of U.S. patent application Ser. No. 15/418,573, filed Jan. 27, 2017, entitled “Apparatus and Method for Direct Transfer of Semiconductor Devices,” now patented as U.S. Pat. No. 10,490,532, which is a continuation of and claims priority to U.S. patent application Ser. No. 14/939,896, filed on Nov. 12, 2015, entitled “Apparatus for Transfer of Semiconductor Devices,” now patented as U.S. Pat. No. 9,633,883, which claims priority to U.S. Provisional Patent Application No. 62/146,956, filed on Apr. 13, 2015, and to U.S. Provisional Patent Application No. 62/136,434, filed on Mar. 20, 2015, which applications are hereby incorporated in their entirety by reference.
| Number | Name | Date | Kind |
|---|---|---|---|
| 3724068 | Galli | Apr 1973 | A |
| 3887996 | Hartleroad et al. | Jun 1975 | A |
| 4667402 | Wilde | May 1987 | A |
| 4859267 | Knoll | Aug 1989 | A |
| 4859269 | Nishiguchi | Aug 1989 | A |
| 4906812 | Nied et al. | Mar 1990 | A |
| 5105255 | Shannon et al. | Apr 1992 | A |
| 5270260 | Scheuenpflug | Dec 1993 | A |
| 5362681 | Roberts, Jr. et al. | Nov 1994 | A |
| 5415331 | Lin | May 1995 | A |
| 5670429 | Murayama | Sep 1997 | A |
| 5951918 | Kuwajima et al. | Sep 1999 | A |
| 5976912 | Fukutomi et al. | Nov 1999 | A |
| 6002180 | Akram et al. | Dec 1999 | A |
| 6080336 | Suehiro et al. | Jun 2000 | A |
| 6085573 | Larson | Jul 2000 | A |
| 6091332 | Eberhardt et al. | Jul 2000 | A |
| 6171736 | Hirayanagi | Jan 2001 | B1 |
| 6173750 | Davis et al. | Jan 2001 | B1 |
| 6204092 | Freund et al. | Mar 2001 | B1 |
| 6207473 | Hirai et al. | Mar 2001 | B1 |
| 6228676 | Glenn et al. | May 2001 | B1 |
| 6238597 | Yim et al. | May 2001 | B1 |
| 6284569 | Sheppard et al. | Sep 2001 | B1 |
| 6284998 | Sinkunas et al. | Sep 2001 | B1 |
| 6311950 | Kappel et al. | Nov 2001 | B1 |
| 6319754 | Wang et al. | Nov 2001 | B1 |
| 6323659 | Krahn | Nov 2001 | B1 |
| 6352073 | Kurosawa et al. | Mar 2002 | B1 |
| 6353202 | Grotsch | Mar 2002 | B1 |
| 6404131 | Kawano et al. | Jun 2002 | B1 |
| 6538254 | Tomimatsu et al. | Mar 2003 | B1 |
| 6589809 | Koopmans | Jul 2003 | B1 |
| 6637905 | Ng et al. | Oct 2003 | B1 |
| 6713714 | Azdasht | Mar 2004 | B1 |
| 6730933 | Shimizu et al. | May 2004 | B1 |
| 6770961 | Lee | Aug 2004 | B2 |
| 6889427 | Yee et al. | May 2005 | B2 |
| 6961111 | Kuramasu | Nov 2005 | B1 |
| 7060593 | Kurosawa et al. | Jun 2006 | B2 |
| 7102524 | Arneson et al. | Sep 2006 | B2 |
| 7192843 | Kito | Mar 2007 | B2 |
| 7279346 | Andrews et al. | Oct 2007 | B2 |
| 7279347 | Hon et al. | Oct 2007 | B2 |
| 7364983 | Wang et al. | Apr 2008 | B2 |
| 7445688 | Suzuki et al. | Nov 2008 | B2 |
| 7510747 | Choi et al. | Mar 2009 | B2 |
| 7560303 | Wang et al. | Jul 2009 | B2 |
| 7623034 | Ferguson et al. | Nov 2009 | B2 |
| 7632587 | McLean et al. | Dec 2009 | B2 |
| 7637714 | Kabeshita et al. | Dec 2009 | B2 |
| 7654687 | Tsai et al. | Feb 2010 | B2 |
| 7757742 | Cheung et al. | Jul 2010 | B2 |
| 7795076 | Arneson et al. | Sep 2010 | B2 |
| 7857569 | Hiroki et al. | Dec 2010 | B2 |
| 7886438 | Ito et al. | Feb 2011 | B2 |
| 7906787 | Kang | Mar 2011 | B2 |
| 8034647 | Batres et al. | Oct 2011 | B2 |
| 8110839 | Ing et al. | Feb 2012 | B2 |
| 8136231 | Schiller | Mar 2012 | B2 |
| 8141612 | Chan et al. | Mar 2012 | B2 |
| 8142611 | Shibata et al. | Mar 2012 | B2 |
| 8198176 | Hatakeyama et al. | Jun 2012 | B2 |
| 8221583 | Min et al. | Jul 2012 | B2 |
| 8344397 | Lerman et al. | Jan 2013 | B2 |
| 8361840 | Kerr et al. | Jan 2013 | B2 |
| 8415771 | Golda et al. | Apr 2013 | B1 |
| 8415879 | Lowenthal et al. | Apr 2013 | B2 |
| 8791530 | Bibl et al. | Jul 2014 | B2 |
| 8794501 | Bibl et al. | Aug 2014 | B2 |
| 8835940 | Hu et al. | Sep 2014 | B2 |
| 8865489 | Rogers et al. | Oct 2014 | B2 |
| 8928021 | Bibl et al. | Jan 2015 | B1 |
| 8933433 | Higginson et al. | Jan 2015 | B2 |
| 8948905 | Prakapenka et al. | Feb 2015 | B2 |
| 8998068 | Park et al. | Apr 2015 | B2 |
| 9000470 | Tudorica et al. | Apr 2015 | B2 |
| 9000566 | Golda et al. | Apr 2015 | B2 |
| 9069128 | Kuroda et al. | Jun 2015 | B2 |
| 9082936 | Baldridge et al. | Jul 2015 | B2 |
| 9087764 | Chan et al. | Jul 2015 | B2 |
| 9099568 | Blanchard | Aug 2015 | B2 |
| 9105714 | Hu et al. | Aug 2015 | B2 |
| 9106056 | Hersee | Aug 2015 | B1 |
| 9111984 | Sanchez et al. | Aug 2015 | B2 |
| 9136161 | Bibl et al. | Sep 2015 | B2 |
| 9142535 | Oraw | Sep 2015 | B2 |
| 9153171 | Sakariya et al. | Oct 2015 | B2 |
| 9159707 | Cope | Oct 2015 | B2 |
| 9166114 | Hu et al. | Oct 2015 | B2 |
| 9166126 | Donofrio et al. | Oct 2015 | B2 |
| 9217541 | Bathurst et al. | Dec 2015 | B2 |
| 9224629 | Golda et al. | Dec 2015 | B2 |
| 9229597 | Oraw | Jan 2016 | B2 |
| 9236815 | Golda et al. | Jan 2016 | B2 |
| 9255001 | Golda et al. | Feb 2016 | B2 |
| 9288899 | Golda et al. | Mar 2016 | B2 |
