characterised by atmosphere control

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CPC
H01L21/67389

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67389characterised by atmosphere control

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Storage shelf
- Patent number 12,322,624
- Issue date Jun 3, 2025
- Murata Machinery, Ltd.
- Tatsuo Tsubaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of installing a purge fluid conditioning element into a sem...
- Patent number 12,315,749
- Issue date May 27, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer carrier dry cleaner
- Patent number 12,288,708
- Issue date Apr 29, 2025
- NANYA TECHNOLOGY CORPORATION
- Jih-Cheng Huang
- B08 - CLEANING
Information Patent Grant
Humidity control device for equipment front end module of semicondu...
- Patent number 12,283,506
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer storage container
- Patent number 12,264,005
- Issue date Apr 1, 2025
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mini-environment system for controlling oxygen and humidity levels...
- Patent number 12,237,192
- Issue date Feb 25, 2025
- KLA Corporation
- Alexander Fridman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing method
- Patent number 12,211,731
- Issue date Jan 28, 2025
- Disco Corporation
- Kazuma Sekiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for adjusting oxygen content in front opening uni...
- Patent number 12,198,960
- Issue date Jan 14, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Dapeng Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage container
- Patent number 12,183,610
- Issue date Dec 31, 2024
- Miraial Co., Ltd.
- Chiaki Matsutori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fume-removing device
- Patent number 12,176,230
- Issue date Dec 24, 2024
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of storing carriers and method of storing carriers
- Patent number 12,176,229
- Issue date Dec 24, 2024
- Semes Co., Ltd.
- Yong Bae Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage container
- Patent number 12,176,231
- Issue date Dec 24, 2024
- Shin-Etsu Polymer Co., Ltd.
- Osamu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System with substrate carrier deterioration detection and repair
- Patent number 12,162,134
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Humidity control in semiconductor systems
- Patent number 12,148,642
- Issue date Nov 19, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filter isolation for equipment front end module
- Patent number 12,140,339
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- James Christopher Hansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer system and a method for transporting wafers
- Patent number 12,125,727
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Safeguarding device, wafer transport container with at least one sa...
- Patent number 12,106,987
- Issue date Oct 1, 2024
- VAT Holding AG
- Florian Ehrne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EFEM and method of controlling supply amount of inert gas
- Patent number 12,087,606
- Issue date Sep 10, 2024
- Sinfonia Technology Co., Ltd.
- Masahiro Osawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Airflow detection device and methods of use
- Patent number 12,080,575
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Front opening unified pod
- Patent number 12,080,578
- Issue date Sep 3, 2024
- Mega Rich Technologies Inc.
- Kuan-Ting Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 12,074,045
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for humidity control of FOUP during semiconduct...
- Patent number 12,051,609
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sung-Ju Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ventilated wafer cassette
- Patent number 12,033,877
- Issue date Jul 9, 2024
- Beijing Tongmei Xtal Technology Co., Ltd.
- Wei Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container system
- Patent number 12,017,841
- Issue date Jun 25, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer treatment device
- Patent number 12,014,937
- Issue date Jun 18, 2024
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quick-detachable valve, substrate container provided with the same,...
- Patent number 12,009,239
- Issue date Jun 11, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quick-release valve module, reticle pod provided with quick-release...
- Patent number 11,981,483
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate storing container
- Patent number 11,948,821
- Issue date Apr 2, 2024
- Miraial Co., Ltd.
- Chiaki Matsutori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning a synthetic surface
- Patent number 11,872,603
- Issue date Jan 16, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
CLOSED LOOP CONTROL SYSTEM TO MONITOR INSIDE PARAMETERS OF A SUBSTR...
- Publication number 20250167027
- Publication date May 22, 2025
- Applied Materials, Inc.
- Srinivas Poshatrahalli Gopalakrishna
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS
- Publication number 20250167017
- Publication date May 22, 2025
- LPE S.p.A.
- Maurilio Meschia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIFTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCL...
- Publication number 20250157848
- Publication date May 15, 2025
- SEMES CO., LTD.
- Mun Hyeok HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE CONTAINER PROCESSING APPARATUS
- Publication number 20250112070
- Publication date Apr 3, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF STORING CARRIERS AND METHOD OF STORING CARRIERS
- Publication number 20250112071
- Publication date Apr 3, 2025
- SEMES CO., LTD.
- Yong Bae CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR
- Publication number 20250100161
- Publication date Mar 27, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jen-Ti WANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FUME-REMOVING DEVICE
- Publication number 20250069925
- Publication date Feb 27, 2025
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING A SYNTHETIC SURFACE
- Publication number 20250050382
- Publication date Feb 13, 2025
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- B08 - CLEANING
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20250038024
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DIFFUSION DEVICE, AND WAFER CONTAINER INCLUDING THE SAME
- Publication number 20250038025
- Publication date Jan 30, 2025
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR FRONT GAS DELIVERY INTO A CONTAINER
- Publication number 20250029856
- Publication date Jan 23, 2025
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROPLATING WETTING CHAMBER WITH REDUCED BUBBLE ENTRAPMENT
- Publication number 20250006519
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Kyle M. Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CARRIER DRY CLEANER
- Publication number 20240429081
- Publication date Dec 26, 2024
- NANYA TECHNOLOGY CORPORATION
- Jih-Cheng HUANG
- B08 - CLEANING
Information Patent Application
EFEM AND METHOD OF CONTROLLING SUPPLY AMOUNT OF INERT GAS
- Publication number 20240420980
- Publication date Dec 19, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Masahiro Osawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXHAUST DEVICE
- Publication number 20240395588
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chien-Liang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS
- Publication number 20240387218
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRFLOW DETECTION DEVICE AND METHODS OF USE
- Publication number 20240379391
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER
- Publication number 20240363380
- Publication date Oct 31, 2024
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR HUMIDITY CONTROL OF FOUP DURING SEMICONDUCT...
- Publication number 20240347363
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sung-Ju Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TREATMENT DEVICE
- Publication number 20240304468
- Publication date Sep 12, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR MONITORING OF A CONTROLLED ENVIRONMENT IN A...
- Publication number 20240304477
- Publication date Sep 12, 2024
- ASM IP HOLDING B.V.
- Gido van der Star
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...
- Publication number 20240274454
- Publication date Aug 15, 2024
- Entegris, Inc.
- Ryan Madhu Jacob
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240249964
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240249960
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Kazuya NABETA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING A SYNTHETIC SURFACE
- Publication number 20240226969
- Publication date Jul 11, 2024
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- B08 - CLEANING
Information Patent Application
WAFER CARRIER MEASURING APPARATUS
- Publication number 20240186163
- Publication date Jun 6, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Supply System
- Publication number 20240145283
- Publication date May 2, 2024
- DAIFUKU CO., LTD.
- Tadashi Nishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORING CONTAINER
- Publication number 20240145284
- Publication date May 2, 2024
- MIRAIAL CO., LTD.
- Chiaki Matsutori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE DEVICE
- Publication number 20240128108
- Publication date Apr 18, 2024
- MURATA MACHINERY, LTD.
- Yasuhisa ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER WITH BUILT-IN NEGATIVE PRESSURE CAVITY
- Publication number 20240055287
- Publication date Feb 15, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- Ming-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS

