characterised by the method of coating

Industry

CPC
C23C16/44

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/44characterised by the method of coating

Industries

Patents Grantslast 30 patents

Information Patent Grant
Epitaxial growth methods and structures thereof
- Patent number 12,369,374
- Issue date Jul 22, 2025
- Taiwan Semicoductor Manufacturing Co., Ltd.
- Tetsuji Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group 4 metal element-containing compound, precursor composition in...
- Patent number 12,365,700
- Issue date Jul 22, 2025
- Hansol Chemical Co., Ltd.
- Hyun-Kee Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, processing method, and non-transito...
- Patent number 12,368,043
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Akinori Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method
- Patent number 12,368,031
- Issue date Jul 22, 2025
- HITACHI HIGH-TECH CORPORATION
- Kosa Hirota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and exhaust system
- Patent number 12,365,982
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Masanori Okuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor chamber components with advanced coating techniques
- Patent number 12,362,150
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanisms for supplying process gas into wafer process apparatus
- Patent number 12,359,318
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Su-Horng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and method of forming metal oxide layer using...
- Patent number 12,359,313
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,359,314
- Issue date Jul 15, 2025
- Kokusai Electric Corporation
- Shin Sone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam etching chamber with etching by-product redistributor
- Patent number 12,362,154
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pneumatic devices including surface coatings
- Patent number 12,359,289
- Issue date Jul 15, 2025
- Maxterial, Inc.
- Atieh Haghdoost
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Grant
Method for manufacturing a composite structure comprising a thin la...
- Patent number 12,362,173
- Issue date Jul 15, 2025
- Soitec
- Hugo Biard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite nuclear component, DLI-MOCVD method for producing same, a...
- Patent number 12,354,757
- Issue date Jul 8, 2025
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Frédéric Schuster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device, and...
- Patent number 12,354,887
- Issue date Jul 8, 2025
- Kokusai Electric Corporation
- Gen Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for conductance liners in semiconductor proce...
- Patent number 12,354,847
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Timothy Joseph Franklin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,351,913
- Issue date Jul 8, 2025
- Kioxia Corporation
- Tomoki Ishimaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Targeted temporal ALD
- Patent number 12,351,912
- Issue date Jul 8, 2025
- Microsoft Technology Licensing, LLC
- Ville Kalevi Saunajoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of monitoring a surface condition of a component
- Patent number 12,351,907
- Issue date Jul 8, 2025
- Watlow Electric Manufacturing Company
- Jacob Lindley
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Gallium nitride particles and method for producing same
- Patent number 12,351,455
- Issue date Jul 8, 2025
- Tosoh Corporation
- Masami Mesuda
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Methods and systems for delivery of vanadium compounds
- Patent number 12,351,902
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,351,905
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Ryota Ifuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 12,344,930
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Yuichi Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon-based thin films from N-alkyl substituted perhydridocyclotr...
- Patent number 12,344,934
- Issue date Jul 1, 2025
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Uniform in situ cleaning and deposition
- Patent number 12,347,653
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming plasma coating
- Patent number 12,347,652
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Lance A. Scudder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, heat insulator assembly and method...
- Patent number 12,344,935
- Issue date Jul 1, 2025
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid raw material supplying method and gas supply apparatus
- Patent number 12,344,936
- Issue date Jul 1, 2025
- TOLYO ELECTRON LIMITED
- Hiroaki Dewa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of ceramic layers using liquid organometallic precursors
- Patent number 12,344,932
- Issue date Jul 1, 2025
- X ENERGY, LLC.
- Howard Taery Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 12,341,004
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 12,338,531
- Issue date Jun 24, 2025
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250236950
- Publication date Jul 24, 2025
- Samsung Electronics Co., Ltd.
- Sangyub IE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE SUBSTRATE PROCESSING APPARATUS AND COLD TRAP USED THE...
- Publication number 20250236949
- Publication date Jul 24, 2025
- HPSP Co., Ltd.
- Hye Seong YOON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS WITH DETECTION SYSTEM AND METHODS
- Publication number 20250232992
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Ming-Yao HSIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250230542
- Publication date Jul 17, 2025
- Kokusai Electric Corporation
- Hideharu ITATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS FOR DELIVERING PRECURSORS AND RELATED METHODS
- Publication number 20250230543
- Publication date Jul 17, 2025
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METAL-CONTAINING FILMS AND CHAMBER CLEAN
- Publication number 20250226227
- Publication date Jul 10, 2025
- LAM RESEARCH CORPORATION
- Dustin Zachary Austin
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250223692
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY METHOD OF SUBSTRATE PROCESSING APPARATUS
- Publication number 20250223695
- Publication date Jul 10, 2025
- JUSUNG ENGINEERING CO., LTD.
- Chul Joo HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND FI...
- Publication number 20250223694
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Tomoya ONITSUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250223703
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Toshiyuki KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250223691
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND METHOD FOR...
- Publication number 20250223693
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- YU-SEN CHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR REMOVAL OF RESIDUE COATING DEPOSITED ON MET...
- Publication number 20250215560
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Osama Khalil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Heat Insulating Structure, Method o...
- Publication number 20250215561
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Gas Supply Assembly, Substrate Proc...
- Publication number 20250215568
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250215563
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Takashi YOKOGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING S...
- Publication number 20250215565
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Jocelyn Kofi Brobbey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR FORMING A THRESHOLD VOLTAGE SHIFTI...
- Publication number 20250218783
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Giuseppe Alessio Verni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PADDLE CONFIGURATION FOR A PARTICLE COATING REACTOR
- Publication number 20250214054
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Govindraj Desai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXHAUST STRUCTURE, EXHAUST SYSTEM, PROCESSING APPARATUS, AND METHOD...
- Publication number 20250215562
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Masakazu SAKATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MAKING MULTICOMPONENT PEROVSKITES
- Publication number 20250212674
- Publication date Jun 26, 2025
- OXFORD PHOTOVOLTAICS LIMITED
- Lidón Gil ESCRIG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20250210328
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Sho KUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...
- Publication number 20250210343
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Marina Mariano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITOR ELECTRODE FORMING METHOD
- Publication number 20250210358
- Publication date Jun 26, 2025
- Jusung Engineering Co., Ltd.
- Jeong Soo JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
- Publication number 20250207287
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250210346
- Publication date Jun 26, 2025
- Kokusai Electric Corporation
- Shingo NOHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATU...
- Publication number 20250207249
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Toshiharu Watarai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250207250
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION CHAMBER, ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
- Publication number 20250207252
- Publication date Jun 26, 2025
- BENEQ OY
- Pekka SOININEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Substrate Support, Substrate Proces...
- Publication number 20250207258
- Publication date Jun 26, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by the method of coating