| 9296111 | Bibl et al. | Mar 2016 | B2 |
| 9308649 | Golda et al. | Apr 2016 | B2 |
| 9314930 | Golda et al. | Apr 2016 | B2 |
| 9318475 | Bibl et al. | Apr 2016 | B2 |
| 9324692 | Lowenthal et al. | Apr 2016 | B2 |
| 9324693 | Oraw et al. | Apr 2016 | B2 |
| 9368549 | Oraw et al. | Jun 2016 | B1 |
| 9370864 | Bibl et al. | Jun 2016 | B2 |
| 9379092 | Hu et al. | Jun 2016 | B2 |
| 9391042 | Golda et al. | Jul 2016 | B2 |
| 9418979 | Karlicek, Jr. et al. | Aug 2016 | B2 |
| 9425151 | Golda et al. | Aug 2016 | B2 |
| 9450043 | Nuzzo et al. | Sep 2016 | B2 |
| 9490407 | Ray et al. | Nov 2016 | B2 |
| 9508694 | Oraw et al. | Nov 2016 | B2 |
| 9570427 | Bibl et al. | Feb 2017 | B2 |
| 9583466 | McGroddy et al. | Feb 2017 | B2 |
| 9583533 | Hu et al. | Feb 2017 | B2 |
| 9595638 | Ahn et al. | Mar 2017 | B2 |
| 9633883 | Huska et al. | Apr 2017 | B2 |
| 9666764 | Bergmann et al. | May 2017 | B2 |
| 9871023 | Huska et al. | Jan 2018 | B2 |
| 9897266 | Moon et al. | Feb 2018 | B2 |
| 10141215 | Wendt et al. | Nov 2018 | B2 |
| 10615152 | Huska et al. | Apr 2020 | B2 |
| 11094571 | Huska | Aug 2021 | B2 |
| 11183478 | Huska et al. | Nov 2021 | B2 |
| 20010040620 | Wakisaka et al. | Nov 2001 | A1 |
| 20010047225 | Shimoike et al. | Nov 2001 | A1 |
| 20020019074 | Nakazawa et al. | Feb 2002 | A1 |
| 20020043923 | Natori | Apr 2002 | A1 |
| 20020069952 | Kurosawa | Jun 2002 | A1 |
| 20020102760 | Gottfried | Aug 2002 | A1 |
| 20020149092 | Lee | Oct 2002 | A1 |
| 20030140486 | Chen et al. | Jul 2003 | A1 |
| 20030153099 | Jiang et al. | Aug 2003 | A1 |
| 20030230799 | Yee et al. | Dec 2003 | A1 |
| 20040020037 | Arneson et al. | Feb 2004 | A1 |
| 20040020039 | Arneson et al. | Feb 2004 | A1 |
| 20040020040 | Arneson et al. | Feb 2004 | A1 |
| 20040239861 | Uchida | Dec 2004 | A1 |
| 20040250417 | Arneson et al. | Dec 2004 | A1 |
| 20050007516 | Hong et al. | Jan 2005 | A1 |
| 20050009244 | Shiobara et al. | Jan 2005 | A1 |
| 20050015970 | Arneson et al. | Jan 2005 | A1 |
| 20050057906 | Nakatani et al. | Mar 2005 | A1 |
| 20050101052 | Kobayashi et al. | May 2005 | A1 |
| 20050115602 | Senta et al. | Jun 2005 | A1 |
| 20050155792 | Ito et al. | Jul 2005 | A1 |
| 20050170613 | Murata et al. | Aug 2005 | A1 |
| 20050237765 | Suehiro et al. | Oct 2005 | A1 |
| 20050253161 | Horio et al. | Nov 2005 | A1 |
| 20050282355 | Edwards et al. | Dec 2005 | A1 |
| 20060002146 | Baba | Jan 2006 | A1 |
| 20060003491 | Kim et al. | Jan 2006 | A1 |
| 20060076690 | Khandros et al. | Apr 2006 | A1 |
| 20060084239 | Nagai et al. | Apr 2006 | A1 |
| 20060145125 | Kuwajima et al. | Jul 2006 | A1 |
| 20060166466 | Maki et al. | Jul 2006 | A1 |
| 20060180344 | Ito et al. | Aug 2006 | A1 |
| 20060181600 | Bourdelais et al. | Aug 2006 | A1 |
| 20060225273 | Arneson et al. | Oct 2006 | A1 |
| 20070076433 | Kinoshita et al. | Apr 2007 | A1 |
| 20070086211 | Beeson et al. | Apr 2007 | A1 |
| 20070087279 | Otsuka | Apr 2007 | A1 |
| 20070095791 | Shinozaki et al. | May 2007 | A1 |
| 20070128306 | Cheung | Jun 2007 | A1 |
| 20070131016 | Addison et al. | Jun 2007 | A1 |
| 20070138494 | Pugh et al. | Jun 2007 | A1 |
| 20070152577 | Cho et al. | Jul 2007 | A1 |
| 20070164260 | Kuwajima | Jul 2007 | A1 |
| 20070171651 | Park et al. | Jul 2007 | A1 |
| 20070263190 | De Boeij et al. | Nov 2007 | A1 |
| 20080005895 | Aoyama et al. | Jan 2008 | A1 |
| 20080032484 | Diep et al. | Feb 2008 | A1 |
| 20080060750 | Wang et al. | Mar 2008 | A1 |
| 20080118681 | Ueno | May 2008 | A1 |
| 20080124842 | Wang et al. | May 2008 | A1 |
| 20080145968 | Hiew et al. | Jun 2008 | A1 |
| 20080185972 | Ito | Aug 2008 | A1 |
| 20080266872 | Chang | Oct 2008 | A1 |
| 20080267745 | Schiller | Oct 2008 | A1 |
| 20090030312 | Hadjicostis | Jan 2009 | A1 |
| 20090032295 | Okajima et al. | Feb 2009 | A1 |
| 20090039376 | Uemoto et al. | Feb 2009 | A1 |
| 20090065588 | Aoki et al. | Mar 2009 | A1 |
| 20090090468 | Murayama | Apr 2009 | A1 |
| 20090095963 | Daniels | Apr 2009 | A1 |
| 20090096413 | Partovi et al. | Apr 2009 | A1 |
| 20090155026 | Alberti et al. | Jun 2009 | A1 |
| 20090217522 | Ito et al. | Sep 2009 | A1 |
| 20090283220 | Chen | Nov 2009 | A1 |
| 20100044845 | Funaya et al. | Feb 2010 | A1 |
| 20100073597 | Bierhuizen et al. | Mar 2010 | A1 |
| 20100075459 | Kerr et al. | Mar 2010 | A1 |
| 20100178722 | de Graff et al. | Jul 2010 | A1 |
| 20100200898 | Lin et al. | Aug 2010 | A1 |
| 20100246152 | Lin et al. | Sep 2010 | A1 |
| 20100311227 | Hatakeyama et al. | Dec 2010 | A1 |
| 20110034912 | de Graff et al. | Feb 2011 | A1 |
| 20110089443 | Hsu | Apr 2011 | A1 |
| 20110120761 | Kawai | May 2011 | A1 |
| 20110123796 | Auman et al. | May 2011 | A1 |
| 20110175518 | Reed et al. | Jul 2011 | A1 |
| 20110180137 | Iwamuro et al. | Jul 2011 | A1 |
| 20110180138 | Adachi et al. | Jul 2011 | A1 |