characterised by atmosphere control

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Storage shelf

Methods of installing a purge fluid conditioning element into a sem...

Wafer carrier dry cleaner

Humidity control device for equipment front end module of semicondu...

Wafer storage container

Mini-environment system for controlling oxygen and humidity levels...

Wafer processing method

System and method for adjusting oxygen content in front opening uni...

Substrate storage container

Fume-removing device

Apparatus of storing carriers and method of storing carriers

Substrate storage container

System with substrate carrier deterioration detection and repair

Humidity control in semiconductor systems

Side storage pods, equipment front end modules, and methods for pro...

Filter isolation for equipment front end module

Wafer transfer system and a method for transporting wafers

Safeguarding device, wafer transport container with at least one sa...

EFEM and method of controlling supply amount of inert gas

Airflow detection device and methods of use

Front opening unified pod

Prevention of contamination of substrates during gas purging

Systems and methods for humidity control of FOUP during semiconduct...

Ventilated wafer cassette

Substrate container system

Wafer treatment device

Quick-detachable valve, substrate container provided with the same,...

Quick-release valve module, reticle pod provided with quick-release...

Substrate storing container

Method for cleaning a synthetic surface

Patents Applicationslast 30 patents

CLOSED LOOP CONTROL SYSTEM TO MONITOR INSIDE PARAMETERS OF A SUBSTR...

MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS

SUBSTRATE LIFTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCL...

WAFER STORAGE CONTAINER PROCESSING APPARATUS

APPARATUS OF STORING CARRIERS AND METHOD OF STORING CARRIERS

SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

FUME-REMOVING DEVICE

METHOD FOR CLEANING A SYNTHETIC SURFACE

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

GAS DIFFUSION DEVICE, AND WAFER CONTAINER INCLUDING THE SAME

METHOD AND DEVICE FOR FRONT GAS DELIVERY INTO A CONTAINER

ELECTROPLATING WETTING CHAMBER WITH REDUCED BUBBLE ENTRAPMENT

WAFER CARRIER DRY CLEANER

EFEM AND METHOD OF CONTROLLING SUPPLY AMOUNT OF INERT GAS

EXHAUST DEVICE

WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS

AIRFLOW DETECTION DEVICE AND METHODS OF USE

METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER

SYSTEMS AND METHODS FOR HUMIDITY CONTROL OF FOUP DURING SEMICONDUCT...

WAFER TREATMENT DEVICE

SYSTEMS AND METHODS FOR MONITORING OF A CONTROLLED ENVIRONMENT IN A...

SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

METHOD FOR CLEANING A SYNTHETIC SURFACE

WAFER CARRIER MEASURING APPARATUS

Gas Supply System

SUBSTRATE STORING CONTAINER

PURGE DEVICE

SUBSTRATE CONTAINER WITH BUILT-IN NEGATIVE PRESSURE CAVITY