characterised by means for on-wafer monitoring of the processing

Industry

CPC
G03F7/3028

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/3028characterised by means for on-wafer monitoring of the processing

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Solution, method of forming resist pattern, and semiconductor devic...
- Patent number 11,822,250
- Issue date Nov 21, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Hiroyuki Iida
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Developer critical dimension control with pulse development
- Patent number 11,543,793
- Issue date Jan 3, 2023
- International Business Machines Corporation
- Richard C. Johnson
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for forming a photoresist layer, method for forming a mas...
- Patent number 11,163,235
- Issue date Nov 2, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yung-Yao Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shutter monitoring system
- Patent number 11,131,541
- Issue date Sep 28, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yu Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developer critical dimension control with pulse development
- Patent number 10,915,085
- Issue date Feb 9, 2021
- International Business Machines Corporation
- Richard C. Johnson
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate position adjustment method, storage medium and substrate...
- Patent number 10,529,604
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Makoto Hayakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Developing device and developing method
- Patent number 10,500,607
- Issue date Dec 10, 2019
- WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Dongpo Jia
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Development method, development device, and non-transitory computer...
- Patent number 10,203,605
- Issue date Feb 12, 2019
- Tokyo Electron Limited
- Yusaku Hashimoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method for drying a substrate by discharging g...
- Patent number 10,134,610
- Issue date Nov 20, 2018
- Screen Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method and developing device
- Patent number 10,012,906
- Issue date Jul 3, 2018
- BOE Technology Group Co., Ltd.
- Liping Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Monitoring apparatus and method particularly useful in photolithogr...
- Patent number 9,291,911
- Issue date Mar 22, 2016
- Nova Measuring Instruments Ltd.
- Giora Dishon
- G01 - MEASURING TESTING
Information Patent Grant
Development processing apparatus
- Patent number 9,116,431
- Issue date Aug 25, 2015
- Kabushiki Kaisha Toshiba
- Masatoshi Terayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Monitoring apparatus and method particularly useful in photolithogr...
- Patent number 8,780,320
- Issue date Jul 15, 2014
- Nova Measuring Instuments Ltd.
- Giora Dishon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Development method, method of manufacturing photomask, method of ma...
- Patent number 8,672,563
- Issue date Mar 18, 2014
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Monitoring apparatus and method particularly useful in photolithogr...
- Patent number 8,482,715
- Issue date Jul 9, 2013
- Nova Measuring Instruments Ltd.
- Giora Dishon
- G01 - MEASURING TESTING
Information Patent Grant
Developing device and developing method
- Patent number 8,445,189
- Issue date May 21, 2013
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing device, developing method and storage medium
- Patent number 8,440,266
- Issue date May 14, 2013
- Tokyo Electron Limited
- Norikatsu Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method and developing unit
- Patent number 8,053,180
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Yuko Ono
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Development method, method of manufacturing photomask, and method o...
- Patent number 8,017,287
- Issue date Sep 13, 2011
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, computer storage medium and substrate...
- Patent number 7,938,587
- Issue date May 10, 2011
- Tokyo Electron Limited
- Takahisa Otsuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing device and developing method
- Patent number 7,918,182
- Issue date Apr 5, 2011
- Tokyo Electronic Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method and developing unit
- Patent number 7,857,530
- Issue date Dec 28, 2010
- Tokyo Electron Limited
- Yuko Ono
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Monitoring apparatus and method particularly useful in photolithogr...
- Patent number 7,821,614
- Issue date Oct 26, 2010
- Nova Measuring Instruments Ltd.
- Giora Dishon
- G01 - MEASURING TESTING
Information Patent Grant
Developing apparatus and method
- Patent number 7,806,076
- Issue date Oct 5, 2010
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method and developing unit
- Patent number 7,794,924
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Yuko Ono
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Monitoring apparatus and method particularly useful in photolithogr...
- Patent number 7,525,634
- Issue date Apr 28, 2009
- Nova Measuring Instruments Ltd.
- Giora Dishon
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method of forming a photoresist pattern, and repair n...
- Patent number 7,447,559
- Issue date Nov 4, 2008
- Samsung Electronics Co., Ltd.
- Gi-Cheon Yoon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method and developing unit
- Patent number 7,427,168
- Issue date Sep 23, 2008
- Tokyo Electron Limited
- Yuko Ono
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Monitoring apparatus and method particularly useful in photolithogr...
- Patent number 7,289,190
- Issue date Oct 30, 2007
- Nova Measuring Instruments Ltd.
- Giora Dishon
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining photoresist thickness and structure formed u...
- Patent number 7,235,336
- Issue date Jun 26, 2007
- Integrated Device Technology, Inc.
- Yiming Gu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR TESTING PHOTOSENSITIVE COMPOSITION AND METHOD FOR PRODUC...
- Publication number 20240231235
- Publication date Jul 11, 2024
- FUJIFILM CORPORATION
- Kei YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR FORMING A PHOTORESIST LAYER, METHOD FOR FORMING A MAS...
- Publication number 20210055658
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- YUNG-YAO LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLUTION, METHOD OF FORMING RESIST PATTERN, AND SEMICONDUCTOR DEVIC...
- Publication number 20200301283
- Publication date Sep 24, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Hiroyuki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPER CRITICAL DIMENSION CONTROL WITH PULSE DEVELOPMENT
- Publication number 20200089188
- Publication date Mar 19, 2020
- International Business Machines Corporation
- Richard C. Johnson
- G05 - CONTROLLING REGULATING
Information Patent Application
Shutter Monitoring System
- Publication number 20200003550
- Publication date Jan 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yu LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE POSITION ADJUSTMENT METHOD, STORAGE MEDIUM AND SUBSTRATE...
- Publication number 20190019701
- Publication date Jan 17, 2019
- TOKYO ELECTRON LIMITED
- Makoto HAYAKAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVELOPING METHOD AND DEVELOPING DEVICE
- Publication number 20180017871
- Publication date Jan 18, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Liping Luo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPMENT METHOD, DEVELOPMENT DEVICE, AND NON-TRANSITORY COMPUTER...
- Publication number 20170285481
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yusaku HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGR...
- Publication number 20140320837
- Publication date Oct 30, 2014
- Giora DISHON
- G01 - MEASURING TESTING
Information Patent Application
DEVELOPMENT PROCESSING APPARATUS
- Publication number 20130321784
- Publication date Dec 5, 2013
- Kabushiki Kaisha Toshiba
- Masatoshi Terayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGR...
- Publication number 20130293872
- Publication date Nov 7, 2013
- Giora DISHON
- G01 - MEASURING TESTING
Information Patent Application
Development method, method of manufacturing photomask, method of ma...
- Publication number 20110293305
- Publication date Dec 1, 2011
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING DEVICE AND DEVELOPING METHOD
- Publication number 20110127236
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Taro YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGR...
- Publication number 20110037957
- Publication date Feb 17, 2011
- NOVA MEASURING INSTRUMENTS LTD.
- Giora Dishon
- G01 - MEASURING TESTING
Information Patent Application
DEVELOPING APPARATUS AND METHOD
- Publication number 20100323307
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING DEVICE, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20100203250
- Publication date Aug 12, 2010
- TOKYO ELECTRON LIMITED
- Norikatsu Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPMENT METHOD, METHOD OF MANUFACTURING PHOTOMASK, METHOD OF MA...
- Publication number 20100129737
- Publication date May 27, 2010
- Hideaki SAKURAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD AND DEVELOPING UNIT
- Publication number 20100047725
- Publication date Feb 25, 2010
- TOKYO ELECTRON LIMITED
- Yuko Ono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGR...
- Publication number 20090231558
- Publication date Sep 17, 2009
- NOVA MEASURING INSTRUMENTS LTD.
- Giora Dishon
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE...
- Publication number 20090225285
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Takahisa Otsuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-SPEED SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING...
- Publication number 20090071940
- Publication date Mar 19, 2009
- SOKUDO CO., LTD.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing method and developing unit
- Publication number 20080284989
- Publication date Nov 20, 2008
- TOKYO ELECTRON LIMITED
- Yuko Ono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for performing development processing during phot...
- Publication number 20080090186
- Publication date Apr 17, 2008
- SOKUDO CO., LTD.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing method and developing unit
- Publication number 20080079917
- Publication date Apr 3, 2008
- TOKYO ELECTRON LIMITED
- Yuko Ono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGR...
- Publication number 20080043229
- Publication date Feb 21, 2008
- NOVA MEASURING INSTRUMENTS LTD.
- Giora Dishon
- G01 - MEASURING TESTING
Information Patent Application
Developing method and developing unit
- Publication number 20080013946
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Yuko Ono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing device and developing method
- Publication number 20070184178
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pattern forming method, film forming apparatus and pattern forming...
- Publication number 20070009839
- Publication date Jan 11, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Monitoring apparatus and method particularly useful in photolithogr...
- Publication number 20060193630
- Publication date Aug 31, 2006
- NOVA MEASURING INSTRUMENTS LTD.
- Giora Dishon
- G01 - MEASURING TESTING
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20060134563
- Publication date Jun 22, 2006
- Minoru Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