| 20110209751 | Nojiri et al. | Sep 2011 | A1 |
| 20110232082 | Kim et al. | Sep 2011 | A1 |
| 20110277831 | Yoshida et al. | Nov 2011 | A1 |
| 20110315956 | Tischler et al. | Dec 2011 | A1 |
| 20110317417 | Gourlay | Dec 2011 | A1 |
| 20120044441 | Shigeta et al. | Feb 2012 | A1 |
| 20120049204 | Lai | Mar 2012 | A1 |
| 20120070570 | Kim et al. | Mar 2012 | A1 |
| 20120092389 | Okuyama | Apr 2012 | A1 |
| 20120127754 | Lin et al. | May 2012 | A1 |
| 20120156814 | Hsieh et al. | Jun 2012 | A1 |
| 20120157804 | Rogers et al. | Jun 2012 | A1 |
| 20120165759 | Rogers et al. | Jun 2012 | A1 |
| 20120193662 | Donofrio et al. | Aug 2012 | A1 |
| 20120224111 | Ohshima | Sep 2012 | A1 |
| 20120247817 | Hommura et al. | Oct 2012 | A1 |
| 20120292086 | Auman et al. | Nov 2012 | A1 |
| 20120320581 | Rogers et al. | Dec 2012 | A1 |
| 20130037838 | Speier et al. | Feb 2013 | A1 |
| 20130041235 | Rogers et al. | Feb 2013 | A1 |
| 20130056749 | Tischler et al. | Mar 2013 | A1 |
| 20130062637 | Reed et al. | Mar 2013 | A1 |
| 20130119538 | McCarthy | May 2013 | A1 |
| 20130208026 | Suzuki et al. | Aug 2013 | A1 |
| 20130264592 | Bergmann et al. | Oct 2013 | A1 |
| 20130271959 | Woodgate et al. | Oct 2013 | A1 |
| 20130294006 | Kang et al. | Nov 2013 | A1 |
| 20130302969 | Priewasser | Nov 2013 | A1 |
| 20130309792 | Tischler et al. | Nov 2013 | A1 |
| 20130316487 | de Graff et al. | Nov 2013 | A1 |
| 20140008017 | Rie le | Jan 2014 | A1 |
| 20140017822 | Sakai et al. | Jan 2014 | A1 |
| 20140028953 | Kubota et al. | Jan 2014 | A1 |
| 20140062316 | Tischler et al. | Mar 2014 | A1 |
| 20140065741 | Chern et al. | Mar 2014 | A1 |
| 20140071413 | Takakuwa | Mar 2014 | A1 |
| 20140091337 | Ooyabu et al. | Apr 2014 | A1 |
| 20140094878 | Gossler et al. | Apr 2014 | A1 |
| 20140098557 | Veerasamy | Apr 2014 | A1 |
| 20140104850 | Yamamoto et al. | Apr 2014 | A1 |
| 20140110859 | Rafferty et al. | Apr 2014 | A1 |
| 20140120640 | Shieh et al. | May 2014 | A1 |
| 20140130340 | Li et al. | May 2014 | A1 |
| 20140142740 | Prakapenka et al. | May 2014 | A1 |
| 20140158885 | Noji et al. | Jun 2014 | A1 |
| 20140159072 | Ooyabu et al. | Jun 2014 | A1 |
| 20140167611 | Tischler et al. | Jun 2014 | A1 |
| 20140199635 | Hirano et al. | Jul 2014 | A1 |
| 20140264407 | Tischler et al. | Sep 2014 | A1 |
| 20140303452 | Ghaffari | Oct 2014 | A1 |
| 20140339495 | Bibl et al. | Nov 2014 | A1 |
| 20140355251 | Kahrs et al. | Dec 2014 | A1 |
| 20140367711 | Bibl et al. | Dec 2014 | A1 |
| 20150023023 | Livesay et al. | Jan 2015 | A1 |
| 20150034989 | Namiki et al. | Feb 2015 | A1 |
| 20150037517 | Buriak et al. | Feb 2015 | A1 |
| 20150054003 | Oraw | Feb 2015 | A1 |
| 20150114572 | Sanchez et al. | Apr 2015 | A1 |
| 20150204490 | Zheng et al. | Jul 2015 | A1 |
| 20150262729 | Aoki et al. | Sep 2015 | A1 |
| 20150303359 | Liu et al. | Oct 2015 | A1 |
| 20150308632 | Ueno et al. | Oct 2015 | A1 |
| 20150332635 | Lau et al. | Nov 2015 | A1 |
| 20150364633 | Hosomi et al. | Dec 2015 | A1 |
| 20150370130 | Lin | Dec 2015 | A1 |
| 20150371585 | Bower et al. | Dec 2015 | A1 |
| 20160026846 | Lin et al. | Jan 2016 | A1 |
| 20160064196 | Okita et al. | Mar 2016 | A1 |
| 20160066789 | Rogers et al. | Mar 2016 | A1 |
| 20160079112 | Itonaga et al. | Mar 2016 | A1 |
| 20160155656 | Matsumura | Jun 2016 | A1 |
| 20160172562 | Voutsas | Jun 2016 | A1 |
| 20160211415 | Huang et al. | Jul 2016 | A1 |
| 20160218264 | Tischler et al. | Jul 2016 | A1 |
| 20160233269 | Choi et al. | Aug 2016 | A1 |
| 20160267836 | Meersman et al. | Sep 2016 | A1 |
| 20160275205 | Lehavi et al. | Sep 2016 | A1 |
| 20160276195 | Huska et al. | Sep 2016 | A1 |
| 20160276205 | Huska et al. | Sep 2016 | A1 |
| 20170005077 | Kim et al. | Jan 2017 | A1 |
| 20170053901 | Huska et al. | Feb 2017 | A1 |
| 20170062400 | Li et al. | Mar 2017 | A1 |
| 20170062683 | Chen et al. | Mar 2017 | A1 |
| 20170140959 | Huska et al. | May 2017 | A1 |
| 20170140967 | Huska et al. | May 2017 | A1 |
| 20170150602 | Johnston et al. | May 2017 | A1 |
| 20170188427 | Cok et al. | Jun 2017 | A1 |
| 20170194171 | Peterson et al. | Jul 2017 | A1 |
| 20170256523 | Huska et al. | Sep 2017 | A1 |
| 20170256524 | Huska et al. | Sep 2017 | A1 |
| 20170269430 | Peterson et al. | Sep 2017 | A1 |
| 20170365586 | Huska et al. | Dec 2017 | A1 |
| 20180040665 | Ohmae et al. | Feb 2018 | A1 |
| 20180045379 | Jiang | Feb 2018 | A1 |
| 20180053752 | Huska et al. | Feb 2018 | A1 |
| 20180122673 | Wendt et al. | May 2018 | A1 |
| 20180141163 | Wendt et al. | May 2018 | A1 |
| 20180204749 | Huska et al. | Jul 2018 | A1 |
| 20180226376 | Huska et al. | Aug 2018 | A1 |
| 20180233495 | Peterson et al. | Aug 2018 | A1 |
| 20180248090 | Huska et al. | Aug 2018 | A1 |
| 20180261579 | Huska et al. | Sep 2018 | A1 |
| 20180261580 | Huska et al. | Sep 2018 | A1 |
| 20180261581 | Huska et al. | Sep 2018 | A1 |
| 20180269086 | Huska et al. | Sep 2018 | A1 |
| 20180286838 | Huska et al. | Oct 2018 | A1 |
| 20180301439 | Peterson et al. | Oct 2018 | A1 |
| 20190096727 | Wendt et al. | Mar 2019 | A1 |
| 20190237445 | Huska et al. | Aug 2019 | A1 |
| 20190348405 | Peterson et al. | Nov 2019 | A1 |
| 20190378748 | Peterson et al. | Dec 2019 | A1 |
| 20200118862 | Peterson et al. | Apr 2020 | A1 |
| 20200168587 | Huska | May 2020 | A1 |
| 20200235081 | Huska et al. | Jul 2020 | A1 |
| 20200243491 | Peterson et al. | Jul 2020 | A1 |
| 20200251453 | Huska et al. | Aug 2020 | A1 |
| 20210375656 | Huska et al. | Dec 2021 | A1 |
| Number | Date | Country |
|---|---|---|
| 1265226 | Aug 2000 | CN |
| 1370306 | Sep 2002 | CN |
| 1453636 | Nov 2003 | CN |
| 1875455 | Dec 2006 | CN |
| 101295037 | Oct 2008 | CN |
| 101308225 | Nov 2008 | CN |
| 101320244 | Dec 2008 | CN |
| 101441419 | May 2009 | CN |
| 101821834 | Sep 2010 | CN |
| 102472790 | May 2012 | CN |
| 103210483 | Jul 2013 | CN |
| 103843125 | Jun 2014 | CN |
| 104007642 | Aug 2014 | CN |
| 104205289 | Dec 2014 | CN |
| 105278160 | Jan 2016 | CN |
| 107078066 | Aug 2017 | CN |
| 0375293 | Jun 1990 | EP |
| 2426398 | Mar 2012 | EP |
| 3427306 | Jan 2019 | EP |
| S487643 | Feb 1973 | JP |
| S52137983 | Nov 1977 | JP |
| S6097634 | May 1985 | JP |
| H077056 | Jan 1995 | JP |
| 10294493 | Nov 1998 | JP |
| H1123394 | Jan 1999 | JP |
| H09181150 | Jan 1999 | JP |
| H1187370 | Mar 1999 | JP |
| H11220170 | Aug 1999 | JP |
| 2002151739 | May 2002 | JP |
| 2002184836 | Jun 2002 | JP |
| 2005327923 | Nov 2005 | JP |
| 2005535149 | Nov 2005 | JP |
| 2006203023 | Aug 2006 | JP |
| 2006332417 | Dec 2006 | JP |
| 2006332468 | Dec 2006 | JP |
| 2007173849 | Jul 2007 | JP |
| 2007193197 | Aug 2007 | JP |
| 2009101762 | May 2009 | JP |
| 2010087359 | Apr 2010 | JP |
| 2010161155 | Jul 2010 | JP |
| 2012015318 | Jan 2012 | JP |
| 4996747 | May 2012 | JP |
| 2012156473 | Aug 2012 | JP |
| 2012195350 | Oct 2012 | JP |
| 2013118244 | Jun 2013 | JP |
| WO2011111293 | Jun 2013 | JP |
| 2015035532 | Feb 2015 | JP |
| 2015513213 | Apr 2015 | JP |
| 2016001735 | Jan 2016 | JP |
| 2016029740 | Mar 2016 | JP |
| 2017137720 | Aug 2017 | JP |
| 20010072454 | Jul 2001 | KR |
| 20060003158 | Jan 2006 | KR |
| 20170137720 | Dec 2017 | KR |
| 2331951 | Jul 2007 | RU |
| 2331951 | Aug 2008 | RU |
| 200947641 | Nov 2009 | TW |
| WO0077731 | Dec 2000 | WO |
| WO2007011068 | Jan 2007 | WO |
| WO2007143623 | Dec 2007 | WO |
| WO2008012460 | Jan 2008 | WO |
| WO2010070885 | Jun 2010 | WO |
| WO2012148231 | Nov 2012 | WO |
| WO2011111293 | Jun 2013 | WO |
| WO2014075608 | May 2014 | WO |
| WO2015188172 | Dec 2015 | WO |
| WO2016069766 | May 2016 | WO |
| WO2016154956 | Oct 2016 | WO |
| WO2016183844 | Nov 2016 | WO |
| WO2016183845 | Nov 2016 | WO |
| WO2016200440 | Dec 2016 | WO |
| WO2017008253 | Jan 2017 | WO |
| WO2017028206 | Feb 2017 | WO |
| WO2017028207 | Feb 2017 | WO |
| Entry |
|---|
| Chinese Office Action dated Dec. 23, 2020 for Chinese Patent Application No. 201910706964.0, a counterpart foreign application of U.S. Pat. No. 9,633,883, 19 pages. |
| Chinese Office Action dated Dec. 29, 2020 for Chinese Patent Application No. 201680016956.8, a counterpart foreign application of U.S. Pat. No. 9,633,883, 5 pages. |
| CN Search Report dated Aug. 9, 2019 for CN application No. 201910706964.0, 2 pages. |
| CN Search Report dated Jul. 10, 2020 for CN application No. 201910706964.0, 2 pages. |
| CN Search Report dated Jul. 26, 2020 for CN application No. 201910706964.0, 2 pages. |
| Japanese Office Action dated Jan. 26, 2021 for Japanese Patent Application No. 2019-238704, a counterpart foreign application of U.S. Pat. No. 9,633,883, 8 pages. |
| Korean Office Action dated Feb. 4, 2021 for Korean Patent Application No. 10-2018-7030172, a counterpart foreign application of U.S. Pat. No. 9,678,383, 9 pages. |
| Korean Office Action dated Dec. 23, 2020 for Korean Patent Application No. 10-2019-7000016, a counterpart foreign application of U.S. Pat. No. 9,633,883, 7 pages. |
| Office Action for U.S. Appl. No. 16/222,873, dated Feb. 12, 2021, Peterson, “Method and Apparatus for Light Diffusion,” 11 pages. |
| Machine translated First Chinese Office Action dated Jun. 2, 2021, for Chinese Patent Application No. 201980027164.4, a counterpart foreign application of the U.S. Pat. No. 10,410,905, 10 pages. |
| Chinese Office Action dated Jun. 20, 2021 for Chinese Patent Application No. 201780027031.8, a counterpart foreign application of the U.S. Pat. No. 9,678,383, 7 pages. |
| Machine translated First Chinese Office Action dated Apr. 26, 2021 for Chinese Patent Application No. 201980027670.3, a counterpart foreign application of U.S. Appl. No. 16/147,456, 18 pages. |
