TREA

characterised by the implantation of both electrically active and inactive species in the same semiconductor region to be doped

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  • CPC
  • H01L21/2656
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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/2656characterised by the implantation of both electrically active and inactive species in the same semiconductor region to be doped
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