characterised by atmosphere control

Industry

CPC
H01L21/67389

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67389characterised by atmosphere control

Industries

Patents Grantslast 30 patents

Information Patent Grant
Humidity control in semiconductor systems
- Patent number 12,148,642
- Issue date Nov 19, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filter isolation for equipment front end module
- Patent number 12,140,339
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- James Christopher Hansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer system and a method for transporting wafers
- Patent number 12,125,727
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Safeguarding device, wafer transport container with at least one sa...
- Patent number 12,106,987
- Issue date Oct 1, 2024
- VAT Holding AG
- Florian Ehrne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EFEM and method of controlling supply amount of inert gas
- Patent number 12,087,606
- Issue date Sep 10, 2024
- Sinfonia Technology Co., Ltd.
- Masahiro Osawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Airflow detection device and methods of use
- Patent number 12,080,575
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Front opening unified pod
- Patent number 12,080,578
- Issue date Sep 3, 2024
- Mega Rich Technologies Inc.
- Kuan-Ting Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 12,074,045
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for humidity control of FOUP during semiconduct...
- Patent number 12,051,609
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sung-Ju Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ventilated wafer cassette
- Patent number 12,033,877
- Issue date Jul 9, 2024
- Beijing Tongmei Xtal Technology Co., Ltd.
- Wei Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container system
- Patent number 12,017,841
- Issue date Jun 25, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer treatment device
- Patent number 12,014,937
- Issue date Jun 18, 2024
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quick-detachable valve, substrate container provided with the same,...
- Patent number 12,009,239
- Issue date Jun 11, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quick-release valve module, reticle pod provided with quick-release...
- Patent number 11,981,483
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate storing container
- Patent number 11,948,821
- Issue date Apr 2, 2024
- Miraial Co., Ltd.
- Chiaki Matsutori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning a synthetic surface
- Patent number 11,872,603
- Issue date Jan 16, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Grant
Method of storing workpiece using workpiece storage system
- Patent number 11,848,221
- Issue date Dec 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Chi Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indexable side storage pod apparatus, heated side storage pod appar...
- Patent number 11,823,933
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Patrick Pannese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer chamber
- Patent number 11,823,923
- Issue date Nov 21, 2023
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 11,810,805
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Side storage pods, electronic device processing systems, and method...
- Patent number 11,791,185
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate treating apparatus
- Patent number 11,756,813
- Issue date Sep 12, 2023
- Semes Co., Ltd.
- Yong Seok Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for processing substrate
- Patent number 11,756,817
- Issue date Sep 12, 2023
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for ope...
- Patent number 11,749,537
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Patrick Pannese
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Automated nozzle cleaning system
- Patent number 11,699,609
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Guan Jung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage container
- Patent number 11,646,214
- Issue date May 9, 2023
- Shin-Etsu Polymer Co., Ltd.
- Osamu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for ope...
- Patent number 11,640,915
- Issue date May 2, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port operation in electronic device manufacturing apparatus, s...
- Patent number 11,637,029
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port device, gas gate and gas-providing method
- Patent number 11,631,604
- Issue date Apr 18, 2023
- NANYA TECHNOLOGY CORPORATION
- Jih-Cheng Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS
- Publication number 20240387218
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRFLOW DETECTION DEVICE AND METHODS OF USE
- Publication number 20240379391
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER
- Publication number 20240363380
- Publication date Oct 31, 2024
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR HUMIDITY CONTROL OF FOUP DURING SEMICONDUCT...
- Publication number 20240347363
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sung-Ju Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TREATMENT DEVICE
- Publication number 20240304468
- Publication date Sep 12, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR MONITORING OF A CONTROLLED ENVIRONMENT IN A...
- Publication number 20240304477
- Publication date Sep 12, 2024
- ASM IP HOLDING B.V.
- Gido van der Star
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...
- Publication number 20240274454
- Publication date Aug 15, 2024
- Entegris, Inc.
- Ryan Madhu Jacob
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240249964
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240249960
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Kazuya NABETA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING A SYNTHETIC SURFACE
- Publication number 20240226969
- Publication date Jul 11, 2024
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- B08 - CLEANING
Information Patent Application
WAFER CARRIER MEASURING APPARATUS
- Publication number 20240186163
- Publication date Jun 6, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Supply System
- Publication number 20240145283
- Publication date May 2, 2024
- DAIFUKU CO., LTD.
- Tadashi Nishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORING CONTAINER
- Publication number 20240145284
- Publication date May 2, 2024
- MIRAIAL CO., LTD.
- Chiaki Matsutori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE DEVICE
- Publication number 20240128108
- Publication date Apr 18, 2024
- MURATA MACHINERY, LTD.
- Yasuhisa ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER WITH BUILT-IN NEGATIVE PRESSURE CAVITY
- Publication number 20240055287
- Publication date Feb 15, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- Ming-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER CHAMBER
- Publication number 20240038554
- Publication date Feb 1, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
WAFER STORAGE CONTAINER
- Publication number 20240017903
- Publication date Jan 18, 2024
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOZZLE
- Publication number 20240009686
- Publication date Jan 11, 2024
- Brillian Network & Automation Integrated System Co., Ltd.
- YUNG-CHOU CHEN
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20240014056
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR MEASURING AIR SPEED
- Publication number 20230417791
- Publication date Dec 28, 2023
- FOXSEMICON INTEGRATED TECHNOLOGY, INC.
- SI-YU WEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGING GAS AMPLIFIER
- Publication number 20230411191
- Publication date Dec 21, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING A NOZZLE
- Publication number 20230352327
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Guan Jung CHEN
- B08 - CLEANING
Information Patent Application
WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS
- Publication number 20230326776
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FRONT OPENING UNIFIED POD
- Publication number 20230326775
- Publication date Oct 12, 2023
- Mega Rich Technologies Inc.
- Kuan-Ting Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE CONTAINER
- Publication number 20230286742
- Publication date Sep 14, 2023
- PICO & TERA CO., LTD
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Storage Container
- Publication number 20230274960
- Publication date Aug 31, 2023
- Shin-Etsu Polymer Co., Ltd.
- Osamu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORAGE CONTAINER
- Publication number 20230260813
- Publication date Aug 17, 2023
- MIRAIAL CO LTD
- Chiaki MATSUTORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER WITH MECHANICALLY ACTUATED EXHAUST VALVE
- Publication number 20230245908
- Publication date Aug 3, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HUMIDITY CONTROL DEVICE FOR EQUIPMENT FRONT END MODULE OF SEMICONDU...
- Publication number 20230207359
- Publication date Jun 29, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER PLATE APPLIED FOR LOAD PORT
- Publication number 20230207360
- Publication date Jun 29, 2023
- Brillian Network & Automation Integrated System Co., Ltd.
- SHENG-CHI HSU
- H01 - BASIC ELECTRIC ELEMENTS