| Machine trnalated First Chinese Office Action dated Dec. 23, 2021 for Chinese Patent Application No. 201910706964.0, a counterpart foreign application of U.S. Pat. No. 9,633,883, 34 pages. |
| Machine translated Third Chinese Office Action dated Jun. 29, 2021 for Chinese Patent Application No. 201910706964.0, a counterpart foreign application of U.S. Pat. No. 9,633,883, 13 pages. |
| Chinese Re-Examination dated Jun. 7, 2021 for Chinese Patent Application No. 201680016956.8 a foreign counterpart to U.S. Pat. No. 9,633,883, 8 pages. |
| CN Search Report dated May 26, 2021 for CN Patent Application No. 201980027164.4, 1 page. |
| CN Search Report dated Dec. 15, 2020 for CN Patent Application No. 201910706964.0, 2 pages. |
| Supplemental CN Search Report dated Mar. 19, 2021 for CN Patent Application No. 201910706964.0, 2 pages. |
| CN Search Report dated Apr. 20, 2021 for CN Patent Application No. 201980027670.3, 2 pages. |
| CN Seupplemental Search Report dated Jun. 21, 2021 for CN Patent Application No. 201910706964.0, 2 pages. |
| CN Search Report dated Jul. 10, 2020 for CN application No. 201680016956,8, 1 page. |
| CN Search Report dated Jul. 3, 2020 for CN Patent Application No. 201780027031.8, 1 page. |
| CN Search Report dated Jul. 9, 2019 for CN Patent Application No. 201780027031.8, 2 pages. |
| CN Search Report dated Aug. 9, 2019 for CN application No. 201680016956,8, 1 page. |
| European Office Action dated Jun. 15, 2021 for European Patent Application No. 17767669.9, a foreign counterpart to U.S. Pat. No. 9,678,383, 5 pages. |
| Korean Office Action dated May 31, 2021 for Korean Patent Application No. 10-2019-7016397, a counterpart foreign application of U.S. Pat. No. 10,504,767, 9 pages. |
| Korean Office Action dated Aug. 4, 2021 for Korean Application No. 10-2018-7030172, a foreign counterpart to U.S. Pat. No. 9,678,383, 3 pages. |
| Korean Office Action dated Jun. 23, 2021 for Korean Patent Application No. 201710936038.3, a counterpart foreign application of U.S. Pat. No. 9,633,883, 5 pages. |
| Office Action for U.S. Appl. No. 16/708,357, dated Jun. 24, 2021, Peterson, “Direct Transfer Apparatus for a Pattern Array of Semiconductor Device Die”, 14 Pages. |
| Office Action for U.S. Appl. No. 16/551,131, dated Aug. 4, 2021, Peterson, “Method and Apparatus for Multiple Direct Transfers of Semiconductor Devices”, 10 Pages. |
| Taiwanese Office Action dated Jun. 24, 2021 for Taiwanese Patent Application No. 109133686, a counterpart foreign application of U.S. Pat. No. 10,410,905, 7 pages. |
| Extended European Search Report dated May 29, 2020 for European Patent Application No. 17873931.4, 14 pages. |
| Extended European Search Report dated May 4, 2020 for European Patent Application No. 17867498.2, 12 pages. |
| Japanese Office Action dated May 29, 2020 for Japanese Patent Application No. 2018-548830, a counterpart foreign application of the U.S. Pat. No. 9,678,383, 12 pages. |
| Final Office Action dated May 13, 2020 for U.S. Appl. No. 16/381,982 “Method for Improved Transfer of Semiconductor Die,” Huska, 9 pages. |
| Office Action for U.S. Appl. No. 16/792,045, dated Jun. 2, 2020, Peterson, “Apparatus for Direct Transfer of Semiconductor Device Die,” 14 pages. |
| Taiwanese Office Action dated Feb. 24, 2020 for Taiwanese Patent Application No. 108115983, a counterpart of U.S. Pat. No. 10,410,905, 10 pages. |
| Chinese Office Action dated Mar. 26, 2021 for Chinese Patent Application No. 201910706964.0, a foreign counterpart to U.S. Pat. No. 9,633,883, 31 pages. |
| Japanese Office Action dated Apr. 6, 2021 for Japanese Patent Application No. 2019-523856, a foreign counterpart of U.S. Pat. No. 10,141,215, 14 pages. |
| Korean Office Action dated Apr. 29, 2021 for Korean Patent Application No. 10-2019-7012931, a counterpart foreign application of U.S. Pat. No. 10,141,215, 10 pages. |
| Chinese Office Action dated Feb. 26, 2021 for Chinese Patent Application No. 201780027031.8, a counterpart foreign application of U.S. Pat. No. 9,678,383, 20 pages. |
| Japanese Office Action dated Mar. 23, 2021 for Japanese Patent Application No. 2018-548830, a counterpart foreign application of U.S. Pat. No. 9,678,383, 6 pages. |
| Chinese Office Action dated Jul. 14, 2020 for Chinese Patent Application No. 201780027031.8, a counterpart foreign application of the U.S. Pat. No. 9,678,383, 10 pages. |
| Chinese Office Action dated Aug. 4, 2020 for Chinese Patent Application No. 201680016956.8, a counterpart foreign application of U.S. Pat. No. 9,633,883, 8 pages. |
| Office Action for U.S. Appl. No. 16/222,873, dated Sep. 3, 2020, Peterson, “Method and Apparatus for Light Diffusion,” 9 pages. |
| Chinese Office Action dated Jul. 12, 2019 for Chinese Patent Application No. 201780027031.8, a counterpart of U.S. Pat. No. 9,678,383, 17 pages. |
