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characterised by the composition of the lapping agent
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Industry
CPC
B24B37/044
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B37/00
Lapping machines or devices Accessories
Current Industry
B24B37/044
characterised by the composition of the lapping agent
Industries
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Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of reducing semiconductor substrate surface unevenness
Patent number
11,901,186
Issue date
Feb 13, 2024
Massachusetts Institute of Technology
Li Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for polishing silicon substrate and polishing composition set
Patent number
11,897,081
Issue date
Feb 13, 2024
FUJIMI INCORPORATED
Shinichiro Takami
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Method of polishing silicon wafer
Patent number
11,890,719
Issue date
Feb 6, 2024
Sumco Corporation
Shuhei Matsuda
B24 - GRINDING POLISHING
Information
Patent Grant
Methods for polishing dielectric layer in forming semiconductor device
Patent number
11,862,472
Issue date
Jan 2, 2024
Yangtze Memory Technologies Co., Ltd.
Xiaohong Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hard abrasive particle-free polishing of hard materials
Patent number
11,820,918
Issue date
Nov 21, 2023
Entegris, Inc.
Rajiv K. Singh
B24 - GRINDING POLISHING
Information
Patent Grant
Ruthenium CMP chemistry based on halogenation
Patent number
11,820,919
Issue date
Nov 21, 2023
Tokyo Electron Limited
Paul Abel
B24 - GRINDING POLISHING
Information
Patent Grant
Calcium carbonate slurry
Patent number
11,806,836
Issue date
Nov 7, 2023
Illumina, Inc.
Robert Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing liquid composition for silicon oxide film
Patent number
11,795,346
Issue date
Oct 24, 2023
Kao Corporation
Yohei Uchida
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing composition and polishing method
Patent number
11,781,039
Issue date
Oct 10, 2023
FUJIMI INCORPORATED
Tomoaki Ishibashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing liquid, polishing liquid set, and polishing method
Patent number
11,767,448
Issue date
Sep 26, 2023
Resonac Corporation
Takaaki Matsumoto
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing compositions and methods of use thereof
Patent number
11,732,157
Issue date
Aug 22, 2023
Fujifilm Electronic Materials U.S.A., Inc.
Yannan Liang
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical planarization composition for polishing oxide m...
Patent number
11,718,767
Issue date
Aug 8, 2023
VERSUM MATERIALS US, LLC
Ming-Shih Tsai
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing agent, polishing method, and liquid additive for polishing
Patent number
11,713,404
Issue date
Aug 1, 2023
AGC Inc.
Toshihiko Otsuki
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad for chemical mechanical planarization
Patent number
11,685,013
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih Hung Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing compositions and methods of using same
Patent number
11,680,186
Issue date
Jun 20, 2023
Fujifilm Electronic Materials U.S.A., Inc.
Eric Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing polishing particles and method for polishi...
Patent number
11,661,539
Issue date
May 30, 2023
Shin-Etsu Chemical Co., Ltd.
Mitsuhito Takahashi
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Polishing solution and polishing method
Patent number
11,655,394
Issue date
May 23, 2023
Resonac Corporation
Yuya Otsuka
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing jig assembly for a new or refurbished electrostatic chuck
Patent number
11,648,639
Issue date
May 16, 2023
Applied Materials, Inc.
William Ming-ye Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Neutral to alkaline chemical mechanical polishing compositions and...
Patent number
11,591,495
Issue date
Feb 28, 2023
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Yi Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Polishing liquid, polishing liquid set, and polishing method
Patent number
11,572,490
Issue date
Feb 7, 2023
SHOWA DENKO MATERIALS CO., LTD.
Tomohiro Iwano
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Polishing pad and method for producing the same, and method for pro...
Patent number
11,565,366
Issue date
Jan 31, 2023
Fujibo Holdings, Inc.
Shin Tokushige
B24 - GRINDING POLISHING
Information
Patent Grant
Modified colloidal silica and method for producing the same, and po...
