characterised by means for confinement of gases or sputtered material

Industry

CPC
C23C14/0068

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0068characterised by means for confinement of gases or sputtered material

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,869,748
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Takeshi Yasui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lattice coat surface enhancement for chamber components
- Patent number 11,739,411
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Lit Ping Lam
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
High-refractive-index hydrogenated silicon film and methods for pre...
- Patent number 11,643,716
- Issue date May 9, 2023
- ZHEJIANG CRYSTAL-OPTECH CO., LTD.
- Ruizhi Zhang
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Coatings for surgical instruments
- Patent number 11,078,566
- Issue date Aug 3, 2021
- DePuy Synthes Products, Inc.
- Dayananda Sukadhare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Piezoelectric element
- Patent number 10,388,851
- Issue date Aug 20, 2019
- FUJIFILM Corporation
- Daigo Sawaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber and semiconductor processing apparatus
- Patent number 10,347,470
- Issue date Jul 9, 2019
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Feng Lv
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and method thereof
- Patent number 10,184,171
- Issue date Jan 22, 2019
- Samsung Electronics Co., Ltd.
- Satoh Ryuichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactive sputtering apparatus
- Patent number 9,905,401
- Issue date Feb 27, 2018
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating method for depositing a layer system on a substrate and sub...
- Patent number 9,551,067
- Issue date Jan 24, 2017
- OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON
- Jörg Vetter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic device manufacturing method and sputtering method
- Patent number 9,472,384
- Issue date Oct 18, 2016
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Two piece shutter disk assembly for a substrate process chamber
- Patent number 9,252,002
- Issue date Feb 2, 2016
- Applied Materials, Inc.
- Cheng-Hsiung Matthew Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 9,175,377
- Issue date Nov 3, 2015
- Canon Anelva Corporation
- Shigenori Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering apparatus
- Patent number 9,034,152
- Issue date May 19, 2015
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with a rotating drum
- Patent number 8,758,580
- Issue date Jun 24, 2014
- Vaeco Inc.
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter deposition shield assembly to reduce cathode shorting
- Patent number 8,591,709
- Issue date Nov 26, 2013
- WD Media, LLC
- Chichoy Lim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputter deposition processes and equipment
- Patent number 8,435,388
- Issue date May 7, 2013
- Cardinal CG Company
- Klaus Hartig
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron-assisted deposition process and apparatus
- Patent number 7,931,787
- Issue date Apr 26, 2011
- Donald Bennett Hilliard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energy device and method for producing the same
- Patent number 7,816,032
- Issue date Oct 19, 2010
- Panasonic Corporation
- Kazuyoshi Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing a coating on a tape carrier
- Patent number 7,736,438
- Issue date Jun 15, 2010
- LOS ALAMOS NATIONAL SECURITY, LLC
- Jonathan Storer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering method
- Patent number 7,575,661
- Issue date Aug 18, 2009
- Canon Kabushiki Kaisha
- Yasuyuki Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming deposited film
- Patent number 6,787,478
- Issue date Sep 7, 2004
- Canon Kabushiki Kaisha
- Atsushi Koike
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing an oxide epitaxially strained lattice film
- Patent number 6,533,906
- Issue date Mar 18, 2003
- Kabushiki Kaisha Toshiba
- Takashi Kawakubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming apparatus and process for forming thin film using...
- Patent number 6,451,184
- Issue date Sep 17, 2002
- Canon Kabushiki Kaisha
- Kazuho Sone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming apparatus and method of forming thin film of comp...
- Patent number 6,238,527
- Issue date May 29, 2001
- Canon Kabushiki Kaisha
- Kazuho Sone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering device
- Patent number 6,217,730
- Issue date Apr 17, 2001
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Kuniaki Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering apparatus and process for forming thin film usi...
- Patent number 6,200,431
- Issue date Mar 13, 2001
- Canon Kabushiki Kaisha
- Kazuho Sone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and method for manufacturing compound thin film
- Patent number 6,080,284
- Issue date Jun 27, 2000
- Minolta Co., Ltd.
- Tomoko Miyaura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 5,744,016
- Issue date Apr 28, 1998
- NEC Corporation
- Yoshiaki Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and apparatus for reactive coating of a substrate
- Patent number 5,427,665
- Issue date Jun 27, 1995
- Leybold Aktiengesellschaft
- Klaus Hartig
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stationary aperture plate for reactive sputter deposition
- Patent number 5,415,753
- Issue date May 16, 1995