| Chinese Office Action dated Aug. 28, 2019 for Chinese Patent Application No. 201680016956.8, a counterpart of U.S. Pat. No. 9,633,883, x pages. |
| “Capillaries 1572& 1572N Series,” Gaiser precision bonding tools, coorstek.com, Nov. 23, 2016, 1 page. |
| European Office Action dated Sep. 9, 2019 for European Patent Application No. 16769455.3, counterpart foreing application of the U.S. Appl. No. 14/939,896, 8 pages. |
| Extended European Search Report dated Feb. 2, 2018 for European Patent Application No. 15803526.1, 6 pages. |
| Extended European Search Report dated Sep. 19, 2018 for European Application No. 16769455.3, 9 pages. |
| Extended European Search Report dated Oct. 10, 2019 for European Patent Application No. 17767669.9, 7 pages. |
| Japanese Office Action dated Apr. 2, 2019 for Japanese Patent Application No. 2017-516645, a counterpart of U.S. Appl. No. 15/316,505, 11 pages. |
| Japanese Office Action dated May 7, 2019 for Japanese Patent Application No. 2017-549243, a counterpart of U.S. Pat. No. 9,633,883, 12 pages. |
| Japanese Office Action dated Aug. 27, 2019 for Japanese Patent Application No. 2017-549243, a counterpart of U.S. Pat. No. 9,633,883, 6 pages. |
| Korean Office Action dated Nov. 26, 2018 for Korean Patent Application No. 10-2017-7000397, a counterpart of U.S. Appl. No. 15/316,505, 20 pages. |
| Korean Office Action dated Feb. 26, 2019 for Korean Patent Application No. 10-2017-7000397, a counterpart of U.S. Appl. No. 15/316,505, 11 pages. |
| Korean Office Action dated Jul. 2, 2018, for the Korean Patent Application No. 10-2017-7026529, a counterpart foreign application of U.S. Pat. No. 9,633,883, 5 pages. |
| Final Office Action dated Jan. 14, 2019 for U.S. Appl. No. 15/796,533 “Apparatus for Multi-Direct Transfer of Semiconductors,” Huska, 17 pages. |
| Final Office Action dated Feb. 11, 2019 for U.S. Appl. No. 16/013,755 “Substrate with Array of LEDs for Backlighting a Display Device,” Peterson, 12 pages. |
| Non Final Office Action dated Mar. 8, 2019 for U.S. Appl. No. 15/360,471 “Top-Side Laser for Direct Transfer of Semiconductor Devices,” Wendt, 21 pages. |
| Non Final Office Action dated Mar. 19, 2019 for U.S. Appl. No. 15/978,094 “Method and Apparatus for Multiple Direct Transfers of Semiconductor Devices,” Peterson, 12 pages. |
| Non Final Office Action dated Mar. 3, 26, 2019 for U.S. Appl. No. 15/360,645 “Pattern Array Direct Transfer Apparatus and Method Therefor,” Peterson, 13 pages. |
| Final Office Action dated May 29, 2019 for U.S. Appl. No. 15/316,505 “Manufacture of Circuit Assembly with Unpackaged Semiconductor Devices,” Peterson, 28 pages. |
| Non Final Office Action dated Jun. 11, 2019 for U.S. Appl. No. 15/600,611 “Method and Apparatus for Transfer of Semiconductor Devices,” Huska, 10 pages. |
| Non Final Office Action dated Jun. 25, 2019 for U.S. Appl. No. 15/600,637 “Semiconductor Device On Glass Substrate and Method of Making the Same,” Huska, 9 pages. |
| Office action for U.S. Appl. No. 14/939,896, dated Jul. 5, 2016, Huska et al., “Method and Apparatus for Transfer of Semiconductor Devices,” 9 pages. |
| Final Office Action dated Aug. 16, 2019 for U.S. Appl. No. 15/360,645 “Direct Transfer Apparatus for a Pattern Array of Semiconductor Device Die,” Peterson, 10 pages. |
| Final Office Action dated Aug. 26, 2019 for U.S. Appl. No. 16/222,873 “Method and Apparatus for Light Diffusion,” Peterson, 10 pages. |
| Non Final Office Action dated Sep. 12, 2019 for U.S. Appl. No. 16/523,909 “Apparatus for Direct Transfer of Semiconductor Device Die,” Peterson, 12 pages. |
| Office Action for U.S. Appl. No. 15/951,094, dated Jan. 28, 2019, Peterson et al., “Substrate With Array of LEDs for Backlighting a Display Device,” 15 pages. |
| Office Action for U.S. Appl. No. 15/951,094, dated Oct. 11, 2018, Peterson et al., “Substrate With Array of LEDs for Backlighting a Display Device,” 13 pages. |
| Office Action for U.S. Appl. No. 16/013,755, dated Oct. 25, 2018, Peterson et al, “Substrate with Array of LEDs for Backlighting a Display Device,” 12 pages. |
| Office action for U.S. Appl. No. 15/074,994, dated Oct. 3, 2016, Huska et al., “Method for Transfer of Semiconductor Devices,” 10 pages. |
| Office Action for U.S. Appl. No. 15/444,013, dated Oct. 4, 2018, Huska et al, “Semiconductor Device Circuit Apparatus Bonded with Anisotropic Conductive Film and Method of Direct Transfer for Making the Same,” 15 pages. |
| Office action for U.S. Appl. No. 15/409,409, dated Oct. 5, 2017, Huska et al., “Flexible Support Substrate for Transfer of Semiconductor Devices,” 10 pages. |
| Office Action for U.S. Appl. No. 16/222,873, dated Nov. 1, 2019, Peterson, “Method and Apparatus for Light Diffusion,” 17 pages. |
| Office Action for U.S. Appl. No. 15/316,505, dated Nov. 16, 2018, Peterson et al, “Manufacture of Circuit Assembly with Unpackaged Semiconductor Devices,” 22 pages. |