Patent number
11,530,335
Issue date
Dec 20, 2022
FUJIMI INCORPORATED
Keiji Ashitaka
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Polishing composition based on mixture of colloidal silica particles
Patent number
11,525,071
Issue date
Dec 13, 2022
FUJIMI INCORPORATED
Jie Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing composition, manufacturing method of polishing compositio...
Patent number
11,518,911
Issue date
Dec 6, 2022
FUJIMI INCORPORATED
Yukinobu Yoshizaki
B24 - GRINDING POLISHING
Information
Patent Grant
Methods for chemical mechanical polishing and forming interconnect...
Patent number
11,508,585
Issue date
Nov 22, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Ji Cui
B24 - GRINDING POLISHING
Information
Patent Grant
Barrier ruthenium chemical mechanical polishing slurry
Patent number
11,505,718
Issue date
Nov 22, 2022
FUJIFILM ELECTRONIC MATERIALS U.S.A., INC.
David (Tawei) Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Modified colloidal silica and method for producing the same, and po...
Patent number
11,499,070
Issue date
Nov 15, 2022
FUJIMI INCORPORATED
Keiji Ashitaka
B24 - GRINDING POLISHING
Information
Patent Grant
Derivatized polyamino acids
Patent number
11,492,514
Issue date
Nov 8, 2022
CMC Materials, Inc.
Na Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Tools for polishing and refinishing concrete and methods for using...
Patent number
11,471,998
Issue date
Oct 18, 2022
Mark Wetherell
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
Methods for polishing dielectric layer in forming semiconductor device
Patent number
11,462,415
Issue date
Oct 4, 2022
Yangtze Memory Technologies Co., Ltd.
Xiaohong Zhou
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
POLISHING COMPOSITION AND POLISHING METHOD USING THE SAME
Publication number
20240124744
Publication date
Apr 18, 2024
Hooi-Sung KIM
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
POLISHING COMPOSITION
Publication number
20240117219
Publication date
Apr 11, 2024
Fujimi Incorporated
Yasuaki ITO
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20240091900
Publication date
Mar 21, 2024
Disco Corporation
Shun NAKAGAWA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
Publication number
20240087963
Publication date
Mar 14, 2024
EBARA CORPORATION
Akira FUKUNAGA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING COMPOSITION AND METHOD OF POLISHING SILICON WAFER
Publication number
20240052202
Publication date
Feb 15, 2024
NITTA DuPont Incorporated
Noriaki SUGITA
B24 - GRINDING POLISHING
Information
Patent Application
ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM
Publication number
20240050995
Publication date
Feb 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Wen Liu
B08 - CLEANING
Information
Patent Application
Ruthenium CMP Chemistry Based On Halogenation
Publication number
20240043721
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Paul Abel
B24 - GRINDING POLISHING
Information
Patent Application
METHODS FOR REMOVING DEPOSITS ON THE SURFACE OF A CHAMBER COMPONENT
Publication number
20240017299
Publication date
Jan 18, 2024
Applied Materials, Inc.
Tuochuan Huang
B08 - CLEANING
Information
Patent Application
FACE-UP WAFER ELECTROCHEMICAL PLANARIZATION APPARATUS
Publication number
20230390887
Publication date
Dec 7, 2023
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS WITH INTEGRATED SLURRY MIXE...
Publication number
20230373062
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company Limited
Yu-Chen Wei
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING AND CLEANING METHOD, CLEANER AND POLISHING CLEANING SET
Publication number
20230364732
Publication date
Nov 16, 2023
Fujimi Incorporated
SACHIKO HIRAKO
B08 - CLEANING
Information
Patent Application
SLURRY, POLISHING METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR CO...
Publication number
20230357600
Publication date
Nov 9, 2023
Satoshi FURUKAWA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
POLISHING COMPOSTION FOR SEMICONDUCTOR PROCESS, MANUFACTURING METHO...