- Materials Research Corporation
- Steven D. Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20240096597
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Takeshi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20220098717
- Publication date Mar 31, 2022
- TOKYO ELECTRON LIMITED
- Kenichi IMAKITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20200402774
- Publication date Dec 24, 2020
- Kokusai Electric Corporation
- Takeshi YASUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION DEVICE
- Publication number 20200279724
- Publication date Sep 3, 2020
- Shincron Co., LTD
- Ekishu NAGAE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATINGS FOR SURGICAL INSTRUMENTS
- Publication number 20180334741
- Publication date Nov 22, 2018
- DePuy Synthes Products, Inc.
- Dayananda Sukadhare
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METAL STRIP, BIPOLAR PLATE AND ASSOCIATED MANUFACTURING METHOD
- Publication number 20180112304
- Publication date Apr 26, 2018
- APERAM
- Pauline GIRARDON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION
- Publication number 20170330796
- Publication date Nov 16, 2017
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20160322206
- Publication date Nov 3, 2016
- Beijing NMC Co., Ltd.
- Feng LV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS FOR SURGICAL INSTRUMENTS
- Publication number 20160186307
- Publication date Jun 30, 2016
- DePuy Synthes Products, Inc.
- Dayananda Sukadhare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition System With A Rotating Drum
- Publication number 20140262765
- Publication date Sep 18, 2014
- Vaeco, Inc.
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CVD APPARATUS, PLASMA CVD METHOD, REACTIVE SPUTTERING APPARA...
- Publication number 20140023796
- Publication date Jan 23, 2014
- TORAY INDUSTRIES, INC.
- Hiroe Ejiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TWO PIECE SHUTTER DISK ASSEMBLY FOR A SUBSTRATE PROCESS CHAMBER
- Publication number 20140020629
- Publication date Jan 23, 2014
- Applied Materials, Inc.
- CHENG-HSIUNG MATTHEW TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING METHOD FOR DEPOSITING A LAYER SYSTEM ON A SUBSTRATE AND SUB...
- Publication number 20130302596
- Publication date Nov 14, 2013
- Jörg Vetter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRONIC DEVICE MANUFACTURING METHOD AND SPUTTERING METHOD
- Publication number 20130048489
- Publication date Feb 28, 2013
- Canon ANELVA Corporation
- Nobuo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CATHODE SPUTTER DEPOSITION OF A Cu(In,Ga)X2 THIN FILM
- Publication number 20130015057
- Publication date Jan 17, 2013
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Simon Perraud
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20120199919
- Publication date Aug 9, 2012
- Canon ANELVA Corporation
- Takashi Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTERING APPARATUS
- Publication number 20120152736
- Publication date Jun 21, 2012
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED ARTICLE AND METHOD FOR MANUFACTURING SAME
- Publication number 20120128948
- Publication date May 24, 2012
- HON HAI Precision Industry CO., LTD.
- HSIN-PEI CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM WITH A ROTATING DRUM
- Publication number 20120045588
- Publication date Feb 23, 2012
- VAECO INC.
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20120031748
- Publication date Feb 9, 2012
- Canon ANELVA Corporation
- Shigenori Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING DEVICE WITH ROTATABLE TARGETS
- Publication number 20110266147
- Publication date Nov 3, 2011
- HON HAI Precision Industry CO., LTD.
- CHUNG-PEI WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electron-assisted deposition
- Publication number 20110220491
- Publication date Sep 15, 2011
- Donald Bennett Hilliard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYERED COATED CUTTING TOOL
- Publication number 20110135898
- Publication date Jun 9, 2011
- Sandvik Intellectual Property AB
- Johan BÖHLMARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS
- Publication number 20100326818
- Publication date Dec 30, 2010
- Canon ANELVA Corporation
- Manabu Ikemoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTERING METHOD
- Publication number 20090200159
- Publication date Aug 13, 2009
- Canon Kabushiki Kaisha
- Yasuyuki Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Reactive Solid-Gas Plasma Deposition
- Publication number 20090057133
- Publication date Mar 5, 2009
- Vladimir Kouznetsov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering apparatus, method for producing a transparent electrocon...
- Publication number 20080210546
- Publication date Sep 4, 2008
- Ulvac Inc.
- Sadayuki Ukishima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of making first surface mirror with oxide graded reflecting...
- Publication number 20080073203
- Publication date Mar 27, 2008
- Guardian Industries Corp.
- Hong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reactive sputter deposition processes and equipment
- Publication number 20070131536
- Publication date Jun 14, 2007
- Cardinal CG Company
- Klaus Hartig
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for depositing a coating on a tape carrier
- Publication number 20060275548
- Publication date Dec 7, 2006
- The Regents of the University of California.
- Jonathan Storer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by means for confinement of gases or sputtered material