| Final Office Action dated Nov. 18, 2019 for U.S. Appl. No. 15/600,611 “Method and Apparatus for Transfer of Semiconductor Devices,” Huska, 6 pages. |
| Office action for U.S. Appl. No. 15/345,425, dated Nov. 21, 2017, Huska et al., “Substrate With Array of LEDs for Backlighting a Display Device,” 14 pages. |
| Non Final Office Action dated Dec. 5, 2018 for U.S. Appl. No. 15/978,091 “Apparatus for Improved Direct Transfer of Semiconductor Die,” Huska, 16 pages. |
| Office action for U.S. Appl. No. 16/222,873 dated Feb. 26, 2019, Peterson, “Method and Apparatus for Light Diffusion,” 4 pages. |
| Non Final Office Action dated Feb. 4, 2020 for U.S. Appl. No. 16/381,982 “Method for Improved Transfer of Semiconductor Die,” Huska, 7 pages. |
| Office Action for U.S. Appl. No. 15/984,126, dated Feb. 6, 2019, Huska et al, “Support Substrate for Transfer of Semiconductor Devices,” 7 pages. |
| Office Action for U.S. Appl. No. 15/444,013, dated Mar. 22, 2018, Huska et al., “Semiconductor Device Circuit Apparatus Bonded with Anisotropic Conductive Film and Method of Direct Transfer for Making the Same,” 16 pages. |
| Office Action for U.S. Appl. No. 15/418,573, dated Apr. 10, 2019, Huska et al., “Apparatus and Method for Direct Transfer of Semiconductor Devices,” 9 pages. |
| Office Action for U.S. Appl. No. 15/418,605, dated Apr. 12, 2019, Huska et al., “Apparatus and Method for Direct Transfer of Semiconductor Devices via Stacking,” 10 pages. |
| Office Action for U.S. Appl. No. 15/479,063, dated Apr. 19, 2018, Peterson, “Method and Apparatus for Light Diffusion,” 12 pages. |
| Office Action for U.S. Appl. No. 16/000,746, dated Apr. 9, 2019, Huska et al., “Apparatus for Direct Transfer of Semiconductor Device Die,” 10 pages. |
| Office action for U.S. Appl. No. 15/345,425, dated Aug. 11, 2017, Huska et al., “Substrate With Array of LEDs for Backlighting a Display Device,” 12 pages. |
| Office action for U.S. Appl. No. 15/345,425, dated Jul. 11, 2017, Huska et al., “Substrate With Array of LEDs for Backlighting a Display Device,” 12 pages. |
| Office Action for U.S. Appl. No. 15/984,126, dated Aug. 14, 2018, Andrew Huska, “Support Substrate for Transfer of Semiconductor Devices,” 10 pages. |
| Office action for U.S. Appl. No. 15/075,001, dated Aug. 18, 2016, Peterson et al., “Method and Apparatus for Light Diffusion,” 13 pages. |
| Office Action for U.S. Appl. No. 15,978,092, dated Aug. 30, 2018, Andrew Huska, “Apparatus for Direct Transfer of Semiconductor Devices With Needle Retraction Support,” 14 pages. |
| Office Action for U.S. Appl. No. 15/984,126, dated Aug. 30, 2018, Andrew Huska, “Apparatus for Direct Transfer of Semiconductor Devices With Needle Retraction Support,” 14 pages. |
| Office Action for U.S. Appl. No. 15/418,573, dated Aug. 8, 2019, Huska et al., “Apparatus and Method for Direct Transfer of Semiconductor Devices,” 6 pages. |
| Office Action for U.S. Appl. No. 15/479,063, dated Sep. 11, 2017, Peterson, “Method and Apparatus for Light Diffusion,” 11 pages. |
| Office Action for U.S. Appl. No. 15/418,605, dated Sep. 18, 2019, Huska, “Apparatus and Method for Direct Transfer of Semiconductor Devices via Stacking,” 6 pages. |
| Office Action for U.S. Appl. No. 15/444,013, dated Sep. 20, 2017, Huska et al., “Semiconductor Device Circuit Apparatus Bonded with Anisotropic Conductive Film and Method of Direct Transfer for Making the Same,” 14 pages. |
| PCT Search Report and Written Opinion dated May 10, 2018 for PCT application No. PCT/US2018/014256, 7 pages. |
| PCT Search Report and Written Opinion dated Dec. 10, 2015 for PCT application No. PCT/US2015/034596, 9 pages. |
| PCT Search Report and Written Opinion dated Mar. 15, 2018 for PCT application No. PCT/US2017/062968, 7 pages. |
| PCT Search Report and Written Opinion dated Apr. 12, 2018 for PCT Application No. PCT/US17/62981, 7 pages. |
| PCT Search Report and Written Opinion dated May 4, 2018 for PCT Application No. PCT/US18/19773, 7 pages. |
| PCT Search Report and Written Opinion dated Jun. 2, 2016 for PCT application No. PCT/US2016/023280, 7 pages. |
| PCT Search Report and Written Opinion dated Aug. 14, 2017 for PCT Application No. PCT/US17/23061, 10 pages. |
| PCT Search Report and Written Opinion dated Aug. 15, 2019, for PCT Application No. PCT/US2019/029996, 7 pages. |
| Extended European Search Report dated Dec. 2, 2020 for European Patent Application No. 20196959.9, 14 pages. |
| Japanese Office Action dated Dec. 1, 2020 for Japanese Patent Application No. 2019-527530, a counterpart of U.S. Pat. No. 10,504,767, 16 pages. |
| Taiwanese Office Action dated Oct. 22, 2020 for Taiwanese Patent Application No. 109133686, a counterpart of U.S. Pat. No. 10,410,905, 2 pages. |