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Epitaxial growth methods and structures thereof

Group 4 metal element-containing compound, precursor composition in...

Substrate processing apparatus, processing method, and non-transito...

Plasma processing method

Processing apparatus and exhaust system

Semiconductor chamber components with advanced coating techniques

Mechanisms for supplying process gas into wafer process apparatus

Deposition apparatus and method of forming metal oxide layer using...

Method of manufacturing semiconductor device, substrate processing...

Ion beam etching chamber with etching by-product redistributor

Pneumatic devices including surface coatings

Method for manufacturing a composite structure comprising a thin la...

Composite nuclear component, DLI-MOCVD method for producing same, a...

Cleaning method, method of manufacturing semiconductor device, and...

Methods and apparatus for conductance liners in semiconductor proce...

Film forming apparatus and film forming method

Targeted temporal ALD

Method of monitoring a surface condition of a component

Gallium nitride particles and method for producing same

Methods and systems for delivery of vanadium compounds

Film forming method and film forming apparatus

Deposition method and deposition apparatus

Silicon-based thin films from N-alkyl substituted perhydridocyclotr...

Uniform in situ cleaning and deposition

Method for forming plasma coating

Substrate processing apparatus, heat insulator assembly and method...

Liquid raw material supplying method and gas supply apparatus

Deposition of ceramic layers using liquid organometallic precursors

Film formation method and film formation apparatus

Spatially tunable deposition to compensate within wafer differentia...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM

HIGH PRESSURE SUBSTRATE PROCESSING APPARATUS AND COLD TRAP USED THE...

DEPOSITION APPARATUS WITH DETECTION SYSTEM AND METHODS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SYSTEMS FOR DELIVERING PRECURSORS AND RELATED METHODS

DEPOSITION OF METAL-CONTAINING FILMS AND CHAMBER CLEAN

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

GAS SUPPLY METHOD OF SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND FI...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

APPARATUS FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND METHOD FOR...

SYSTEMS AND METHODS FOR REMOVAL OF RESIDUE COATING DEPOSITED ON MET...

Substrate Processing Apparatus, Heat Insulating Structure, Method o...

Substrate Processing Apparatus, Gas Supply Assembly, Substrate Proc...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING S...

METHOD, SYSTEM AND APPARATUS FOR FORMING A THRESHOLD VOLTAGE SHIFTI...

PADDLE CONFIGURATION FOR A PARTICLE COATING REACTOR

EXHAUST STRUCTURE, EXHAUST SYSTEM, PROCESSING APPARATUS, AND METHOD...

PROCESS FOR MAKING MULTICOMPONENT PEROVSKITES

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...

CAPACITOR ELECTRODE FORMING METHOD

SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATU...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

REACTION CHAMBER, ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD

Substrate Processing Apparatus, Substrate Support, Substrate Proces...