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus and method of manufacturing semicond...

Lattice coat surface enhancement for chamber components

High-refractive-index hydrogenated silicon film and methods for pre...

Coatings for surgical instruments

Piezoelectric element

Process chamber and semiconductor processing apparatus

Sputtering apparatus and method thereof

Reactive sputtering apparatus

Coating method for depositing a layer system on a substrate and sub...

Electronic device manufacturing method and sputtering method

Two piece shutter disk assembly for a substrate process chamber

Film forming apparatus and film forming method

Reactive sputtering apparatus

Deposition system with a rotating drum

Sputter deposition shield assembly to reduce cathode shorting

Reactive sputter deposition processes and equipment

Electron-assisted deposition process and apparatus

Energy device and method for producing the same

Method and apparatus for depositing a coating on a tape carrier

Reactive sputtering method

Method of forming deposited film

Method of manufacturing an oxide epitaxially strained lattice film

Thin film forming apparatus and process for forming thin film using...

Thin film forming apparatus and method of forming thin film of comp...

Sputtering device

Reactive sputtering apparatus and process for forming thin film usi...

Sputtering apparatus and method for manufacturing compound thin film

Sputtering apparatus

Process and apparatus for reactive coating of a substrate

Stationary aperture plate for reactive sputter deposition

Patents Applicationslast 30 patents

Substrate Processing Apparatus and Method of Manufacturing Semicond...

FILM FORMING APPARATUS AND FILM FORMING METHOD

Substrate Processing Apparatus and Method of Manufacturing Semicond...

FILM FORMATION DEVICE

COATINGS FOR SURGICAL INSTRUMENTS

METAL STRIP, BIPOLAR PLATE AND ASSOCIATED MANUFACTURING METHOD

FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION

PROCESS CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS

COATINGS FOR SURGICAL INSTRUMENTS

Deposition System With A Rotating Drum

PLASMA CVD APPARATUS, PLASMA CVD METHOD, REACTIVE SPUTTERING APPARA...

TWO PIECE SHUTTER DISK ASSEMBLY FOR A SUBSTRATE PROCESS CHAMBER

COATING METHOD FOR DEPOSITING A LAYER SYSTEM ON A SUBSTRATE AND SUB...

ELECTRONIC DEVICE MANUFACTURING METHOD AND SPUTTERING METHOD

CATHODE SPUTTER DEPOSITION OF A Cu(In,Ga)X2 THIN FILM

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

REACTIVE SPUTTERING APPARATUS

COATED ARTICLE AND METHOD FOR MANUFACTURING SAME

DEPOSITION SYSTEM WITH A ROTATING DRUM

FILM FORMING APPARATUS AND FILM FORMING METHOD

SPUTTERING DEVICE WITH ROTATABLE TARGETS

Electron-assisted deposition

MULTILAYERED COATED CUTTING TOOL

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS

REACTIVE SPUTTERING METHOD

Method and Apparatus for Reactive Solid-Gas Plasma Deposition

Sputtering apparatus, method for producing a transparent electrocon...

Method of making first surface mirror with oxide graded reflecting...

Reactive sputter deposition processes and equipment

Method and apparatus for depositing a coating on a tape carrier