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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/67389characterised by atmosphere control
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Gas Supply System
    • Publication number 20240145283
    • Publication date May 2, 2024
    • DAIFUKU CO., LTD.
    • Tadashi Nishikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE STORING CONTAINER
    • Publication number 20240145284
    • Publication date May 2, 2024
    • MIRAIAL CO., LTD.
    • Chiaki Matsutori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PURGE DEVICE
    • Publication number 20240128108
    • Publication date Apr 18, 2024
    • MURATA MACHINERY, LTD.
    • Yasuhisa ITO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE CONTAINER WITH BUILT-IN NEGATIVE PRESSURE CAVITY
    • Publication number 20240055287
    • Publication date Feb 15, 2024
    • GUDENG PRECISION INDUSTRIAL CO., LTD.
    • Ming-Chien CHIU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20240038554
    • Publication date Feb 1, 2024
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    WAFER STORAGE CONTAINER
    • Publication number 20240017903
    • Publication date Jan 18, 2024
    • Bum Je WOO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    NOZZLE
    • Publication number 20240009686
    • Publication date Jan 11, 2024
    • Brillian Network & Automation Integrated System Co., Ltd.
    • YUNG-CHOU CHEN
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
    • Publication number 20240014056
    • Publication date Jan 11, 2024
    • Applied Materials, Inc.
    • Douglas Brian Baumgarten
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEVICE FOR MEASURING AIR SPEED
    • Publication number 20230417791
    • Publication date Dec 28, 2023
    • FOXSEMICON INTEGRATED TECHNOLOGY, INC.
    • SI-YU WEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PURGING GAS AMPLIFIER
    • Publication number 20230411191
    • Publication date Dec 21, 2023
    • Entegris, Inc.
    • Matthew A. Fuller
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF CLEANING A NOZZLE
    • Publication number 20230352327
    • Publication date Nov 2, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Guan Jung CHEN
    • B08 - CLEANING
  • Information Patent Application

    WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS
    • Publication number 20230326776
    • Publication date Oct 12, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ren-Hau Wu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FRONT OPENING UNIFIED POD
    • Publication number 20230326775
    • Publication date Oct 12, 2023
    • Mega Rich Technologies Inc.
    • Kuan-Ting Lin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER STORAGE CONTAINER
    • Publication number 20230286742
    • Publication date Sep 14, 2023
    • PICO & TERA CO., LTD
    • Bum Je WOO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate Storage Container
    • Publication number 20230274960
    • Publication date Aug 31, 2023
    • Shin-Etsu Polymer Co., Ltd.
    • Osamu Ogawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE STORAGE CONTAINER
    • Publication number 20230260813
    • Publication date Aug 17, 2023
    • MIRAIAL CO LTD
    • Chiaki MATSUTORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE CONTAINER WITH MECHANICALLY ACTUATED EXHAUST VALVE
    • Publication number 20230245908
    • Publication date Aug 3, 2023
    • Entegris, Inc.
    • Matthew A. Fuller
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HUMIDITY CONTROL DEVICE FOR EQUIPMENT FRONT END MODULE OF SEMICONDU...
    • Publication number 20230207359
    • Publication date Jun 29, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ren-Hau Wu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CARRIER PLATE APPLIED FOR LOAD PORT
    • Publication number 20230207360
    • Publication date Jun 29, 2023
    • Brillian Network & Automation Integrated System Co., Ltd.
    • SHENG-CHI HSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...
    • Publication number 20230207354
    • Publication date Jun 29, 2023
    • Applied Materials, Inc.
    • Devendra Channappa Holeyannavar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ARTICLE STORAGE EQUIPMENT IN SEMICONDUCTOR FABRICATION FACILITY AND...
    • Publication number 20230197494
    • Publication date Jun 22, 2023
    • SEMES CO., LTD.
    • Sung Ho LEE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHODS OF INSTALLING A PURGE FLUID CONDITIONING ELEMENT INTO A SEM...
    • Publication number 20230197489
    • Publication date Jun 22, 2023
    • Entegris, Inc.
    • Matthew A. FULLER
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS AND METHOD FOR REPAIRING DEFECT OF SEMICONDUCTOR
    • Publication number 20230178334
    • Publication date Jun 8, 2023
    • Naidun-tech Co., Ltd.
    • Chi-Wen CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LAMINAR FLOW DEVICE
    • Publication number 20230178400
    • Publication date Jun 8, 2023
    • NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY
    • SHIH-CHENG HU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SYSTEMS AND METHODS FOR HUMIDITY CONTROL OF FOUP DURING SEMICONDUCT...
    • Publication number 20230154778
    • Publication date May 18, 2023
    • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
    • Sung-Ju Huang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE AR...
    • Publication number 20230135865
    • Publication date May 4, 2023
    • BROOKS AUTOMATION (GERMANY) GmbH
    • Lutz Rebstock
    • B08 - CLEANING
  • Information Patent Application

    STORAGE SHELF
    • Publication number 20230134774
    • Publication date May 4, 2023
    • MURATA MACHINERY, LTD.
    • Tatsuo Tsubaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER CARRIER DRY CLEANER
    • Publication number 20230094352
    • Publication date Mar 30, 2023
    • NANYA TECHNOLOGY CORPORATION
    • Jih-Cheng HUANG
    • B08 - CLEANING
  • Information Patent Application

    SIDE STORAGE PODS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND METHOD...
    • Publication number 20230073921
    • Publication date Mar 9, 2023
    • Applied Materials, Inc.
    • Paul B. Reuter
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
    • Publication number 20230062287
    • Publication date Mar 2, 2023
    • BROOKS AUTOMATION (GERMANY) GMBH
    • Lutz Rebstock
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS