characterised by substrate supports

Industry

CPC
H01L21/67383

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67383characterised by substrate supports

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate storage apparatus provided with storage environment detec...
- Patent number 12,198,958
- Issue date Jan 14, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G08 - SIGNALLING
Information Patent Grant
Fume-removing device
- Patent number 12,176,230
- Issue date Dec 24, 2024
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit enclosure system
- Patent number 12,165,905
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container and substrate treating apparatus
- Patent number 12,148,641
- Issue date Nov 19, 2024
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Separators for handling, transporting, or storing semiconductor wafers
- Patent number 12,106,988
- Issue date Oct 1, 2024
- Daewon Semiconductor Packaging Industrial Company
- Sunna Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod with antistatic capability
- Patent number 12,087,605
- Issue date Sep 10, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G08 - SIGNALLING
Information Patent Grant
Substrate storage container
- Patent number 12,080,577
- Issue date Sep 3, 2024
- Miraial Co., Ltd.
- Kouji Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,057,326
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enclosure system shelf including alignment features
- Patent number 12,027,397
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Aaron Green
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing a substrate detection process
- Patent number 12,020,963
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Min-Cheng Wu
- G01 - MEASURING TESTING
Information Patent Grant
Adjustable device and an adjustable storage box
- Patent number 11,972,962
- Issue date Apr 30, 2024
- DLY Technologies Inc.
- Shih Feng Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magazine supporting equipment and semiconductor manufacturing appar...
- Patent number 11,955,359
- Issue date Apr 9, 2024
- Samsung Electronics Co., Ltd.
- Jun Young Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport box
- Patent number 11,842,912
- Issue date Dec 12, 2023
- 3S KOREA CO., LTD.
- Sang Jin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle transportation container
- Patent number 11,837,486
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ching Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer storage container and cap assembly used therefor
- Patent number 11,823,930
- Issue date Nov 21, 2023
- 3S KOREA CO., LTD.
- Sang Jin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, electronic device processing systems, and method...
- Patent number 11,791,185
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Semiconductor wafer storage device
- Patent number 11,764,089
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu Ju- Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier FOUP and a method of placing a carrier
- Patent number 11,756,816
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Steven Trey Tindel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for processing substrate
- Patent number 11,756,817
- Issue date Sep 12, 2023
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage container
- Patent number 11,735,449
- Issue date Aug 22, 2023
- Shin-Etsu Polymer Co., Ltd.
- Kazumasa Onuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage container
- Patent number 11,735,450
- Issue date Aug 22, 2023
- Shin-Etsu Polymer Co., Ltd.
- Sou Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage container
- Patent number 11,646,214
- Issue date May 9, 2023
- Shin-Etsu Polymer Co., Ltd.
- Osamu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port apparatus and method of driving the same
- Patent number 11,646,215
- Issue date May 9, 2023
- TDK Corporation
- Tomoshi Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage shelf, and method for installing storage shelf
- Patent number 11,631,603
- Issue date Apr 18, 2023
- Murata Machinery, Ltd.
- Tatsuo Tsubaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Frame cassette for holding tape-frames
- Patent number 11,594,439
- Issue date Feb 28, 2023
- Infineon Technologies AG
- Germar Schneider
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Environmental control material holder
- Patent number 11,581,209
- Issue date Feb 14, 2023
- Entegris, Inc.
- Jason T. Steffens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Buffer unit, and apparatus and method for treating substrate with t...
- Patent number 11,569,110
- Issue date Jan 31, 2023
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, electronic device processing systems, and method...
- Patent number 11,508,593
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Paul B. Reuter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storing container
- Patent number 11,501,990
- Issue date Nov 15, 2022
- Miraial Co., Ltd.
- Chiaki Matsutori
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Grant
Apparatus and techniques for electronic device encapsulation
- Patent number 11,489,119
- Issue date Nov 1, 2022
- Kateeva, Inc.
- Alexander Sou-Kang Ko
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Patents Applicationslast 30 patents