characterised by atmosphere control

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Humidity control in semiconductor systems

Side storage pods, equipment front end modules, and methods for pro...

Filter isolation for equipment front end module

Wafer transfer system and a method for transporting wafers

Safeguarding device, wafer transport container with at least one sa...

EFEM and method of controlling supply amount of inert gas

Airflow detection device and methods of use

Front opening unified pod

Prevention of contamination of substrates during gas purging

Systems and methods for humidity control of FOUP during semiconduct...

Ventilated wafer cassette

Substrate container system

Wafer treatment device

Quick-detachable valve, substrate container provided with the same,...

Quick-release valve module, reticle pod provided with quick-release...

Substrate storing container

Method for cleaning a synthetic surface

Method of storing workpiece using workpiece storage system

Indexable side storage pod apparatus, heated side storage pod appar...

Transfer chamber

Prevention of contamination of substrates during gas purging

Side storage pods, electronic device processing systems, and method...

Substrate treating apparatus

Apparatus and method for processing substrate

Side storage pods, equipment front end modules, and methods for ope...

Automated nozzle cleaning system

Substrate storage container

Side storage pods, equipment front end modules, and methods for ope...

Load port operation in electronic device manufacturing apparatus, s...

Load port device, gas gate and gas-providing method

Patents Applicationslast 30 patents

WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS

AIRFLOW DETECTION DEVICE AND METHODS OF USE

METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER

SYSTEMS AND METHODS FOR HUMIDITY CONTROL OF FOUP DURING SEMICONDUCT...

WAFER TREATMENT DEVICE

SYSTEMS AND METHODS FOR MONITORING OF A CONTROLLED ENVIRONMENT IN A...

SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

METHOD FOR CLEANING A SYNTHETIC SURFACE

WAFER CARRIER MEASURING APPARATUS

Gas Supply System

SUBSTRATE STORING CONTAINER

PURGE DEVICE

SUBSTRATE CONTAINER WITH BUILT-IN NEGATIVE PRESSURE CAVITY

TRANSFER CHAMBER

WAFER STORAGE CONTAINER

NOZZLE

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

DEVICE FOR MEASURING AIR SPEED

PURGING GAS AMPLIFIER

METHOD OF CLEANING A NOZZLE

WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS

FRONT OPENING UNIFIED POD

WAFER STORAGE CONTAINER

Substrate Storage Container

SUBSTRATE STORAGE CONTAINER

SUBSTRATE CONTAINER WITH MECHANICALLY ACTUATED EXHAUST VALVE

HUMIDITY CONTROL DEVICE FOR EQUIPMENT FRONT END MODULE OF SEMICONDU...

CARRIER PLATE APPLIED FOR LOAD PORT