Publication number
20230332014
Publication date
Oct 19, 2023
SK enpulse Co., Ltd.
Han Teo PARK
B24 - GRINDING POLISHING
Information
Patent Application
DUAL ADDITIVE POLISHING COMPOSITION FOR GLASS SUBSTRATES
Publication number
20230323158
Publication date
Oct 12, 2023
CMC Materials, Inc.
Tong LI
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR PRODUCING INORGANIC PARTICLE-CONTAINING SLURRY AND ZIRCO...
Publication number
20230312981
Publication date
Oct 5, 2023
FUJIMI INCORPORATED
Ryota MAE
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
POLISHING METHOD AND POLISHING APPARATUS
Publication number
20230294241
Publication date
Sep 21, 2023
EBARA CORPORATION
Ban ITO
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING COMPOSITION, POLISHING METHOD, AND METHOD OF MANUFACTURIN...
Publication number
20230287243
Publication date
Sep 14, 2023
FUJIMI INCORPORATED
Masaki TADA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Polishing Compositions and Methods of Using Same
Publication number
20230265313
Publication date
Aug 24, 2023
Fujifilm Electronic Materials U.S.A., Inc.
Eric Turner
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
LARGE AREA QUARTZ CRYSTAL WAFER LAPPING DEVICE AND A LAPPING METHOD...
Publication number
20230249312
Publication date
Aug 10, 2023
TANGSHAN GUOXIN JINGYUAN ELECTRONICS CO., LTD.
Jianmin XU
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING METHOD AND POLISHING COMPOSITION SET
Publication number
20230235194
Publication date
Jul 27, 2023
Fujimi Incorporated
Shinichiro TAKAMI
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY COMPOSITIONS FOR POLISHING METAL LAYERS, CHEMICAL MECHANICAL...
Publication number
20230193080
Publication date
Jun 22, 2023
Samsung Electronics Co., Ltd.
YEA RIN BYUN
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME
Publication number
20230191555
Publication date
Jun 22, 2023
Samsung Electronics Co., Ltd.
Chaelyoung Kim
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR POLISHING WAFER
Publication number
20230137813
Publication date
May 4, 2023
Shin-Etsu Handotai Co., Ltd.
Masaaki OSEKI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING LIQUID AND POLISHING METHOD
Publication number
20230128096
Publication date
Apr 27, 2023
Showa Denko Materials Co., Ltd.
Daisuke IIKURA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
CMP PROCESS APPLIED TO A THIN SIC WAFER FOR STRESS RELEASE AND DAMA...
Publication number
20230128739
Publication date
Apr 27, 2023
STMicroelectronics S.r.l.
Agata GRASSO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOOLS FOR CHEMICAL PLANARIZATION
Publication number
20230077988
Publication date
Mar 16, 2023
CHEMPOWER CORPORATION
Sudhanshu Misra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR CHEMICAL MECHANICAL POLISHING AND FORMING INTERCONNECT...
Publication number
20230082084
Publication date
Mar 16, 2023
Taiwan Semiconductor Manufacturing company Ltd.
JI CUI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING COMPOSITION AND METHOD FOR PRODUCING SAME
Publication number
20230073290
Publication date
Mar 9, 2023
FUJIMI INCORPORATED
Kohsuke TSUCHIYA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
High Oxide Film Removal Rate Shallow Trench (STI) Chemical Mechanic...
Publication number
20230020073
Publication date
Jan 19, 2023
VERSUM MATERIALS US, LLC
Xiaobo Shi
B24 - GRINDING POLISHING
Information
Patent Application
METHODS FOR POLISHING DIELECTRIC LAYER IN FORMING SEMICONDUCTOR DEVICE
Publication number
20220406612
Publication date
Dec 22, 2022
Yangtze Memory Technologies Co., Ltd.
Xiaohong Zhou
H01 - BASIC ELECTRIC ELEMENTS