Information Patent Application
ENCLOSURE SYSTEM SHELF
- Publication number 20240429079
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Aaron Green
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS
- Publication number 20240429080
- Publication date Dec 26, 2024
- Daewon Semiconductor Packaging Industrial Company
- Sunna Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240339339
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method of Providing FOUP or Cassette Supporting Structur...
- Publication number 20240332051
- Publication date Oct 3, 2024
- STATS ChipPAC Pte Ltd.
- Yaojian Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HOUSING CONTAINER AND METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20240332052
- Publication date Oct 3, 2024
- Mitsubishi Electric Corporation
- Mikihito SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING A PROCESSING APPARATUS
- Publication number 20240312814
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Min-Cheng WU
- G01 - MEASURING TESTING
Information Patent Application
LOUVER DESIGN FOR ELIMINATING LINE OF SIGHT
- Publication number 20240282605
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Rupankar CHOUDHURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT DEVICE AND METHOD
- Publication number 20240186145
- Publication date Jun 6, 2024
- ASML Netherlands B.V.
- Monim AZIMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SEMICONDUCTOR WAFERS
- Publication number 20240178026
- Publication date May 30, 2024
- Siltronic AG
- Ludwig Lamprecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORING CONTAINER
- Publication number 20240162069
- Publication date May 16, 2024
- MIRAIAL CO LTD
- Tsuyoshi NAGASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...
- Publication number 20240096671
- Publication date Mar 21, 2024
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Storage Container
- Publication number 20240038561
- Publication date Feb 1, 2024
- Shin-Etsu Polymer Co., Ltd.
- Osamu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE CONTAINER
- Publication number 20240021454
- Publication date Jan 18, 2024
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER EQUIPPED WITH STABILIZING SUPPORT AND SMOOTH TR...
- Publication number 20240006212
- Publication date Jan 4, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER STORAGE DEVICE
- Publication number 20230377922
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu Ju- CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE CONTAINER AND CAP ASSEMBLY USED THEREFOR
- Publication number 20230317484
- Publication date Oct 5, 2023
- 3S KOREA CO., LTD
- Sang Jin KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A STORAGE CONTAINER AND MANUFACTURING METHOD OF THE SAME
- Publication number 20230245907
- Publication date Aug 3, 2023
- Shin-Etsu Polymer Co., Ltd.
- Seiya Nakarai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORAGE CONTAINER
- Publication number 20230197488
- Publication date Jun 22, 2023
- MIRAIAL CO., LTD.
- Kouji KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for the Temperature Control of a Substrate and Correspond...
- Publication number 20230148124
- Publication date May 11, 2023
- ERS electronic GmbH
- Klaus Reitinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230094318
- Publication date Mar 30, 2023
- SCREEN Holdings Co., Ltd.
- Yosuke YASUTAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT BOX
- Publication number 20230072884
- Publication date Mar 9, 2023
- 3S KOREA CO., LTD
- Sang Jin KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDE STORAGE PODS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND METHOD...
- Publication number 20230073921
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS
- Publication number 20230005771
- Publication date Jan 5, 2023
- Daewon Semiconductor Packaging Industrial Company
- Sunna Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES FOR ELECTRONIC DEVICE ENCAPSULATION
- Publication number 20220399499
- Publication date Dec 15, 2022
- Kateeva, Inc.
- Alexander Sou-Kang KO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SUBSTRATE STORAGE CONTAINER
- Publication number 20220344186
- Publication date Oct 27, 2022
- Shin-Etsu Polymer Co., Ltd.
- Junya TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Storage Container
- Publication number 20220277977
- Publication date Sep 1, 2022
- Shin-Etsu Polymer Co., Ltd.
- Sou Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINERS FOR PROTECTING SEMICONDUCTOR DEVICES AND RELATED METHODS
- Publication number 20220230901
- Publication date Jul 21, 2022
- Micron Technology, Inc.
- Mohamed A. Ditali
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORAGE CONTAINER AND FILTER UNIT
- Publication number 20220199439
- Publication date Jun 23, 2022
- MIRAIAL CO., LTD.
- Yuya NARITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE POD HAVING ANTI-COLLISION GAP STRUCTURE
- Publication number 20220102178
- Publication date Mar 31, 2022
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- MING-CHIEN CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE DEVICE AND AN ADJUSTABLE STORAGE BOX
- Publication number 20220051911
- Publication date Feb 17, 2022
- DLY TECHNOLOGIES INC.
- SHIH FENG PAN
- H01 - BASIC ELECTRIC ELEMENTS

characterised by substrate supports

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate storage apparatus provided with storage environment detec...

Fume-removing device

Process kit enclosure system

Container and substrate treating apparatus

Separators for handling, transporting, or storing semiconductor wafers

Reticle pod with antistatic capability

Substrate storage container

Substrate processing apparatus and substrate processing method

Enclosure system shelf including alignment features

Method of performing a substrate detection process

Adjustable device and an adjustable storage box

Magazine supporting equipment and semiconductor manufacturing appar...

Wafer transport box

Reticle transportation container

Wafer storage container and cap assembly used therefor

Side storage pods, electronic device processing systems, and method...

Semiconductor wafer storage device

Carrier FOUP and a method of placing a carrier

Apparatus and method for processing substrate

Substrate storage container

Substrate storage container

Substrate storage container

Load port apparatus and method of driving the same

Storage shelf, and method for installing storage shelf

Frame cassette for holding tape-frames

Environmental control material holder

Buffer unit, and apparatus and method for treating substrate with t...

Side storage pods, electronic device processing systems, and method...

Substrate storing container

Apparatus and techniques for electronic device encapsulation

Patents Applicationslast 30 patents

ENCLOSURE SYSTEM SHELF

SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

System and Method of Providing FOUP or Cassette Supporting Structur...

WAFER HOUSING CONTAINER AND METHOD OF MANUFACTURING SEMICONDUCTOR D...

METHOD OF OPERATING A PROCESSING APPARATUS

LOUVER DESIGN FOR ELIMINATING LINE OF SIGHT

SURFACE TREATMENT DEVICE AND METHOD

APPARATUS FOR TRANSPORTING SEMICONDUCTOR WAFERS

SUBSTRATE STORING CONTAINER

SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...

Substrate Storage Container

WAFER STORAGE CONTAINER

SUBSTRATE CONTAINER EQUIPPED WITH STABILIZING SUPPORT AND SMOOTH TR...

SEMICONDUCTOR WAFER STORAGE DEVICE

WAFER STORAGE CONTAINER AND CAP ASSEMBLY USED THEREFOR

A STORAGE CONTAINER AND MANUFACTURING METHOD OF THE SAME

SUBSTRATE STORAGE CONTAINER

Apparatus for the Temperature Control of a Substrate and Correspond...

SUBSTRATE PROCESSING APPARATUS

WAFER TRANSPORT BOX

SIDE STORAGE PODS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND METHOD...

SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS

APPARATUS AND TECHNIQUES FOR ELECTRONIC DEVICE ENCAPSULATION

SUBSTRATE STORAGE CONTAINER

Substrate Storage Container

CONTAINERS FOR PROTECTING SEMICONDUCTOR DEVICES AND RELATED METHODS

SUBSTRATE STORAGE CONTAINER AND FILTER UNIT

RETICLE POD HAVING ANTI-COLLISION GAP STRUCTURE

ADJUSTABLE DEVICE AND AN ADJUSTABLE STORAGE BOX