| Chinese Office Actioon dated Mar. 11, 2020 for Chinese Patent Application No. 201680016956.8, a counterpart of U.S. Pat. No. 9,633,883, 5 pages. |
| Final Office Action dated Apr. 9, 2020 for U.S. Appl. No. 16/222,873 “Method and Apparatus for Light Diffusion,” Peterson, 13 pages. |
| Japanese Office Action dated Feb. 2, 2021 for Japanese Patent Application No. 2017-549243, a counterpart foreign application of U.S. Pat. No. 9,633,883, 4 pages. |
| European Office Action dated Oct. 5, 2020 for European Patent Application No. 17767669.9, a counterpart of U.S. Pat. No. 9,678,383, 5 pages. |
| Chinese Office Action dated Oct. 9, 2018, for Chinese Patent Application No. 201580037905.9, a counterpart foreign applicaiton of U.S. Appl. No. 15/316,505, 9 Pages. |
| Japanese Office Action dated Sep. 1, 2020 for Japanese Patent Application No. 2017-549243, a counterpart foreign application of U.S. Pat. No. 9,633,883, 28 pages. |
| Japanese Office Action dated Oct. 6, 2020 for Japanese Patent Application No. 2018-548830, a counterpart foreign application of U.S. Pat. No. 9,678,383, 9 pages. |
| Chinese Office Action dated Aug. 27, 2021 for Chinese Application No. 201680016956.8, a foreign counterpart to U.S. Pat. No. 9,633,883, 12 pages. |
| Extended European Search Report dated Dec. 23, 2021 for European Patent Application No. 19804301.0, 8 pages. |
| Japanese Office Action dated Oct. 5, 2021 for Japanese Patent Application No. 2019-527530, a foreign counterpart to U.S. Pat. No. 10,504,767, 8 pages. |
| Japanese Office Action dated Nov. 16, 2021 for Japanese Patent Application No. 2019-523856, a foreign counterpart to U.S. Pat. No. 10,141,215, 6 pages. |
| Korean Office Action dated Nov. 15, 2021 for Korean Patent Application No. 10-2019-7016397, a foreign counterpart to U.S. Pat. No. 10,504,767, 4 pages. |
| Korean Office Action dated Nov. 26, 2021 for Korean Patent Application No. 10-2019-7012931, a foreign counterpart to U.S. Pat. No. 10,141,215, 9 pages. |
| Office Action for U.S. Appl. No. 16/708,357,dated Jan. 18, 2022, Peterson, “Direct Transfer Apparatus for a Pattern Array of Semiconductor Device Die,” 16 pages. |
| Chinese Re-Examination dated Jun. 7, 2021 for Chinese Patent Application No. 201910706964.0, a foreign counterpart to U.S. Pat. No. 9,633,883, 8 pages. |
| Chinese Office Action dated Jun. 7, 2021 for Chinese Patent Application No. 201680016956.8, a counterpart foreign application of U.S. Pat. No. 9,633,883, 8 pages. |
| European Office Action dated Feb. 16, 2022 for European Patent Application No. 17767669.9, a foreign counterpart to U.S. Pat. No. 9,678,383, 4 pages. |
| Extended European Search Report dated May 10, 2022 for European Patent Application No. 19865538.3, a foreign counterpart to U.S. Pat. No. 11,094,571, 6 pages. |
| Japanese Office Action dated Apr. 5, 2022 for Japanese Patent Application No. 2018-548830, a foreign counterpart to U.S. Pat. No. 9,678,383, 35 pages. |
| The Japanese Office Action dated May 10, 2022 for Japanese Patent Application No. 2020-563754, a foreign counterpart of U.S. Pat. No. 10,410,905, 3 pages. |
| Korean Office Action dated Jan. 28, 2022 for Korean Patent Application No. 10-2021-7038411, a foreign counterpart to U.S. Pat. No. 9,633,883, 26 pages (with machine generated English translation). |
| Korean Office Action dated Jul. 27, 2022 for Korean Patent Application No. 10-2021-7038411, a foreign counterpart to U.S. Pat. No. 9,633,883, 13 pages. |
| Korean Office Action dated Aug. 4, 2022 for Korean Patent Application No. 10-2020-7032776, a foreign counterpart to U.S. Pat. No. 10,410,905, 4 pages. |
| Office Action for U.S. Appl. No. 16/841,090, dated Mar. 16, 2022, Huska, “Semiconductor Device on Glass Substrate ”, 9 Pages. |
| Office Action for U.S. Appl. No. 16/856,970, dated Apr. 22, 2022, “Apparatus and Method for Direct Transfer of Semiconductor Devices From a Substrate and Stacking Semiconductor Devices on Each Other”, 7 Pages. |
| Chinese Office Action dated Nov. 29, 2022 for Chinese Patent Application No. 201780077698.9, a foreign counterpart to U.S. Pat. No. 10,141,215, 29 pages. |
| Japanese Office Action mailed Oct. 18, 2022 for Japanese Patent Application No. 2020-563754, a foreign counterpart to U.S. Pat. No. 10,410,905, 6 pages. |
| Office Action for U.S. Appl. No. 17/402,987, dated Sep. 15, 2022, Andrew Huska, “Method and Apparatus to Increase Transfer Speed of Semiconductor Devices With Micro-Adjustment”, 4 pages. |
| Number | Date | Country | |
|---|---|---|---|
| 20200168587 A1 | May 2020 | US |
| Number | Date | Country | |
|---|---|---|---|
| 62146956 | Apr 2015 | US | |
| 62136434 | Mar 2015 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 15418573 | Jan 2017 | US |
| Child | 16694665 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 14939896 | Nov 2015 | US |
| Child | 15418573 | US |