characterised by means for on-wafer monitoring of the processing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Solution, method of forming resist pattern, and semiconductor devic...

Developer critical dimension control with pulse development

Apparatus for forming a photoresist layer, method for forming a mas...

Shutter monitoring system

Developer critical dimension control with pulse development

Substrate position adjustment method, storage medium and substrate...

Developing device and developing method

Development method, development device, and non-transitory computer...

Substrate processing method for drying a substrate by discharging g...

Developing method and developing device

Monitoring apparatus and method particularly useful in photolithogr...

Development processing apparatus

Monitoring apparatus and method particularly useful in photolithogr...

Development method, method of manufacturing photomask, method of ma...

Monitoring apparatus and method particularly useful in photolithogr...

Developing device and developing method

Developing device, developing method and storage medium

Developing method and developing unit

Development method, method of manufacturing photomask, and method o...

Substrate processing method, computer storage medium and substrate...

Developing device and developing method

Developing method and developing unit

Monitoring apparatus and method particularly useful in photolithogr...

Developing apparatus and method

Developing method and developing unit

Monitoring apparatus and method particularly useful in photolithogr...

Apparatus and method of forming a photoresist pattern, and repair n...

Developing method and developing unit

Monitoring apparatus and method particularly useful in photolithogr...

Method for determining photoresist thickness and structure formed u...

Patents Applicationslast 30 patents

METHOD FOR TESTING PHOTOSENSITIVE COMPOSITION AND METHOD FOR PRODUC...

APPARATUS FOR FORMING A PHOTORESIST LAYER, METHOD FOR FORMING A MAS...

SOLUTION, METHOD OF FORMING RESIST PATTERN, AND SEMICONDUCTOR DEVIC...

DEVELOPER CRITICAL DIMENSION CONTROL WITH PULSE DEVELOPMENT

Shutter Monitoring System

SUBSTRATE POSITION ADJUSTMENT METHOD, STORAGE MEDIUM AND SUBSTRATE...

DEVELOPING METHOD AND DEVELOPING DEVICE

DEVELOPMENT METHOD, DEVELOPMENT DEVICE, AND NON-TRANSITORY COMPUTER...

MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGR...

DEVELOPMENT PROCESSING APPARATUS

MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGR...

Development method, method of manufacturing photomask, method of ma...

DEVELOPING DEVICE AND DEVELOPING METHOD

MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGR...

DEVELOPING APPARATUS AND METHOD

DEVELOPING DEVICE, DEVELOPING METHOD AND STORAGE MEDIUM

DEVELOPMENT METHOD, METHOD OF MANUFACTURING PHOTOMASK, METHOD OF MA...

DEVELOPING METHOD AND DEVELOPING UNIT

MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGR...

SUBSTRATE PROCESSING METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE...

MULTI-SPEED SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING...

Developing method and developing unit

Method and system for performing development processing during phot...

Developing method and developing unit

MONITORING APPARATUS AND METHOD PARTICULARLY USEFUL IN PHOTOLITHOGR...

Developing method and developing unit

Developing device and developing method

Pattern forming method, film forming apparatus and pattern forming...

Monitoring apparatus and method particularly useful in photolithogr...

Method for manufacturing semiconductor device